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    Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass
    12.
    发明授权
    Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass 失效
    使用无机硫族化物玻璃的灰度掩模和深度图案转移技术

    公开(公告)号：US6033766A

    公开(公告)日：2000-03-07

    申请号：US228910

    申请日：1999-01-11

    Applicant: Barry Block ,  Arnold O. Thornton ,  Jan Ingwersen ,  Walter Daschner

    Inventor： Barry Block ,  Arnold O. Thornton ,  Jan Ingwersen ,  Walter Daschner

    IPC: B81B1/00 ,  B81C1/00 ,  G03F1/00 ,  G03F1/54 ,  G03F7/00 ,  G03F7/004 ,  B32B3/00 ,  B32B15/00 ,  G03F9/00

    CPC classification number: G03F1/54 ,  G03F1/50 ,  G03F7/0007 ,  G03F7/001 ,  G03F7/0043 ,  Y10T428/24926

    Abstract: A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 .ANG.. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist layer on an inorganic substrate. The selenium germanium photoresist layer may then transfer the gray scale to the substrate.

    Abstract translation: 描述了一种制造高分辨率扩展模拟灰度掩模的方法。 使用涂覆有薄银层的无机硫族化物玻璃（例如硒锗）可以通过精确控制像素的尺寸，均匀性和方差来生产灰度掩模。 硒锗玻璃由垂直于衬底排列的柱结构组成，给出了100 ANGSTROM的边缘精度。 柱结构还防止在蚀刻工艺期间的底切，从而允许像素靠近放置在一起。 因此，硒锗可以用作具有扩展的模拟灰度级的高分辨率灰度级掩模。 灰度掩模可用于将无机基底上的硒锗光致抗蚀剂层上的信息作为调制厚度印记。 然后，硒锗光致抗蚀剂层可以将灰度级转移到衬底。

    Method for producing a mask for use in X-ray photolithography and resulting structure
    13.
    发明授权
    Method for producing a mask for use in X-ray photolithography and resulting structure 失效
    用于生产用于X射线光刻及其结构的掩模的方法

    公开(公告)号：US4680243A

    公开(公告)日：1987-07-14

    申请号：US761993

    申请日：1985-08-02

    Applicant: Alexander R. Shimkunas ,  Barry Block

    Inventor： Alexander R. Shimkunas ,  Barry Block

    IPC: G03F1/22 ,  H01L21/027 ,  G21K5/00 ,  B44C1/22 ,  C23F1/02 ,  G03F9/00

    CPC classification number: G03F1/22

    Abstract: A method for manufacturing a mask (100) for use in x-ray photolithographic processes includes the step of coating a silicon wafer (10) with a layer of boron nitride (12). A masking substance (14) is used to coat one side of the boron nitride coated wafer, and the boron nitride is etched off of the other side of the wafer. The wafer (10) is then bonded to a pyrex ring (16) using a field assisted thermal bonding process. During the field assisted thermal bonding process, the silicon (11) is bonded directly to the pyrex (16). Then, a zirconium layer (24) is used to cover the mask and is selectively etched where it is desired to remove a circular portion of the silicon. Thereafter the silicon is subjected to a semianisotropic etch. The remaining structure includes a pyrex ring bonded to a silicon ring across which a layer of boron nitride is stretched. The layer of boron nitride is subjected to an annealing process and is then coated with an x-ray opaque material.

    Abstract translation: 制造用于x射线光刻工艺的掩模（100）的方法包括用氮化硼层（12）涂覆硅晶片（10）的步骤。 掩模物质（14）用于涂覆氮化硼涂覆的晶片的一侧，氮化硼从晶片的另一侧蚀刻掉。 然后使用场辅助热粘合工艺将晶片（10）结合到焦耳环（16）。 在场辅助热粘合过程中，硅（11）直接键合到发烟（16）。 然后，使用锆层（24）覆盖掩模，并且在需要去除硅的圆形部分的情况下被选择性地蚀刻。 此后，将硅进行半等向各向异性蚀刻。 剩余的结构包括结合到硅环上的发烟环，氮化硼层被拉伸通过该硅环。 对氮化硼层进行退火处理，然后用X射线不透明材料涂覆。

    Thermal gas pressure gauge method and apparatus
    14.
    发明授权
    Thermal gas pressure gauge method and apparatus 失效
    热气压计量仪方法及装置

