公开(公告)号：US08481981B2

公开(公告)日：2013-07-09

申请号：US12312203

申请日：2007-10-30

申请人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle ,  Jiro Matsuo ,  Toshio Seki

发明人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle ,  Jiro Matsuo ,  Toshio Seki

IPC分类号： G21K5/04

CPC分类号： H01L21/3065 ,  H01J2237/0812 ,  H01J2237/202 ,  H01J2237/3151

摘要： Surface roughness having intervals of several tens of nanometers to about a hundred micrometers in a solid surface is reduced by directing a gas cluster ion beam to the surface. An angle formed between the normal to the solid surface and the gas cluster ion beam is referred to as an irradiation angle, and an irradiation angle at which the distance of interaction between the solid and the cluster colliding with the solid dramatically increases is referred to as a critical angle. A solid surface smoothing method includes an irradiation step of directing the gas cluster ion beam onto the solid surface at an irradiation angle not smaller than the critical angle. The critical angle is 70°.

摘要翻译： 通过将气体团簇离子束引导到表面，在固体表面中具有数十纳米至约百微米间隔的表面粗糙度被减小。 被称为固体表面和气体团簇离子束的法线之间的角度被称为照射角度，并且固体和团簇与固体之间的相互作用距离急剧增加的照射角度被称为 一个临界角。 固体表面平滑化方法包括将气体团簇离子束以不小于临界角的照射角度引导到固体表面的照射步骤。 临界角为70°。

公开(公告)号：US20090305507A1

公开(公告)日：2009-12-10

申请号：US12312266

申请日：2007-10-30

申请人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle ,  Jiro Matsuo ,  Toshio Seki

发明人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle ,  Jiro Matsuo ,  Toshio Seki

IPC分类号： H01L21/308 ,  H01L21/302

CPC分类号： H01L21/3083 ,  H01J2237/0812 ,  H01L21/3065

摘要： A solid surface is processed while corner portions of a relief structure are protected from deformation. A method of processing a solid surface with a gas cluster ion beam includes a cluster protection layer formation step of forming, on the solid surface, a relief structure having protrusions with a cluster protection layer formed to cover an upper part thereof and recesses without the cluster protection layer; an irradiation step of emitting a gas cluster ion beam onto the solid surface having the relief structure formed in the cluster protection layer formation step; and a removal step of removing the cluster protection layer. A thickness T of the cluster protection layer satisfies T > nY + ( b 2  Y 2  n - nY 2  ( b 4 - 16  a 2 ) 1 2 2 ) 1 2 , where n is a dose of the gas cluster ion beam, and Y is an etching efficiency of the cluster protection layer, expressed as an etching volume per cluster (a and b are constants).

摘要翻译： 处理浮雕结构的角部以防止变形的实心表面。 用气体簇离子束处理固体表面的方法包括：簇保护层形成步骤，在固体表面上形成具有突起的浮雕结构，所述突起具有形成为覆盖其上部的簇保护层和没有簇的凹部 保护层; 在所述簇保护层形成工序中形成有具有所述浮雕结构的固体表面上的气体簇离子束的照射工序; 以及去除簇保护层的去除步骤。 簇保护层的厚度T满足T> nY +（b 2 y 2 n n n 2（b 4 - 16 a a 2）1 2 2）1 2，其中n是气体簇的剂量 离子束，Y是簇保护层的蚀刻效率，表示为每簇的蚀刻体积（a和b是常数）。

