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公开(公告)号:US20090256467A1
公开(公告)日:2009-10-15
申请号:US12244984
申请日:2008-10-03
IPC分类号: H01J1/62
CPC分类号: H01L27/3244 , H01L27/12 , H01L27/1248 , H01L27/3246 , H01L27/3258 , H01L29/16 , H01L29/66757 , H01L29/78621 , H01L29/78645 , H01L29/78675 , H01L29/78696 , H01L51/5008 , H01L51/524 , H01L51/5253 , H01L51/56 , H01L2227/323 , H01L2251/566
摘要: The purpose of the invention is to improve reliability of a light emitting apparatus comprising TFTs and organic light emitting elements. The light emitting apparatus according to the invention having thin film transistors and light emitting elements, comprises; a second inorganic insulation layer on a gate electrode, a first organic insulation layer on the second inorganic insulation layer, a third inorganic insulation layer on the first organic insulation layer, an anode layer formed on the third inorganic insulation layer, a second organic insulation layer overlapping with the end of the anode layer and having an inclination angle of 35 to 45 degrees, a fourth inorganic insulation layer formed on the upper surface and side surface of the second organic insulation layer and having an opening over the anode layer, an organic compound layer formed in contact with the anode layer and the fourth inorganic insulation layer and containing light emitting material, and a cathode layer formed in contact with the organic compound layer containing the light emitting material, wherein the third inorganic insulation layer and the fourth inorganic insulation layer are formed with silicon nitride or aluminum nitride.
摘要翻译: 本发明的目的是提高包括TFT和有机发光元件的发光装置的可靠性。 根据本发明的具有薄膜晶体管和发光元件的发光装置包括: 栅电极上的第二无机绝缘层,第二无机绝缘层上的第一有机绝缘层,第一有机绝缘层上的第三无机绝缘层,形成在第三无机绝缘层上的阳极层,第二有机绝缘层 与阳极层的端部重叠并且具有35度至45度的倾斜角度;形成在第二有机绝缘层的上表面和侧表面上并且在阳极层上具有开口的第四无机绝缘层,有机化合物 形成为与阳极层和第四无机绝缘层接触且含有发光材料的层,以及与含有发光材料的有机化合物层接触形成的阴极层,其中第三无机绝缘层和第四无机绝缘层 由氮化硅或氮化铝形成。
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公开(公告)号:US20090020762A1
公开(公告)日:2009-01-22
申请号:US12183330
申请日:2008-07-31
IPC分类号: H01L33/00
CPC分类号: H01L33/44 , H01L27/12 , H01L27/1248 , H01L27/1288 , H01L29/78621 , H01L2924/0002 , H01L2924/00
摘要: To achieve promotion of stability of operational function of display device and enlargement of design margin in circuit design, in a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate, the semiconductor element includes a photosensitive organic resin film as an interlayer insulating film, an inner wall face of a first opening portion provided at the photosensitive organic resin film is covered by a second insulating nitride film, a second opening portion provided at an inorganic insulating film is provided on an inner side of the first opening portion, the semiconductor and a wiring are connected through the first opening portion and the second opening portion and the pixel electrode is provided at a layer on a lower side of an activation layer.
