公开(公告)号：US07082224B2

公开(公告)日：2006-07-25

申请号：US11060400

申请日：2005-02-18

Applicant: Mitsuji Ikeda ,  Syoji Yoshida ,  Keisuke Nakashima ,  Koyo Katsura ,  Shigeru Shibukawa ,  Haruo Yoda ,  Takashi Hotta

Inventor： Mitsuji Ikeda ,  Syoji Yoshida ,  Keisuke Nakashima ,  Koyo Katsura ,  Shigeru Shibukawa ,  Haruo Yoda ,  Takashi Hotta

IPC: G06K9/64

CPC classification number: G06K9/6203 ,  G06T7/20

Abstract: An apparatus for calculating a normalized correlation coefficient used as a similarity evaluation measure by using image data values of pixels in a template image and image data values of pixels in a subimage, included in a search image, corresponding to the template image, has a memory that stores image data values of pixels in the search image and calculating means that calculate a sum of image data values of pixels in the template image and a sum of image data values of pixels in the first rectangular region in the search image or a sum of squares of image data values of pixels in the template image and a sum of squares of image data values of pixels in the first rectangular region in the search image. Normalized correlation coefficient calculating means calculate a normalized correlation coefficient on the basis of the sum of image data values of pixels in the template image and the sum of image data values of pixels in the first rectangular region in the search image, or the sum of squares of image data values of pixels in the template image and the sum of squares of image data values of pixels in the first rectangular region in the search image.

Abstract translation: 一种用于计算通过使用模板图像中的像素的图像数据值和相应于模板图像的包括在搜索图像中的子图像中的像素的图像数据值而用作相似性评估度量的归一化相关系数的装置，具有存储器 其存储搜索图像中的像素的图像数据值;以及计算装置，其计算模板图像中的像素的图像数据值的和和搜索图像中的第一矩形区域中的像素的图像数据值之和，或者 模板图像中的像素的图像数据值的平方和搜索图像中的第一矩形区域中的像素的图像数据值的平方和。 归一化相关系数计算装置基于模板图像中的像素的图像数据值之和和搜索图像中的第一矩形区域中的像素的图像数据值之和或平方和来计算归一化相关系数 的模板图像中的像素的图像数据值和搜索图像中的第一矩形区域中的像素的图像数据值的平方和。

公开(公告)号：US5339381A

公开(公告)日：1994-08-16

申请号：US033751

申请日：1993-03-18

Applicant: Mitsuji Ikeda ,  Ryoichi Mine ,  Masayuki Nozaki ,  Tadashi Sugiura

Inventor： Mitsuji Ikeda ,  Ryoichi Mine ,  Masayuki Nozaki ,  Tadashi Sugiura

IPC: B29C70/84 ,  G02B6/36 ,  G02B6/44

CPC classification number: G02B6/442 ,  B29C70/84 ,  B29L2031/3412 ,  G02B6/3644

Abstract: An optical fiber composite insulator includes an insulator body in which a through hole having a substantially radially circular cross section is provided, a plurality of optical fibers passed through the through hole, and an organic insulating material gas-tightly sealing the optical fibers in the through hole, wherein a diameter of the through hole is not more than 13 mm, the optical fibers are located inside a hypothetical circle drawn on any plane orthogonal to an axis of the through hole and having a center coaxial with that of the through hole, the hypothetical circle having a diameter equal to 95% of that of the through hole, and a distance between any optical fibers is set at not less than 0.1 mm.

