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公开(公告)号:US12125623B2
公开(公告)日:2024-10-22
申请号:US17804550
申请日:2022-05-27
Applicant: IMEC VZW
Inventor: Florin Ciubotaru , Hanns Christoph Adelmann
Abstract: The disclosed technology relates to a logic device based on spin waves. In one aspect, the logic device includes a spin wave generator, a waveguide, at least two phase shifters, and an output port. The spin wave generator is connected with the waveguide and is configured to emit a spin wave in the waveguide. The at least two phase shifters are connected with the waveguide at separate positions such that, when a spin wave is emitted by the spin wave generator, it passes via the phase shifters. The at least two phase shifters are configured to change a phase of the passing spin wave. The output port is connected with the wave guide such that the at least two phase shifters are present between the spin wave generator and the output port.
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公开(公告)号:US10712659B2
公开(公告)日:2020-07-14
申请号:US15979800
申请日:2018-05-15
Applicant: IMEC VZW , Imec USA Nanoelectronics Design Center
Inventor: Emily Gallagher , Cedric Huyghebaert , Ivan Pollentier , Hanns Christoph Adelmann , Marina Timmermans , Jae Uk Lee
Abstract: The present disclosure relates to a method for forming a carbon nanotube pellicle membrane for an extreme ultraviolet lithography reticle, the method comprising: bonding together overlapping carbon nanotubes of at least one carbon nanotube film by pressing the at least one carbon nanotube film between a first pressing surface and a second pressing surface, thereby forming a free-standing carbon nanotube pellicle membrane. The present disclosure also relates to a method for forming a pellicle for extreme ultraviolet lithography and for forming a reticle system for extreme ultraviolet lithography respectively.
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公开(公告)号:US10672894B2
公开(公告)日:2020-06-02
申请号:US16216833
申请日:2018-12-11
Applicant: IMEC vzw
Inventor: Jan Van Houdt , Hanns Christoph Adelmann , Han Chung Lin
Abstract: The disclosed technology generally relates to methods of fabricating a semiconductor device, and more particularly to methods of fabricating a ferroelectric field-effect transistor (FeFET). According to one aspect, a method of fabricating a FeFET includes forming a layer stack on a gate structure, wherein forming the layer stack comprises a ferroelectric layer followed by forming a sacrificial stressor layer. The method additionally includes heat-treating the layer stack to cause a phase transition in the ferroelectric layer. The method additionally includes, subsequent to the heat treatment, replacing the sacrificial stressor layer with a two-dimensional (2D) material channel layer. The method further includes forming a source contact and a drain contact contacting the 2D material channel layer.
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公开(公告)号:US20190198638A1
公开(公告)日:2019-06-27
申请号:US16216833
申请日:2018-12-11
Applicant: IMEC vzw
Inventor: Jan Van Houdt , Hanns Christoph Adelmann , Han Chung Lin
Abstract: The disclosed technology generally relates to methods of fabricating a semiconductor device, and more particularly to methods of fabricating a ferroelectric field-effect transistor (FeFET). According to one aspect, a method of fabricating a FeFET includes forming a layer stack on a gate structure, wherein forming the layer stack comprises a ferroelectric layer followed by forming a sacrificial stressor layer. The method additionally includes heat-treating the layer stack to cause a phase transition in the ferroelectric layer. The method additionally includes, subsequent to the heat treatment, replacing the sacrificial stressor layer with a two-dimensional (2D) material channel layer. The method further includes forming a source contact and a drain contact contacting the 2D material channel layer.
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公开(公告)号:US20180175863A1
公开(公告)日:2018-06-21
申请号:US15849372
申请日:2017-12-20
Applicant: IMEC VZW , Katholieke Universiteit Leuven
Inventor: Odysseas Zografos , Bart Soree , Florin Ciubotaru , Hanns Christoph Adelmann
IPC: H03K19/23 , H03K19/168 , G06F1/04
CPC classification number: H03K19/23 , G01R33/1284 , G01R33/18 , G06F1/04 , H03K19/168
Abstract: The disclosed technology generally relates to computation devices, and more particularly to majority gate devices configured for computation based on spin waves. In one aspect, a majority gate device comprises cells that are configurable as spin wave generators or spin wave detectors. The majority gate device comprises an odd number of spin wave generators, and at least one spin wave detector. The majority gate device additionally comprises a waveguide adapted for guiding spin waves generated by the spin wave generators. The spin wave generators and the at least one spin wave detector are positioned in an inline configuration along the waveguide such that, in operation, interference of the spin waves generated by the spin wave generators can be detected by the at least one spin wave detector. The interference of the spin waves corresponds to a majority operation of the spin waves generated by the spin wave generators.
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公开(公告)号:US20180123031A1
公开(公告)日:2018-05-03
申请号:US15801213
申请日:2017-11-01
Applicant: IMEC VZW
Inventor: Hanns Christoph Adelmann , Gouri Sankar Kar , Johan Swerts , Sebastien Couet
Abstract: The disclosed technology generally relates to semiconductor devices and more particularly to semiconductor devices comprising a magnetic tunnel junction (MTJ). In an aspect, a method of forming a magnetoresistive random access memory (MRAM) includes forming a layer stack above a substrate, where the layer stack includes a ferromagnetic reference layer, a tunnel barrier layer and a ferromagnetic free layer and a spin-orbit-torque (SOT)-generating layer. The method additionally includes, subsequent to forming the layer stack, patterning the layer stack to form a MTJ pillar.
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公开(公告)号:US20170346149A1
公开(公告)日:2017-11-30
申请号:US15604314
申请日:2017-05-24
Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
Inventor: Florin Ciubotaru , Hanns Christoph Adelmann , Xiao Sun
CPC classification number: H01P1/218 , B82Y10/00 , B82Y25/00 , H01F10/32 , H01L43/00 , H01L43/10 , H01P1/215
Abstract: The present disclosure relates to a tunable magnonic crystal device comprising a spin wave waveguide, a magnonic crystal structure in or on the spin wave waveguide, and a magneto-electric cell operably connected to the magnonic crystal structure. The magnonic crystal structure is adapted for selectively filtering a spin wave spectral component of a spin wave propagating through the spin wave waveguide so as to provide a filtered spin wave. The magneto-electric cell comprises an electrode for receiving a control voltage, and adjusting the control voltage controls a spectral parameter of the spectral component of the spin wave via an interaction, dependent on the control voltage, between the magneto-electric cell and a magnetic property of the magnonic crystal structure.
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