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11.发明授权公开(公告)号：US09298111B2
公开(公告)日：2016-03-29
申请号：US13405882
申请日：2012-02-27
申请人： Viktor Kulitzki , Bernhard Gellrich , Stefan Xalter , Yim-Bun Patrick Kwan , Peter Deufel , Andreas Wurmbrand
发明人： Viktor Kulitzki , Bernhard Gellrich , Stefan Xalter , Yim-Bun Patrick Kwan , Peter Deufel , Andreas Wurmbrand
CPC分类号： G03F7/70916 , G02B7/00 , G03F7/70233 , G03F7/70808 , G03F7/70825 , G03F7/70891
摘要： An optical arrangement includes a multiplicity of optical elements and a carrier structure which carries the optical elements. The carrier structure is composed of at least two releasably interconnected modules. Each module is composed of at least one carrier structure subelement. A subhousing is produced by a multiplicity of carrier structure subelements and/or modules. The subhousing has a geometry that varies, at least in regions, in correspondence to a usable beam path in the projection exposure apparatus, the usable beam path being defined as an envelope of all light bundles which can propagate from all field points in a field plane to an image plane of the projection exposure apparatus. A projection exposure apparatus for EUV lithography includes such an optical arrangement.
摘要翻译： 光学装置包括多个光学元件和承载光学元件的载体结构。 载体结构由至少两个可释放地互连的模块组成。 每个模块由至少一个载体结构子元件组成。 子载体由多个载体结构子元件和/或模块产生。 子结构具有至少在区域中对应于投影曝光装置中的可用光束路径而变化的几何形状，可用光束路径被定义为可以在场平面中从所有场点传播的所有光束的包络 到投影曝光装置的像平面。 用于EUV光刻的投影曝光装置包括这种光学装置。
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公开(公告)号：US20120188523A1
公开(公告)日：2012-07-26
申请号：US13405882
申请日：2012-02-27
申请人： Viktor Kulitsky , Bernhard Gellrich , Stefan Xalter , Yim-Bun Patrick Kwan , Peter Deufel , Andreas Wurmbrand
发明人： Viktor Kulitsky , Bernhard Gellrich , Stefan Xalter , Yim-Bun Patrick Kwan , Peter Deufel , Andreas Wurmbrand
CPC分类号： G03F7/70916 , G02B7/00 , G03F7/70233 , G03F7/70808 , G03F7/70825 , G03F7/70891
摘要： An optical arrangement includes a multiplicity of optical elements and a carrier structure which carries the optical elements. The carrier structure is composed of at least two releasably interconnected modules. Each module is composed of at least one carrier structure subelement. A subhousing is produced by a multiplicity of carrier structure subelements and/or modules. The subhousing has a geometry that varies, at least in regions, in correspondence to a usable beam path in the projection exposure apparatus, the usable beam path being defined as an envelope of all light bundles which can propagate from all field points in a field plane to an image plane of the projection exposure apparatus. A projection exposure apparatus for EUV lithography includes such an optical arrangement.
摘要翻译： 光学装置包括多个光学元件和承载光学元件的载体结构。 载体结构由至少两个可释放地互连的模块组成。 每个模块由至少一个载体结构子元件组成。 子载体由多个载体结构子元件和/或模块产生。 子结构具有至少在区域中对应于投影曝光装置中的可用光束路径而变化的几何形状，可用光束路径被定义为可以在场平面中从所有场点传播的所有光束的包络 到投影曝光装置的像平面。 用于EUV光刻的投影曝光装置包括这种光学装置。
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公开(公告)号：US08089707B2
公开(公告)日：2012-01-03
申请号：US12700351
申请日：2010-02-04
申请人： Hermann Bieg , Marcus Will , Thomas Bischoff , Yim-Bun Patrick Kwan , Uy-Liem Nguyen , Stefan Xalter , Michael Muehlbeyer
发明人： Hermann Bieg , Marcus Will , Thomas Bischoff , Yim-Bun Patrick Kwan , Uy-Liem Nguyen , Stefan Xalter , Michael Muehlbeyer
IPC分类号： G02B9/00
CPC分类号： G03F7/70191 , G02B5/005 , G02B13/143 , G02B17/02 , G03F7/7025 , G03F7/70825 , G21K1/04 , G21K1/067
摘要： The invention relates to an optical imaging device, in particular an objective 1 for microlithography in the field of EUVL for producing semiconductor components, having a beam path 2, a plurality of optical elements 3 and a diaphragm device 7 with an adjustable diaphragm opening shape. The diaphragm device has a diaphragm store 7a, 7b with a plurality of different diaphragm openings 6 with fixed shapes in each case, which can be introduced into the beam path 2.
