-
公开(公告)号：US08628268B2
公开(公告)日：2014-01-14
申请号：US12922382
申请日：2009-03-13
IPC分类号： B25B5/08
CPC分类号： H01L21/68728 , H01L21/687 , Y10T403/7005 , Y10T403/7007 , Y10T403/7041
摘要： A cam lock clamp comprises a stud having a substantially cylindrical body with a first end including a head area and a second end arranged to support one or more disc springs concentrically about the stud. A socket is arranged to mechanically couple concentrically around the stud with the head area of the stud being exposed above an uppermost portion of the socket. The socket is configured to be firmly attached to a consumable material. A camshaft has a substantially cylindrical body and is configured to mount within a bore of a backing plate. The camshaft further comprises an eccentric cutout area located in a central portion of the camshaft body. The camshaft is configured to engage and lock the head area of the stud when the consumable material and the backing plate are proximate to one another.
摘要翻译： 凸轮锁定夹具包括具有基本上圆柱形主体的螺柱，其具有包括头部区域的第一端和布置成围绕螺柱同心地支撑一个或多个盘簧的第二端。 插座布置成以同心的方式围绕螺柱共同连接，螺柱的头部区域暴露在插座的最上部分之上。 插座被配置为牢固地连接到消耗材料上。 凸轮轴具有基本上圆柱形的主体并被构造成安装在背板的孔内。 凸轮轴还包括位于凸轮轴主体的中心部分的偏心切口区域。 凸轮轴构造成当消耗材料和背板彼此靠近时接合并锁定螺柱的头部区域。
-
公开(公告)号：US08313805B2
公开(公告)日：2012-11-20
申请号：US13422696
申请日：2012-03-16
IPC分类号： C23C16/50 , C23C16/503 , C23C16/505 , C23C16/509 , C23F1/00 , C23C16/06 , C23C16/22
CPC分类号： H01J37/32532 , H01J37/32091 , H01J37/3244 , H01J37/32449 , H01J37/32541 , H01J37/32568 , H01J37/32605
摘要： An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which includes an inner electrode mechanically attached to a backing plate by a clamp ring and an outer electrode attached to the backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release cam pins extending upward from the upper face of the outer electrode. To compensate for differential thermal expansion, the clamp ring can include expansion joins at spaced locations which allow the clamp ring to absorb thermal stresses.
-
公开(公告)号：US08313665B2
公开(公告)日：2012-11-20
申请号：US12954017
申请日：2010-11-24
IPC分类号： G01L21/30 , H01L21/302
CPC分类号： H01J37/32449 , H01J37/32091 , H01J37/32541 , H01J37/3255 , H01J37/32724
摘要： Showerhead electrode assemblies are disclosed, which include a showerhead electrode adapted to be mounted in an interior of a vacuum chamber; an optional backing plate attached to the showerhead electrode; a thermal control plate attached to the backing plate or to the showerhead electrode at multiple contact points across the backing plate; and at least one thermally and electrically conductive gasket separating the backing plate and the thermal control plate, or the backing plate and showerhead electrode, at the contact points. Methods of processing semiconductor substrates using the showerhead electrode assemblies are also disclosed.
摘要翻译： 公开了一种喷头电极组件，其包括适于安装在真空室内部的喷头电极; 连接到喷头电极的可选背板; 热控制板，在穿过背板的多个接触点处附接到背板或喷头电极; 以及在接触点处分离背板和热控制板，或背板和喷头电极的至少一个导热和导电的衬垫。 还公开了使用喷头电极组件处理半导体衬底的方法。
-
公开(公告)号：US08206506B2
公开(公告)日：2012-06-26
申请号：US12216525
申请日：2008-07-07
IPC分类号： C23C16/50 , C23C16/503
CPC分类号： H01J37/3244 , H01J37/32449
摘要： A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
摘要翻译： 淋浴头电极在其外周边包括内台阶和外台阶，外台阶与夹板环配合，该夹环将电极机械地附接到背板。
-
公开(公告)号：US08161906B2
公开(公告)日：2012-04-24
申请号：US12216526
申请日：2008-07-07
IPC分类号： C23C16/50 , C23C16/503 , C23C16/505 , C23C16/509 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： H01J37/32532 , H01J37/32091 , H01J37/3244 , H01J37/32449 , H01J37/32541 , H01J37/32568 , H01J37/32605
摘要： An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which includes an inner electrode mechanically attached to a backing plate by a clamp ring and an outer electrode attached to the backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release cam pins extending upward from the upper face of the outer electrode. To compensate for differential thermal expansion, the clamp ring can include expansion joins at spaced locations which allow the clamp ring to absorb thermal stresses.
