METHODS OF FORMING A COMPOUND SEMICONDUCTOR DEVICE INCLUDING A DIFFUSION REGION
    11.
    发明申请
    METHODS OF FORMING A COMPOUND SEMICONDUCTOR DEVICE INCLUDING A DIFFUSION REGION 有权
    形成包括扩散区域的化合物半导体器件的方法

    公开(公告)号:US20100144123A1

    公开(公告)日:2010-06-10

    申请号:US12508382

    申请日:2009-07-23

    CPC classification number: H01L21/2258

    Abstract: Provided is a method of forming a compound semiconductor device. In the method, a dopant element layer is formed on an undoped compound semiconductor layer. An annealing process is performed to diffuse dopants in the dopant element layer into the undoped compound semiconductor layer, thereby forming a dopant diffusion region. A rapid cooling process is performed using liquid nitrogen with respect to the substrate having the dopant diffusion region.

    Abstract translation: 提供一种形成化合物半导体器件的方法。 在该方法中,在未掺杂的化合物半导体层上形成掺杂剂元素层。 执行退火处理以将掺杂剂元素层中的掺杂剂扩散到未掺杂的化合物半导体层中,从而形成掺杂剂扩散区域。 相对于具有掺杂剂扩散区域的基板,使用液氮进行快速冷却处理。

    SHARED PHOTODIODE IMAGE SENSOR
    12.
    发明申请
    SHARED PHOTODIODE IMAGE SENSOR 有权
    共享光电图像传感器

    公开(公告)号:US20100133590A1

    公开(公告)日:2010-06-03

    申请号:US12626343

    申请日:2009-11-25

    Abstract: An image sensor with a shared photodiode is provided. The image sensor includes at least two unit pixels, each of which includes a photodiode, a diffusion region which gathers electrons from the photodiode, a transfer transistor which connects the photodiode with the diffusion region, and a readout circuit which reads out a signal from the diffusion region. Photodiodes of neighboring unit pixels are disposed symmetrically to be adjacent to one another to form a shared photodiode. The image sensor does not have a STI region which causes a dark current restricting its performance and does not require a basic minimum design factor (a distance or an area) related to a STI region. A region corresponding to a STI region may be used as a region of a photodiode or for additional pixel scaling. Therefore, a limitation in scaling of a photodiode is overcome, and pixel performance is improved in spite of pixel scaling.

    Abstract translation: 提供具有共享光电二极管的图像传感器。 图像传感器包括至少两个单位像素,每个单元像素包括光电二极管,从光电二极管收集电子的扩散区域,连接光电二极管与扩散区域的传输晶体管,以及读出电路, 扩散区。 相邻单位像素的光电二极管彼此对称设置以形成共用光电二极管。 图像传感器不具有导致暗电流限制其性能的STI区域,并且不需要与STI区域相关的基本最小设计因子(距离或面积)。 可以将对应于STI区域的区域用作光电二极管的区域或用于附加像素缩放。 因此,克服了光电二极管的缩放的限制,并且尽管像素缩放来提高像素性能。

    Long wavelength vertical cavity surface emitting laser device and method of fabricating the same
    13.
    发明授权
    Long wavelength vertical cavity surface emitting laser device and method of fabricating the same 有权
    长波长垂直腔表面发射激光器件及其制造方法

    公开(公告)号:US07680162B2

    公开(公告)日:2010-03-16

    申请号:US11951133

    申请日:2007-12-05

    Abstract: Provided is a vertical cavity surface emitting device. The surface emitting device includes a lower mirror layer emitting light having a long wavelength, an active layer providing an optical gain, a tunnel junction layer for confining a current, and an upper mirror layer, which are sequentially stacked on a compound semiconductor substrate, wherein a heat release layer is formed on side surfaces of at least one of the active layer, the tunnel junction layer and the upper mirror layer by using etching process, and the heat release layer has greater thermal conductivity than at least one of the active layer, the tunnel junction layer and the upper mirror layer.