摘要翻译： 本发明涉及一种光学成像装置，特别是用于制造半导体元件的EUVL领域的微光刻物镜1，其具有光束路径2，多个光学元件3和具有可调光阑开口形状的光阑装置7。 隔膜装置具有隔膜存储器7a，7b，其具有多个不同的隔膜开口6，每个隔膜开口6在每种情况下具有固定的形状，可以将其引入光束路径2。
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公开(公告)号：US07929227B2
公开(公告)日：2011-04-19
申请号：US12829491
申请日：2010-07-02
申请人： Hermann Bieg , Karl-Eugen Aubele , Yim-Bun Patrick Kwan , Stefan Xalter , Martin Schmidt , Saverio Sanvido , Uy-Liem Nguyen
发明人： Hermann Bieg , Karl-Eugen Aubele , Yim-Bun Patrick Kwan , Stefan Xalter , Martin Schmidt , Saverio Sanvido , Uy-Liem Nguyen
IPC分类号： G02B7/02
CPC分类号： G02B7/02 , G02B7/005 , G02B7/008 , G02B7/021 , G02B7/023 , G02B7/026 , G02B7/028 , G02B7/1827
摘要： An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement.
摘要翻译： 一种光学组件，其以特别是在物镜或照明或曝光系统中的布置被支撑在壳体的内部，其包括至少一个光学元件，特别是透镜，反射镜或孔，其中所述至少一个元件 由至少一个操纵器影响的特征在于，所述至少一个操纵器布置在壳体的外部或者通过解耦装置的完全或大部分分离的保持装置中，并且提供 操纵器和元件之间的有效耦合将被装置的内部中的操纵器影响。
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公开(公告)号：US08018664B2
公开(公告)日：2011-09-13
申请号：US10598014
申请日：2004-04-20
申请人： Stefan Xalter , Peter Deufel , Yim Bun Patrick Kwan , Bernard Stommen , Herman Soemers , Franz Van Deuren , Paul Peter Anne Brom
发明人： Stefan Xalter , Peter Deufel , Yim Bun Patrick Kwan , Bernard Stommen , Herman Soemers , Franz Van Deuren , Paul Peter Anne Brom
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G01M11/04 , G02B7/00 , G02B7/182 , G03F7/70808
摘要： A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6′. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6′ and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.
摘要翻译： 壳体结构具有框架结构1，其上经由连接元件7布置有多个保持在安装件6或结构模块6'中的光学元件5。 光学元件5以其安装件6或结构模块6'和连接元件7可拆卸地连接到框架结构1，使得在安装状态下，它们作为轴承单元集成在框架结构1中。
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公开(公告)号：US20110216428A1
公开(公告)日：2011-09-08
申请号：US13108549
申请日：2011-05-16
申请人： Stefan Xalter , Peter Deufel , Yim Bun Patrick Kwan , Bernard Stommen , Herman Soemers , Franz Van Deuren , Paul Peter Anne Brom
发明人： Stefan Xalter , Peter Deufel , Yim Bun Patrick Kwan , Bernard Stommen , Herman Soemers , Franz Van Deuren , Paul Peter Anne Brom
IPC分类号： G02B7/182
CPC分类号： G03F7/70825 , G01M11/04 , G02B7/00 , G02B7/182 , G03F7/70808
摘要： A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6′. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6′ and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.