摘要翻译: 为了实现显示装置的操作功能的稳定性和电路设计中的设计余量的增加,在包括具有半导体元件的像素部分和设置有与基板上的半导体元件连接的像素电极的多个像素的显示装置中, 半导体元件包括作为层间绝缘膜的光敏有机树脂膜,设置在感光性有机树脂膜上的第一开口部的内壁面被第二绝缘氮化物膜覆盖,设置在无机绝缘膜上的第二开口部 设置在第一开口部的内侧,半导体和布线通过第一开口部和第二开口部连接,并且像素电极设置在活化层的下侧的层。
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公开(公告)号:US20130001583A1
公开(公告)日:2013-01-03
申请号:US13609906
申请日:2012-09-11
申请人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Jun KOYAMA , Yukio TANAKA , Hidehito KITAKADO , Hideto OHNUMA
发明人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Jun KOYAMA , Yukio TANAKA , Hidehito KITAKADO , Hideto OHNUMA
IPC分类号: H01L29/786
CPC分类号: G02F1/1368 , G02F1/133345 , G02F1/13454 , G02F1/136227 , G02F1/136286 , G02F2201/123 , G02F2202/104 , H01L27/12 , H01L27/1222 , H01L27/124 , H01L27/1248 , H01L27/1259 , H01L27/3248 , H01L27/3258 , H01L27/3262 , H01L27/3272 , H01L27/3276 , H01L29/458 , H01L29/78621 , H01L29/78627 , H01L29/78675 , H01L2029/7863 , H01L2227/323
摘要: This invention provides a semiconductor device having high operation performance and high reliability. An LDD region 707 overlapping with a gate wiring is arranged in an n-channel TFT 802 forming a driving circuit, and a TFT structure highly resistant to hot carrier injection is achieved. LDD regions 717, 718, 719 and 720 not overlapping with a gate wiring are arranged in an n-channel TFT 804 forming a pixel unit. As a result, a TFT structure having a small OFF current value is achieved. In this instance, an element belonging to the Group 15 of the Periodic Table exists in a higher concentration in the LDD region 707 than in the LDD regions 717, 718, 719 and 720.
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公开(公告)号:US20130001568A1
公开(公告)日:2013-01-03
申请号:US13609915
申请日:2012-09-11
申请人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Jun KOYAMA , Yukio TANAKA , Hidehito KITAKADO , Hideto OHNUMA
发明人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Jun KOYAMA , Yukio TANAKA , Hidehito KITAKADO , Hideto OHNUMA
IPC分类号: H01L29/786
CPC分类号: G02F1/1368 , G02F1/133345 , G02F1/13454 , G02F1/136227 , G02F1/136286 , G02F2201/123 , G02F2202/104 , H01L27/12 , H01L27/1222 , H01L27/124 , H01L27/1248 , H01L27/1259 , H01L27/3248 , H01L27/3258 , H01L27/3262 , H01L27/3272 , H01L27/3276 , H01L29/458 , H01L29/78621 , H01L29/78627 , H01L29/78675 , H01L2029/7863 , H01L2227/323
摘要: This invention provides a semiconductor device having high operation performance and high reliability. An LDD region 707 overlapping with a gate wiring is arranged in an n-channel TFT 802 forming a driving circuit, and a TFT structure highly resistant to hot carrier injection is achieved. LDD regions 717, 718, 719 and 720 not overlapping with a gate wiring are arranged in an n-channel TFT 804 forming a pixel unit. As a result, a TFT structure having a small OFF current value is achieved. In this instance, an element belonging to the Group 15 of the Periodic Table exists in a higher concentration in the LDD region 707 than in the LDD regions 717, 718, 719 and 720.
摘要翻译: 本发明提供一种具有高操作性能和高可靠性的半导体器件。 在形成驱动电路的n沟道TFT 802中配置与栅极配线重叠的LDD区域707,能够实现高耐热载流子注入的TFT结构。 不与栅极布线重叠的LDD区域717,718,719和720被布置在形成像素单元的n沟道TFT 804中。 结果,实现了具有小的截止电流值的TFT结构。 在这种情况下,属于周期表第15族的元素在LDD区707中比在LDD区717,718,719和720中的浓度更高。
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公开(公告)号:US20120248470A1
公开(公告)日:2012-10-04
申请号:US13486017
申请日:2012-06-01
申请人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Motomu KURATA , Hiroyuki HATA , Mitsuhiro ICHIJO , Takashi OHTSUKI , Aya ANZAI , Masayuki SAKAKURA
发明人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Motomu KURATA , Hiroyuki HATA , Mitsuhiro ICHIJO , Takashi OHTSUKI , Aya ANZAI , Masayuki SAKAKURA
IPC分类号: H01L33/08
CPC分类号: H04N5/655 , G06F3/02 , H01L27/12 , H01L27/1214 , H01L27/1222 , H01L27/124 , H01L27/1248 , H01L27/3244 , H01L27/3258 , H01L27/3276 , H01L33/60 , H01L51/0005 , H01L51/5246 , H01L51/56 , H01L2224/4847 , H01L2227/323 , H01L2251/5323 , H04N5/642
摘要: The present invention provides a method for manufacturing a highly reliable display device at a low cost with high yield. According to the present invention, a step due to an opening in a contact is covered with an insulating layer to reduce the step, and is processed into a gentle shape. A wiring or the like is formed to be in contact with the insulating layer and thus the coverage of the wiring or the like is enhanced. In addition, deterioration of a light-emitting element due to contaminants such as water can be prevented by sealing a layer including an organic material that has water permeability in a display device with a sealing material. Since the sealing material is formed in a portion of a driver circuit region in the display device, the frame margin of the display device can be narrowed.
