公开(公告)号：US20120241427A1

公开(公告)日：2012-09-27

申请号：US13404930

申请日：2012-02-24

Applicant: Dimitry Maltsev ,  Dmitry N. Romashko ,  Michael Plotkin ,  Jonathan S. Ehrmann ,  James J. Cordingley

Inventor： Dimitry Maltsev ,  Dmitry N. Romashko ,  Michael Plotkin ,  Jonathan S. Ehrmann ,  James J. Cordingley

IPC: B23K26/00

CPC classification number: B23K26/0732 ,  B23K26/042 ,  B23K26/0619 ,  B23K26/0622 ,  B23K26/082 ,  H01L21/76892 ,  H01L23/5258 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of processing material of device elements by laser interaction is disclosed. According to one aspect, the method includes generating a pulsed laser processing output along a laser beam axis, the output including a plurality of laser pulses triggered sequentially at times determined by a pulse repetition rate. A trajectory relative to locations of device elements to be processed is generated. A position of one or more designated device elements relative to an intercept point position on the trajectory at one or more laser pulse times is determined, and a laser beam is deflected based on the predicted position within a predetermined deflection range. According to some aspects, the predetermined deflection range may correspond to a compass rose or cruciform field shape. As a result, a deflection accuracy for laser processing may be improved.

Abstract translation: 公开了一种通过激光相互作用处理器件元件材料的方法。 根据一个方面，所述方法包括沿着激光束轴产生脉冲激光处理输出，所述输出包括在由脉冲重复率确定的时间顺序触发的多个激光脉冲。 产生相对于要处理的设备元件的位置的轨迹。 确定一个或多个指定装置元件相对于在一个或多个激光脉冲时间的轨迹上的截点位置的位置，并且激光束基于在预定偏转范围内的预测位置偏转。 根据一些方面，预定的偏转范围可以对应于罗盘玫瑰或十字形场的形状。 结果，可以提高激光加工的偏转精度。

公开(公告)号：US20110085014A1

公开(公告)日：2011-04-14

申请号：US12577201

申请日：2009-10-11

Applicant: Boaz Tagansky ,  Michael Plotkin ,  Craig Breen

Inventor： Boaz Tagansky ,  Michael Plotkin ,  Craig Breen

IPC: B41J2/435 ,  H01S3/04

CPC classification number: B41J2/45 ,  H01S5/042 ,  H01S5/4025

Abstract: Electrophotographic print system, comprising a photosensitive medium, and a laser array being provided with a plurality of laser diodes arranged to emit light onto the photosensitive medium for varying an electrical potential on a surface of the photosensitive medium, and a plurality of heat dissipation diodes, each heat dissipation diode being arranged in proximity to a corresponding laser diode, wherein each laser diode and the corresponding heat dissipation diode are coupled to a common drive circuit and are arranged in opposite current flow directions with respect to each other, so that in use the current flows either through the laser diode or through the heat dissipation diode depending on the current flow direction in the drive circuit.

Abstract translation: 电子照相打印系统，包括感光介质和激光阵列，其设置有多个激光二极管，所述多个激光二极管被布置成将光发射到感光介质上以改变感光介质的表面上的电位，以及多个散热二极管， 每个散热二极管布置在相应的激光二极管附近，其中每个激光二极管和相应的散热二极管耦合到公共驱动电路并且相对于彼此以相反的电流流动方向布置，使得在使用中 电流根据驱动电路中的电流流动方向通过激光二极管或通过散热二极管流动。

公开(公告)号：US20090128616A1

公开(公告)日：2009-05-21

申请号：US12297522

申请日：2006-04-19

Applicant: Michael Plotkin ,  Dror Kella ,  David Towner ,  Mani Fischer

Inventor： Michael Plotkin ,  Dror Kella ,  David Towner ,  Mani Fischer

IPC: B41J2/47

CPC classification number: H04N1/1911 ,  H04N1/1135 ,  H04N1/12

Abstract: A method of, and apparatus for, reducing the visibility of banding artifacts on a printed medium comprising producing synthetic artifacts on the printed medium, overlapping scan lines at swath boundaries and controlling exposure along a scan line to reduce the visibility of the banding artifacts.

Abstract translation: 一种用于降低打印介质上的条纹伪像的可见性的方法和装置，包括在印刷介质上产生合成人为因素，在扫描线边缘处重叠扫描线，并控制沿着扫描线的曝光，以降低条纹伪像的可视性。

公开(公告)号：US07528858B2

公开(公告)日：2009-05-05

申请号：US10586957

申请日：2004-02-05

Applicant: Haim Livne ,  Michael Plotkin ,  Craig Breen

Inventor： Haim Livne ,  Michael Plotkin ,  Craig Breen

IPC: B41J2/47

CPC classification number: G02B27/0031 ,  B41J2/471 ,  G02B7/1827 ,  H04N1/047 ,  H04N2201/02439 ,  H04N2201/0471 ,  H04N2201/04739 ,  H04N2201/04755 ,  H04N2201/04794

Abstract: An imager comprising a photosensitive surface; a light source which produces at least one scanning light beam; a deflector, arranged to deflect the at least one scanning light beam onto the photosensitive surface; and a sensor which measures the orientation of the deflector. The imager also comprises a controller operative to determine a placement error of said at least one scanning beam on the photosensitive surface, responsive to the orientation measurement by the sensor: and an actuator, responsive to the displacement error, and arranged to change the direction of deflection of the at least one light beam by the deflector. The sensor is configured to measure the orientation of the deflector substantially at a null in a vibrational mode of the deflector.

