On-chip inductors with through-silicon-via fence for Q improvement
    13.
    发明申请
    On-chip inductors with through-silicon-via fence for Q improvement 有权
    具有通硅栅的片上电感,提高Q值

    公开(公告)号:US20090090995A1

    公开(公告)日:2009-04-09

    申请号:US11868392

    申请日:2007-10-05

    IPC分类号: H01L29/66

    摘要: A semiconductor structure for providing isolations for on-chip inductors comprises a semiconductor substrate, one or more on-chip inductors formed above the first semiconductor substrate, a plurality of through-silicon-vias formed through the first semiconductor substrate in a vicinity of the one or more on-chip inductors, and one or more conductors coupling at least one of the plurality of through-silicon-vias to a ground, wherein the plurality of through-silicon-vias provide isolations for the one or more on-chip inductors.

    摘要翻译: 用于为片上电感器提供隔离的半导体结构包括半导体衬底,形成在第一半导体衬底上方的一个或多个片上电感器,在第一半导体衬底附近通过第一半导体衬底形成的多个穿硅通孔 或更多片上电感器,以及将多个穿硅通孔中的至少一个耦合到地的一个或多个导体,其中多个通硅通孔为一个或多个片上电感器提供隔离。