-
公开(公告)号：US20170363549A1
公开(公告)日：2017-12-21
申请号：US15615494
申请日：2017-06-06
Applicant: FEI Company
Inventor： Konstantin Balashov , Tom Miller
CPC classification number: H01L22/12 , G01N1/28 , G01N1/32 , G01N9/24 , G01N23/20025 , G01N23/2204 , G03F7/70483 , G03F7/70616 , G03F7/7075
Abstract: Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.
-
Patent Agency Ranking
公开(公告)号：US08624206B2
公开(公告)日：2014-01-07
申请号：US13655129
申请日：2012-10-18
Applicant: FEI Company
Inventor： Tom Miller , Gene Mirro , Cornelis Sander Kooijman , Hendrik Jan de Vos
IPC: H01J3/26
CPC classification number: H01J3/26 , H01J37/1472 , H01J37/1477 , H01J37/3026 , H01J2237/1504 , H01J2237/1518 , H01J2237/1526 , H01J2237/30416 , H01J2237/3045 , H01J2237/30461
Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.
Abstract translation: 引导带电粒子束的改进方法，其补偿带电粒子通过改变一个或多个偏转器信号而穿过系统所需要的时间。 根据本发明的一个实施例，在数模（D / A）转换之前，将数字滤波器应用于扫描图案，以便减少或消除可能由TOF误差引起的过拍影响。 在其他实施例中，也可以使用模拟滤波器或具有较低带宽的信号放大器的使用来补偿TOF误差。 通过改变扫描图案，可以显着减少或消除超拍效果。
-
公开(公告)号：US09105438B2
公开(公告)日：2015-08-11
申请号：US13891545
申请日：2013-05-10
Applicant: FEI Company
Inventor： Tom Miller , Sean Kellogg , Shouyin Zhang , Mostafa Maazouz , Anthony Graupera
CPC classification number: H01J37/08 , H01J37/026 , H01J37/10 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/3007 , H01J37/3171 , H01J2237/0492 , H01J2237/08 , H01J2237/18 , H01J2237/188 , H01J2237/31713 , H01J2237/31749
Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.
Abstract translation: 申请人已经发现，通过高能离子和中性气体分子之间的电荷交换相互作用产生的高能中性粒子使用等离子体源在离子束系统中到达样品。 能量中性产生离子束冲击点的二次电子。 解决问题的方法包括等离子体源下面的差分泵浦腔，以减少离子与气体相互作用的机会。
-
公开(公告)号：US20130320229A1
公开(公告)日：2013-12-05
申请号：US13891545
申请日：2013-05-10
Applicant: FEI Company
Inventor： Tom Miller , Sean Kellogg , Shouyin Zhang , Mostafa Maazouz , Anthony Graupera
IPC: H01J37/08
CPC classification number: H01J37/08 , H01J37/026 , H01J37/10 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/3007 , H01J37/3171 , H01J2237/0492 , H01J2237/08 , H01J2237/18 , H01J2237/188 , H01J2237/31713 , H01J2237/31749
Abstract: Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.
-
公开(公告)号：US10312162B2
公开(公告)日：2019-06-04
申请号：US15615494
申请日：2017-06-06
Applicant: FEI Company
Inventor： Konstantin Balashov , Tom Miller
IPC: H01L21/66 , G01N9/24 , G01N1/28 , G03F7/20 , G01N23/20025 , G01N23/2204
Abstract: Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.
-
公开(公告)号：US20130092826A1
公开(公告)日：2013-04-18
申请号：US13655129
申请日：2012-10-18
Applicant: FEI Company
Inventor： Tom Miller , Gene Mirro , Cornelis Sander Kooijman , Hendrik Jan de Vos
IPC: H01J3/26
CPC classification number: H01J3/26 , H01J37/1472 , H01J37/1477 , H01J37/3026 , H01J2237/1504 , H01J2237/1518 , H01J2237/1526 , H01J2237/30416 , H01J2237/3045 , H01J2237/30461
Abstract: An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.
Abstract translation: 引导带电粒子束的改进方法，其补偿带电粒子通过改变一个或多个偏转器信号而穿过系统所需的时间。 根据本发明的一个实施例，在数模（D / A）转换之前，将数字滤波器应用于扫描图案，以便减少或消除可能由TOF误差引起的过拍影响。 在其他实施例中，也可以使用模拟滤波器或具有较低带宽的信号放大器的使用来补偿TOF误差。 通过改变扫描图案，可以显着减少或消除超拍效果。
-
-
-
-
-
Search Results
6
records
(took 0.01 seconds)