Abstract translation: 一种成像器，包括感光表面; 产生至少一个扫描光束的光源; 偏转器，布置成将所述至少一个扫描光束偏转到所述感光表面上; 以及测量偏转器的取向的传感器。 成像器还包括控制器，其操作以响应于传感器的取向测量来确定所述至少一个扫描光束在感光表面上的放置误差;以及响应于位移误差的致动器，并被布置成改变方向 所述至少一个光束被所述偏转器偏转。 传感器被配置成在偏转器的振动模式中基本上测量偏转器的取向。

公开(公告)号：US20070159676A1

公开(公告)日：2007-07-12

申请号：US10586957

申请日：2004-02-05

Applicant: Haim Livne ,  Michael Plotkin ,  Craig Breen

Inventor： Haim Livne ,  Michael Plotkin ,  Craig Breen

IPC: G02B26/08

CPC classification number: G02B27/0031 ,  B41J2/471 ,  G02B7/1827 ,  H04N1/047 ,  H04N2201/02439 ,  H04N2201/0471 ,  H04N2201/04739 ,  H04N2201/04755 ,  H04N2201/04794

Abstract: An imager comprising a photosensitive surface; a light source which produces at least one scaning light beam; a deflector, arranged to deflect the at least one scanning light beam onto the photosensitive surface; and a sensor which measures the orientation of the deflector. The imager also comprises a controller operative to determine a placement error of said at least one scanning beam on the photosensitive surface, responsive to the orientation measurement by the sensor; and an actuator, responsive to the displacement error, and arranged to change the direction of deflection of the at least one light beam by the deflector. The sensor is configured to measure the orientation of the deflector substantially at a null in a vibrational mode of the deflector.

Abstract translation: 一种成像器，包括感光表面; 产生至少一个扫描光束的光源; 偏转器，布置成将所述至少一个扫描光束偏转到所述感光表面上; 以及测量偏转器的取向的传感器。 成像器还包括控制器，用于响应于传感器的取向测量，确定所述至少一个扫描光束在感光表面上的放置误差; 以及响应于所述位移误差的致动器，并且被布置成通过所述偏转器改变所述至少一个光束的偏转方向。 传感器被配置成在偏转器的振动模式中基本上测量偏转器的取向。

公开(公告)号：US20050199598A1

公开(公告)日：2005-09-15

申请号：US11125651

申请日：2005-05-10

Applicant: Bradley Hunter ,  Steven Cahill ,  Jonathan Ehrmann ,  Michael Plotkin

Inventor： Bradley Hunter ,  Steven Cahill ,  Jonathan Ehrmann ,  Michael Plotkin

IPC: B23K26/04 ,  B23K26/08 ,  B23K101/40 ,  G03F7/20 ,  H01L21/82 ,  B23K26/38 ,  B23K26/06

CPC classification number: B23K26/046 ,  B23K26/02 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0853 ,  B23K2101/40 ,  G03F7/70041 ,  G03F7/70725

Abstract: A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis.

Abstract translation: 提供了一种用于精确定位材料处理激光束的腰部以动态地补偿位于激光加工部位内间隔开的多个物体上的微结构的局部高度变化的高速方法和系统。 在优选实施例中，微结构是形成在半导体晶片的多个存储芯片上的多条导线。 该系统包括聚焦透镜子系统，用于沿着基本上垂直于平面的光轴聚焦激光束，用于在平面中移动晶片的x-y级，以及用于沿着光轴移动聚焦透镜子系统的第一空气轴承滑座。

公开(公告)号：US08928720B2

公开(公告)日：2015-01-06

申请号：US12090322

申请日：2005-10-27

Applicant: David K. Towner ,  Michael Plotkin ,  Dror Kella

Inventor： David K. Towner ,  Michael Plotkin ,  Dror Kella

IPC: B41J2/47 ,  G02B26/12 ,  H04N1/191 ,  H04N1/40 ,  H04N1/113 ,  H04N1/12

CPC classification number: G02B26/123 ,  B41J2/473 ,  H04N1/1135 ,  H04N1/12 ,  H04N1/1911 ,  H04N1/1918 ,  H04N1/40025 ,  H04N2201/0082

Abstract: Apparatus comprising a two-dimensional array of light sources (40) and a scanning device (26) arranged to scan light (14) emitted from the light sources (40) onto a medium (10) to generate a plurality of scan lines (52) on the medium (10), the light sources (24 and scanning device (26) being arranged such that a plurality of light sources (24) can be used to generate each scan line (52) of the plurality of scan lines (52).

