利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

51 条记录 (耗时 0.032 秒)

    TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
    12.
    发明授权
    TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same 有权
    用于监测六氟化钨处理以检测气相成核的TPIR装置及其利用方法和系统

    公开(公告)号：US09340878B2

    公开(公告)日：2016-05-17

    申请号：US13375053

    申请日：2010-05-28

    申请人： Jose I. Arno ,  Joseph R. Despres ,  Shkelqim Letaj ,  Steven M. Lurcott ,  Thomas H. Baum ,  Peng Zou

    发明人： Jose I. Arno ,  Joseph R. Despres ,  Shkelqim Letaj ,  Steven M. Lurcott ,  Thomas H. Baum ,  Peng Zou

    IPC分类号： G01N31/00 ,  C23C16/52 ,  G01N21/3504 ,  C23C16/14

    CPC分类号： C23C16/52 ,  C23C16/14 ,  C23C16/455 ,  G01N21/3504

    摘要： Apparatus and method for monitoring a vapor deposition installation in which a gas mixture can undergo gas phase nucleation (GPN) and/or chemically attack the product device, under process conditions supportive of such behavior. The apparatus includes a radiation source arranged to transmit source radiation through a sample of the gas mixture, and a thermopile detector assembly arranged to receive output radiation resulting from interaction of the source radiation with the gas mixture sample, and to responsively generate an output indicative of onset of the gas phase nucleation and/or chemical attack when such onset occurs. Such monitoring apparatus and methodology is useful in tungsten CVD processing to achieve high rate tungsten film growth without GPN or chemical attack.

    摘要翻译： 用于监测气相沉积装置的装置和方法，其中气体混合物可以在支持这种行为的工艺条件下经历气相成核（GPN）和/或化学侵蚀产品装置。 该装置包括被布置成通过气体混合物的样本传送源辐射的辐射源，以及布置成接收由源辐射与气体混合物样品的相互作用产生的输出辐射的热电堆检测器组件，并且响应地产生指示 发生这种发生时气相成核和/或化学侵蚀的发生。 这种监测装置和方法在钨CVD处理中可用于实现无GPN或化学侵蚀的高速钨膜生长。

    Photometrically modulated delivery of reagents
    13.
    发明授权
    Photometrically modulated delivery of reagents 有权
    光度调制递送试剂

    公开(公告)号：US08244482B2

    公开(公告)日：2012-08-14

    申请号：US13085476

    申请日：2011-04-12

    申请人： Jose I. Arno

    发明人： Jose I. Arno

    IPC分类号： H01L21/66

    CPC分类号： H01L22/20 ,  G01N21/3504 ,  Y10T137/0329 ,  Y10T137/2509 ,  Y10T137/87676

    摘要： A process system adapted for processing of or with a material therein. The process system includes: a sampling region for the material; an infrared photometric monitor constructed and arranged to transmit infrared radiation through the sampling region and to responsively generate an output signal correlative of the material in the sampling region, based on its interaction with the infrared radiation; and process control means arranged to receive the output of the infrared photometric monitor and to responsively control one or more process conditions in and/or affecting the process system.

    摘要翻译： 一种适于处理其中或与其中的材料一起的过程系统。 处理系统包括：材料的采样区域; 红外测光监测器，其构造和布置成基于其与红外辐射的相互作用，将红外辐射透射通过采样区域并且响应地产生与采样区域中的材料相关的输出信号; 以及过程控制装置，其布置成接收红外测光监视器的输出并且响应地控制处理系统中的一个或多个处理条件和/或影响处理系统。

    Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same
    14.
    发明授权
    Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same 有权
    流体存储和分配容器具有可测量的可验证的密封性，以及制造它的方法

    公开(公告)号：US08003391B2

    公开(公告)日：2011-08-23

    申请号：US11772157

    申请日：2007-06-30

    申请人： Paul J. Marganski ,  Jose I. Arno ,  Edward A. Sturm ,  Kristy L. Zaleta

    发明人： Paul J. Marganski ,  Jose I. Arno ,  Edward A. Sturm ,  Kristy L. Zaleta

    IPC分类号： G01N31/22

    CPC分类号： G01N31/22 ,  B65D79/02 ,  F17C2205/0338 ,  F17C2205/0391

    摘要： A fluid storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise associated with a colorimetric agent undergoing color change in exposure to fluid leaking from the vessel. Such shrink-wrap film may be applied to a portion of the vessel susceptible to leakage, or alternatively to the entire vessel, so that the film is colorimetrically effective to indicate the occurrence of a leakage event by visually perceptible change of color.

