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公开(公告)号：US08405055B2
公开(公告)日：2013-03-26
申请号：US12566060
申请日：2009-09-24
申请人： Dzmitry Labetski , Vadim Yevgenyevich Banine , Erik Roelof Loopstra , Johannes Hubertus Josephina Moors , Gerardus Hubertus Petrus Maria Swinkels
发明人： Dzmitry Labetski , Vadim Yevgenyevich Banine , Erik Roelof Loopstra , Johannes Hubertus Josephina Moors , Gerardus Hubertus Petrus Maria Swinkels
IPC分类号： H05H1/42
摘要： A radiation source is configured to generate extreme ultraviolet radiation. The radiation source includes a fuel supply configured to supply a fuel to a plasma formation site; a laser configured to emit a beam of radiation to the plasma formation site so that a plasma that emits extreme ultraviolet radiation is generated when the beam of radiation impacts the fuel; a fuel particulate interceptor constructed and arranged to shield at least part of the radiation source from fuel particulates that are emitted by the plasma, the fuel particulate interceptor comprising a first portion and a second portion, the second portion being positioned closer to the plasma formation site than the first portion, and the first portion being rotatable; and a fuel particulate remover constructed and arranged to remove fuel particulates from a surface of the fuel particulate interceptor and to direct the fuel particulates towards a collection location.
摘要翻译： 辐射源被配置成产生极紫外辐射。 辐射源包括构造成将燃料供应到等离子体形成位置的燃料供应; 激光器被配置为向等离子体形成位置发射辐射束，使得当辐射束影响燃料时产生发射极紫外辐射的等离子体; 燃料颗粒拦截器，其被构造和布置成将辐射源的至少一部分屏蔽在由等离子体发射的燃料颗粒中，所述燃料颗粒拦截器包括第一部分和第二部分，所述第二部分位于更靠近等离子体形成位置 并且所述第一部分可旋转; 以及构造和布置成从燃料颗粒拦截器的表面去除燃料颗粒并将燃料颗粒引导到收集位置的燃料颗粒去除器。
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公开(公告)号：US20120147348A1
公开(公告)日：2012-06-14
申请号：US13361545
申请日：2012-01-30
申请人： Yuri Johannes Gabriel VAN DE VIJVER , Tjarko Adriaan Rudolf VAN EMPEL , Jan Bernard Plechelmus VAN SCHOOT , Gerardus Hubertus Petrus Maria SWINKELS , Hendrikus Gijsbertus SCHIMMEL , Dzmitry LABETSKI
发明人： Yuri Johannes Gabriel VAN DE VIJVER , Tjarko Adriaan Rudolf VAN EMPEL , Jan Bernard Plechelmus VAN SCHOOT , Gerardus Hubertus Petrus Maria SWINKELS , Hendrikus Gijsbertus SCHIMMEL , Dzmitry LABETSKI
IPC分类号： G03B27/54
CPC分类号： G03F7/70033 , B82Y10/00 , G03F7/70841 , G03F7/70908 , G03F7/70916 , G03F7/70933 , H05G2/003 , H05G2/008
摘要： A lithographic apparatus is arranged to project a pattern from a patterning device onto a substrate is disclosed. The lithographic apparatus includes an illumination system and an outlet connected to a pumping system to pump away gas from between an inner wall and outer wall of the illumination system or, if a radiation source is present, between the inner wall of the illumination system and an inner wall of the radiation source.