公开(公告)号：US20060017636A1

公开(公告)日：2006-01-26

申请号：US11155728

申请日：2005-06-16

申请人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

发明人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

IPC分类号： H01Q19/06

CPC分类号： H01Q13/28 ,  H01Q21/28

摘要： A direction-change element for changing the direction of travel of an incident electromagnetic wave and electromagnetic wave transmitting/receiving elements are disposed on a substrate. The direction-change element has a periodic array of materials of different refractive indexes arranged in parallel to the substrate surface. The electromagnetic wave transmitting/receiving elements are positioned at opposite ends of the periodic array in the direction of its arrangement. The output ratio between the two electromagnetic wave transmitting/receiving elements can be used to detect the incidence angle of the electromagnetic wave with high accuracy. By changing the relative intensity of electromagnetic waves to be sent from the two electromagnetic wave transmitting/receiving elements, it is possible to achieve high-accuracy control of the angle of emittance of the electromagnetic wave to be sent from the device. Accordingly, the present invention offers a small, low-profile electromagnetic wave transmitting/receiving device capable of detecting and radiating electromagnetic waves with high accuracy of their incidence and emittance angles.

摘要翻译： 用于改变入射电磁波的行进方向的方向转换元件和电磁波发射/接收元件设置在基片上。 方向变化元件具有平行于衬底表面布置的不同折射率的材料的周期性阵列。 电磁波发射/接收元件沿其排列方向定位在周期性阵列的相对端。 两个电磁波发射/接收元件之间的输出比可用于高精度地检测电磁波的入射角。 通过改变从两个电磁波发射/接收元件发送的电磁波的相对强度，可以实现从装置发送的电磁波的发射角的高精度控制。 因此，本发明提供一种能够以其入射角和发射角度的高精度检测和辐射电磁波的小型低调电磁波发射/接收装置。

公开(公告)号：US07375696B2

公开(公告)日：2008-05-20

申请号：US11155728

申请日：2005-06-16

申请人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

发明人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

IPC分类号： H01Q15/02 ,  H01Q19/06

CPC分类号： H01Q13/28 ,  H01Q21/28

摘要： A direction-change element for changing the direction of travel of an incident electromagnetic wave and electromagnetic wave transmitting/receiving elements are disposed on a substrate. The direction-change element has a periodic array of materials of different refractive indexes arranged in parallel to the substrate surface. The electromagnetic wave transmitting/receiving elements are positioned at opposite ends of the periodic array in the direction of its arrangement. The output ratio between the two electromagnetic wave transmitting/receiving elements can be used to detect the incidence angle of the electromagnetic wave with high accuracy. By changing the relative intensity of electromagnetic waves to be sent from the two electromagnetic wave transmitting/receiving elements, it is possible to achieve high-accuracy control of the angle of emittance of the electromagnetic wave to be sent from the device. Accordingly, the present invention offers a small, low-profile electromagnetic wave transmitting/receiving device capable of detecting and radiating electromagnetic waves with high accuracy of their incidence and emittance angles.

摘要翻译： 用于改变入射电磁波的行进方向的方向转换元件和电磁波发射/接收元件设置在基片上。 方向变化元件具有平行于衬底表面布置的不同折射率的材料的周期性阵列。 电磁波发射/接收元件沿其排列方向定位在周期性阵列的相对端。 两个电磁波发射/接收元件之间的输出比可用于高精度地检测电磁波的入射角。 通过改变从两个电磁波发射/接收元件发送的电磁波的相对强度，可以实现从装置发送的电磁波的发射角的高精度控制。 因此，本发明提供一种能够以其入射角和发射角度的高精度检测和辐射电磁波的小型低调电磁波发射/接收装置。

公开(公告)号：US07269310B2

公开(公告)日：2007-09-11

申请号：US11369356

申请日：2006-03-06

申请人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle

发明人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle

IPC分类号： G02B6/26

CPC分类号： G02B6/1225 ,  B82Y20/00 ,  G02B6/30

摘要： An optical connector used for inputting light to an optical element from an external optical system or outputting light from an optical element to an external optical system includes a photonic crystal having a periodic refractive index structure, and an optical waveguide to be optically coupled to the optical element and a region in which a plurality of defects are formed at intervals equal to or less than four times the refractive index period a of the photonic crystal are formed in the photonic crystal. The region has a size equal to or greater than the wavelength of the light input from the external optical system or the wavelength of the light output to the external optical system, and the external optical system and the optical waveguide are optically coupled to each other via the region. The optical connector has an improved optical coupling efficiency, can achieve optical coupling of a plurality of light components of different wavelengths, and can readily achieve alignment.

