公开(公告)号：US06414978B1

公开(公告)日：2002-07-02

申请号：US09826296

申请日：2001-04-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S322

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US20070274363A1

公开(公告)日：2007-11-29

申请号：US11804795

申请日：2007-05-21

申请人： Igor Bragin ,  Vadim Berger

发明人： Igor Bragin ,  Vadim Berger

IPC分类号： H01S3/22 ,  H01S3/223 ,  H01S3/00

CPC分类号： H01S3/0385 ,  H01S3/225

摘要： A gas discharge laser includes elongated discharge electrodes having an active surface width that varies along the length of the resonator. In one example each of the electrodes is formed by a row of pins having a circular active surface. The pins are diametrically aligned with the active surfaces generally coplanar.

摘要翻译： 气体放电激光器包括具有沿谐振器的长度变化的有源表面宽度的细长放电电极。 在一个示例中，每个电极由具有圆形有源表面的一排销形成。 这些销与活动表面沿径向对齐，通常共面。

公开(公告)号：US07266137B2

公开(公告)日：2007-09-04

申请号：US11263626

申请日：2005-10-31

申请人： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

发明人： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

IPC分类号： H01S3/22

CPC分类号： G03F7/70025 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/08045 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.

摘要翻译： 气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。 分子氟在放电室内会耗尽。 包括分子氟在内的气体注入可以将分子氟的分压提高一定量。 注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。 基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注入的量和/或注射间隔。 驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。 在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

公开(公告)号：US06965624B2

公开(公告)日：2005-11-15

申请号：US10338779

申请日：2003-01-06

申请人： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

发明人： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

IPC分类号： G02B5/18 ,  G03F7/20 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225 ,  H01S3/00 ,  H01S3/09 ,  H01S3/097 ,  H01S3/22

CPC分类号： G03F7/70025 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/08045 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

摘要翻译： 提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。 分子氟以初始分压提供，并在激光放电室内耗尽。 每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选地每次注射小于0.2毫巴，或者已经在其中的2％的量的7％ 在激光室内。 可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。 每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。 驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。 在每个范围内，气体注入和气体替换优选基于对放电的总施加电能和/或时间和/或脉冲计数进行。

公开(公告)号：US06757315B1

公开(公告)日：2004-06-29

申请号：US09692265

申请日：2000-10-19

申请人： Igor Bragin ,  Vadim Berger ,  Ivan Tassy-Julien ,  Uwe Stamm

发明人： Igor Bragin ,  Vadim Berger ,  Ivan Tassy-Julien ,  Uwe Stamm

IPC分类号： H01S322

CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

摘要： A preionization device for a gas laser includes an internal preionization electrode having a dielectric housing around it such that the preionization device is of corona type. The internal electrode connects to advantageous electrical circuitry, preferably external to the discharge chamber via a conductive feedthrough. The circuitry reduces the voltage across the dielectric tube of the preionization unit to reduce over-flashing at tube ends and oscillations due to residual energies stored in the dielectric. A semi-transparent mesh electrode between the preionization unit and the discharge area prevents field distortions and discharge instabilities.

摘要翻译： 用于气体激光器的预电离装置包括内部预电离电极，其具有围绕其的介电壳体，使得所述预电离装置是电晕型的。 内部电极通过导电馈通连接到有利的电路，优选地在放电室的外部。 该电路降低了预电离单元的电介质管两端的电压，以减少由于存储在电介质中的剩余能量引起的管末端过度闪烁和振荡。 在预电离单元和放电区之间的半透明网状电极防止场失真和放电不稳定。

公开(公告)号：US06556609B2

公开(公告)日：2003-04-29

申请号：US09826301

申请日：2001-04-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S322

CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US06430205B2

公开(公告)日：2002-08-06

申请号：US09826372

申请日：2001-04-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S322

CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US20080019411A1

公开(公告)日：2008-01-24

申请号：US11490386

申请日：2006-07-20

申请人： Norbert Niemoeller ,  Igor Bragin ,  Rainer Paetzel ,  Rustem Osmanow ,  Juergen Witt