    Abstract translation: 提供了一种垂直腔表面发射装置。 表面发射器件包括顺序地堆叠在化合物半导体衬底上的具有长波长的光的下反射镜层,提供光学增益的有源层,用于限制电流的隧道结层和上镜面层,其中 通过使用蚀刻工艺在活性层,隧道结层和上镜面层中的至少一个的侧表面上形成放热层,并且散热层的热导率比活性层, 隧道结层和上镜面层。

    LONG WAVELENGTH VERTICAL CAVITY SURFACE EMITTING LASER DEVICE AND METHOD OF FABRICATING THE SAME
    14.
    发明申请
    LONG WAVELENGTH VERTICAL CAVITY SURFACE EMITTING LASER DEVICE AND METHOD OF FABRICATING THE SAME 有权
    长波长垂直孔表面发射激光器件及其制造方法

    公开(公告)号:US20080137692A1

    公开(公告)日:2008-06-12

    申请号:US11951133

    申请日:2007-12-05

    Abstract: Provided is a vertical cavity surface emitting device. The surface emitting device includes a lower mirror layer emitting light having a long wavelength, an active layer providing an optical gain, a tunnel junction layer for confining a current, and an upper mirror layer, which are sequentially stacked on a compound semiconductor substrate, wherein a heat release layer is formed on side surfaces of at least one of the active layer, the tunnel junction layer and the upper mirror layer by using etching process, and the heat release layer has greater thermal conductivity than at least one of the active layer, the tunnel junction layer and the upper mirror layer.

    Abstract translation: 提供了一种垂直腔表面发射装置。 表面发射器件包括顺序地堆叠在化合物半导体衬底上的具有长波长的光的下反射镜层,提供光学增益的有源层,用于限制电流的隧道结层和上镜面层,其中 通过使用蚀刻工艺在活性层,隧道结层和上镜面层中的至少一个的侧表面上形成放热层,并且散热层的热导率比活性层, 隧道结层和上镜面层。

    Vertical cavity surface emitting laser module having monitoring photodiode and method of fabricating the same
    15.
    发明申请
    Vertical cavity surface emitting laser module having monitoring photodiode and method of fabricating the same 有权
    具有监测光电二极管的垂直腔表面发射激光器模块及其制造方法

    公开(公告)号:US20070133642A1

    公开(公告)日:2007-06-14

    申请号:US11635938

    申请日:2006-12-08

    Abstract: Provided are a vertical cavity surface emitting laser (VCSEL) module providing accurate alignment between a VCSEL and a monitoring photodiode (MPD) for efficiently detecting light emitted by the VCSEL and a method of fabricating the VCSEL module. The VCSEL module includes: a first mirror layer, a first semiconductor conducting layer, an active layer, a tunnel junction layer, and a second semiconductor conducting layer sequentially formed on a first region in a substrate having first and second regions; a MPD disposed on a portion of the second semiconductor conducting layer in the first region; and a VCSEL including layers having the same shapes as the first mirror layer, the first semiconductor conducting layer, the active layer, the tunnel junction layer and the second semiconductor conducting layer in the first region, and a second mirror layer formed on a portion of the second semiconductor conducting layer, and sequentially formed on the second region in the substrate. The predetermined distance is set so that light emitted by the VCSEL can be detected by the MPD.

    Abstract translation: 提供了垂直腔表面发射激光器(VCSEL)模块,其提供VCSEL和监视光电二极管(MPD)之间的精确对准,用于有效地检测由VCSEL发射的光以及制造VCSEL模块的方法。 VCSEL模块包括:第一半导体层,第一半导体导电层,有源层,隧道结层和顺序地形成在具有第一和第二区域的衬底的第一区域上的第二半导体导电层; 设置在所述第一区域中的所述第二半导体导电层的一部分上的MPD; 以及VCSEL,其包括在第一区域中具有与第一镜像层,第一半导体层,有源层,隧道结层和第二半导体导电层相同形状的层,以及形成在第一区域的一部分上的第二镜层 第二半导体导电层,并顺序地形成在基板的第二区域上。 设定预定距离,使得能够通过MPD检测由VCSEL发出的光。

    Hybrid metal bonded vertical cavity surface emitting laser and fabricating method thereof
    16.
    发明申请
    Hybrid metal bonded vertical cavity surface emitting laser and fabricating method thereof 审中-公开
    混合金属结合垂直腔表面发射激光器及其制造方法

    公开(公告)号:US20060126694A1

    公开(公告)日:2006-06-15

    申请号:US11179954

    申请日:2005-07-12

    Abstract: Provided is a method of fabricating a vertical cavity surface emitting laser among semiconductor optical devices, comprising: bonding a dielectric mirror layer to an epi-structure having a mirror layer and an active layer; bonding these on a new substrate using a metal bonded method; removing the existing substrate; and fabricating a vertical cavity surface emitting laser on the new substrate. The method of fabricating the vertical cavity surface emitting laser is performed by moving and attaching a vertical cavity surface emitting laser to a new substrate using an external metallic bonding method, without electrically and optically affecting upper and lower mirrors and an active layer that constitutes the vertical cavity surface emitting laser. While using the existing method of fabricating the vertical cavity surface emitting laser, the VCSEL is fabricated by moving to a new substrate having good thermal characteristics so that good heat emission characteristics are accomplished, thus facilitating manufacture of the vertical cavity surface emitting laser having high reliability and good characteristics.

