SURFACE INSPECTION APPARATUS
    171.
    发明申请
    SURFACE INSPECTION APPARATUS 有权
    表面检查装置

    公开(公告)号:US20120026490A1

    公开(公告)日:2012-02-02

    申请号:US13269268

    申请日:2011-10-07

    Inventor: Takashi WATANABE

    Abstract: A surface inspection apparatus for observing an edge portion of an object to be inspected includes an illumination device that irradiates an illumination light to the edge portion; and an observation device that forms an image of an observation region of the edge portion illuminated with the illumination light. The illumination device emits a first irradiation beam and a second irradiation beam as the illumination light. The first irradiation beam is incident at approximately right angles to the edge portion for compensating brightness of the image and the second irradiation beam is obliquely incident laterally to the observation region of the edge portion for generating a shadow depending on a surface state of the observation region.

    Abstract translation: 用于观察待检查物体的边缘部分的表面检查装置包括:照射装置,其向所述边缘部分照射照明光; 以及观察装置,其形成用照明光照射的边缘部分的观察区域的图像。 照明装置发射第一照射光束和第二照射光束作为照明光。 第一照射光束与边缘部分大致成直角地入射,用于补偿图像的亮度,并且第二照射光束横向地入射到边缘部分的观察区域,以根据观察区域的表面状态产生阴影 。

    APPARATUS FOR OPTICALLY INSPECTING AN AT LEAST PARTIALLY REFLECTING SURFACE OF AN OBJECT
    172.
    发明申请
    APPARATUS FOR OPTICALLY INSPECTING AN AT LEAST PARTIALLY REFLECTING SURFACE OF AN OBJECT 有权
    用于光学检查物体的最小部分反射表面的装置

    公开(公告)号:US20110310242A1

    公开(公告)日:2011-12-22

    申请号:US13171105

    申请日:2011-06-28

    Abstract: An apparatus for optically inspecting an at least partially reflecting surface of an object includes first and second transverse carriers (12, 14) defining respective substantially circular segment-shaped cutouts (32). The transverse carriers (12, 14) are disposed at a longitudinal distance (D) from one another and the longitudinal distance (D) defines a longitudinal direction (17). A plurality of longitudinal members are configured to hold the first and second transverse carriers at the longitudinal distance (D). The longitudinal members are arranged at a defined radial distance to the circular segment-shaped cutouts. A translucent diffusing screen is held in the circular segment-shaped cutouts by the transverse carriers to form a tunnel-shaped inspection space. A multiplicity of light sources are arranged outside of the tunnel-shaped inspection space behind the diffusing screen. The light sources are configured to be controlled individually or in small groups to generate variable light-dark patterns on the diffusing screen. A workpiece receptacle is configured for accommodating the object in the tunnel-shaped inspection space. At least one camera is directed into the tunnel-shaped inspection space. An evaluation and control unit is configured to control the light sources and the camera to generate various light-dark patterns on the diffusing screen and to record and evaluate a plurality of images of the object in dependence on the light-dark patterns.

    Abstract translation: 用于光学检查物体的至少部分反射表面的装置包括限定相应的基本上圆形的段状切口(32)的第一和第二横向载体(12,14)。 横向载体(12,14)以纵向距离(D)彼此设置,并且纵向距离(D)限定纵向方向(17)。 多个纵向构件构造成以纵向距离(D)保持第一和第二横向载体。 纵向构件以规定的径向距离布置成圆形段状切口。 半透明的漫射屏幕由横向载体保持在圆形扇形切口中,以形成隧道形检查空间。 多个光源布置在漫射屏幕后面的隧道形检查空间的外侧。 光源被配置为单独地或以小组来控制,以在漫射屏幕上产生可变的亮暗图案。 工件容器构造成用于将物体容纳在隧道形状的检查空间中。 至少一个相机被引导到隧道形状的检查空间中。 评估和控制单元被配置为控制光源和相机以在扩散屏幕上产生各种亮暗图案,并且根据暗色图案来记录和评估对象的多个图像。

    Integrating Optical System and Methods
    174.
    发明申请
    Integrating Optical System and Methods 有权
    光学系统与方法的集成

    公开(公告)号:US20110108741A1

    公开(公告)日:2011-05-12

    申请号:US12639407

    申请日:2009-12-16

    Abstract: An integrating optical system having a chamber, the chamber having an aperture and at least one portion having a diffuse reflective material; a light source; and a diffuse transmissive baffle. The baffle is located in relation to the chamber such that it is also located in an optical path between the light source and a treatable target. A light-ray originating from the light source is diffusely transmitted from the diffuse transmissive baffle and impinges on an interior surface of the chamber before impinging on the treatable target.

    Abstract translation: 一种具有腔室的积分光学系统,该腔室具有孔径和至少一部分具有漫反射材料; 光源; 和漫射透射挡板。 挡板相对于腔室定位,使得挡板也位于光源和可治疗靶之间的光路中。 源自光源的光线从扩散透射挡板扩散地传播并撞击在腔室的内表面上,然后撞击在可治疗靶上。

    INSPECTION DEVICE WITH ROTATABLE LIGHTING ELEMENT HOUSING
    175.
    发明申请
    INSPECTION DEVICE WITH ROTATABLE LIGHTING ELEMENT HOUSING 有权
    具有可旋转照明元件外壳的检查装置

    公开(公告)号:US20110102782A1

    公开(公告)日:2011-05-05

    申请号:US12863583

    申请日:2008-08-27

    Abstract: The invention relates to an inspection device for monitoring containers, particularly bottles, comprising at least one transport path for supplying and removing the containers, a lighting unit, and optical measuring unit, and a control unit, wherein the lighting unit is surrounded by a transparent hollow body mounted in a rotatable fashion about the central axis, and the hollow body may be driven by a motor, either directly or via appropriate operative connections. Ideally, the hollow body is a tube made of a material or mixture of materials that is transparent to rays in the optically visible wavelength range, in the infrared range, and/or in the ultraviolet range, wherein the material is at least partially transparent to said rays.

