摘要:
A multiple step chemical vapor deposition process for depositing a tungsten layer on a substrate. A first step of the deposition process includes a nucleation step in which WF.sub.6 and SiH.sub.4 are introduced into a deposition chamber. Next, the flow of WF.sub.6 and SiH.sub.4 are stopped and diborane is introduced into the chamber for between 5-25 seconds. Finally, during a bulk deposition step, the WF.sub.6 is reintroduced into the chamber along with H.sub.2 and B.sub.2 H.sub.6 flows to deposit a tungsten layer on the substrate. In a preferred embodiment, the bulk deposition step also introduces nitrogen into the process gas.
摘要:
The present invention relates to an electrical protective circuit, used when abnormality occurs, in a vibration suppressing apparatus which changes the load torque on a generator such as an alternator fixed on the engine to generate an angle moment on the generator body to cancel rough idling engine vibrations to suppress vehicle body vibrations due to the rough idling. In the inventive vibration suppressing apparatus, a generator is fixed on the engine which generator includes a voltage regulator to control a field winding current such that a fixed voltage is output to a battery. The generation of engine rough idling is detected on the basis of either a change in the engine speed or a change in the engine vibrations. If rough idling is detected, a high voltage circuit is connected to the field winding to increase the field winding current and hence the load torque on the generator. In the inventive protective circuit, the battery voltage is compared with a predetermined reference value when no rough idling is detected. If the battery voltage exceeds the reference value, a changeover signal is generated and the high voltage circuit is disconnected from the field winding in response to the changeover signal.
摘要:
A wire guide apparatus for a wire driven mechanism includes an arm stem member, an arm end member having a hand section, a joint section for rotatably coupling the arm end member to the arm stem member, a wire guide pulley, and a device for bending the arm end member relative to the arm stem member. The arm stem member is provided with a first drive source for driving the hand section via wires and a second drive source for driving the bending device. The wire guide pulley is rotatably supported at an eccentric position relative to an elbow position of the arm end member for guiding the wires to pass through the arm stem member and arm end member and is displaced toward the arm stem member by an amount corresponding to an extent of bending of the arm end member.
摘要:
An anthropomorphic robot arm includes a hand section, wrist section and arm section. The hand section comprises a base plate, a plurality of flexible fingers which have a plurality of joints and are rotatably supported by the base plate, and one thumb which has a plurality of joints and is supported by the base plate such that it is able to rotate in a direction so that it is opposable to the flexible fingers. A group of actuators contained within the arm section independently drive each joint of the fingers, giving them the same movements as a human arm.
摘要:
A widely applicable object grasping system for driving mechanical fingers, wherein a motion converting means for converting the rotary motion of a constant speed motor into linear motion and producing variable-speed motion so as to cause the mechanical fingers to approach an object at a higher speed and to grasp the object at a lower speed with increased moment.
摘要:
Soft contact lenses comprising a copolymer comprising at least one monomer of the general formula, ##EQU1## wherein X is H or CH.sub.3 and n is 2 or 3, at least one monomer of the general formula, ##EQU2## wherein X is H or CH.sub.3 and m is an integer of 4 to 13, and optionally at least one polymerizable monomer other than the monomers of the above-mentioned two groups are disclosed. These contact lenses are soft and flexible in the non-swollen state and are tougher and less susceptible to microbiological contamination than the hitherto known soft contact lenses. Also a novel process for preparation of these soft contact lenses is disclosed, which comprises cast-polymerizing a mixture of the above-mentioned monomers, cooling the resulting copolymer to a low temperature at which it stands rigid, and shaping the copolymer body into the lens form in the cooled rigid state.
摘要:
Embodiments of the invention generally provide a method for depositing silicon-containing films. In one embodiment, a method for depositing silicon-containing material film on a substrate includes heating a substrate disposed in a processing chamber to a temperature less than about 550 degrees Celsius; flowing a nitrogen and carbon containing chemical comprising (H3C)—N═N—H into the processing chamber; flowing a silicon-containing source chemical with silicon-nitrogen bonds into the processing chamber; and depositing a silicon and nitrogen containing film on the substrate.
摘要:
Embodiments of the invention generally provide a method for depositing silicon-containing films. In one embodiment, a method for depositing silicon-containing material film on a substrate includes flowing a nitrogen and carbon containing chemical into a deposition chamber, flowing a silicon-containing source chemical having silicon-nitrogen bonds into the processing chamber, and heating the substrate disposed in the chamber to a temperature less than about 550 degrees Celsius. In another embodiment, the silicon containing chemical is trisilylamine and the nitrogen and carbon containing chemical is (CH3)3—N.
摘要:
A method of an automatic adjustment of a carrier level is used for a system having a center device, a communication line extending from the center device, and at least one communication-terminal device connected to the communication line. The system conducts two-way communication of data signals on the communication line based on a predetermined multiplexing scheme. The method includes the steps of periodically transmitting a carrier-level-measurement message from the center device to the communication line for each high-frequency channel used for the two-way communication, the carrier-level-measurement message being sent via a first channel different from channels used for communication and control, transmitting a reply message in response to the carrier-level-measurement message from a communication-terminal device to the center device via a second channel different from the channels used for communication and control, transmitting a carrier-level-adjustment message from the center device to the communication line via the first channel, the carrier-level-adjustment message containing level-adjustment information based on a carrier level of the reply message received by the center device, and adjusting a carrier level of the communication-terminal device based on the level-adjustment information of the carrier-level-adjustment message received by the communication-terminal device.
摘要:
The object of the invention is to provide a charging generator 1 which can avoid occurrence of overvoltage due to failure of equipment, which comprises: an a.c. generator 10 having armature windings 10a, 10b, 10c and a field winding 10d for generating an a.c.; a rectifier 11 having a plurality of power zener diodes 11a-11f having an intrinsic breakdown voltage Vz for converting the a.c. output from the armature windings to a d.c.; a current inhibit means which receives the d.c. output from the rectifier via field winding 10d and inhibits a field current which flows through the field winding; a voltage detection means for detecting a voltage of the d.c. output from the rectifier; and a voltage regulator 13, which includes a protection control means for controlling the current inhibit means in accordance with a result of judgment which is larger between a detected value of the d.c. voltage and a predetermined protection cut-off voltage VB, for regulating the d.c. voltage in the vicinity of the protection cut-off voltage VB by inhibiting the field current, and wherein the relationship between breakdown voltage Vz and protection cut-off voltage is set Vz>VB.