摘要翻译： 用于从外部光学系统向光学元件输入光或将光从光学元件输出到外部光学系统的光学连接器包括具有周期性折射率结构的光子晶体和光学耦合到光学 元素和在光子晶体中形成等于或小于光子晶体的折射率周期a的四倍的间隔形成多个缺陷的区域。 该区域具有等于或大于从外部光学系统输入的光的波长或输出到外部光学系统的光的波长的大小，并且外部光学系统和光学波导通过彼此经由 该区域。 光连接器具有改进的光耦合效率，可以实现多个不同波长的光分量的光耦合，并且可以容易地实现对准。

公开(公告)号：US20060291780A1

公开(公告)日：2006-12-28

申请号：US11473090

申请日：2006-06-21

申请人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

发明人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

IPC分类号： G02B6/26

CPC分类号： B82Y20/00 ,  G02B6/1225 ,  G02B6/1226

摘要： An optical element includes: a conductive film having a through opening and a periodic uneven structure (grooves) formed in a surface thereof, and a photonic crystal. The grooves are formed around the through opening, the photonic crystal has an optical waveguide and a defect structure (point defect) optically coupled to the optical waveguide formed therein, the conductive film is disposed opposite to the photonic crystal, and the through opening is opposite to the point defect.

摘要翻译： 光学元件包括：导电膜，其具有通孔和在其表面形成的周期性不均匀结构（凹槽）和光子晶体。 凹槽形成在通孔周围，光子晶体具有与形成在其中的光波导光学耦合的光波导和缺陷结构（点缺陷），导电膜设置为与光子晶体相对，并且通孔相对 到点缺陷。

公开(公告)号：US07245808B2

公开(公告)日：2007-07-17

申请号：US11473090

申请日：2006-06-21

申请人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

发明人： Akinobu Sato ,  Akiko Suzuki ,  Emmanuel Bourelle

IPC分类号： G02B6/10

CPC分类号： B82Y20/00 ,  G02B6/1225 ,  G02B6/1226

摘要： An optical element includes: a conductive film having a through opening and a periodic uneven structure (grooves) formed in a surface thereof; and a photonic crystal. The grooves are formed around the through opening, the photonic crystal has an optical waveguide and a defect structure (point defect) optically coupled to the optical waveguide formed therein, the conductive film is disposed opposite to the photonic crystal, and the through opening is opposite to the point defect.

摘要翻译： 光学元件包括：导电膜，其具有在其表面上形成的通孔和周期性不均匀的结构（凹槽）; 和光子晶体。 凹槽形成在通孔周围，光子晶体具有与形成在其中的光波导光学耦合的光波导和缺陷结构（点缺陷），导电膜设置为与光子晶体相对，并且通孔相对 到点缺陷。

公开(公告)号：US20060204173A1

公开(公告)日：2006-09-14

申请号：US11369356

申请日：2006-03-06

申请人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle

发明人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle

IPC分类号： G02B6/26

CPC分类号： G02B6/1225 ,  B82Y20/00 ,  G02B6/30

摘要： An optical connector used for inputting light to an optical element from an external optical system or outputting light from an optical element to an external optical system includes a photonic crystal having a periodic refractive index structure, and an optical waveguide to be optically coupled to the optical element and a region in which a plurality of defects are formed at intervals equal to or less than four times the refractive index period a of the photonic crystal are formed in the photonic crystal. The region has a size equal to or greater than the wavelength of the light input from the external optical system or the wavelength of the light output to the external optical system, and the external optical system and the optical waveguide are optically coupled to each other via the region. The optical connector has an improved optical coupling efficiency, can achieve optical coupling of a plurality of light components of different wavelengths, and can readily achieve alignment.