    Abstract translation: 本发明涉及一种用于监测容器,特别是瓶子的检查装置,其包括至少一个用于供应和拆卸容器的输送路径,照明单元和光学测量单元以及控制单元,其中照明单元被透明 空心体以围绕中心轴线的可旋转方式安装,并且空心体可以由电动机直接地或通过适当的操作连接来驱动。 理想地,中空体是由在光学可见波长范围,红外范围和/或紫外线范围内的光线透明的材料或材料混合物制成的管,其中该材料至少部分地透明于 说光线

    Surface inspection apparatus
    176.
    发明申请
    Surface inspection apparatus 审中-公开
    表面检查装置

    公开(公告)号:US20090097018A1

    公开(公告)日:2009-04-16

    申请号:US12314056

    申请日:2008-12-03

    Inventor: Takashi Watanabe

    Abstract: A surface inspection apparatus for observing an edge portion of an object to be inspected includes an illumination device that irradiates an illumination light to the edge portion; and an observation device that forms an image of an observation region of the edge portion illuminated with the illumination light. The illumination device emits a first irradiation beam and a second irradiation beam as the illumination light. The first irradiation beam is incident at approximately right angles to the edge portion for compensating brightness of the image and the second irradiation beam is obliquely incident laterally to the observation region of the edge portion for generating a shadow depending on a surface state of the observation region.

    Abstract translation: 用于观察待检查物体的边缘部分的表面检查装置包括:照射装置,其向所述边缘部分照射照明光; 以及观察装置,其形成用照明光照射的边缘部分的观察区域的图像。 照明装置发射第一照射光束和第二照射光束作为照明光。 第一照射光束与边缘部分大致成直角地入射,用于补偿图像的亮度,并且第二照射光束横向地入射到边缘部分的观察区域,用于根据观察区域的表面状态产生阴影 。

    Illumination means and inspection means having an illumination means
    177.
    发明申请
    Illumination means and inspection means having an illumination means 有权
    具有照明装置的照明装置和检查装置

    公开(公告)号:US20090086483A1

    公开(公告)日:2009-04-02

    申请号:US12286253

    申请日:2008-09-29

    Abstract: An illumination mean for the inspection of flat substrates is disclosed. The flat substrate includes an upper edge area, a lower edge area and a front area. The illumination means is formed as an annular segment and comprises an opening into which at least the edge area of the flat substrate extends. A plurality of light sources are arranged on an annular segment in a housing. Inside the housing, a reflective element is provided so that the light from the light sources does not impinge perpendicularly on the upper edge area, the lower edge area and the front area of the flat substrate.

    Abstract translation: 公开了用于检查平板基板的照明平均值。 平面基板包括上边缘区域,下边缘区域和前部区域。 照明装置形成为环形部分,并且包括至少平坦基板的边缘区域延伸到的开口。 多个光源布置在壳体中的环形部分上。 在壳体内部,设置反射元件,使得来自光源的光线不会垂直地照射在平坦基板的上边缘区域,下边缘区域和前部区域上。

    Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected
    178.
    发明授权
    Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected 失效
    半导体基板的制造方法以及检查被检查体的图案的缺陷的方法和装置

    公开(公告)号:US07460220B2

    公开(公告)日:2008-12-02

    申请号:US11605242

    申请日:2006-11-29

    Abstract: A method of inspecting a specimen, including: emitting a light from a lamp of a light source; illuminating a specimen on which plural patterns are formed with the light emitted from the light source and, passed through an objective lens; forming an optical image of the specimen by collecting light reflected from the specimen by the illuminating and passed through the objective lens and a image forming lens; detecting the optical image with a TDI image sensor; and processing a signal outputted from the TDI image sensor and detecting a defect of a pattern among the plural patterns formed on the specimen, wherein the image detected by the TDI image sensor is formed with light having a wavelength selected from the wavelengths of the light emitted from the light source.

    Abstract translation: 一种检查样本的方法,包括:从光源的灯发射光; 用从光源发射的光照射形成有多个图案的样本,并通过物镜; 通过照射通过收集从样本反射的光并通过物镜和成像透镜来形成样本的光学图像; 用TDI图像传感器检测光学图像; 并处理从TDI图像传感器输出的信号,并且检测在样本上形成的多个图案之间的图案的缺陷,其中由TDI图像传感器检测到的图像由具有选自发射的光的波长的波长的光形成 从光源。

    COMBINATION READER
    179.
    发明申请
    COMBINATION READER 审中-公开
    组合阅读器

    公开(公告)号:US20080265139A1

    公开(公告)日:2008-10-30

    申请号:US12164146

    申请日:2008-06-30

    Abstract: An imaging system for collecting images of signals associated with a sample tile comprising a stage supporting the sample tile, a ring illuminator system emitting a uniform excitation energy upon an entirety of the sample tile causing at least a first signal to be generated from the sample tile, and an image collecting device collecting a first image of the first signal. The image collecting device further collecting a second image of a second signal emitted from the sample tile, wherein the second signal being different than the first signal.

    Abstract translation: 一种用于收集与样品瓦片相关联的信号的图像的成像系统,包括支撑样品瓦片的台架,环形照明器系统,其在整个样品瓦片上发射均匀的激发能量,从而从样品瓦片产生至少一个第一信号 以及收集第一信号的第一图像的图像采集装置。 所述图像采集装置进一步收集从样本瓦片发射的第二信号的第二图像,其中所述第二信号不同于所述第一信号。

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