摘要翻译: 本发明提供了一种以高成本低成本制造高度可靠的显示装置的方法。 根据本发明,由绝缘层覆盖由于接触开口而产生的台阶,以减小台阶,并且被加工成平缓的形状。 布线等形成为与绝缘层接触,从而增强布线等的覆盖。 此外,通过用包封材料密封包括显示装置中具有透水性的有机材料的层,可以防止由诸如水等污染物引起的发光元件的劣化。 由于密封材料形成在显示装置的驱动电路区域的一部分中,所以显示装置的边框可以变窄。
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公开(公告)号:US20110180801A1
公开(公告)日:2011-07-28
申请号:US13082104
申请日:2011-04-07
IPC分类号: H01L51/52
CPC分类号: H01L27/3244 , H01L27/12 , H01L27/1248 , H01L27/3246 , H01L27/3258 , H01L29/16 , H01L29/66757 , H01L29/78621 , H01L29/78645 , H01L29/78675 , H01L29/78696 , H01L51/5008 , H01L51/524 , H01L51/5253 , H01L51/56 , H01L2227/323 , H01L2251/566
摘要: The purpose of the invention is to improve reliability of a light emitting apparatus comprising TFTs and organic light emitting elements. The light emitting apparatus according to the invention having thin film transistors and light emitting elements, comprises; a second inorganic insulation layer on a gate electrode, a first organic insulation layer on the second inorganic insulation layer, a third inorganic insulation layer on the first organic insulation layer, an anode layer formed on the third inorganic insulation layer, a second organic insulation layer overlapping with the end of the anode layer and having an inclination angle of 35 to 45 degrees, a fourth inorganic insulation layer formed on the upper surface and side surface of the second organic insulation layer and having an opening over the anode layer, an organic compound layer formed in contact with the anode layer and the fourth inorganic insulation layer and containing light emitting material, and a cathode layer formed in contact with the organic compound layer containing the light emitting material, wherein the third inorganic insulation layer and the fourth inorganic insulation layer are formed with silicon nitride or aluminum nitride.
