公开(公告)号：US10103509B2

公开(公告)日：2018-10-16

申请号：US15836878

申请日：2017-12-10

Applicant: Gigaphoton, Inc.

Inventor： Kouji Kakizaki ,  Akira Suwa ,  Osamu Wakabayashi ,  Hiroshi Umeda

IPC: H01S3/13 ,  H01S3/23 ,  H01S3/097 ,  H01S3/225 ,  H01S3/10 ,  H01S3/22

Abstract: The excimer laser device receives data on a target value of pulse energy from an external device and outputs a pulse laser beam. The excimer laser device includes a master oscillator, at least one power amplifier including a chamber provided in an optical path of the pulse laser beam outputted from the master oscillator, a pair of electrodes provided in the chamber, and an electric power source configured to apply voltage to the pair of electrodes, and a controller configured to control the electric power source of one power amplifier of the at least one power amplifier to stop applying the voltage to the pair of electrodes based on the target value of the pulse energy.

公开(公告)号：US10096966B2

公开(公告)日：2018-10-09

申请号：US15290518

申请日：2016-10-11

Applicant: Gigaphoton Inc.

Inventor： Akira Suwa ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Tomoyuki Ohkubo ,  Hiroshi Umeda ,  Hisakazu Katsuumi

IPC: H01S3/097 ,  H01G4/14 ,  H01G4/258 ,  H01G4/30 ,  H01S3/041 ,  H01S3/225 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038

Abstract: A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.

公开(公告)号：US09991665B2

公开(公告)日：2018-06-05

申请号：US15713761

申请日：2017-09-25

Applicant: Gigaphoton Inc.

Inventor： Hiroshi Umeda ,  Takeshi Asayama ,  Osamu Wakabayashi

IPC: H01S3/097 ,  B23K26/00 ,  H01L21/67 ,  H01S3/139 ,  H01L21/02 ,  H01S3/23 ,  H01S3/225 ,  H01S3/104 ,  H01S3/00 ,  H01S3/13

CPC classification number: H01S3/09702 ,  B23K26/00 ,  B23K26/0608 ,  H01L21/02686 ,  H01L21/67115 ,  H01S3/0057 ,  H01S3/104 ,  H01S3/1305 ,  H01S3/1394 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2383

Abstract: The laser system may include a delay circuit unit, first and second trigger-correction units, and a clock generator. The delay circuit unit may receive a trigger signal, output a first delay signal obtained by delaying the trigger signal by a first delay time, and output a second delay signal obtained by delaying the trigger signal by a second delay time. The first trigger-correction unit may receive the first delay signal and output a first switch signal obtained by delaying the first delay signal by a first correction time. The second trigger-correction unit may receive the second delay signal and output a second switch signal obtained by delaying the second delay signal by a second correction time. The clock generator may generate a clock signal that is common to the delay circuit unit and the first and second trigger-correction units.

公开(公告)号：US09699877B2

公开(公告)日：2017-07-04

申请号：US15096769

申请日：2016-04-12

Applicant: GIGAPHOTON INC.

Inventor： Tsukasa Hori ,  Fumio Iwamoto ,  Hiroshi Umeda

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: In an example of the present invention is an extreme ultraviolet light generation apparatus including: a droplet supply device configured to successively supply droplets; a charging electrode being configured to control charging of droplets supplied from the droplet supply unit; and a target controller configured to control electric polarities of the droplets supplied from the droplet supply unit by controlling potential of the charging electrode in such a way that successive droplets join together to become a target droplet, wherein the droplets controlled in charging by the charging electrode include a plurality of groups each composed of successive droplets, and, in each of the groups, a droplet at one end is charged positively or negatively, a droplet at the other end is uncharged or charged in a polarity being the same as a polarity of an adjacent droplet in a group adjacent to the droplet at the other end.

公开(公告)号：US08872126B2

公开(公告)日：2014-10-28

申请号：US14188428

申请日：2014-02-24

Applicant: Gigaphoton Inc.

Inventor： Hiroshi Umeda ,  Toshiyuki Hirashita

IPC: H05G2/00 ,  G21K5/00

CPC classification number: H05G2/008 ,  H05G2/005 ,  H05G2/006

Abstract: A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and a heater 58 that is separated from the tank 51 and heats the tank 51 via the insulating member 62.

Abstract translation: 目标供给装置4可以包括由金属形成的保持目标材料的箱51，与罐51的周边的至少一部分接触的绝缘构件62和与罐51分离的加热器58 并通过绝缘构件62加热箱51。