摘要翻译： 用于等离子体反应室的电极组件，用于半导体衬底处理。 组件包括上喷头电极，其包括通过夹紧环机械连接到背板的内电极和通过一系列间隔开的凸轮锁附接到背板的外电极。 防护环围绕背板并且可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以用工具旋转以释放从外部的上表面向上延伸的凸轮销 电极。 为了补偿差分热膨胀，夹紧环可以包括在间隔位置处的膨胀接合，这允许夹紧环吸收热应力。
-
公开(公告)号：US20120073754A1
公开(公告)日：2012-03-29
申请号：US13021499
申请日：2011-02-04
IPC分类号： H01L21/00
CPC分类号： H01L21/67069
摘要： A plasma confinement ring assembly with a single movable lower ring can be used for controlling wafer area pressure in a capacitively coupled plasma reaction chamber wherein a wafer is supported on a lower electrode assembly and process gas is introduced into the chamber by an upper showerhead electrode assembly. The assembly includes an upper ring, the lower ring, hangers, hanger caps, spacer sleeves and washers. The lower ring is supported by the hangers and is movable towards the upper ring when the washers come into contact with the lower electrode assembly during adjustment of the gap between the upper and lower electrodes. The hanger caps engage upper ends of the hangers and fit in upper portions of hanger bores in the upper ring. The spacer sleeves surround lower sections of the hangers and fit within lower portions of the hanger bores. The washers fit between enlarged heads of the hangers and a lower surface of the lower ring. The spacer sleeves are dimensioned to avoid rubbing against the inner surfaces of the hanger bores during lifting of the lower ring.
摘要翻译： 可以使用具有单个可移动下环的等离子体约束环组件来控制电容耦合等离子体反应室中的晶片面积压力，其中晶片被支撑在下部电极组件上，并且处理气体通过上部喷头电极组件 。 组件包括上环，下环，吊架，衣架盖，间隔套和垫圈。 下环由吊架支撑，并且当在上下电极之间的间隙调节期间垫圈与下电极组件接触时，可以朝向上环移动。 衣架帽接合衣架的上端，并安装在上环的衣架孔的上部。 间隔套环绕悬挂器的下部并且安装在衣架孔的下部。 垫圈安装在衣架的扩大头部和下环的下表面之间。 间隔套的尺寸被设计成避免在提升下环期间摩擦挂钩孔的内表面。
-
公开(公告)号：US20110042879A1
公开(公告)日：2011-02-24
申请号：US12922382
申请日：2009-03-13
IPC分类号： B25B5/08
CPC分类号： H01L21/68728 , H01L21/687 , Y10T403/7005 , Y10T403/7007 , Y10T403/7041
摘要： A cam lock clamp comprises a stud having a substantially cylindrical body with a first end including a head area and a second end arranged to support one or more disc springs concentrically about the stud. A socket is arranged to mechanically couple concentrically around the stud with the head area of the stud being exposed above an uppermost portion of the socket. The socket is configured to be firmly attached to a consumable material. A camshaft has a substantially cylindrical body and is configured to mount within a bore of a backing plate. The camshaft further comprises an eccentric cutout area located in a central portion of the camshaft body. The camshaft is configured to engage and lock the head area of the stud when the consumable material and the backing plate are proximate to one another.