    公开(公告)号：US4197752A

    公开(公告)日：1980-04-15

    申请号：US963103

    申请日：1978-11-22

    Applicant: Barry Block

    Inventor： Barry Block

    IPC: G01L21/00 ,  G01L21/12

    CPC classification number: G01L21/00

    Abstract: In the thermal gas pressure gauge, a foil heater has a heater surface disposed in gas communication with the gas to be measured and the heater surface is thermally cycled at first and second reference frequencies to produce cyclical heating of the gaseous material adjacent the heating element. A directional microphone is disposed facing the heating element to derive signals of an amplitude determined by the amplitude of the cyclical heating effect of the gaseous material at the first and second reference frequencies. The detected signals are synchronously detected to produce a pair of dc outputs indicative of pressure in two respective pressure regimes. In an overlap pressure regime the two dc outputs are converted to digital signals which are correlated with pairs of values tabled in a read only memory for reading out a digital signal indicative of the pressure. In a low pressure regime from approximately 10.sup.-4 torr and below to the region of 1 to 10 torr, the measured pressure is independent of the molecular gas species and therefore is an absolute gauge, whereas in the higher pressure regime from 1 to 10 torr to the condensation pressure of the measured gas, the measured pressure is somewhat dependent on the molecular gas species. For measurement in the higher pressure regime, the heater and microphone are contained within a volume of the gas separated from the relatively large volume of a chamber being measured by means of an acoustic filter. The acoustic filter provides a high impedence to pressure waves at the second or higher reference frequency to avoid dissipation of the generated pressure wave to be measured within the large chamber volume. The tabled values in the read only memory permit a smooth transition of the gauge measurement from the first to the second regime.

    Abstract translation: 在热气体压力计中，箔加热器具有与要测量的气体气体连通的加热器表面，并且加热器表面在第一和第二参考频率下热循环，以产生邻近加热元件的气态材料的周期性加热。 定向麦克风被布置成面向加热元件以导出由在第一和第二参考频率处的气态材料的循环加热效应的幅度确定的振幅的信号。 检测到的信号被同步地检测以产生指示两个相应压力方案中的压力的​​一对直流输出。 在重叠压力状态下，两个直流输出被转换成数字信号，这些数字信号与在只读存储器中提供的值对相关联，用于读出表示压力的数字信号。 在约10-4乇以下至1〜10乇区域的低压状态下，测得的压力与分子气体种类无关，因此是绝对规格，而在1〜10乇的较高压力下 到测量气体的冷凝压力，所测量的压力在某种程度上取决于分子气体种类。 为了在较高压力状态下进行测量，加热器和麦克风被包含在通过声学滤波器测量的与相当大体积的腔室分离的一定体积的气体中。 声学滤波器在第二或更高参考频率处提供对高压的高阻抗，以避免在大腔体积内产生的被测压力波的耗散。 只读存储器中的提示值允许量规测量从第一个状态到第二个状态的平滑过渡。

    Optical head with a diffractive lens for focusing a laser beam
    15.
    发明授权
    Optical head with a diffractive lens for focusing a laser beam 失效
    具有用于聚焦激光束的衍射透镜的光学头

    公开(公告)号：US6167016A

    公开(公告)日：2000-12-26

    申请号：US833608

    申请日：1997-04-11

    Applicant: Barry Block ,  Arnold Thorton

    Inventor： Barry Block ,  Arnold Thorton

    IPC: G11B7/12 ,  G11B7/135 ,  G11B11/105 ,  G11B7/125

    CPC classification number: G11B7/1353 ,  G11B7/122 ,  G11B7/1372 ,  G11B11/10532 ,  G11B11/10554 ,  G11B11/1058

    Abstract: A head slider for flying above a rotating magneto-optic or optical disk and an optical mechanical assembly with a fixed height above a rotating magneto-optic or optical disk contains magnetic coils and a lens plate with a diffractive optic structure for focusing laser light into a small spot on the disk. The diffractive optic structure may be a zone plate, a phase zone plate or a blazed phase zone plate or other diffractive focusing optical element. The diffractive optic structure does not require curved transparent material such as glass or a high index of refraction. The diffractive optic structure is easily manufactured using lithographic or other techniques.