摘要翻译: 本发明的目的是提高包括TFT和有机发光元件的发光装置的可靠性。 根据本发明的具有薄膜晶体管和发光元件的发光装置包括: 栅电极上的第二无机绝缘层,第二无机绝缘层上的第一有机绝缘层,第一有机绝缘层上的第三无机绝缘层,形成在第三无机绝缘层上的阳极层,第二有机绝缘层 与阳极层的端部重叠并且具有35度至45度的倾斜角度;形成在第二有机绝缘层的上表面和侧表面上并且在阳极层上具有开口的第四无机绝缘层,有机化合物 形成为与阳极层和第四无机绝缘层接触且含有发光材料的层,以及与含有发光材料的有机化合物层接触形成的阴极层,其中第三无机绝缘层和第四无机绝缘层 由氮化硅或氮化铝形成。
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公开(公告)号:US20130001571A1
公开(公告)日:2013-01-03
申请号:US13615805
申请日:2012-09-14
申请人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Motomu KURATA , Hiroyuki HATA , Mitsuhiro ICHIJO , Takashi OHTSUKI , Aya ANZAI , Masayuki SAKAKURA
发明人: Shunpei YAMAZAKI , Satoshi MURAKAMI , Motomu KURATA , Hiroyuki HATA , Mitsuhiro ICHIJO , Takashi OHTSUKI , Aya ANZAI , Masayuki SAKAKURA
IPC分类号: H01L33/08
CPC分类号: H04N5/655 , G06F3/02 , H01L27/12 , H01L27/1214 , H01L27/1222 , H01L27/124 , H01L27/1248 , H01L27/3244 , H01L27/3258 , H01L27/3276 , H01L33/60 , H01L51/0005 , H01L51/5246 , H01L51/56 , H01L2224/4847 , H01L2227/323 , H01L2251/5323 , H04N5/642
摘要: The present invention provides a method for manufacturing a highly reliable display device at a low cost with high yield. According to the present invention, a step due to an opening in a contact is covered with an insulating layer to reduce the step, and is processed into a gentle shape. A wiring or the like is formed to be in contact with the insulating layer and thus the coverage of the wiring or the like is enhanced. In addition, deterioration of a light-emitting element due to contaminants such as water can be prevented by sealing a layer including an organic material that has water permeability in a display device with a sealing material. Since the sealing material is formed in a portion of a driver circuit region in the display device, the frame margin of the display device can be narrowed.
摘要翻译: 本发明提供了一种以高成本低成本制造高度可靠的显示装置的方法。 根据本发明,由绝缘层覆盖由于接触开口而产生的台阶,以减小台阶,并且被加工成平缓的形状。 布线等形成为与绝缘层接触,从而增强布线等的覆盖。 此外,通过用包封材料密封包括显示装置中具有透水性的有机材料的层,可以防止由诸如水等污染物引起的发光元件的劣化。 由于密封材料形成在显示装置的驱动电路区域的一部分中,所以显示装置的边框可以变窄。
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公开(公告)号:US20110278578A1
公开(公告)日:2011-11-17
申请号:US13192596
申请日:2011-07-28
IPC分类号: H01L33/16 , H01L29/786 , H01L29/04
CPC分类号: H01L27/1248 , H01L27/1214 , H01L27/124 , H01L27/1255 , H01L27/3244 , H01L27/3246 , H01L27/3258 , H01L27/326 , H01L27/3262 , H01L29/4958 , H01L29/4966 , H01L29/78645 , H01L51/5237 , H01L51/524 , H01L51/5253 , H01L51/5271 , H01L2251/5315
摘要: A display device according to the present invention includes: a planarization layer for insulating between a gate electrode etc. and a data wiring, a drain electrode, or the like of the transistor; and a barrier layer that is formed on an upper surface or lower surface of the planarization layer and at the same time, adapted to suppress diffusion of moisture or degassing components from the planarization layer. The display device adopts a device structure effective in reducing the plasma damage on the planarization layer by devising a positional relationship between the planarization layer and the barrier layer. Also, in combination with a novel structure as a structure for a pixel electrode, effects such as an increase in luminance can be provided as well.
摘要翻译: 根据本发明的显示装置包括:用于在晶体管的栅电极等与数据布线,漏极等之间绝缘的平坦化层; 以及形成在平坦化层的上表面或下表面上并且同时适于抑制水分或脱气组分从平坦化层扩散的阻挡层。 显示装置采用通过设计平坦化层与阻挡层之间的位置关系有效地减小平坦化层上的等离子体损伤的装置结构。 而且,与作为像素电极的结构的新颖结构相结合,也可以提供诸如亮度增加的效果。
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公开(公告)号:US20110049522A1
公开(公告)日:2011-03-03
申请号:US12711611
申请日:2010-02-24
IPC分类号: H01L33/00
CPC分类号: H01L27/1248 , G02F1/136227 , H01L27/12 , H01L27/1214 , H01L27/124 , H01L27/1244 , H01L27/1255 , H01L27/13 , H01L27/3246 , H01L27/3276 , H01L33/52 , H01L51/5237 , H01L51/5253
摘要: It is an object of the present invention to provide a semiconductor display device having an interlayer insulating film which can obtain planarity of a surface while controlling film formation time, can control treatment time of heating treatment with an object of removing moisture, and can prevent moisture in the interlayer insulating film from being discharged to a film or an electrode adjacent to the interlayer insulating film. An inorganic insulating film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover a TFT. Next, an organic resin film containing photosensitive acrylic resin is applied to the organic insulting film, and the organic resin film is partially exposed to light to be opened. Thereafter, an inorganic insulting film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover the opened organic resin film. Then, in the opening part of the organic resin film, a gate insulating film and the two layer inorganic insulating film containing nitrogen are opened partially is by etching to expose an active layer of the TFT.
