摘要:
A method of applying a treatment liquid to a semiconductor wafer to form a coating include rotating a semiconductor wafer in its own plane within a hermetically-sealed container, discharging a cleaning fluid through a cleaning fluid nozzle onto the top surface of the wafer as it rotates, and then discharging a treatment liquid through a treatment liquid nozzle onto the center of the top surface of the wafer as it rotates. An apparatus for coating a treatment liquid on a semiconductor wafer comprises a hermetically-sealed container, a wafer chuck which rotates a semiconductor wafer in its own plane, a treatment liquid nozzle for connection to a supply of treatment liquid and discharging the treatment liquid onto the center of the top surface of the wafer as it rotates, and a cleaning fluid nozzle which is disposed to discharge a pressurized cleaning fluid onto the top surface of the wafer as it rotates.
摘要:
A fine channel device capable of producing fine particles in an industrial scale, hardening the fine particles immediately after the production and recovering the fine particles from a medium without collapsing the shape of the produced fine particles, a fine particle producing method using the fine channel device and a solvent extraction method using the fine channel, are presented. The fine channel device comprises a fine channel provided with an inlet port and an inlet channel which feed a dispersion phase, an inlet port and an inlet channel which feed a continuous phase, and an outlet channel and an outlet port which discharge fine particles produced by the dispersion phase and the continuous phase, wherein the inlet channel for feeding the dispersion phase and the inlet channel for feeding the continuous phase are joined at an arbitrary angle, and the two inlet channels are connected to the outlet channel at the arbitrary angle.
摘要:
A microchannel structure including a dispersed-phase introduction channel which communicates with a dispersed-phase introduction inlet; a continuous-phase introduction channel which communicates with a continuous-phase introduction inlet; a discharge channel which communicates with a discharge outlet; a fine-particle formation channel; and a plurality of branch channels for dispersed-phase introduction which are microchannels; wherein one end of the fine-particle formation channel in a fluid traveling direction communicates with the continuous-phase introduction channel whereas the other end thereof communicates with the discharge channel; and wherein a side part of the dispersed-phase introduction channel and side part of the fine-particle formation channel communicate via the plurality of branch channel for dispersed-phase introduction.
摘要:
A fine channel device for performing a chemical treatment or for producing fine particles, capable of supplying a liquid to the fine channels evenly and producing products in a large quantity is provided. The fine channel device includes a storage space having a circular or polygonal recess for temporarily storing fluid, and supply channels formed in a radial direction from the storage space. A small chemical plant includes a plurality of the fine channel devices as fundamental constituents and a mechanism to supply at least one fluid and a mechanism to recover products produced.
摘要:
A device includes a first substrate having a channel formed on front and rear surfaces of the first substrate, and an information recording layer forming an optical recording medium on at least one of the front and rear surfaces of the first substrate.
摘要:
A fine channel device capable of producing fine particles in an industrial scale, hardening the fine particles immediately after the production and recovering the fine particles from a medium without collapsing the shape of the produced fine particles, a fine particle producing method using the fine channel device and a solvent extraction method using the fine channel, are presented. The fine channel device comprises a fine channel provided with an inlet port and an inlet channel which feed a dispersion phase, an inlet port and an inlet channel which feed a continuous phase, and an outlet channel and an outlet port which discharge fine particles produced by the dispersion phase and the continuous phase, wherein the inlet channel for feeding the dispersion phase and the inlet channel for feeding the continuous phase are joined at an arbitrary angle, and the two inlet channels are connected to the outlet channel at the arbitrary angle.
摘要:
A front pillar garnish adapted to cover a front pillar disposed between a front windshield and a side door in an automotive vehicle. The front pillar garnish comprises a main body section formed of plastic and generally channel-shaped. The main body section is to be fixedly connected to the front pillar and located at the side of a passenger compartment. A plurality of generally plate-shaped energy absorbing ribs are integrally formed at the inner surface of the main body section in a manner to be generally perpendicular to the longitudinal axis of the main body section. A plurality of bosses are integrally formed extending from the inner surface of the main body section. A clip supporting plate or member is fixedly secured to the tip end sections of the bosses and fixedly supported on the edges of the energy absorbing ribs. A clip formed of a spring material is fixedly mounted on the clip supporting plate or member and fixable to the front pillar in order to install the front pillar garnish to the vehicle body.
摘要:
A car trim including a plurality of ribs formed integrally and arranged vertically at a predetermined interval on a predetermined site of the rear face 1a of trim main body 1 for absorbing energy of collision, each rib being formed in a rectangular tube, each rib side wall 4a being tapared with thinning toward its distal end, and a rigidity changing portion P being disposed by integrally forming an auxiliary rib piece 5 on the rib side wall 4a for introducing buckling transformation of the rib 4 at a predetemined position in the rib side wall 4a. The rib also includes a first energy absorbing portion 5 and a second energy absorbing portion 6 formed in such a multi-stepped manner that the number of rib walls in the former step is different from that number in the latter step. Further, the rib also includes a first auxiliary rib piece 5 extending outside from each corner along one side wall 3, 4 of the rib and a second auxiliary rib piece 6 extending from the distal end of the first auxiliary rib piece 5 onto the other side wall 4, 3 vertically intersecting that first auxiliary rib piece.
摘要:
A pillar garnish for a front pillar disposed between a front windshield glass and a side window glass of an automotive vehicle. The pillar garnish comprises a main body section formed of plastic and secured to a vehicle body. The main body section is generally channel-shaped to cover the front pillar forming part of the vehicle body. The main body section has an inner surface facing the front pillar, and an outer surface facing a vehicle passenger inside a passenger compartment. A plurality of reinforcement ribs are formed at the inner surface of the main body section and integral with the main body section. Each reinforcement rib extends perpendicular to the inner surface. Additionally, a plurality of auxiliary ribs are formed at the inner surface of the main body section and integral with the main body section. Each auxiliary rib extends parallel with each reinforcement rib. Each rib is located between the reinforcement ribs which are located adjacent each other. Each rib extends to occupy at least a part of a region surrounded by the inner surface of the main body section and first and second imaginary straight lines in a transverse plane perpendicular to a longitudinal axis of the main body section.
摘要:
An error detecting device for an optical head detects a focussing error and a tracking error. The error detection device includes an optical structure for converting a reflected light of a light irradiating a surface to be irradiated into an astigmatic pencil of rays having a first focal point and a second focal point, the optical structure having a first focussing member for focussing the reflected light on the first focal point of the astigmatic pencil of rays, and a second focussing member for focussing the reflected light on the second focal point of the astigmatic pencil of rays, the first and the second focussing members being made integral, and a device for detecting errors of the light irradiating the surface to be irradiated, based on a detecting signal of a spot of the reflected light formed by the first focussing member, and a detecting signal of a spot of said reflected light formed by the second focussing member. The error detecting device can be small-sized and light, have a small astigmatic difference, easily to align optical elements.