摘要翻译： 公开了一种光刻设备，用于将图案从图案形成装置突出到衬底上。 光刻设备包括照明系统和连接到泵送系统的出口，以从照明系统的内壁和外壁之间泵送气体，或者如果存在辐射源，则在照明系统的内壁和 辐射源的内壁。
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公开(公告)号：US20110024651A1
公开(公告)日：2011-02-03
申请号：US12741978
申请日：2008-11-07
申请人： Hendrikus Gijsbertus Schimmel , Tjarko Adriaan Rudolf Van Empel , Gerardus Hubertus Petrus Maria Swinkels , Maarten Marinus Johannes Wilhelmus Van Herpen , Dzmitry Labetski
发明人： Hendrikus Gijsbertus Schimmel , Tjarko Adriaan Rudolf Van Empel , Gerardus Hubertus Petrus Maria Swinkels , Maarten Marinus Johannes Wilhelmus Van Herpen , Dzmitry Labetski
CPC分类号： G03F7/70916 , B82Y10/00 , G03F7/70033 , G03F7/70175 , G03F7/70575 , G03F7/70983 , G21K1/10 , G21K2201/061 , H05G2/003
摘要： A radiation system configured to generate a radiation beam, the radiation system including a chamber including: a radiation source configured to generate radiation; a radiation beam emission aperture; a radiation collector configured to collect radiation generated by the source, and to transmit the collected radiation to the radiation beam emission aperture; and a spectral purity filter configured to enhance a spectral purity of the radiation to be emitted via the aperture, wherein the spectral purity filter is configured to divide the chamber into a high pressure region and a low pressure region.
摘要翻译： 一种被配置为产生辐射束的辐射系统，所述辐射系统包括腔室，所述腔室包括：被配置为产生辐射的辐射源; 辐射束发射孔; 辐射收集器，被配置为收集由源产生的辐射，并将收集的辐射传送到辐射束发射孔; 以及光谱纯度滤光器，其被配置为增强经由所述孔发射的辐射的光谱纯度，其中所述光谱纯度滤光器被配置为将所述室分成高压区域和低压区域。
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公开(公告)号：US20100116029A1
公开(公告)日：2010-05-13
申请号：US12609835
申请日：2009-10-30
CPC分类号： G03B27/52 , G01B13/12 , G03F9/7057
摘要： A gas gauge has a gas delivery tube arranged to determine a distance to an object. The gas delivery tube includes a gas conduit through which a suitable measurement gas is supplied. The measurement gas leaves the gas delivery tube under pressure via an outlet and impinges on the object in an interaction area, wherein a pressure of a recoiled gas is measured by a pressure detector. A gas having a low atomic number may be used. The pressure sensor may include a membrane positioned in the gas delivery tube at least partially enveloping the gas conduit at or near the gas outlet. The pressure sensor may include a membrane disk arranged about the gas conduit. The pressure sensor may include a suitable plurality of pressure elements arranged in a substantially common plane and which may be spaced apart yet enveloping the gas conduit.
摘要翻译： 气量计具有布置成确定到物体的距离的气体输送管。 气体输送管包括供给合适的测量气体的气体导管。 测量气体通过出口在压力下离开气体输送管，并在相互作用区域中撞击物体，其中通过压力检测器测量反冲气体的压力。 可以使用原子序数低的气体。 压力传感器可以包括位于气体输送管中的膜，其至少部分地包围气体出口处或附近的气体导管。 压力传感器可以包括围绕气体管道布置的膜盘。 压力传感器可以包括布置在基本上共同的平面中并且可以间隔开并包封气体管道的合适的多个压力元件。
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公开(公告)号：US08901521B2
公开(公告)日：2014-12-02
申请号：US12197693
申请日：2008-08-25
申请人： Tjarko Adriaan Rudolf Van Empel , Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Erik Roelof Loopstra , Johannes Hubertus Josephina Moors , Jan Bernard Plechelmus Van Schoot , Yuri Johannes Gabriël Van De Vijver , Gerardus Hubertus Petrus Maria Swinkels , Hendrikus Gijsbertus Schimmel , Dzmitry Labetski
发明人： Tjarko Adriaan Rudolf Van Empel , Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Erik Roelof Loopstra , Johannes Hubertus Josephina Moors , Jan Bernard Plechelmus Van Schoot , Yuri Johannes Gabriël Van De Vijver , Gerardus Hubertus Petrus Maria Swinkels , Hendrikus Gijsbertus Schimmel , Dzmitry Labetski
CPC分类号： H05G2/008 , G03F7/70175 , G03F7/70891 , G03F7/70916 , G03F7/70983 , H05G2/003 , H05G2/006 , H05K7/2039
摘要： A module for producing extreme ultraviolet radiation includes a supply configured to supply droplets of an ignition material to a predetermined target ignition position and a laser arranged to be focused on the predetermined target ignition position and to produce a plasma by hitting such a droplet which is located at the predetermined target ignition position in order to change the droplet into an extreme ultraviolet producing plasma. Also, the module includes a collector mirror having a mirror surface constructed and arranged to reflect the radiation in order to focus the radiation on a focal point. A fluid supply is constructed and arranged to form a gas flow flowing away from the mirror surface in a direction transverse with respect to the mirror surface in order to mitigate particle debris produced by the plasma.