    摘要翻译： 一种流体存储和分配容器，其具有与其相关联的比色构件，该比色构件在暴露于容纳在容器中的气体的泄漏时有效地改变颜色。 比色构件可以由例如收缩包装性质的膜构成，其包含或以其它方式与在暴露于从容器泄漏的流体的颜色变化中的比色剂相关联。 这种收缩包装膜可以施加到易于泄漏的容器的一部分上，或者替代整个容器，使得该膜通过视觉上可察觉的颜色变化来指示泄漏事件的发生是比色的。

    TPIR APPARATUS FOR MONITORING TUNGSTEN HEXAFLUORIDE PROCESSING TO DETECT GAS PHASE NUCLEATION, AND METHOD AND SYSTEM UTILIZING SAME
    16.
    发明申请
    TPIR APPARATUS FOR MONITORING TUNGSTEN HEXAFLUORIDE PROCESSING TO DETECT GAS PHASE NUCLEATION, AND METHOD AND SYSTEM UTILIZING SAME 有权
    用于监测硝化氢处理以检测气相相关核的TPIR装置，以及使用其的方法和系统

    公开(公告)号：US20120114836A1

    公开(公告)日：2012-05-10

    申请号：US13375053

    申请日：2010-05-28

    申请人： Jose I. Arno ,  Joseph R. Despres ,  Shkelqim Letaj ,  Steven M. Lurcott ,  Thomas H. Baum ,  Peng Zou

    发明人： Jose I. Arno ,  Joseph R. Despres ,  Shkelqim Letaj ,  Steven M. Lurcott ,  Thomas H. Baum ,  Peng Zou

    IPC分类号： C23C16/52 ,  G05B13/02

    CPC分类号： C23C16/52 ,  C23C16/14 ,  C23C16/455 ,  G01N21/3504

    摘要： Apparatus and method for monitoring a vapor deposition installation in which a gas mixture can undergo gas phase nucleation (GPN) and/or chemically attack the product device, under process conditions supportive of such behavior. The apparatus includes a radiation source arranged to transmit source radiation through a sample of the gas mixture, and a thermopile detector assembly arranged to receive output radiation resulting from interaction of the source radiation with the gas mixture sample, and to responsively generate an output indicative of onset of the gas phase nucleation and/or chemical attack when such onset occurs. Such monitoring apparatus and methodology is useful in tungsten CVD processing to achieve high rate tungsten film growth without GPN or chemical attack.

    摘要翻译： 用于监测气相沉积装置的装置和方法，其中气体混合物可以在支持这种行为的工艺条件下经历气相成核（GPN）和/或化学侵蚀产品装置。 该装置包括被布置成通过气体混合物的样本传送源辐射的辐射源，以及布置成接收由源辐射与气体混合物样品的相互作用产生的输出辐射的热电堆检测器组件，并且响应地产生指示 发生这种发生时气相成核和/或化学侵蚀的发生。 这种监测装置和方法在钨CVD处理中可用于实现无GPN或化学侵蚀的高速钨膜生长。

    FLUID STORAGE AND DISPENSING VESSELS HAVING COLORIMETRICALLY VERIFIABLE LEAK-TIGHTNESS AND METHOD OF MAKING SAME
    17.
    发明申请
    FLUID STORAGE AND DISPENSING VESSELS HAVING COLORIMETRICALLY VERIFIABLE LEAK-TIGHTNESS AND METHOD OF MAKING SAME 有权
    流体储存和分配容器具有可彩色可见的透光性及其制造方法