发明人： Norbert Niemoeller ,  Igor Bragin ,  Rainer Paetzel ,  Rustem Osmanow ,  Juergen Witt

IPC分类号： H01S3/22

CPC分类号： H01S3/225 ,  H01S3/0305 ,  H01S3/036 ,  H01S3/0385

摘要： An excimer laser is disclosed in which a gas-discharge is formed for exciting an excimer-forming lasing-gas mixture. The gas discharge is formed between an elongated anode electrode and a elongated cathode electrode. The anode is in contact with a dielectric surface and the cathode is supported above the dielectric surface, laterally spaced from and parallel to the anode. The gas-discharge has a surface-discharge or sliding discharge portion extending from the anode over the dielectric surface, and a volume-discharge portion connecting the sliding-discharge portion to the cathode. The volume-discharge excites the lasing-gas mixture. A laser resonator is arranged to generate laser radiation from the excited gas mixture. The sliding-discharge has homogeneous, stable characteristics that are inherited by the volume-discharge. An ion-wind generator provides circulation of the lasing-gas mixture through the volume-discharge.

摘要翻译： 公开了一种准分子激光器，其中形成气体放电以激发准分子成型激光气体混合物。 气体放电形成在细长的阳极电极和细长的阴极电极之间。 阳极与电介质表面接触，并且阴极被支撑在电介质表面的上方，与阳极横向间隔开并平行。 气体放电具有从电介质表面上的阳极延伸的表面放电或滑动放电部，以及将滑动放电部连接到阴极的容积放电部。 体积放电激发激光气体混合物。 激光谐振器布置成从激发的气体混合物产生激光辐射。 滑动放电具有由体积放电所遗传的均匀，稳定的特性。 离子风发生器通过体积放电提供激光气体混合物的循环。

公开(公告)号：US20050083984A1

公开(公告)日：2005-04-21

申请号：US10963284

申请日：2004-10-12

申请人： Igor Bragin ,  Rainer Paetzel ,  Juergen Baumler ,  Heiko Diesing ,  Helmer Beulshausen ,  Ulrich Rebhan

发明人： Igor Bragin ,  Rainer Paetzel ,  Juergen Baumler ,  Heiko Diesing ,  Helmer Beulshausen ,  Ulrich Rebhan

IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/22 ,  H01S3/225

CPC分类号： H01S3/036 ,  H01S3/03 ,  H01S3/225

摘要： The lifetime of the laser gas in a laser system such as an excimer laser can be increased by changing the way in which the laser system is sealed. In addition to primary seals used to seal the reservoir chamber and discharge channel, at least one secondary seal can be used between the primary seals and the surrounding environment in order to further prevent permeation of impurities into the discharge chamber, as well as to create an intermediate gas volume. A controlled atmosphere can be generated in the intermediate gas volume, which can be at a slightly higher pressure than the surrounding environment in order to resist the flow of impurities through the secondary seal(s). Further, a flow of purge gas can be introduced into the controlled atmosphere in order to carry away any impurities that leak through the secondary seal(s).

摘要翻译： 通过改变激光系统被密封的方式，可以增加诸如准分子激光器之类的激光系统中的激光气体的寿命。 除了用于密封储存室和排出通道的主密封件之外，可以在主密封件和周围环境之间使用至少一个二次密封件，以便进一步防止杂质渗透到排放室中，并且产生 中间气体体积。 可以在中间气体体积中产生受控的气氛，其可以处于比周围环境稍高的压力，以抵抗杂质通过二次密封件的流动。 此外，吹扫气体流可以被引入到受控气氛中，以便携带通过二次密封件泄漏的任何杂质。

公开(公告)号：US20050031004A1

公开(公告)日：2005-02-10

申请号：US10699763

申请日：2003-11-03

申请人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

发明人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

IPC分类号： H01S3/00 ,  H01S3/0971 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/225 ,  H01S3/073 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/2258

摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.

摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。 放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。 公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确时序。 另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。