公开(公告)号：US08587331B2

公开(公告)日：2013-11-19

申请号：US12979159

申请日：2010-12-27

申请人： Tommie E. Berry ,  Keith J. Breinlinger ,  Eric D. Hobbs ,  Marc Loranger ,  Alexander H. Slocum ,  Adrian S. Wilson

发明人： Tommie E. Berry ,  Keith J. Breinlinger ,  Eric D. Hobbs ,  Marc Loranger ,  Alexander H. Slocum ,  Adrian S. Wilson

IPC分类号： G01R31/00

CPC分类号： G01R31/2891

摘要： Devices under test (DUTs) can be tested in a test system that includes an aligner and test cells. A DUT can be moved into and clamped in an aligned position on a carrier in the aligner. In the align position, electrically conductive terminals of the DUT can be in a predetermined position with respect to carrier alignment features of the carrier. The DUT/carrier combination can then be moved from the aligner into one of the test cells, where alignment features of the carrier are mechanically coupled with alignment features of a contactor in the test cell. The mechanical coupling automatically aligns terminals of the DUT with probes of the contactor. The probes thus contact and make electrical connections with the terminals of the DUT. The DUT is then tested. The aligner and each of the test cells can be separate and independent devices so that a DUT can be aligned in the aligner while other DUTs, having previously been aligned to a carrier in the aligner, are tested in a test cell.

摘要翻译： 被测设备（DUT）可以在包括对准器和测试单元的测试系统中进行测试。 DUT可以被移动并被夹持在对准器中的载体上的对准位置。 在对准位置，DUT的导电端子可以相对于载体的载体对准特征处于预定位置。 然后可以将DUT /载体组合从对准器移动到测试单元之一中，其中载体的对准特征与测试单元中的接触器的对准特征机械耦合。 机械联轴器将DUT的端子自动对准接触器的探头。 探头因此与DUT的端子接触并进行电气连接。 然后测试DUT。 对准器和每个测试单元可以是分离和独立的器件，使得DUT可以在对准器中对准，而在测试单元中测试已经与对准器中的载体对准的其它DUT。

公开(公告)号：US07592821B2

公开(公告)日：2009-09-22

申请号：US11877466

申请日：2007-10-23

申请人： Benjamin N. Eldridge ,  Gary W. Grube ,  Eric D. Hobbs ,  Gaetan L. Mathieu ,  Makarand S. Shinde ,  Alexander H. Slocum ,  A. Nicholas Sporck ,  Thomas N. Watson

发明人： Benjamin N. Eldridge ,  Gary W. Grube ,  Eric D. Hobbs ,  Gaetan L. Mathieu ,  Makarand S. Shinde ,  Alexander H. Slocum ,  A. Nicholas Sporck ,  Thomas N. Watson

IPC分类号： G01R31/02

CPC分类号： G01R31/2874 ,  G01R31/2863 ,  G01R31/2889 ,  Y10T29/5313

摘要： A probe card assembly can include a probe head assembly having probes for contacting an electronic device to be tested. The probe head assembly can be electrically connected to a wiring substrate and mechanically attached to a stiffener plate. The wiring substrate can provide electrical connections to a testing apparatus, and the stiffener plate can provide structure for attaching the probe card assembly to the testing apparatus. The stiffener plate can have a greater mechanical strength than the wiring substrate and can be less susceptible to thermally induced movement than the wiring substrate. The wiring substrate may be attached to the stiffener plate at a central location of the wiring substrate. Space may be provided at other locations where the wiring substrate is attached to the stiffener plate so that the wiring substrate can expand and contract with respect to the stiffener plate.

摘要翻译： 探针卡组件可以包括具有用于接触要测试的电子设备的探针的探针头组件。 探针头组件可以电连接到布线基板并且机械地附接到加强板。 布线基板可以提供到测试装置的电连接，并且加强板可以提供用于将探针卡组件附接到测试装置的结构。 加强板可以具有比布线基板更大的机械强度，并且可以比布线基板更不易受热引起的移动。 布线基板可以在布线基板的中心位置处附接到加强板。 可以在将布线基板附接到加强板的其他位置处设置空间，使得布线基板能够相对于加强板膨胀和收缩。

公开(公告)号：US20090158586A1

公开(公告)日：2009-06-25

申请号：US12343260

申请日：2008-12-23

申请人： Eric D. Hobbs ,  Benjamin N. Eldridge ,  Lunyu Ma ,  Gaetan L. Mathieu ,  Steven T. Murphy ,  Makarand S. Shinde ,  Alexander H. Slocum

发明人： Eric D. Hobbs ,  Benjamin N. Eldridge ,  Lunyu Ma ,  Gaetan L. Mathieu ,  Steven T. Murphy ,  Makarand S. Shinde ,  Alexander H. Slocum

IPC分类号： G01R3/00

CPC分类号： G01R31/2886 ,  G01R1/073 ,  G01R31/31905 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49147 ,  Y10T29/49208 ,  Y10T29/49222

摘要： A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.