Abstract translation: 一种装置，包括光源（40）的二维阵列和扫描装置（26），扫描装置（26）将从光源（40）发射的光（14）扫描到介质（10）上以产生多条扫描线 ），介质（10）上的光源（24和扫描装置26）被布置成使得可以使用多个光源（24）来产生多条扫描线（52）中的每条扫描线（52） ）。

公开(公告)号：US20110243393A1

公开(公告)日：2011-10-06

申请号：US12749739

申请日：2010-03-30

Applicant: Alexander Berkovich ,  Hila Nachlieli ,  Shai Emanueli ,  Haim Vladomirski ,  Michael Plotkin

Inventor： Alexander Berkovich ,  Hila Nachlieli ,  Shai Emanueli ,  Haim Vladomirski ,  Michael Plotkin

IPC: G06K9/00

CPC classification number: G06T7/0004 ,  G06T2207/20056 ,  G06T2207/30144

Abstract: A method and apparatus are provided for evaluating the severity in a printed image of a repeating band print artifact. After electronically capturing the printed image, each of a plurality of patches taken from captured image is analysed to produce an artifact severity measure for the patch; an overall artifact severity value is then determined for the printed image from the patch severity measures. The analysis of each patch involves producing a spatial intensity profile across the patch substantially at right angles to an expected direction of extent of any repeating band print artifact present; a Fourier-related transform is then applied to the spatial intensity profile and the patch artifact severity measure generated by summing the resultant spatial frequency coefficients in a limited range about a frequency of interest.

Abstract translation: 提供了一种用于评估重复带打印伪像的打印图像中的严重性的方法和装置。 在电子捕获打印图像之后，分析从拍摄图像中取出的多个贴片中的每一个，以产生贴片的伪影强度测量; 然后根据补丁严重性度量确定打印图像的整体工件严重性值。 每个贴片的分析涉及产生跨越贴片的空间强度分布，其基本上与存在的任何重复带状印刷伪影的预期的程度方向成直角; 然后将傅里叶相关变换应用于空间强度分布和通过在关于感兴趣频率的有限范围内对所得到的空间频率系数进行求和而产生的斑块伪影强度测度。

公开(公告)号：US20090095722A1

公开(公告)日：2009-04-16

申请号：US12233476

申请日：2008-09-18

Applicant: Jonathan S. Ehrmann ,  Joseph J. Griffiths ,  James J. Cordingley ,  Donald J. Svetkoff ,  Shepard D. Johnson ,  Michael Plotkin

Inventor： Jonathan S. Ehrmann ,  Joseph J. Griffiths ,  James J. Cordingley ,  Donald J. Svetkoff ,  Shepard D. Johnson ,  Michael Plotkin

IPC: B23K26/36

CPC classification number: B23K26/0869 ,  B23K26/0344 ,  B23K26/06 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/361 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/16 ,  B23K2103/50 ,  H01L21/76894 ,  H01L23/5258 ,  H01L27/10844 ,  H01L2924/0002 ,  Y10T29/49156 ,  H01L2924/00

Abstract: The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.

Abstract translation: 本发明涉及激光加工方法和系统的领域，具体涉及用于激光加工多材料装置的激光加工方法和系统。 系统和方法可以利用高速偏转器来改善处理能量窗口和/或提高处理速度。 在一些实施例中，偏转器用于束斑的非正交扫描。 在一些实施例中，偏转器用于实现目标结构的非同步处理。

公开(公告)号：US20080278566A1

公开(公告)日：2008-11-13

申请号：US12090322

申请日：2005-10-27

Applicant: David K. Towner ,  Michael Plotkin ,  Dror Kella

Inventor： David K. Towner ,  Michael Plotkin ,  Dror Kella

IPC: B41J2/455

CPC classification number: G02B26/123 ,  B41J2/473 ,  H04N1/1135 ,  H04N1/12 ,  H04N1/1911 ,  H04N1/1918 ,  H04N1/40025 ,  H04N2201/0082

Abstract: Apparatus comprising a two-dimensional array of light sources (40) and a scanning device (26) arranged to scan light (14) emitted from the light sources (40) onto a medium (10) to generate a plurality of scan lines (52) on the medium (10), the light sources (24 and scanning device (26) being arranged such that a plurality of light sources (24) can be used to generate each scan line (52) of the plurality of scan lines (52).

Abstract translation: 一种装置，包括光源（40）的二维阵列和扫描装置（26），扫描装置（26）将从光源（40）发射的光（14）扫描到介质（10）上以产生多条扫描线 ），介质（10）上的光源（24和扫描装置26）被布置成使得可以使用多个光源（24）来产生多条扫描线（52）中的每条扫描线（52） ）。