摘要翻译： 凸轮锁定夹具包括具有基本上圆柱形主体的螺柱，其具有包括头部区域的第一端和布置成围绕螺柱同心地支撑一个或多个盘簧的第二端。 插座布置成以同心的方式围绕螺柱共同连接，螺柱的头部区域暴露在插座的最上部分之上。 插座被配置为牢固地连接到消耗材料上。 凸轮轴具有基本上圆柱形的主体并被构造成安装在背板的孔内。 凸轮轴还包括位于凸轮轴主体的中心部分的偏心切口区域。 凸轮轴构造成当消耗材料和背板彼此靠近时接合并锁定螺柱的头部区域。
-
公开(公告)号：US20100252197A1
公开(公告)日：2010-10-07
申请号：US12419878
申请日：2009-04-07
IPC分类号： H01L21/3065 , C23C16/50
CPC分类号： H01J37/3255 , H01J37/3244
摘要： A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
摘要翻译： 淋浴头电极在其外周边包括内台阶和外台阶，外台阶与夹板环配合，该夹环将电极机械地附接到背板。
-
19.发明授权公开(公告)号：US09111731B2
公开(公告)日：2015-08-18
申请号：US13616571
申请日：2012-09-14
CPC分类号： H01J37/3244 , Y10T29/49002
摘要： A gas feed insert configured to be disposed in a passage through an electrode assembly comprising a first insert end having therein a first bore aligned parallel with a linear axis of the gas feed insert. The gas feed insert further includes a second insert end opposite the first insert end, the second insert end having therein a second bore aligned parallel with the linear axis of the gas feed insert and a bore-to-bore communication channel in gas flow communication with the first bore and the second bore. The bore-to-bore communication channel is formed in an outer surface of the gas feed insert so as to prevent a line-of-sight when a gas flows from the first insert end through the bore-to-bore communication to the second insert end.
摘要翻译： 气体供给插入件，其构造成设置在通过电极组件的通道中，该电极组件包括具有与气体进料插入件的线性轴线平行排列的第一孔的第一插入端。 气体进料插入件还包括与第一插入件端相对的第二插入端，第二插入端具有其中与气体进料插入件的线性轴线平行排列的第二孔，以及与气体流动连通的孔对孔连通通道， 第一个孔和第二个孔。 孔对孔连通通道形成在气体进料插入件的外表面中，以便当气体从第一插入件端部通过孔到孔连通流动到第二插入件时防止视线 结束。
-
公开(公告)号：US08470127B2
公开(公告)日：2013-06-25
申请号：US12985568
申请日：2011-01-06
申请人： Anthony de la Llera , Pratik Mankidy , Rajlnder Dhindsa , Michael C. Kellogg , Gregory R. Bettencourt , Roger Patrick
发明人： Anthony de la Llera , Pratik Mankidy , Rajlnder Dhindsa , Michael C. Kellogg , Gregory R. Bettencourt , Roger Patrick
CPC分类号： H01J37/32091 , H01J37/3244 , H01J37/32532
摘要： A showerhead electrode and assembly useful for plasma etching includes cam locks which provide improved thermal contact between the showerhead electrode and a backing plate. The cam locks include cam shafts in the backing plate which engage enlarged heads of studs mounted on the showerhead electrode. The assembly can include an annular shroud surrounding the showerhead electrode and eight of the cam shafts in the backing plate can be operated such that each cam shaft simultaneously engages a stud on the annular shroud and a stud in an outer row of studs on the showerhead electrode. Another eight cam shafts can be operated such that each cam shaft engages a pair of studs on inner and middle rows of the studs mounted of the showerhead electrode.
摘要翻译： 用于等离子体蚀刻的喷头电极和组件包括提供喷头电极和背板之间改进的热接触的凸轮锁。 凸轮锁包括背板中的凸轮轴，其接合安装在喷头电极上的螺柱的扩大头部。 组件可以包括围绕喷头电极的环形护罩，并且背板中的八个凸轮轴可以被操作，使得每个凸轮轴同时接合环形护罩上的螺柱和喷头电极的外排螺柱中的螺柱 。 可以操作另外八个凸轮轴，使得每个凸轮轴接合在喷头电极安装的螺柱的内部和中间行上的一对螺柱。
-
-
-
-
-
-
-
-
-
搜索结果
34 条记录 (耗时 0.025 秒)