    Abstract translation: 用于在旋转的磁光或光盘上方飞行的磁头滑块和在旋转磁光盘或光盘上方具有固定高度的光学机械组件包含磁性线圈和具有衍射光学结构的透镜板，用于将激光聚焦到 磁盘上的小斑点。 衍射光学结构可以是区域板，相位板或闪耀相位带板或其它衍射聚焦光学元件。 衍射光学结构不需要弯曲的透明材料，例如玻璃或高折射率。 衍射光学结构易于使用光刻或其它技术制造。

    Method for making an optical or magneto-optic head and the resulting head
    16.
    发明授权
    Method for making an optical or magneto-optic head and the resulting head 失效
    用于制造光学或磁光头的方法以及所得到的头部

    公开(公告)号：US6162590A

    公开(公告)日：2000-12-19

    申请号：US59778

    申请日：1998-04-13

    Applicant: Barry Block ,  Arnold Thornton ,  Walter Daschner

    Inventor： Barry Block ,  Arnold Thornton ,  Walter Daschner

    IPC: G02B3/08 ,  G02B5/18 ,  G03F1/00 ,  G03F7/00 ,  G03F7/004 ,  G11B7/12 ,  G11B7/135 ,  G11B7/1353 ,  G11B7/1372 ,  G11B7/22 ,  G11B11/105

    CPC classification number: G11B7/1353 ,  G02B5/1857 ,  G03F7/0007 ,  G03F7/001 ,  G03F7/0043 ,  G11B7/122 ,  G11B7/1372 ,  G11B7/22 ,  G11B11/10532 ,  G11B11/10554 ,  G11B11/1058

    Abstract: A method for forming a novel head used in magneto-optic or optical disks comprises the steps of forming a diffractive lens on one side of a glass substrate and forming air bearing surface rails on a second side of said glass substrate. The glass substrate is then cut into separate heads. In this way, many magneto-optic or optical heads can be formed simultaneously without incurring the expense of bonding lenses onto a slider. In one embodiment, coils are deposited on the substrate to generate a magnetic field during magneto-optic write operations. In another embodiment, a glass wafer having diffractive lenses formed thereon is bonded to a silicon spacer structure. The glass lenses are used to define a waveguide structure on a transparent layer on the bottom of the silicon spacer

    Abstract translation: 用于形成用于磁光或光盘的新型头的方法包括以下步骤：在玻璃基板的一侧上形成衍射透镜，并在所述玻璃基板的第二面上形成空气轴承表面轨。 然后将玻璃基板切成单独的头。 以这种方式，可以同时形成许多磁光或光学头，而不会导致将透镜粘合到滑块上的费用。 在一个实施例中，线圈被沉积在衬底上以在磁光写入操作期间产生磁场。 在另一个实施例中，其上形成有衍射透镜的玻璃晶片被结合到硅间隔物结构。 玻璃透镜用于在硅间隔物的底部上的透明层上限定波导结构

    Shape memory alloy microactuator having an electrostatic force and heating means
    17.
    发明授权
    Shape memory alloy microactuator having an electrostatic force and heating means 失效
    具有静电力和加热装置的形状记忆合金微致动器

    公开(公告)号：US5619177A

    公开(公告)日：1997-04-08

    申请号：US381681

    申请日：1995-01-27

    Applicant: A. David Johnson ,  Barry Block ,  Philip Mauger

    Inventor： A. David Johnson ,  Barry Block ,  Philip Mauger

    IPC: H01H1/00 ,  H01H59/00 ,  H01H61/01 ,  H01H61/06

    CPC classification number: H01H59/0009 ,  H01H61/0107 ,  G11C23/00 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2001/0063 ,  H01H2059/0081 ,  H01H2061/006

    Abstract: A microactuator and method of operation is disclosed for use in actuating valves, electrical contacts, light beams, sensors and other elements between different actuation modes. An actuator member comprised of a shape memory alloy layer is mounted on an elastic substrate, and the proximal end of the actuator member is carried by a base. The shape memory alloy material is heated through its phase change transition temperature so that it deforms by changing volume to bend the distal end of the actuator member in a first direction relative to the base. Stress forces in the substrate oppose the bending movement, and when the shape change layer is cooled below the transition temperature the stress forces move the distal in a second direction which returns the shape change layer to its low temperature shape. Electrostatic forces are selectively applied between the actuator member and base for clamping the actuator member in one of its positions. In another embodiment a bistable actuator is provided in which the actuator member can be operated between two stable positions.

