公开(公告)号：US07605381B2

公开(公告)日：2009-10-20

申请号：US10734261

申请日：2003-12-15

申请人： Mitsugu Sato ,  Tadashi Otaka ,  Makoto Ezumi ,  Atsushi Takane ,  Shoji Yoshida ,  Satoru Yamaguchi ,  Yasuhiko Ozawa

发明人： Mitsugu Sato ,  Tadashi Otaka ,  Makoto Ezumi ,  Atsushi Takane ,  Shoji Yoshida ,  Satoru Yamaguchi ,  Yasuhiko Ozawa

IPC分类号： H01L21/027

CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/153

摘要： An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.

公开(公告)号：US20090050805A1

公开(公告)日：2009-02-26

申请号：US12250763

申请日：2008-10-14

申请人： Hirohiko Kitsuki ,  Kazuo Aoki ,  Mitsugu Sato

发明人： Hirohiko Kitsuki ,  Kazuo Aoki ,  Mitsugu Sato

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/263 ,  H01J2237/21 ,  H01J2237/2487 ,  H01J2237/2809

摘要： A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of convergence lenses is changed by changing the convergence lenses and the hole diameter of a diaphragm. The angle α of aperture of the electron beam is changed in accordance with the visual field range corresponding to a single pixel, i.e. what is called the pixel size.

摘要翻译： 公开了一种用于数字处理图像信号以确保最大焦深和根据观察放大率的最佳分辨率的扫描电子显微镜。 具有多个会聚透镜的光学系统的光圈角度通过改变会聚透镜和光阑的孔径而改变。 根据与单个像素对应的视场范围，即所谓的像素大小，改变电子束的孔径的角度α。

公开(公告)号：US07491933B2

公开(公告)日：2009-02-17

申请号：US11234300

申请日：2005-09-26

申请人： Mitsugu Sato ,  Hideo Todokoro

发明人： Mitsugu Sato ,  Hideo Todokoro

IPC分类号： G01N23/00 ,  G21K7/00 ,  H01J3/14

CPC分类号： H01J37/1474 ,  H01J37/05 ,  H01J37/153 ,  H01J2237/1536 ,  H01J2237/2817

摘要： An electron beam (4) to be irradiated onto a sample (10) is two-dimensionally scanned by a scanning coil (9), and secondary electrons generated from the sample (10) by the scanning are detected by a secondary electron detector (13). A deflection coil (15) for image shifting is used for electrically deflecting the primary electron beam to shift a field of view for image shift in an arbitrary direction by an arbitrary amount. By the image shift, the primary electron beam (4) to be irradiated onto the sample is energy dispersed to degrade the resolution. However, an E×B field producer (30) for dispersion control gives the primary electron beam energy dispersion in the opposite direction and having the equal magnitude. Therefore, the energy dispersion produced in the primary electron beam by the image shift is automatically corrected.

摘要翻译： 通过扫描线圈（9）对被照射到样品（10）上的电子束（4）进行二维扫描，用二次电子检测器（13）检测从样品（10）通过扫描产生的二次电子 ）。 用于图像偏移的偏转线圈（15）用于使一次电子束电偏转以使任意方向上的图像偏移的视场移动任意量。 通过图像偏移，待照射到样品上的一次电子束（4）能量分散以降低分辨率。 然而，用于色散控制的ExB场生成器（30）给出相反方向上的一次电子束能量色散并且具有相等的幅度。 因此，通过图像偏移在一次电子束中产生的能量色散被自动校正。

公开(公告)号：US20080272300A1

公开(公告)日：2008-11-06

申请号：US12155347

申请日：2008-06-03

申请人： Yuko Sasaki ,  Mitsugu Sato

发明人： Yuko Sasaki ,  Mitsugu Sato

IPC分类号： G01N23/00

CPC分类号： H01J37/265 ,  G01N23/2251 ,  H01J2237/043 ,  H01J2237/049 ,  H01J2237/28

摘要： When conditions for an electron gun mainly represented by extraction voltage V1 and accelerating voltage V0 are changed, a charged particle beam is once focused on a fixed position by means of a condenser lens and a virtual cathode position is calculated from a lens excitation of the condenser lens at that time and the mechanical positional relation of the electron gun to set an optical condition. For more accurate setting of the optical condition, a deflecting electrode device is provided at a crossover position of the condenser lens and a voltage is applied to the deflecting electrode device at a constant period so as to control the lens excitation of the condenser lens such that the amount of movement of an image is minimized on an image display unit such as CRT.

摘要翻译： 当主要由提取电压V 1和加速电压V 0表示的电子枪的条件改变时，通过聚光透镜将带电粒子束一次聚焦在固定位置，并且从透镜激发计算虚拟阴极位置 此时的聚光透镜和电子枪的机械位置关系来设定光学条件。 为了更精确地设置光学条件，在聚光透镜的交叉位置处设置偏转电极装置，并且将电压以恒定周期施加到偏转电极装置，以便控制聚光透镜的透镜激发，使得 在诸如CRT的图像显示单元上图像的移动量​​最小化。

公开(公告)号：US07442929B2

公开(公告)日：2008-10-28

申请号：US11397812

申请日：2006-04-05

申请人： Hirohiko Kitsuki ,  Kazuo Aoki ,  Mitsugu Sato

发明人： Hirohiko Kitsuki ,  Kazuo Aoki ,  Mitsugu Sato

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/263 ,  H01J2237/21 ,  H01J2237/2487 ,  H01J2237/2809

摘要： A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of convergence lenses is changed by changing the convergence lenses and the hole diameter of a diaphragm. The angle α of aperture of the electron beam is changed in accordance with the visual field range corresponding to a single pixel, i.e. what is called the pixel size.

