Fixture for deposition
    12.
    发明授权
    Fixture for deposition 失效
    夹具用于沉积

    公开(公告)号:US5589000A

    公开(公告)日:1996-12-31

    申请号:US524340

    申请日:1995-09-06

    CPC classification number: C23C14/50 C23C14/541

    Abstract: A fixture and method for use in deposition of a material over a substrate make use of an apparatus for actively heating and cooling the substrate during the deposition process. The active heating and cooling structure enables careful control of the temperature of the substrate, and can provide rapid temperature adjustment in response to temperature variation. The fixture and method are thereby capable of accelerating the overall deposition process. The fixture and method also make use of structure for reducing warpage in the fixture during the deposition process due to thermal gradients. By reducing the susceptibility of the fixture to warpage and providing improved temperature control, the fixture and method enable fabrication of layers with more consistent characteristics.

    Abstract translation: 用于在衬底上沉积材料的夹具和方法利用用于在沉积工艺期间主动加热和冷却衬底的装置。 主动的加热和冷却结构可以仔细地控制基板的温度,并且可以根据温度变化提供快速的温度调节。 因此,夹具和方法能够加速整个沉积工艺。 夹具和方法还利用由于热梯度在沉积过程中减少夹具中的翘曲的结构。 通过降低夹具对翘曲的敏感性并提供改进的温度控制,夹具和方法能够制造具有更一致特征的层。

    FEEDBLOCK FOR MANUFACTURING MULTILAYER POLYMERIC FILMS
    15.
    发明申请
    FEEDBLOCK FOR MANUFACTURING MULTILAYER POLYMERIC FILMS 有权
    用于制造多层聚合物薄膜的进料

    公开(公告)号:US20130042964A1

    公开(公告)日:2013-02-21

    申请号:US13695463

    申请日:2011-04-25

    Abstract: A feedblock including a first packet creator that forms a first packet including a first plurality of polymeric layers, the first plurality of layers including at least four first individual polymeric layers; and a second packet creator that forms a second packet including a second plurality of polymeric layers, the second plurality of layers including at least four second individual polymeric layers, wherein the first and second packet creators are configured such that, for each packet creator, respective individual polymeric layers of the plurality of polymeric layers are formed at approximately the same time. The feedblock may include a packet combiner that receives and combines the first and second primary packets to form a multilayer stream. In some examples, at least one of the first and second primary packets may be spread in the cross-web direction prior to being combined with one another.

    Abstract translation: 包括第一分组创建器的馈送块,其形成包括第一多个聚合物层的第一分组,所述第一多个层包括至少四个第一单独的聚合物层; 以及第二分组创建器,其形成包括第二多个聚合层的第二分组,所述第二多个层包括至少四个第二单独的聚合物层,其中所述第一和第二分组创建者被配置为使得对于每个分组创建者, 大致同时形成多个聚合物层的单个聚合物层。 馈送块可以包括分组组合器,其接收并组合第一和第二主分组以形成多层流。 在一些示例中,在彼此组合之前,第一和第二主要分组中的至少一个可以在横向方向上扩展。

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