Abstract translation: 一种光纤复合绝缘体包括：绝缘体，其中设置有具有大致圆形横截面的通孔，穿过所述通孔的多根光纤，以及将所述光纤气密地密封在所述通孔中的有机绝缘材料 其中，所述通孔的直径不大于13mm，所述光纤位于与所述通孔的与所述通孔的轴正交的任意平面上的假想圆的内侧，并且与所述通孔的中心同轴， 假想圆的直径等于通孔的95％，任何光纤之间的距离设定为不小于0.1mm。

公开(公告)号：US5329532A

公开(公告)日：1994-07-12

申请号：US755837

申请日：1991-09-06

Applicant: Mitsuji Ikeda ,  Kazumi Hatayama ,  Terumine Hayashi

Inventor： Mitsuji Ikeda ,  Kazumi Hatayama ,  Terumine Hayashi

IPC: G01R31/28 ,  G01R31/3185 ,  H04B17/00

CPC classification number: G01R31/318541 ,  G01R31/31858

Abstract: The first and second flip-flop circuits are connected in series included within a combinational logic for carrying out a delay test. The first and second flip-flop circuits are provided with control pins, system clock pins, scan clock pins, system data pins and scan data pins, respectively. A delay time propagated from the first flip-flop circuit to the second flip-flop circuit through the path of the combinational logic to be tested is measured by detecting an input time to the first flip-flop circuit by the system clock signal to the first flip-flop circuit in response to an input signal to the control pins and a time stored in the second flip-flop circuit corresponding to output system data from the first flip-flop circuit. By measuring the delay time, whether the combinational logic is normal or abnormal is detected.

Abstract translation: 第一和第二触发器电路串联连接在用于进行延迟测试的组合逻辑中。 第一和第二触发器电路分别具有控制引脚，系统时钟引脚，扫描时钟引脚，系统数据引脚和扫描数据引脚。 通过检测到第一触发器电路的输入时间，通过系统时钟信号检测到第一触发器电路的第一触发器电路到第一触发器电路的第一触发器电路 触发器电路响应于对控制引脚的输入信号以及与第一触发器电路的输出系统数据相对应的存储在第二触发器电路中的时间。 通过测量延迟时间，检测组合逻辑是正常还是异常。

公开(公告)号：US08971627B2

公开(公告)日：2015-03-03

申请号：US13696260

申请日：2011-03-17

Applicant: Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

Inventor： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa ,  Wataru Nagatomo

IPC: G06K9/00 ,  G06K9/62 ,  G01B11/00 ,  G01B15/00 ,  G06T7/00 ,  H01L21/66

CPC classification number: G06K9/6201 ,  G01B11/00 ,  G01B15/00 ,  G06K9/6202 ,  G06T7/001 ,  G06T7/74 ,  G06T2207/30148 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The present invention is a template matching processing device capable of evaluating a similarity degree which supports even a case of intensive morphological change between a design image and a photographic image. In the template matching processing device, matching processing between the design image and the photographic image is performed, a partial design image is obtained by clipping a portion having the highest correlation (step 101), and processing for deforming the photographic image in accordance with the clipped design image (steps 102 to 105) is performed, so that correlation between the deformed image obtained and the design image is taken to be set as the similarity degree.

Abstract translation: 本发明是一种模拟匹配处理装置，其能够评价即使在设计图像和摄影图像之间形成密集的情况的情况下也能够支持的相似度。 在模板匹配处理装置中，进行设计图像与摄影图像之间的匹配处理，通过剪切具有最高相关性的部分（步骤101）获得部分设计图像，以及根据 执行剪辑设计图像（步骤102至105），使得获得的变形图像与设计图像之间的相关性被设置为相似度。

公开(公告)号：US20140023265A1

公开(公告)日：2014-01-23

申请号：US13981963

申请日：2011-12-07

Applicant: Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

Inventor： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01L22/12

Abstract: It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.

Abstract translation: 本发明的目的是提供一种半导体检查装置，即使被检查的图像是图像，也能够良好地执行位置对准并且正确地确定位置对准是否已经成功地执行或者在没有操作者干预的情况下已经结束 具有与重复图案的情况相同的特性，或被检查图像是具有复杂形状的图像。 半导体检查装置包括用于对晶片或曝光掩模上的形状进行成像的装置; 用于存储由成像装置检查的图像的装置; 用于存储对应于要由成像装置成像的晶片或曝光掩模上的位置的半导体电路的设计数据的装置; 用于存储作为将设计数据转换为图像而获得的设计数据图像的装置; 用于通过将从所述设计数据图像中包含的形状的相对粗密度关系中找到的兴趣绘制区域转换为图像来生成设计数据ROI图像的装置; 以及位置对准部，被配置为在被检查图像和设计数据图像上执行位置对准。 半导体检查装置利用设计数据ROI图像来识别被检查图像和设计数据图像彼此匹配的位置或计算符合度。