    Abstract translation: 提供了一种在半导体光学器件中制造垂直腔表面发射激光器的方法,包括:将介质镜层结合到具有镜层和有源层的外延结构; 使用金属键合方法将它们结合在新的基板上; 去除现有的基板; 并在新基板上制造垂直腔表面发射激光器。 垂直腔表面发射激光器的制造方法是通过使用外部金属接合方法将垂直空腔表面发射激光器移动并附着到新的衬底而进行的,而不会电和影响上镜和下反射镜以及构成垂直腔的表面发射激光的有源层 腔表面发射激光。 在使用制造垂直腔表面发射激光器的现有方法的同时,通过移动到具有良好热特性的新衬底来制造VCSEL,从而实现良好的发热特性,从而有助于制造具有高可靠性的垂直腔表面发射激光器 和良好的特点。

    AVALANCHE PHOTODIODES AND METHODS OF FABRICATING THE SAME
    18.
    发明申请
    AVALANCHE PHOTODIODES AND METHODS OF FABRICATING THE SAME 有权
    AVALANCHE光电及其制造方法

    公开(公告)号:US20120104531A1

    公开(公告)日:2012-05-03

    申请号:US13191758

    申请日:2011-07-27

    Abstract: Provided are an avalanche photodiode and a method of fabricating the same. The method of fabricating the avalanche photodiode includes sequentially forming a compound semiconductor absorption layer, a compound semiconductor grading layer, a charge sheet layer, a compound semiconductor amplification layer, a selective wet etch layer, and a p-type conductive layer on an n-type substrate through a metal organic chemical vapor deposition process.

    Abstract translation: 提供了一种雪崩光电二极管及其制造方法。 制造雪崩光电二极管的方法包括:在n型衬底上依次形成化合物半导体吸收层,化合物半导体分级层,电荷层,化合物半导体放大层,选择性湿蚀刻层和p型导电层。 通过金属有机化学气相沉积工艺形成衬底。

    Biodegradable and Thermosensitive Poly(Organophosphazene) Hydrogel, Preparation Method Thereof and Use Thereof
    20.
    发明申请
    Biodegradable and Thermosensitive Poly(Organophosphazene) Hydrogel, Preparation Method Thereof and Use Thereof 有权
    可生物降解和热敏聚(有机膦腈)水凝胶,其制备方法及用途

    公开(公告)号:US20090022683A1

    公开(公告)日:2009-01-22

    申请号:US11568851

    申请日:2006-11-03

    Abstract: The present invention relates to a biodegradable and thermosensitive poly(organophosphazene) with a functional group, a preparation method thereof, and a use thereof for delivery of bioactive substances. According to the present invention, poly(organophosphazene) is a phosphagen-based polymer showing biodegradability, thermosensitivity, and sol-gel phase transition depending on temperature change, whereby when administered into a living body with bioactive substances such as drugs, the poly(organophosphazene) forms a gel-phase at body temperature to be capable of controlled release of the bioactive substances. Further, the poly(organophosphazene) has functional groups to chemically bind with bioactive substances through an ionic bond, covalent bond, or coordinate covalent bond to be capable of a sustained release of the bioactive substances due to its good binding property. Therefore, the poly(organophosphazene) is useful as a delivery material for bioactive substances.

    Abstract translation: 本发明涉及具有官能团的生物可降解和热敏聚(有机膦腈),其制备方法及其用于递送生物活性物质的用途。 根据本发明,聚(有机膦腈)是基于温度变化显示生物降解性,热敏性和溶胶 - 凝胶相变的基于磷酸酯的聚合物,其中当用生物活性物质如药物施用于生物体时,聚(有机膦腈 )在体温下形成凝胶相以能够控制释放生物活性物质。 此外,聚(有机膦腈)具有通过离子键,共价键或配位共价键与生物活性物质化学结合的官能团,由于其良好的结合性能,能够持续释放生物活性物质。 因此,聚(有机膦腈)可用作生物活性物质的递送材料。

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