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公开(公告)号：US20240118584A1
公开(公告)日：2024-04-11
申请号：US18505860
申请日：2023-11-09
Applicant: ASML Netherlands B.V.
IPC: G02F1/35 , G02B6/02 , G02F1/365 , G03F9/00 , G06F30/392 , G06F30/398 , H01S3/067
CPC classification number: G02F1/3528 , G02B6/02328 , G02F1/365 , G03F9/7034 , G06F30/392 , G06F30/398 , H01S3/06741 , G06F2119/18
Abstract: A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.
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公开(公告)号：US11846867B2
公开(公告)日：2023-12-19
申请号：US17539347
申请日：2021-12-01
Applicant: ASML NETHERLANDS B.V.
IPC: G02F1/35 , G02B6/02 , G02F1/365 , H01S3/067 , G06F30/392 , G06F30/398 , G03F9/00 , G06F119/18
CPC classification number: G02F1/3528 , G02B6/02328 , G02F1/365 , G03F9/7034 , G06F30/392 , G06F30/398 , H01S3/06741 , G06F2119/18
Abstract: A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.
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公开(公告)号：US11687009B2
公开(公告)日：2023-06-27
申请号：US17741545
申请日：2022-05-11
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel , Ronald Franciscus Herman Hugers , Jan Adrianus Boer , Edwin Johannes Cornelis Bos , Andreas Johannes Antonius Brouns , Vitaliy Prosyentsov , Paul William Scholtes-Van Eijk , Paulus Antonius Andreas Teunissen , Mahesh Upendra Ajgaonkar
CPC classification number: G03F7/70625 , G01B11/27 , G01J1/4257 , G01M11/30 , G02B1/005 , G02B6/02 , G03F7/7065 , G03F7/70525
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：US11372154B2
公开(公告)日：2022-06-28
申请号：US17128360
申请日：2020-12-21
Applicant: ASML NETHERLANDS B.V.
Inventor： Hendrik Sabert , Patrick Sebastian Uebel , Willem Richard Pongers
Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly including: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to include a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.
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公开(公告)号：US20220187680A1
公开(公告)日：2022-06-16
申请号：US17539347
申请日：2021-12-01
Applicant: ASML NETHERLANDS B.V.
IPC: G02F1/35 , G02B6/02 , G02F1/365 , G03F9/00 , G06F30/398 , G06F30/392 , H01S3/067
Abstract: A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.
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Patent Agency Ranking
公开(公告)号：US20210199885A1
公开(公告)日：2021-07-01
申请号：US17190474
申请日：2021-03-03
Applicant: ASML NETHERLANDS B.V
Inventor： Hendrik Sabert , Patrick Sebastian Uebel
IPC: G02B6/02 , G01K11/3206
Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.
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17.发明申请公开(公告)号：US20210063893A1
公开(公告)日：2021-03-04
申请号：US16983264
申请日：2020-08-03
Applicant: ASML NETHERLANDS B.V.
Inventor： Andrey NIKIPELOV , Patrick Sebastian Uebel , Amir Abdolvand , Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Natallia Eduardauna Uzunbajakava
IPC: G03F7/20
Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.
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公开(公告)号：US11774828B2
公开(公告)日：2023-10-03
申请号：US17307217
申请日：2021-05-04
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02F1/3528 , G03F9/7034 , H01S3/0057 , H01S3/06741
Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
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19.发明授权公开(公告)号：US11754906B2
公开(公告)日：2023-09-12
申请号：US18093717
申请日：2023-01-05
Applicant: ASML Netherlands B.V.
CPC classification number: G02F1/353 , G02F1/3501 , G02F1/365 , G02F1/3503 , G02F1/3528
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
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公开(公告)号：US11703634B2
公开(公告)日：2023-07-18
申请号：US17836537
申请日：2022-06-09
Applicant: ASML NETHERLANDS B.V.
CPC classification number: G02B6/02328 , G02B6/02366 , G03F7/70008 , G01B11/25
Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.
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