摘要翻译： 壳体结构具有框架结构1，其上经由连接元件7布置有多个保持在安装件6或结构模块6'中的光学元件5。 光学元件5以其安装件6或结构模块6'和连接元件7可拆卸地连接到框架结构1，使得在安装状态下，它们作为轴承单元集成在框架结构1中。
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公开(公告)号：US20110194091A1
公开(公告)日：2011-08-11
申请号：US13023840
申请日：2011-02-09
IPC分类号： G03B27/54
CPC分类号： G03F7/70916 , G03F7/70833 , G03F7/70883
摘要： An optical arrangement has a plurality of optical elements capable of transmitting a beam. A partial housing is provided which extends from a surface of an optical element in the direction of the beam emanating from the optical element, or of the beam incident on the optical element, and whose shape is adapted to the shape of the beam. The partial housing is surrounded at least partially by a measurement structure which is mechanically decoupled therefrom. The measurement structure has at least one sensor.
摘要翻译： 光学装置具有能够透射光束的多个光学元件。 提供了从光学元件的表面沿着从光学元件发射的光束的方向或入射在光学元件上的光束延伸的部分壳体，并且其形状适合于光束的形状。 至少部分地由部分壳体被与其机械分离的测量结构所包围。 测量结构具有至少一个传感器。
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公开(公告)号：US09316930B2
公开(公告)日：2016-04-19
申请号：US13023840
申请日：2011-02-09
CPC分类号： G03F7/70916 , G03F7/70833 , G03F7/70883
摘要： An optical arrangement has a plurality of optical elements capable of transmitting a beam. A partial housing is provided which extends from a surface of an optical element in the direction of the beam emanating from the optical element, or of the beam incident on the optical element, and whose shape is adapted to the shape of the beam. The partial housing is surrounded at least partially by a measurement structure which is mechanically decoupled therefrom. The measurement structure has at least one sensor.
摘要翻译： 光学装置具有能够透射光束的多个光学元件。 提供了从光学元件的表面沿着从光学元件发射的光束的方向或入射在光学元件上的光束延伸的部分壳体，并且其形状适合于光束的形状。 至少部分地由部分壳体被与其机械分离的测量结构所包围。 测量结构具有至少一个传感器。
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公开(公告)号：US20090185148A1
公开(公告)日：2009-07-23
申请号：US12358722
申请日：2009-01-23
申请人： Yim-Bun Patrick Kwan , Stefan Xalter , Herman M.J.R. Soemers , R. de Weerdt , A.F. Benschop , Bernard Stommen , Frans van Deuren
发明人： Yim-Bun Patrick Kwan , Stefan Xalter , Herman M.J.R. Soemers , R. de Weerdt , A.F. Benschop , Bernard Stommen , Frans van Deuren
CPC分类号： G03F7/70916 , G02B7/023 , G03F7/70141 , G03F7/70258 , G03F7/70266 , G03F7/70825
摘要： The disclosure relates to a support structure for an optical element and an optical element module including such a support structure. The disclosure also relates to a method of supporting an optical element. The disclosure may be used in the context of photolithography processes for fabricating microelectronic devices, such as semiconductor devices, or in the context of fabricating devices, such as masks or reticles, used during such photolithography processes.
摘要翻译： 本发明涉及一种用于光学元件的支撑结构和包括这种支撑结构的光学元件模块。 本公开还涉及一种支持光学元件的方法。 本公开可以用于制造微电子器件（例如半导体器件）的光刻工艺，或者在制造在这种光刻工艺期间使用的器件（例如掩模或掩模版）的上下文中。
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公开(公告)号：US20090052066A1
公开(公告)日：2009-02-26
申请号：US11844232
申请日：2007-08-23
IPC分类号： G02B7/09
CPC分类号： G02B7/005 , G02B7/08 , G03F7/70258 , G03F7/70266 , G03F7/70825
摘要： Actuator devices, as well as related systems and methods, are disclosed. In some embodiments, the devices, systems and methods are within the field of microlithography.
摘要翻译： 致动器装置以及相关系统和方法被公开。 在一些实施例中，装置，系统和方法在微光刻领域内。
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