公开(公告)号：US20230420564A1

公开(公告)日：2023-12-28

申请号：US18244892

申请日：2023-09-11

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Shou-Wan Huang ,  Chun-Hsien Lin

IPC: H01L29/78 ,  H01L27/088 ,  H01L27/06 ,  H01L29/06 ,  H01L29/66

CPC classification number: H01L29/785 ,  H01L27/0886 ,  H01L27/0688 ,  H01L29/0649 ,  H01L29/66795

Abstract: A semiconductor device includes a substrate having a first region and a second region, a first fin-shaped structure extending along a first direction on the first region, a double diffusion break (DDB) structure extending along a second direction to divide the first fin-shaped structure into a first portion and a second portion, and a first gate structure and a second gate structure extending along the second direction on the DDB structure.

公开(公告)号：US20230420292A1

公开(公告)日：2023-12-28

申请号：US18243096

申请日：2023-09-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ching-Chih Chang ,  Yuan-Fu Ko ,  Chih-Sheng Chang

IPC: H01L21/768 ,  H01L23/528 ,  H01L21/02 ,  H01L23/532

CPC classification number: H01L21/7682 ,  H01L23/528 ,  H01L21/0217 ,  H01L21/02164 ,  H01L23/53295

Abstract: A method for fabricating semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first metal interconnection in the first IMD layer; removing part of the first IMD layer; forming a spacer adjacent to the first metal interconnection; forming a second IMD layer on the spacer and the first metal interconnection; and forming a second metal interconnection in the second IMD layer and on the spacer and the first metal interconnection.

公开(公告)号：US11856867B2

公开(公告)日：2023-12-26

申请号：US17095752

申请日：2020-11-12

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chun-Hsien Lin ,  Sheng-Yuan Hsueh

IPC: H10N50/80 ,  H10B61/00 ,  H10N50/85 ,  H10N50/01

CPC classification number: H10N50/80 ,  H10B61/20 ,  H10B61/22 ,  H10N50/01 ,  H10N50/85

Abstract: The present invention provides a semiconductor device and a method of forming the same, and the semiconductor device includes a substrate, a first interconnect layer and a second interconnect layer. The first interconnect layer is disposed on the substrate, and the first interconnect layer includes a first dielectric layer around a plurality of first magnetic tunneling junction (MTJ) structures. The second interconnect layer is disposed on the first interconnect layer, and the second interconnect layer includes a second dielectric layer around a plurality of second MTJ structures, wherein, the second MTJ structures and the first MTJ structures are alternately arranged along a direction. The semiconductor device may obtain a reduced size of each bit cell under a permissible process window, so as to improve the integration of components.

公开(公告)号：US11854632B2

公开(公告)日：2023-12-26

申请号：US17502056

申请日：2021-10-15

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Chien-Liang Wu ,  Wen-Kai Lin ,  Te-Wei Yeh ,  Sheng-Yuan Hsueh ,  Chi-Horn Pai

IPC: G11C17/16 ,  G11C16/10 ,  H10B20/25 ,  H10B20/20

CPC classification number: G11C17/165 ,  G11C16/10 ,  H10B20/20 ,  H10B20/25 ,  G11C2216/26

Abstract: A semiconductor memory structure includes a substrate having thereon a transistor forming region and a capacitor forming region. A transistor is disposed on the substrate within the transistor forming region. A capacitor is disposed within the capacitor forming region and electrically coupled to the transistor. A first inter-layer dielectric layer covers the transistor forming region and the capacitor forming region. The first inter-layer dielectric layer surrounds a metal gate of the transistor and a bottom plate of the capacitor. A cap layer is disposed on the first inter-layer dielectric layer. The cap layer has a first thickness within the transistor forming region and a second thickness within the capacitor forming region. The first thickness is greater than the second thickness. The cap layer within the capacitor forming region acts as a capacitor dielectric layer of the capacitor.

公开(公告)号：US20230413695A1

公开(公告)日：2023-12-21

申请号：US18239108

申请日：2023-08-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Wei Kuo ,  Chung-Yi Chiu

IPC: H10N70/00 ,  H10B63/00 ,  H10N70/20

CPC classification number: H10N70/826 ,  H10N70/231 ,  H10N70/011 ,  H10B63/00

Abstract: A manufacturing method of a memory device includes following steps. A memory unit including a first electrode, a second electrode, and a memory material layer is formed on a substrate. The second electrode is disposed above the first electrode in a vertical direction. The memory material layer is disposed between the first electrode and the second electrode in the vertical direction. A first spacer layer including a first portion, a second portion, and a third portion is formed on a sidewall of the memory unit. The first portion is disposed on a sidewall of the first electrode. The second portion is disposed on a sidewall of the second electrode. The third portion is disposed above the memory unit in the vertical direction and connected with the second portion. A thickness of the second portion in a horizontal direction is greater than that of the first portion in the horizontal direction.

