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    Mechanically-stable electron source
    1.
    发明授权
    Mechanically-stable electron source 有权

    公开(公告)号：US11749492B2

    公开(公告)日：2023-09-05

    申请号：US17654759

    申请日：2022-03-14

    Applicant: FEI Company

    Inventor： Kun Liu ,  Gregory A. Schwind ,  Alan S. Bahm

    IPC: H01J37/073 ,  H01J9/02

    CPC classification number: H01J37/073 ,  H01J9/025 ,  H01J2237/06341

    Abstract: An electron source has an insulating base, a pair of conductive terminals, an insulating support member, a drift isolation member, an emitter-cathode, and one or more heating elements. The conductive terminals are exposed from a first surface of the insulating base. The insulating support member extends from the first surface of the insulating base. The drift isolation member is disposed at an end of the insulating support member remote from the insulating base. The emitter-cathode is coupled to the drift isolation member. The one or more heating elements are coupled to the conductive terminals and the drift isolation member. The combination of the drift isolation member with the insulating support member can prevent stress-induced drift from impacting position of the emitter-cathode, thereby improving the mechanical stability of the electron source.

    Determination of emission parameters from field emission sources
    2.
    发明授权
    Determination of emission parameters from field emission sources 有权
    确定场排放源的排放参数

    公开(公告)号：US08779376B2

    公开(公告)日：2014-07-15

    申请号：US13648887

    申请日：2012-10-10

    Applicant: FEI Company

    Inventor： Lynwood W. Swanson ,  Gregory A. Schwind ,  Sean Kellogg ,  Kun Liu

    IPC: G01T1/29 ,  H01J37/00 ,  H01J37/02

    CPC classification number: H01J37/00 ,  G01T1/29 ,  H01J37/02 ,  H01J37/073 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/065

    Abstract: The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor β function is determined by series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.

    Abstract translation: 发射极的状态可以通过测量电流如何随提取电压而变化来确定。 场因子 功能通过在不同条件下发射的带电粒子的一系列相对简单的测量来确定。 然后可以使用场因子来确定发射的导出特性，在现有技术中难以确定，而不需要从聚焦柱移除源并将其安装在专门的装置中。 关系由源配置确定，并且已经被发现与发射体形状无关，因此发射体形状随着时间的推移而被确定，而不必确定发射体形状，而不必重新定义发射体形状之间的关系 场因子和一系列相对简单的测量，以及场因子与其他发射参数之间的关系。

    MULTI SPECIES ION SOURCE
    5.
    发明申请
    MULTI SPECIES ION SOURCE 审中-公开
    多品种离子源

    公开(公告)号：US20160104599A1

    公开(公告)日：2016-04-14

    申请号：US14973424

    申请日：2015-12-17

    Applicant: FEI Company

    Inventor： Gregory A. Schwind ,  N. William Parker

    IPC: H01J37/21 ,  H01J37/08

    CPC classification number: H01J37/21 ,  H01J27/205 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082 ,  H01J2237/0827 ,  H01J2237/31749

    Abstract: A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.

    Abstract translation: 具有气室的高亮度离子源包括多个通道，其中多个通道各自具有不同的气体。 电子束通过一个通道以提供某种物质的离子用于处理样品。 可以通过将电子引导到具有不同气体种类的另一个通道并用第二种离子的离子处理样品来快速改变离子种类。 偏转板用于将电子束对准气体室，从而允许聚焦离子束中的气体物质快速切换。

    MECHANICALLY-STABLE ELECTRON SOURCE
    6.
    发明申请
    MECHANICALLY-STABLE ELECTRON SOURCE 有权

    公开(公告)号：US20220293387A1

    公开(公告)日：2022-09-15

    申请号：US17654759

    申请日：2022-03-14

    Applicant: FEI Company

    Inventor： Kun Liu ,  Gregory A. Schwind ,  Alan S. Bahm

    IPC: H01J37/073 ,  H01J9/02

    Abstract: An electron source has an insulating base, a pair of conductive terminals, an insulating support member, a drift isolation member, an emitter-cathode, and one or more heating elements. The conductive terminals are exposed from a first surface of the insulating base. The insulating support member extends from the first surface of the insulating base. The drift isolation member is disposed at an end of the insulating support member remote from the insulating base. The emitter-cathode is coupled to the drift isolation member. The one or more heating elements are coupled to the conductive terminals and the drift isolation member. The combination of the drift isolation member with the insulating support member can prevent stress-induced drift from impacting position of the emitter-cathode, thereby improving the mechanical stability of the electron source.

    Multi Species Ion Source
    8.
    发明申请
    Multi Species Ion Source 审中-公开
    多种离子源

    公开(公告)号：US20140001372A1

    公开(公告)日：2014-01-02

    申请号：US13902386

    申请日：2013-05-24

    Applicant: FEI Company

    Inventor： Gregory A. Schwind ,  N. William Parker

    IPC: H01J27/20

    CPC classification number: H01J37/21 ,  H01J27/205 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/082 ,  H01J2237/0827 ,  H01J2237/31749

    Abstract: A high brightness ion source with a gas chamber includes multiple channels, wherein the multiple channels each have a different gas. An electron beam is passed through one of the channels to provide ions of a certain species for processing a sample. The ion species can be rapidly changed by directing the electrons into another channel with a different gas species and processing a sample with ions of a second species. Deflection plates are used to align the electron beam into the gas chamber, thereby allowing the gas species in the focused ion beam to be switched quickly.

    Abstract translation: 具有气室的高亮度离子源包括多个通道，其中多个通道各自具有不同的气体。 电子束通过一个通道以提供某种物质的离子用于处理样品。 可以通过将电子引导到具有不同气体种类的另一个通道并用第二种离子的离子处理样品来快速改变离子种类。 偏转板用于将电子束对准气体室，从而允许聚焦离子束中的气体物质快速切换。

    Collision ionization ion source
    9.
    发明授权
    Collision ionization ion source 有权

    公开(公告)号：US09899181B1

    公开(公告)日：2018-02-20

    申请号：US15405139

    申请日：2017-01-12

    Applicant: FEI Company

    Inventor： Gregory A. Schwind ,  Aurelien Philippe Jean Maclou Botman ,  Sean Kellogg ,  Leon van Kouwen ,  Luigi Mele

    IPC: H01J27/20 ,  H01J37/26 ,  H01J37/08

    CPC classification number: H01J27/20 ,  H01J27/205 ,  H01J37/08 ,  H01J37/26 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/082

    Abstract: A collision ionization ion source comprising: A pair of stacked plates, sandwiched about an intervening gap; An input zone (aperture), provided in a first of said plates, to admit an input beam of charged particles to said gap; An output zone (aperture), located opposite said input zone and provided in the second of said plates, to allow emission of a flux of ions from said gap; A gas space, between said input and output zones, in which gas can be ionized by said input beam so as to produce said ions; A supply duct in said gap, for supplying a flow of said gas to said gas space, and comprising: An emergence orifice, opening into said gas space; An entrance orifice, connectable to a gas supply, wherein said duct comprises at least one transition region between said entrance orifice and said emergence orifice in which an inner height of said duct, measured normal to the plates, decreases from a first height value to a second height value.

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