    Abstract translation: 公开了一种微致动器和操作方法，用于在不同致动模式之间致动阀，电触点，光束，传感器和其他元件。 由形状记忆合金层构成的致动器构件安装在弹性基板上，致动器构件的基端由基座承载。 形状记忆合金材料通过其相变转变温度加热，使得其通过改变体积而变形，以使致动器构件的远端相对于基部沿第一方向弯曲。 衬底中的应力作用与弯曲运动相反，当形状变化层被冷却到转变温度以下时，应力将第二个方向移动到远端，使第二个方向返回到其低温形状。 静电力被选择性地施加在致动器构件和底座之间，以将致动器构件夹紧在其位置之一中。 在另一个实施例中，提供双稳态致动器，其中致动器构件可以在两个稳定位置之间操作。

    High sensitivity miniature pressure transducer
    18.
    发明授权
    High sensitivity miniature pressure transducer 失效
    高灵敏度微型压力传感器

    公开(公告)号：US4996627A

    公开(公告)日：1991-02-26

    申请号：US304344

    申请日：1989-01-30

    Applicant: Arthur R. Zias ,  Barry Block ,  Kenneth W. Mapes ,  Norman L. Nystrom ,  Robert M. Cadwell

    Inventor： Arthur R. Zias ,  Barry Block ,  Kenneth W. Mapes ,  Norman L. Nystrom ,  Robert M. Cadwell

    IPC: G01L9/04 ,  B81B3/00 ,  B81C1/00 ,  G01L9/00 ,  H01L29/84

    CPC classification number: G01L9/0073 ,  G01L9/0042

    Abstract: A miniature transducer having an ultrathin tensioned silicon diaphragm so as to be responsive to extremely small changes in pressure. A silicon wafer is masked to define diaphragm areas, and etched to form a setback or capacitor gap a predefined depth. The mask is removed, and the entire silicon wafer is etched a second time to achieve the desired diaphragm thickness. The first and second etches are carried out independently, and thus the capacitor gap and diaphragm thickness can be independently formed. Mask and metallizing steps are carried out on glass wafers, and sandwiched around the processed semiconductor wafer, whereupon a large number of the miniature transducers are fabricated simultaneously. Unique patterning, etching and metallizing steps carried out on the sandwich structure allow a number of quadrature unit cells to be formed, thereby maximizing the area of the semiconductor and glass structures. By proper selection of materials, the diaphragm is tensioned during the fabrication of the transducer structures.

    Solid state force transducer and method of making same
    19.
    发明授权
    Solid state force transducer and method of making same 失效
    固态力传感器及其制作方法

    公开(公告)号：US4071838A

    公开(公告)日：1978-01-31

    申请号：US656632

    申请日：1976-02-09

    Applicant: Barry Block

    Inventor： Barry Block

    IPC: H01L29/84 ,  G01P15/08 ,  G01P15/12 ,  H01L41/02 ,  H04R23/00

    CPC classification number: H04R23/006 ,  G01P15/0802 ,  G01P15/123 ,  H01L29/84 ,  Y10T29/49002 ,  Y10T29/49103

    Abstract: Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the and crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure. In one embodiment, the gaps between adjacent leg portions of the spring structure are sealed in a fluid tight manner by means of oxide membranes left intact upon etching of the spring structure. In an accelerometer embodiment, sensing masses of equal weight are affixed to opposite sides of the spring structure for dynamically balancing same.

    Abstract translation: 固体折叠板弹簧力传感器通过从诸如硅的单晶材料的分批光刻和蚀刻技术制造。 折叠的板簧结构包括分隔相邻的板簧部分的细长间隙，这些细长的间隙平行于单晶材料的结晶轴取向。 在优选实施例中，单晶材料是金刚石立方体，并且片簧间隙分别在平行于<011>和<011>晶轴的相互正交的方向上延伸。 在制造弹簧结构的优选方法中，通过各向异性蚀刻剂从单晶晶片蚀刻该结构，从而更准确地限定所得到的弹簧结构的角度和尺寸。 在一个实施例中，弹簧结构的相邻腿部之间的间隙通过在蚀刻弹簧结构时保持完整的氧化物膜以流体密封的方式密封。 在加速度计实施例中，相同重量的感测质量被固定在弹簧结构的相对侧上，用于动态平衡它们。

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