摘要翻译： 探针卡组件包括附接到安装组件的多个探针基板。 每个探针衬底包括一组探针，并且每个探针衬底上的探针组合在一起组成一组探针，用于接触待测试的器件。 调整机构构造成赋予每个探针基板以相对于安装组件分别移动每个基板的力。 调节机构可以将每个探针基板转换成“x”，“y”和/或“z”方向，并且可以进一步围绕前述方向上的任何一个或多个旋转每个探针基板。 调节机构可以进一步改变一个或多个探针基板的形状。 因此，探针可以相对于要测试的装置上的触点对准和/或平坦化。

公开(公告)号：US20080036480A1

公开(公告)日：2008-02-14

申请号：US11464593

申请日：2006-08-15

申请人： Eric D. Hobbs ,  Christopher D. McCoy ,  James M. Porter ,  Alexander H. Slocum

发明人： Eric D. Hobbs ,  Christopher D. McCoy ,  James M. Porter ,  Alexander H. Slocum

IPC分类号： G01R31/02

CPC分类号： G01R31/2891 ,  G01R31/31905

摘要： A probe card assembly can comprise a support structure to which a plurality of probes can be directly or indirectly attached. The probes can be disposed to contact an electronic device to be tested. The probe card assembly can further comprise actuators, which can be configured to change selectively an attitude of the support structure with respect to a reference structure. The probe card assembly can also comprise a plurality of lockable compliant structures. While unlocked, the lockable compliant structures can allow the support structure to move with respect to the reference structure. While locked, however, the compliant structures can provide mechanical resistance to movement of the support structure with respect to the reference structure.

摘要翻译： 探针卡组件可以包括支撑结构，多个探针可以直接或间接附接到支撑结构。 可以将探针设置成接触要测试的电子设备。 探针卡组件还可以包括致动器，其可以被配置为相对于参考结构选择性地改变支撑结构的姿态。 探针卡组件还可以包括多个可锁定的柔顺结构。 当解锁时，可锁定的柔性结构可以允许支撑结构相对于参考结构移动。 然而，当锁定时，柔性结构可以提供对支撑结构相对于参考结构的移动的机械阻力。

公开(公告)号：US09702904B2

公开(公告)日：2017-07-11

申请号：US13288925

申请日：2011-11-03

申请人： Keith J. Breinlinger ,  Benjamin N. Eldridge ,  Eric D. Hobbs ,  Michael J. Armstrong ,  John K. Gritters

发明人： Keith J. Breinlinger ,  Benjamin N. Eldridge ,  Eric D. Hobbs ,  Michael J. Armstrong ,  John K. Gritters

IPC分类号： G01R1/067 ,  H01R13/24 ,  G01R1/073 ,  H01R43/16

CPC分类号： G01R1/06716 ,  G01R1/06733 ,  G01R1/07357 ,  H01R13/2407 ,  H01R43/16 ,  Y10T29/49204

摘要： An electrically conductive contact element can include a first base and a second base with elongate, spaced apart leaves between the bases. A first end of each leaf can be coupled to the first base and an opposite second end of the leaf can be coupled to the second base. A body of the leaf between the first end and the second end can be sufficiently elongate to respond to a force through said contact element substantially parallel with the first axis and the second axis by first compressing axially while said force is less than a buckling force and then bending while said force is greater than the buckling force.

公开(公告)号：US20120146679A1

公开(公告)日：2012-06-14

申请号：US12967302

申请日：2010-12-14

申请人： Kevin S. Chang ,  Eric D. Hobbs

发明人： Kevin S. Chang ,  Eric D. Hobbs

IPC分类号： G01R31/00

CPC分类号： G01R1/07378 ,  G01R31/2891

摘要： A stiffener for a probe card assembly can include decoupling mechanisms disposed within radial arms of the stiffener. The decoupling mechanisms can be compliant in a direction along a radial direction of said radial arm and rigid in a direction perpendicular to said radial arm. The decoupling mechanisms can decouple the stiffener from thermally induced differential radial contraction and expansion of the stiffener relative to the cardholder to which the stiffener is mounted. This can reduce thermally-induced vertical translation of the probe card assembly.

摘要翻译： 用于探针卡组件的加强件可以包括设置在加强件的径向臂内的去耦机构。 去耦机构可以沿着所述径向臂的径向的方向并且在垂直于所述径向臂的方向上是刚性的。 解耦机构可以将加强件与加热元件相对于加强件安装到的卡座上的热引起的差分径向收缩和膨胀相分离。 这可以减少探针卡组件的热诱导垂直平移。

公开(公告)号：US20110128029A1

公开(公告)日：2011-06-02

申请号：US13022443

申请日：2011-02-07

申请人： Eric D. Hobbs ,  Andrew W. McFarland

发明人： Eric D. Hobbs ,  Andrew W. McFarland

IPC分类号： G01R31/00

CPC分类号： G01R1/07378

摘要： A stiffener assembly for use with testing devices is provided herein. In some embodiments, a stiffener assembly for use with testing devices can be part of a probe card assembly that can include a stiffener assembly comprising an upper stiffener coupled to a plurality of lower stiffeners; and a substrate constrained between the upper stiffener and the plurality of lower stiffeners, the stiffener assembly restricting non-planar flex of the substrate while facilitating radial movement of the substrate with respect to the stiffener assembly.