摘要翻译： 用于产生极紫外线辐射的模块包括被配置为将点火材料的液滴供应到预定的目标点火位置的电源和布置成聚焦在预定的目标点火位置上的激光器，并且通过击打位于 在预定的目标点火位置，以便将液滴变成极紫外线产生等离子体。 此外，模块包括收集器反射镜，其具有构造和布置成反射辐射的镜面，以便将辐射聚焦在焦点上。 流体供应器被构造和布置成在相对于镜面横向的方向上形成从镜面流出的气流，以便减轻由等离子体产生的颗粒碎片。
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16.发明授权公开(公告)号：US08368032B2
公开(公告)日：2013-02-05
申请号：US12712545
申请日：2010-02-25
申请人： Dzmitry Labetski , Erik Roelof Loopstra , Gerardus Hubertus Petrus Maria Swinkels , Tom Van Zutphen
发明人： Dzmitry Labetski , Erik Roelof Loopstra , Gerardus Hubertus Petrus Maria Swinkels , Tom Van Zutphen
CPC分类号： H05G2/003 , G03F7/70033 , H05G2/005
摘要： A plasma radiation source includes a vessel configured to catch a source material transmitted along a trajectory, and a decelerator configured to reduce a speed of the source material in a section of the trajectory downstream of a plasma initiation site.
摘要翻译： 等离子体辐射源包括构造成捕获沿着轨迹传输的源材料的容器，以及减速器，其构造成在等离子体起始位置下游的轨迹的一部分中降低源材料的速度。
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公开(公告)号：US08115900B2
公开(公告)日：2012-02-14
申请号：US11898933
申请日：2007-09-17
申请人： Yuri Johannes Gabriël Van De Vijver , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels , Hendrikus Gijsbertus Schimmel , Dzmitry Labetski , Tjarko Adriaan Rudolf Van Empel
发明人： Yuri Johannes Gabriël Van De Vijver , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels , Hendrikus Gijsbertus Schimmel , Dzmitry Labetski , Tjarko Adriaan Rudolf Van Empel
IPC分类号： G03B27/52
CPC分类号： G03F7/70033 , B82Y10/00 , G03F7/70841 , G03F7/70908 , G03F7/70916 , G03F7/70933 , H05G2/003 , H05G2/008
摘要： A lithographic apparatus is arranged to project a pattern from a patterning device onto a substrate is disclosed. The lithographic apparatus includes an illumination system and an outlet connected to a pumping system to pump away gas from between an inner wall and outer wall of the illumination system or, if a radiation source is present, between the inner wall of the illumination system and an inner wall of the radiation source.
摘要翻译： 公开了一种光刻设备，用于将图案从图案形成装置突出到衬底上。 光刻设备包括照明系统和连接到泵送系统的出口，以从照明系统的内壁和外壁之间泵送气体，或者如果存在辐射源，则在照明系统的内壁和 辐射源的内壁。
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公开(公告)号：US20110164236A1
公开(公告)日：2011-07-07
申请号：US13063139
申请日：2009-07-21
申请人： Andrei Mikhailovich Yakunin , Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Erik Roelof Loopstra , Vladimir Mihailovitch Krivtsun , Gerardus Hubertus Petrus Maria Swinkels , Dzmitry Labetski
发明人： Andrei Mikhailovich Yakunin , Vadim Yevgenyevich Banine , Vladimir Vitalevich Ivanov , Erik Roelof Loopstra , Vladimir Mihailovitch Krivtsun , Gerardus Hubertus Petrus Maria Swinkels , Dzmitry Labetski
CPC分类号： G03F7/70933 , G03F7/70033 , G03F7/70916 , G03F7/70983 , H05G2/003
摘要： A radiation source is configured to generate extreme ultraviolet radiation. The radiation source includes a plasma formation site located at a position in which a fuel will be contacted by a beam of radiation to form a plasma, an outlet configured to allow gas to exit the radiation source, and a contamination trap at least partially located inside the outlet. The contamination trap is configured to trap debris particles that are generated with the formation of the plasma.