    公开(公告)号：US20110284576A1

    公开(公告)日：2011-11-24

    申请号：US13204488

    申请日：2011-08-05

    申请人： Paul J. Marganski ,  Jose I. Arno ,  Edward A. Sturm ,  Kristy L. Zaleta

    发明人： Paul J. Marganski ,  Jose I. Arno ,  Edward A. Sturm ,  Kristy L. Zaleta

    IPC分类号： B65D79/02 ,  B67D7/06

    CPC分类号： G01N31/22 ,  B65D79/02 ,  F17C2205/0338 ,  F17C2205/0391

    摘要： A fluid storage and dispensing vessel having associated therewith a colorimetric member that is effective to change color in exposure to leakage of a gas contained in the vessel. The colorimetric member may be constituted by a film, e.g., of a shrink-wrap character, that contains or is otherwise associated with a colorimetric agent undergoing color change in exposure to fluid leaking from the vessel. Such shrink-wrap film may be applied to a portion of the vessel susceptible to leakage, or alternatively to the entire vessel, so that the film is colorimetrically effective to indicate the occurrence of a leakage event by visually perceptible change of color.

    摘要翻译： 一种流体存储和分配容器，其具有与其相关联的比色构件，该比色构件在暴露于容纳在容器中的气体的泄漏时有效地改变颜色。 比色构件可以由例如收缩包装性质的膜构成，其包含或以其它方式与在暴露于从容器泄漏的流体的颜色变化中的比色剂相关联。 这种收缩包装膜可以施加到易于泄漏的容器的一部分上，或者替代整个容器，使得该膜通过视觉上可察觉的颜色变化来指示泄漏事件的发生是比色的。

    Photometrically modulated delivery of reagents
    19.
    发明授权
    Photometrically modulated delivery of reagents 失效
    光度调制递送试剂

    公开(公告)号：US07711496B2

    公开(公告)日：2010-05-04

    申请号：US12120101

    申请日：2008-05-13

    申请人： Jose I. Arno

    发明人： Jose I. Arno

    IPC分类号： G01N21/35

    CPC分类号： H01L22/20 ,  G01N21/3504 ,  Y10T137/0329 ,  Y10T137/2509 ,  Y10T137/87676

    摘要： A process system adapted for processing of or with a material therein. The process system includes: a sampling region for the material; an infrared photometric monitor constructed and arranged to transmit infrared radiation through the sampling region and to responsively generate an output signal correlative of the material in the sampling region, based on its interaction with the infrared radiation; and process control means arranged to receive the output of the infrared photometric monitor and to responsively control one or more process conditions in and/or affecting the process system.

    摘要翻译： 一种适于处理其中或与其中的材料一起的过程系统。 处理系统包括：材料的采样区域; 红外测光监测器，其构造和布置成基于其与红外辐射的相互作用，将红外辐射透射通过采样区域并且响应地产生与采样区域中的材料相关的输出信号; 以及过程控制装置，其布置成接收红外测光监视器的输出并且响应地控制处理系统中的一个或多个处理条件和/或影响处理系统。

    MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR
    20.
    发明申请
    MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR 失效
    包含红外热敏探测器的监测系统

    公开(公告)号：US20090039266A1

    公开(公告)日：2009-02-12

    申请号：US12060686

    申请日：2008-04-01

    申请人： Jose I. Arno

    发明人： Jose I. Arno

    IPC分类号： G01J5/02

    CPC分类号： G01N21/3504 ,  G01J5/0007 ,  G01J5/0014 ,  G01J5/025 ,  G01J5/12 ,  H01L21/67253 ,  Y10T483/16

    摘要： The present invention relates to a semiconductor processing system that employs infrared-based thermopile detector for process control, by analyzing a material of interest, based on absorption of infrared light at a characteristic wavelength by such material. In one embodiment, an infrared light beam is transmitted through a linear transmission path from an infrared light source through a sampling region containing material of interest into the thermopile detector. The linear transmission path reduces the risk of signal loss during transmission of the infrared light. The transmission path of the infrared light may comprise a highly smooth and reflective inner surface for minimizing such signal loss during transmission.

    摘要翻译： 本发明涉及一种采用基于红外线热电堆检测器进行过程控制的半导体处理系统，通过利用这种材料对特征波长的红外光的吸收来分析感兴趣的材料。 在一个实施例中，红外光束通过线性传输路径从红外光源通过包含感兴趣的材料的采样区域传输到热电堆检测器中。 线性传输路径降低了红外光传输期间信号丢失的风险。 红外光的传输路径可以包括高度平滑和反射的内表面，用于在传输期间最小化这种信号损失。