摘要翻译： 本文提供了一种与测试装置一起使用的加强装置。 在一些实施例中，用于与测试装置一起使用的加强件组件可以是探针卡组件的一部分，其可以包括加强件组件，该加强件组件包括联接到多个下加强件的上加强件; 以及限制在所述上加强件和所述多个下加强件之间的衬底，所述加强件组件限制所述衬底的非平面弯曲，同时促进所述衬底相对于所述加强件组件的径向移动。

公开(公告)号：US07884627B2

公开(公告)日：2011-02-08

申请号：US11860406

申请日：2007-09-24

申请人： Eric D. Hobbs ,  Andrew W. McFarland

发明人： Eric D. Hobbs ,  Andrew W. McFarland

IPC分类号： G01R31/02

CPC分类号： G01R1/07378

摘要： A stiffener assembly for use with testing devices is provided herein. In some embodiments, a stiffener assembly for use with testing devices can be part of a probe card assembly that can include a stiffener assembly comprising an upper stiffener coupled to a plurality of lower stiffeners; and a substrate constrained between the upper stiffener and the plurality of lower stiffeners, the stiffener assembly restricting non-planar flex of the substrate while facilitating radial movement of the substrate with respect to the stiffener assembly.

摘要翻译： 本文提供了一种与测试装置一起使用的加强装置。 在一些实施例中，用于与测试装置一起使用的加强件组件可以是探针卡组件的一部分，其可以包括加强件组件，该加强件组件包括联接到多个下加强件的上加强件; 以及限制在所述上加强件和所述多个下加强件之间的衬底，所述加强件组件限制所述衬底的非平面弯曲，同时促进所述衬底相对于所述加强件组件的径向移动。

公开(公告)号：US20100264949A1

公开(公告)日：2010-10-21

申请号：US12423927

申请日：2009-04-15

申请人： Eric D. Hobbs

发明人： Eric D. Hobbs

IPC分类号： G01R31/02 ,  G01R1/073

CPC分类号： G01R31/2889 ,  G01R31/2891

摘要： A flexure band can comprise structures configured to have elastic properties. Such a band can be stretched but will return generally to its original shape after forces that stretched the band are removed. The flexure band can hold one or more temperature control devices against a peripheral edge of a stiffening frame in a probe card assembly, or the flexure band can itself be a temperature control device. The band can be made of a metal that can be selected to impart one or more of the following properties: low thermal conductivity, high specific heat, generates little to no appreciable contamination, and/or usable over a wide range of temperatures. A material can be added to the band as a full or partial coating that enhances or adds one or more of the above-mentioned possible properties of the metal band.

摘要翻译： 弯曲带可以包括构造成具有弹性特性的结构。 这样的带可以被拉伸，但是在拉伸带的力被去除之后通常将返回到其原始形状。 挠曲带可以将一个或多个温度控制装置保持在探针卡组件中的加强框架的周边边缘上，或者挠曲带本身可以是温度控制装置。 带可以由可以选择以赋予以下特性中的一种或多种的金属制成：低导热性，高比热，几乎不产生明显的污染，和/或可在宽的温度范围内使用。 可以将材料作为增强或增加金属带的上述可能性质中的一种或多种的全部或部分涂层添加到带中。

公开(公告)号：US07732975B1

公开(公告)日：2010-06-08

申请号：US12345292

申请日：2008-12-29

申请人： Eric D. Hobbs ,  Gaetan L. Mathieu

发明人： Eric D. Hobbs ,  Gaetan L. Mathieu

IPC分类号： H02N1/00

CPC分类号： H02N1/006

摘要： A gap-closing actuator includes a stator having one or more first electrodes, a mover having one or more second electrodes interposed among the first electrodes, and a biasing mechanism for applying a non-capacitive bias to the mover for urging the mover to move in a desired direction with respect to the stator. The non-capacitive bias is different from a capacitive force generated between the first and second electrodes when the gap-closing actuator is in operation.

摘要翻译： 间隙关闭致动器包括具有一个或多个第一电极的定子，具有插入在第一电极中的一个或多个第二电极的移动器，以及用于向移动器施加非电容性偏压以推动移动器移动的偏置机构 相对于定子的期望方向。 当间隙关闭致动器运行时，非电容性偏压不同于在第一和第二电极之间产生的电容性力。