摘要翻译： 辐射源被配置成产生极紫外辐射。 辐射源包括位于燃料将被辐射束接触以形成等离子体的位置处的等离子体形成位置，被配置为允许气体离开辐射源的出口以及至少部分地位于内部的污染阱 出口。 污染阱被配置成捕集在形成等离子体时产生的碎屑颗粒。
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公开(公告)号：US20100085547A1
公开(公告)日：2010-04-08
申请号：US12566060
申请日：2009-09-24
申请人： Dzmitry Labetski , Vadim Yevgenyevich Banine , Erik Roelof Loopstra , Johannes Hubertus Josephina Moors , Gerardus Hubertus Petrus Maria Swinkels
发明人： Dzmitry Labetski , Vadim Yevgenyevich Banine , Erik Roelof Loopstra , Johannes Hubertus Josephina Moors , Gerardus Hubertus Petrus Maria Swinkels
摘要： A radiation source is configured to generate extreme ultraviolet radiation. The radiation source includes a fuel supply configured to supply a fuel to a plasma formation site; a laser configured to emit a beam of radiation to the plasma formation site so that a plasma that emits extreme ultraviolet radiation is generated when the beam of radiation impacts the fuel; a fuel particulate interceptor constructed and arranged to shield at least part of the radiation source from fuel particulates that are emitted by the plasma, the fuel particulate interceptor comprising a first portion and a second portion, the second portion being positioned closer to the plasma formation site than the first portion, and the first portion being rotatable; and a fuel particulate remover constructed and arranged to remove fuel particulates from a surface of the fuel particulate interceptor and to direct the fuel particulates towards a collection location.
摘要翻译： 辐射源被配置成产生极紫外辐射。 辐射源包括构造成将燃料供应到等离子体形成位置的燃料供应; 激光器被配置为向等离子体形成位置发射辐射束，使得当辐射束影响燃料时产生发射极紫外辐射的等离子体; 燃料颗粒拦截器，其被构造和布置成将辐射源的至少一部分屏蔽在由等离子体发射的燃料颗粒中，所述燃料颗粒拦截器包括第一部分和第二部分，所述第二部分位于更靠近等离子体形成位置 并且所述第一部分可旋转; 以及构造和布置成从燃料颗粒拦截器的表面去除燃料颗粒并将燃料颗粒引导到收集位置的燃料颗粒去除器。
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公开(公告)号：US20090073396A1
公开(公告)日：2009-03-19
申请号：US11898933
申请日：2007-09-17
申请人： Yuri Johannes Gabriel Van De Vijver , Tjarko Adriaan Rudolf Van Empel , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels , Hendrikus Gijsbertus Schimmel , Dzmitry Labetski
发明人： Yuri Johannes Gabriel Van De Vijver , Tjarko Adriaan Rudolf Van Empel , Jan Bernard Plechelmus Van Schoot , Gerardus Hubertus Petrus Maria Swinkels , Hendrikus Gijsbertus Schimmel , Dzmitry Labetski
IPC分类号： G03B27/52
CPC分类号： G03F7/70033 , B82Y10/00 , G03F7/70841 , G03F7/70908 , G03F7/70916 , G03F7/70933 , H05G2/003 , H05G2/008
摘要： A lithographic apparatus is arranged to project a pattern from a patterning device onto a substrate is disclosed. The lithographic apparatus includes an illumination system and an outlet connected to a pumping system to pump away gas from between an inner wall and outer wall of the illumination system or, if a radiation source is present, between the inner wall of the illumination system and an inner wall of the radiation source.
摘要翻译： 公开了一种光刻设备，用于将图案从图案形成装置突出到衬底上。 光刻设备包括照明系统和连接到泵送系统的出口，以从照明系统的内壁和外壁之间泵送气体，或者如果存在辐射源，则在照明系统的内壁和 辐射源的内壁。
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