公开(公告)号：US20230411308A1

公开(公告)日：2023-12-21

申请号：US17864407

申请日：2022-07-14

Applicant: United Microelectronics Corp.

Inventor： Chia-Chen Sun ,  En-Chiuan Liou

IPC: H01L23/00 ,  H01L23/522 ,  H01L23/528

CPC classification number: H01L23/562 ,  H01L23/5226 ,  H01L23/528

Abstract: Provided is a semiconductor structure including a first and a second conductive layers, and a first group of vias. The second conductive layer is disposed on the first conductive layer. The first group of vias is disposed between and connects the first and the second conductive layer. The first group of vias includes a first, a second, a third and a fourth vias. The first and second vias are arranged in a first column. The third and fourth vias are arranged in a second column. The first via is adjacent to the third via. The second via is adjacent to the fourth via. The extension directions of the first and second vias are orthogonal to each other, the extension directions of the third and the fourth vias are orthogonal to each other, and the extending directions of the first and the third vias are orthogonal to each other.

公开(公告)号：US11849649B2

公开(公告)日：2023-12-19

申请号：US17573641

申请日：2022-01-12

Applicant: United Microelectronics Corp.

Inventor： Da-Jun Lin ,  Bin-Siang Tsai ,  Ting-An Chien

IPC: H10N50/80 ,  H10N50/01 ,  H10N50/85

CPC classification number: H10N50/80 ,  H10N50/01 ,  H10N50/85

Abstract: A method for fabricating memory cell of magnetoresistive RAM includes forming a memory stack structure on a first electrode layer. The memory stack structure includes a SAF layer to serve as a pinned layer; a magnetic free layer and a barrier layer sandwiched between the SAF layer and the magnetic free layer. A second electrode layer is then formed on the memory stack structure. The SAF layer includes a first magnetic layer, a second magnetic layer, and a spacer layer of a first metal element sandwiched between the first magnetic layer and the second magnetic layer. The first metal element is phase separated from a second metal element of the first and second magnetic layers, and the second metal element of the first magnetic layer and the second magnetic layer interfaces with the spacer layer.

公开(公告)号：US20230403941A1

公开(公告)日：2023-12-14

申请号：US18238520

申请日：2023-08-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Po-kai Hsu ,  Hung-Yueh Chen ,  Yu-Ping Wang

IPC: H10N50/01 ,  H10N50/80

CPC classification number: H10N50/01 ,  H10N50/80 ,  H10B61/00

Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a cap layer adjacent to and directly contacting the MTJ, a first inter-metal dielectric (IMD) layer around the MTJ, a top electrode on the MTJ, a metal interconnection under the MTJ, and a second IMD layer around the metal interconnection. Preferably, the cap layer is a single layer structure made of dielectric material and an edge of the cap layer contacts the first IMD layer directly.

公开(公告)号：US20230403837A1

公开(公告)日：2023-12-14

申请号：US17857065

申请日：2022-07-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Li-Ping Huang ,  Chun-Yen Tseng

IPC: H01L27/11

CPC classification number: H01L27/1104

Abstract: The invention provides a static random access memory (SRAM) array pattern, which comprises a substrate, a first region, a second region, a third region and a fourth region are defined on the substrate and arranged in an array, each region partially overlaps with the other three regions, and each region contains a SRAM cell, the layout of the SRAM cell in the first region is the same as that in the third region, the layout of the SRAM cell in the second region is the same as that in the fourth region, and the layout of the SRAM cell in the first region and the layout of the SRAM cell in the fourth region are mirror patterns along a horizontal axis.

公开(公告)号：US20230402527A1

公开(公告)日：2023-12-14

申请号：US18238534

申请日：2023-08-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： An-Chi Liu ,  Chun-Hsien Lin

IPC: H01L29/66 ,  H01L29/20 ,  H01L29/201 ,  H01L29/40 ,  H01L29/778

CPC classification number: H01L29/66462 ,  H01L29/2003 ,  H01L29/201 ,  H01L29/404 ,  H01L29/778

Abstract: A high electron mobility transistor (HEMT) includes a buffer layer on a substrate, a barrier layer on the buffer layer, a gate electrode on the barrier layer, a field plate adjacent to two sides of the gate electrode, and a first passivation layer adjacent to two sides of the gate electrode. Preferably, a sidewall of the field plate includes a first curve.