公开(公告)号：US09105438B2

公开(公告)日：2015-08-11

申请号：US13891545

申请日：2013-05-10

Applicant: FEI Company

Inventor： Tom Miller ,  Sean Kellogg ,  Shouyin Zhang ,  Mostafa Maazouz ,  Anthony Graupera

IPC: H01J37/08 ,  H01J37/02 ,  H01J37/16 ,  H01J37/18

CPC classification number: H01J37/08 ,  H01J37/026 ,  H01J37/10 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/0492 ,  H01J2237/08 ,  H01J2237/18 ,  H01J2237/188 ,  H01J2237/31713 ,  H01J2237/31749

Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.

Abstract translation: 申请人已经发现，通过高能离子和中性气体分子之间的电荷交换相互作用产生的高能中性粒子使用等离子体源在离子束系统中到达样品。 能量中性产生离子束冲击点的二次电子。 解决问题的方法包括等离子体源下面的差分泵浦腔，以减少离子与气体相互作用的机会。

公开(公告)号：US20130320229A1

公开(公告)日：2013-12-05

申请号：US13891545

申请日：2013-05-10

Applicant: FEI Company

Inventor： Tom Miller ,  Sean Kellogg ,  Shouyin Zhang ,  Mostafa Maazouz ,  Anthony Graupera

IPC: H01J37/08

CPC classification number: H01J37/08 ,  H01J37/026 ,  H01J37/10 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/0492 ,  H01J2237/08 ,  H01J2237/18 ,  H01J2237/188 ,  H01J2237/31713 ,  H01J2237/31749

Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.

公开(公告)号：US20130187058A1

公开(公告)日：2013-07-25

申请号：US13648887

申请日：2012-10-10

Applicant: FEI COMPANY

Inventor： Lynwood W. Swanson ,  Gregory A. Schwind ,  Sean Kellogg ,  Kun Liu

IPC: G01T1/29

CPC classification number: H01J37/00 ,  G01T1/29 ,  H01J37/02 ,  H01J37/073 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/065

Abstract: The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor β function is determined by series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.

Abstract translation: 发射极的状态可以通过测量电流如何随提取电压而变化来确定。 场因子β函数由在不同条件下发射的带电粒子的一系列相对简单的测量来确定。 然后可以使用场因子来确定发射的导出特性，在现有技术中难以确定，而不需要从聚焦柱移除源并将其安装在专门的装置中。 关系由源配置确定，并且已经被发现与发射体形状无关，因此发射体形状随着时间的推移而被确定，而不必确定发射体形状，而不必重新定义发射体形状之间的关系 场因子和一系列相对简单的测量，以及场因子与其他发射参数之间的关系。