公开(公告)号：US20140016824A1

公开(公告)日：2014-01-16

申请号：US14005913

申请日：2011-11-09

Applicant: Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

Inventor： Jun'ichi Taguchi ,  Mitsuji Ikeda ,  Yuichi Abe ,  Masahiro Kitazawa

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06K9/3275

Abstract: An evaluation value indicative of the extent of lines in each direction is calculated for a pre-processed image in which 0s are filled in and extended in the lateral direction of the inputted image and which has been reduced ⅛th in the longitudinal direction. To obtain the angle of rotation of an image from the change in the evaluation value obtained while the angle relative to the lateral direction of the pre-processed image is modified in small steps, a parallel line is drawn for each direction, a projection is taken, and the sum of squares serves as the evaluation value of the direction. The direction having the highest evaluation value serves as the obtained direction of rotation from the normal position. The projection of each direction references the point of intersection between the parallel line drawn for each direction and the coordinate line of the horizontal axis.

Abstract translation: 对于其中0被填充并在输入图像的横向方向上延伸并且在纵向方向上减少1/8的预处理图像来计算指示每个方向的行程度的评估值。 为了在以小步骤修改相对于预处理图像的横向方向的角度获得的评估值的变化中获得图像的旋转角度，对于每个方向绘制平行线，进行投影 ，并且平方和作为方向的评价值。 具有最高评估值的方向用作从正常位置获得的旋转方向。 每个方向的投影参考在每个方向绘制的平行线与水平轴的坐标线之间的交点。

公开(公告)号：US08305435B2

公开(公告)日：2012-11-06

申请号：US12053287

申请日：2008-03-21

Applicant: Yoshimichi Sato ,  Mitsuji Ikeda ,  Fumihiro Sasajima

Inventor： Yoshimichi Sato ,  Mitsuji Ikeda ,  Fumihiro Sasajima

IPC: H04N7/18 ,  H04N9/47 ,  G01N23/00 ,  G21K7/00 ,  G06K9/62

CPC classification number: G06T7/74 ,  G06T7/73 ,  G06T2207/30148

Abstract: The present invention achieves the process of easily registering a template which is prepared for a size change in pattern matching for specifying a measurement point, and high-speed pattern matching by which adequate position accuracy can be obtained in measurement. The present invention includes means for automatically calculating the size and position of a positioning template different from a measurement point itself when the measurement point is designated, to display a template having the calculated size and position. The present invention further includes means for performing pattern matching by using all or some of a plurality of divided templates and extracting templates having a similar positional relationship to the original positional relationship.

Abstract translation: 本发明实现了为了指定测量点而进行模式匹配中的尺寸变化准备的模板的容易登记以及在测量中可以获得足够的位置精度的高速模式匹配的处理。 本发明包括当指定测量点时自动计算与测量点本身不同的定位模板的尺寸和位置的装置，以显示具有计算的尺寸和位置的模板。 本发明还包括通过使用多个划分的模板中的全部或一些来提取与原始位置关系具有相似位置关系的模板来执行模式匹配的装置。

公开(公告)号：US08285056B2

公开(公告)日：2012-10-09

申请号：US12401848

申请日：2009-03-11

Applicant: Junichi Taguchi ,  Mitsuji Ikeda ,  Osamu Komuro ,  Akiyuki Sugiyama

Inventor： Junichi Taguchi ,  Mitsuji Ikeda ,  Osamu Komuro ,  Akiyuki Sugiyama

IPC: G06K9/46

CPC classification number: G06T7/001 ,  G06K9/6206 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A matching degree computing apparatus is provided for comparing an input image and an object template image and computing a matching degree between an input image and an object template image based on the compared result. The computing apparatus includes a transforming unit for transforming the input image so as to be matched to the template object region and a computing unit for computing a matching degree between the transformed input image and the template image. The transforming unit provides a shaping unit for shaping a non-background region to the form of the template object region in the object corresponding region of the input image and a processing unit for arranging the non-background region contacting with the template object corresponding region so that the non-background region has no substantial impact on the matching degree in the object non-corresponding region of the input image.