摘要翻译： 公开了一种用于数字处理图像信号以确保最大焦深和根据观察放大率的最佳分辨率的扫描电子显微镜。 具有多个会聚透镜的光学系统的光圈角度通过改变会聚透镜和光阑的孔径而改变。 根据与单个像素对应的视场范围，即所谓的像素大小，改变电子束的孔径的角度α。

公开(公告)号：US20080237465A1

公开(公告)日：2008-10-02

申请号：US12073948

申请日：2008-03-12

申请人： Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato

发明人： Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato

IPC分类号： G01N23/02

CPC分类号： G01N23/225 ,  H01J37/244 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/28

摘要： A scanning electron microscope can discriminate secondary particles in a desired energy region by band-pass and detect the secondary particles with a high yield point. Even when a lens 23 is disposed on an electron source side of an objective lens 18, and a primary electron beam forms any optical system on the electron gun side of the lens, the lens operates the primary electron beam to be converged to a convergent point 24 that is a specific position. A detection ExB 16 that supplies a field that affects the locus of the secondary particles that are generated from a specimen 2 is disposed at the convergent point 24 of the primary electron beam so as to lead only the secondary particles in a specific energy range to a detection unit 13. Because a position to which the field that affects the locus of the secondary particles is supplied is the convergent point of the primary electron beam 19, it is possible to lead only the secondary particles of the desired energy to the detection unit without enlarging the aberration of the primary electron beam 19 and also to effectively conduct the band-pass discrimination of the energy. As a result, the signal electrons according to an observation object can be discriminated and detected.

摘要翻译： 扫描电子显微镜可以通过带通来区分所需能量区域中的二次粒子，并以高屈服点检测二次粒子。 即使当透镜23设置在物镜18的电子源侧，并且一次电子束在透镜的电子枪侧形成任何光学系统时，该透镜操作一次电子束以收敛到会聚点 24这是一个具体的位置。 提供影响从样本2产生的二次粒子的轨迹的场的检测ExB 16设置在一次电子束的会聚点24处，以便仅将二次粒子在特定能量范围内引导到 检测单元13。 由于施加影响次级粒子的轨迹的场的位置是一次电子束19的会聚点，所以只能将所需能量的二次粒子引导到检测单元，而不会增大像差 一次电子束19并且还有效地进行能量的带通辨别。 结果，可以区分和检测根据观察对象的信号电子。

公开(公告)号：US20080237463A1

公开(公告)日：2008-10-02

申请号：US11987018

申请日：2007-11-26

申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

IPC分类号： G01N23/00 ,  G21K1/08

CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

公开(公告)号：US20080217535A1

公开(公告)日：2008-09-11

申请号：US12073359

申请日：2008-03-04

申请人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

发明人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

IPC分类号： G01N23/00

CPC分类号： G01N23/22 ,  H01J37/222 ,  H01J37/28

摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

公开(公告)号：US20080179536A1

公开(公告)日：2008-07-31

申请号：US12076786

申请日：2008-03-24

申请人： Mitsugu Sato ,  Makoto Ezumi ,  Satoru Yamaguchi

发明人： Mitsugu Sato ,  Makoto Ezumi ,  Satoru Yamaguchi

IPC分类号： H01J3/20 ,  H01J1/50

CPC分类号： H01J37/265 ,  H01J2237/1501 ,  H01J2237/28 ,  H01J2237/304

摘要： A charged-particle beam emitting device which includes the following configuration devices so that a lowering in the image resolution will be suppressed even if a primary beam is tilted relative to a sample: A device for causing orbit of the primary beam to pass through off-axes of a plurality of lenses, and controlling off-axis orbit of the primary beam. This device allows the aberration which occurs in the objective lens at the time of beam tilt to be cancelled out by the aberration which occurs in the other lens. Also, there is provided a device for simultaneously modulating excitations of the plurality of lenses including the objective lens.

摘要翻译： 一种带电粒子束发射装置，其包括以下配置装置，使得即使主光束相对于样本倾斜，图像分辨率的降低也将被抑制：用于使一次光束的轨道穿过关闭的装置， 多个透镜的轴，并且控制主光束的离轴轨道。 该装置允许在光束倾斜时在物镜中发生的像差由在另一个透镜中出现的像差抵消。 此外，提供了一种用于同时调制包括物镜的多个透镜的激励的装置。

公开(公告)号：US07361894B2

公开(公告)日：2008-04-22

申请号：US11501229

申请日：2006-08-09

申请人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

发明人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

IPC分类号： G01N23/22 ,  H01J37/26 ,  H01J37/28 ,  G21K7/00

CPC分类号： H01J37/28 ,  G06T5/50 ,  G06T7/30 ,  G06T2207/10056 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/226

摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

摘要翻译： 本发明的目的是提供一种在抑制由于带电粒子束的照射引起的充电的影响被抑制的情况下，能够高精度地实现视区域位移的抑制的样本图像形成方法和带电粒子束装置 。 为了实现上述目的，本发明提供一种通过在样品上扫描带电粒子束并基于从样品发射的二次信号形成图像来形成样品图像的方法，该方法包括以下步骤：形成多个 通过叠加通过多个扫描时间获得的多个图像的合成图像; 以及通过校正多个合成图像之间的位置偏移并叠加多个合成图像来形成另一个合成图像，以及用于实现上述方法的带电粒子束装置。