摘要翻译： 用于从外部光学系统向光学元件输入光或将光从光学元件输出到外部光学系统的光学连接器包括具有周期性折射率结构的光子晶体和光学耦合到光学 元素和在光子晶体中形成等于或小于光子晶体的折射率周期a的四倍的间隔形成多个缺陷的区域。 该区域具有等于或大于从外部光学系统输入的光的波长或输出到外部光学系统的光的波长的大小，并且外部光学系统和光学波导通过彼此经由 该区域。 光连接器具有改进的光耦合效率，可以实现多个不同波长的光分量的光耦合，并且可以容易地实现对准。

公开(公告)号：US20050218328A1

公开(公告)日：2005-10-06

申请号：US11073370

申请日：2005-03-04

申请人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle

发明人： Akiko Suzuki ,  Akinobu Sato ,  Emmanuel Bourelle

IPC分类号： G01J1/02 ,  G01J1/04 ,  G01J5/02 ,  G01J5/08 ,  G01J5/12 ,  G01J5/14 ,  H01L27/14 ,  H01L35/32

CPC分类号： G01J5/12 ,  G01J5/02 ,  G01J5/022 ,  G01J5/024 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0818 ,  G01J5/0853 ,  G01J5/0884

摘要： An infrared sensor which is provided with an infrared detector 43 for converting infrared light to an electric signal and an optical element 44 for guiding the infrared light to the infrared detector 43, and in which the optical element 44 is a planar optical waveguide provided with a diffraction grating and is formed on a substrate 41 side by side with the infrared detector 43. The infrared light incident on the optical element 44 from a direction vertical to the substrate surface is deflected and guided by the optical element 44 in parallel to the substrate surface for incidence on the infrared detector 43. The infrared sensor is small in size, highly sensitive, fast in responsivity, and easy to manufacture.

摘要翻译： 一种红外线传感器，其具有用于将红外光转换成电信号的红外检测器43和用于将红外光引导到红外线检测器43的光学元件44，其中，光学元件44是设置有 并且与红外线检测器43并列地形成在基板41上。 从垂直于基板表面的方向入射到光学元件44上的红外光被光学元件44偏转并被引导，平行于基板表面入射到红外检测器43上。 红外传感器尺寸小，灵敏度高，响应速度快，易于制造。

公开(公告)号：US08683901B2

公开(公告)日：2014-04-01

申请号：US12878403

申请日：2010-09-09

申请人： Akinobu Sato ,  Akiko Suzuki ,  Takeshi Kawano

发明人： Akinobu Sato ,  Akiko Suzuki ,  Takeshi Kawano

IPC分类号： B26F1/14

CPC分类号： B21D37/205 ,  B21D37/20 ,  B23K15/08 ,  B26D7/088 ,  B26F1/14 ,  C23F4/00 ,  G21K5/02 ,  Y10T83/263 ,  Y10T83/929 ,  Y10T83/9437

摘要： To enable fabrication of a precise stamped product having an extremely low surface roughness. Ripples 24 having depths ranging from 10 to 100 nm are formed with periodicities ranging from 100 to 1000 nm on a stamping tool surface that comes into contact with a workpiece material. The ripples 24 have a stripe shape extending in a direction substantially perpendicular to the direction of sliding between the stamping tool (die 21) and the workpiece material (the direction of the arrow a). The ripples 24 serve as micro pools. For example, a product that is required to have a surface roughness of the order of several tens of nm or lower can be satisfactorily stamped.

摘要翻译： 为了制造具有极低表面粗糙度的精密冲压产品。 在与工件材料接触的冲压工具表面上形成深度范围为10至100nm的波纹24，周期范围为100至1000nm。 波纹24具有在与冲压工具（模具21）和工件材料（箭头a的方向）之间的滑动方向基本垂直的方向上延伸的条纹形状。 波纹24作为微池。 例如，可以令人满意地冲压要求具有几十nm以下的表面粗糙度的产品。