摘要翻译: 本发明的目的是提供一种具有层间绝缘膜的半导体显示装置,其可以在控制成膜时间的同时获得表面的平面性,并且可以控制用于除去水分的加热处理的处理时间,并且可以防止水分 在层间绝缘膜中不被放电到与层间绝缘膜相邻的膜或电极。 形成与有机树脂相比不容易透过水分的含氮的无机绝缘膜,以覆盖TFT。 接着,在有机绝缘膜上涂布含有感光性丙烯酸树脂的有机树脂膜,将有机树脂膜部分地曝光以打开。 然后,形成与有机树脂相比不容易透过水分的含有氮的无机绝缘膜,以覆盖打开的有机树脂膜。 然后,在有机树脂膜的开口部分,通过蚀刻部分地开启含有氮的栅极绝缘膜和双层无机绝缘膜,以暴露TFT的有源层。
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公开(公告)号:US20100283067A1
公开(公告)日:2010-11-11
申请号:US12840350
申请日:2010-07-21
IPC分类号: H01L33/08
CPC分类号: H01L27/1248 , G02F1/133512 , G02F1/1337 , G02F1/1339 , G02F1/1341 , G02F1/13439 , G02F1/136213 , G02F1/136227 , G02F1/136286 , G02F1/1368 , G02F2201/123 , H01L23/3171 , H01L23/49827 , H01L27/1218 , H01L27/124 , H01L27/3248 , H01L27/3258 , H01L27/3276 , H01L29/41733 , H01L29/42384 , H01L29/66757 , H01L29/66765 , H01L29/786 , H01L29/78606 , H01L29/78651 , H01L2251/5315 , H01L2251/5338 , H01L2924/0002 , Y10S438/95 , H01L2924/00
摘要: Provided is a semiconductor element including: a semiconductor having an active layer; a gate insulating film which is in contact with the semiconductor; a gate electrode opposite to the active layer through the gate insulating film; a first nitride insulating film formed over the active layer; a photosensitive organic resin film formed on the first nitride insulating film; a second nitride insulating film formed on the photosensitive organic resin film; and a wiring provided on the second nitride insulating film, in which a first opening portion is provided in the photosensitive organic resin film, an inner wall surface of the first opening portion is covered with the second nitride insulating film, a second opening portion is provided in a laminate including the gate insulating film, the first nitride insulating film, and the second nitride insulating film inside the first opening portion, and the semiconductor is connected with the wiring through the first opening portion and the second opening portion.
摘要翻译: 提供一种半导体元件,包括:具有活性层的半导体; 与半导体接触的栅极绝缘膜; 通过所述栅极绝缘膜与所述有源层相对的栅电极; 形成在有源层上的第一氮化物绝缘膜; 形成在第一氮化物绝缘膜上的光敏有机树脂膜; 形成在感光性有机树脂膜上的第二氮化物绝缘膜; 以及设置在第二氮化物绝缘膜上的布线,其中在感光性有机树脂膜中设置有第一开口部,第一开口部的内壁面被第二氮化物绝缘膜覆盖,设置有第二开口部 在第一开口部内部具有栅极绝缘膜,第一氮化物绝缘膜和第二氮化物绝缘膜的层叠体中,半导体通过第一开口部和第二开口部与布线连接。
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