Abstract translation: 提供了一种匹配度计算装置，用于比较输入图像和对象模板图像，并且基于比较结果计算输入图像和对象模板图像之间的匹配度。 计算装置包括：变换单元，用于变换输入图像以与模板对象区域匹配;以及计算单元，用于计算变换后的输入图像与模板图像之间的匹配度。 变换单元提供一个成形单元，用于将非背景区域形成为输入图像的对象对应区域中的模板对象区域的形式;以及处理单元，用于布置与模板对象对应区域接触的非背景区域 非背景区域对输入图像的对象非对应区域中的匹配度没有实质影响。

公开(公告)号：US20120207397A1

公开(公告)日：2012-08-16

申请号：US13502823

申请日：2010-10-06

Applicant: Wataru Nagatomo ,  Yuichi Abe ,  Mitsuji Ikeda

Inventor： Wataru Nagatomo ,  Yuichi Abe ,  Mitsuji Ikeda

IPC: G06K9/68

CPC classification number: G06K9/6203 ,  G06K9/6253 ,  G06K9/6255 ,  G06K9/6857 ,  G06T7/74 ,  G06T2207/10061 ,  G06T2207/20016 ,  G06T2207/30148 ,  H01J2237/221 ,  H01J2237/226

Abstract: Provided is a template matching method and a template matching apparatus, where the degree of matching between a template and the actual image upon template matching is maintained at a high level, without depending on a partial appearance of a lower layer. Proposed as one embodiment, is a method and an apparatus for template matching, where either an area is set in which comparison of the template and the image is not conducted, or a second area is set inside the template where comparison different from comparison conducted in a first comparison area is to be conducted, and the template matching is conducted on the basis either of comparison excluding the non-comparison area, or of comparison using the first and second areas.

Abstract translation: 提供了一种模板匹配方法和模板匹配装置，其中模板匹配之间的模板和实际图像之间的匹配程度保持在高水平，而不依赖于较低层的部分外观。 作为一个实施例，提出了一种用于模板匹配的方法和装置，其中设置了不进行模板和图像的比较的区域，或者在模板内部设置第二区域，其中比较不同于进行比较 将进行第一比较区域，并且基于除非比较区域之外的比较或使用第一和第二区域的比较进行模板匹配。

公开(公告)号：US20090295914A1

公开(公告)日：2009-12-03

申请号：US12053287

申请日：2008-03-21

Applicant: Yoshimichi SATO ,  Mitsuji IKEDA ,  Fumihiro SASAJIMA

Inventor： Yoshimichi SATO ,  Mitsuji IKEDA ,  Fumihiro SASAJIMA

IPC: H04N7/18 ,  G06K9/00

CPC classification number: G06T7/74 ,  G06T7/73 ,  G06T2207/30148

Abstract: The present invention achieves the process of easily registering a template which is prepared for a size change in pattern matching for specifying a measurement point, and high-speed pattern matching by which adequate position accuracy can be obtained in measurement. The present invention includes means for automatically calculating the size and position of a positioning template different from a measurement point itself when the measurement point is designated, to display a template having the calculated size and position. The present invention further includes means for performing pattern matching by using all or some of a plurality of divided templates and extracting templates having a similar positional relationship to the original positional relationship.

Abstract translation: 本发明实现了为了指定测量点而进行模式匹配中的尺寸变化准备的模板的容易登记以及在测量中可以获得足够的位置精度的高速模式匹配的处理。 本发明包括当指定测量点时自动计算与测量点本身不同的定位模板的尺寸和位置的装置，以显示具有计算的尺寸和位置的模板。 本发明还包括通过使用多个划分的模板中的全部或一些来提取与原始位置关系具有相似位置关系的模板来执行模式匹配的装置。