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公开(公告)号：US20180186624A1
公开(公告)日：2018-07-05
申请号：US15393268
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chin-Fu Kuo , Chao-Ta Huang
IPC: B81B3/00
CPC classification number: B81B3/0072
Abstract: A MEMS apparatus includes a substrate, a cover disposed on the substrate, a movable mass disposed on the substrate, and an impact absorber disposed on the cover. The impact absorber includes a restraint, a stationary stopper disposed on a lower surface of the cover, a movable stopper, elastic elements connecting the restraint and the movable stopper, a supporting element connecting the restraint and the stationary stopper, and a space disposed between the stationary stopper and the movable stopper. The impact absorber is adapted to prevent the movable mass from impacting the cover. In addition, the supporting element may be made of an electrical insulation material to reduce electrostatic interaction between the movable mass and the movable stopper.
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公开(公告)号：US10011476B1
公开(公告)日：2018-07-03
申请号：US15393268
申请日：2016-12-29
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chin-Fu Kuo , Chao-Ta Huang
IPC: B81B3/00
Abstract: A MEMS apparatus includes a substrate, a cover disposed on the substrate, a movable mass disposed on the substrate, and an impact absorber disposed on the cover. The impact absorber includes a restraint, a stationary stopper disposed on a lower surface of the cover, a movable stopper, elastic elements connecting the restraint and the movable stopper, a supporting element connecting the restraint and the stationary stopper, and a space disposed between the stationary stopper and the movable stopper. The impact absorber is adapted to prevent the movable mass from impacting the cover. In addition, the supporting element may be made of an electrical insulation material to reduce electrostatic interaction between the movable mass and the movable stopper.
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公开(公告)号：US09841281B2
公开(公告)日：2017-12-12
申请号：US14553595
申请日：2014-11-25
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chung-Yuan Su , Chun-Yin Tsai , Chao-Ta Huang
IPC: B81B3/00 , G01C19/5762
CPC classification number: G01C19/5762 , B81B3/0045 , B81B2201/0235 , B81B2201/0242 , B81B2203/0163 , Y10T74/12
Abstract: A micro-electromechanical apparatus includes a rotary element, at least one restraint and at least two folded springs. The rotary element is capable of rotating with respect to an axis. The folded springs are symmetrically disposed about the axis. Each folded spring has a moving end and a fixed end, the moving end is connected to the rotary element, and the fixed end is connected to the at least one restraint. The moving end is not located on the axis, and the fixed end is not located on the axis. A moving distance is defined as a distance between the moving end and the axis, a fixed distance is defined as a distance between the fixed end and the axis. A spring length is defined as a distance between the moving end and the fixed end. The spring length is varied according to the rotation of the rotary element.
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公开(公告)号：US20170188413A1
公开(公告)日：2017-06-29
申请号：US15250869
申请日：2016-08-29
Applicant: Industrial Technology Research Institute
Inventor： Yu-Wen Hsu , Chung-Yuan Su , Chao-Ta Huang
CPC classification number: H05B1/023 , G01N27/12 , G05D23/24 , H05B3/265 , H05B2203/003
Abstract: A micro-electromechanical temperature control system including a micro-electromechanical apparatus is provided. The micro-electromechanical apparatus includes a heater and a thermal reservoir. A specific heat capacity of the thermal reservoir is greater than a specific heat capacity of the heater, so that a heating time and a heating frequency of the heater are reduced to save electrical power consumption. The micro-electromechanical temperature control system is adapted for a micro-electromechanical sensor that is required to be controlled at an operating temperature, such as a gas sensor.
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公开(公告)号：US12264972B2
公开(公告)日：2025-04-01
申请号：US18201996
申请日：2023-05-25
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Yu-Wen Hsu , Lu-Pu Liao , Chao-Ta Huang , Bo-Kai Chao
Abstract: A vertically integrated micro-bolometer includes an integrated circuit chip, an infrared sensing film, and a metal bonding layer. The integrated circuit chip includes a silicon substrate, a circuit element, and a dielectric layer disposed on the silicon substrate. The infrared sensing film includes a top absorbing layer, a sensing layer, and a bottom absorbing layer. The sensing layer is disposed between the top absorbing layer and the bottom absorbing layer. Materials of the top absorbing layer, the sensing layer, and the bottom absorbing layer are materials compatible with a semiconductor manufacturing process. The metal bonding layer connects the dielectric layer on the silicon substrate in the integrated circuit chip and the bottom absorbing layer of the infrared sensing film to form a vertically integrated micro-bolometer. In one embodiment, the infrared sensing film is divided into a central sensing film, a surrounding sensing film, and a plurality of connecting portions by a plurality of slots. The surrounding sensing film surrounds the central sensing film. Each of the connecting portions connects the surrounding sensing film and the central sensing film. A central distance from the bottom absorbing layer of the central sensing film to the silicon substrate is substantially equal to a surrounding distance from the bottom absorbing layer of the surrounding sensing film to the silicon substrate.
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Patent Agency Ranking
公开(公告)号：US12180062B2
公开(公告)日：2024-12-31
申请号：US17743331
申请日：2022-05-12
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Jen-Chieh Li , Chao-Ta Huang , Chung-Yuan Su , RueiHung Kao
Abstract: A microelectromechanical apparatus includes a base and a thin film including a stationary part disposed on the base, a peripheral part, a central part surrounded by the peripheral part, and a first and second elastic part. The first elastic part is connected to the stationary part and the peripheral part. The second elastic part is connected to the peripheral part and the central part. When low frequency signal is input to a first electrode of the first elastic part, the peripheral part and the and the central part respectively vibrate with a first and second low-frequency amplitudes. When high-frequency signal is input to a second electrode of the second elastic part, the peripheral part and the central part respectively vibrate with a first and second high-frequency amplitudes. A difference between the first and second low-frequency amplitudes is smaller than a difference between the first and second high-frequency amplitudes.
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公开(公告)号：US11359970B2
公开(公告)日：2022-06-14
申请号：US16904820
申请日：2020-06-18
Applicant: Industrial Technology Research Institute
Inventor： Bor-Shiun Lee , Ming-Fa Chen , Ying-Che Lo , Chao-Ta Huang
Abstract: A microelectromechanical infrared sensing apparatus includes a substrate, a sensing plate, a plurality of supporting elements and a plurality of stoppers. The substrate includes an infrared reflecting layer. The sensing plate includes an infrared absorbing layer. The supporting elements are disposed on the substrate, and each of the supporting elements is connected to the sensing plate, such that the sensing plate is suspended above the infrared reflecting layer. The stoppers are disposed between the substrate and the sensing plate. When the sensing plate moves toward the infrared reflecting layer and the stoppers contact both the substrate and the sensing plate, the distance between the sensing plate and the infrared reflecting layer is substantially equal to the height of at least one of the stoppers.
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公开(公告)号：US11131340B2
公开(公告)日：2021-09-28
申请号：US16870439
申请日：2020-05-08
Applicant: Industrial Technology Research Institute
Inventor： Chien-Nan Yeh , Chung-Yuan Su , Chao-Ta Huang
Abstract: A linear guideway with an embedded sensor includes a track, a slider, a plurality of rolling members, and a sensing module. The track extends in a first direction and has a first recess. The slider can move in the first direction and include a second recess, a channel, at least one hole, and a deforming region. The channel is formed by coupling the first recess and the second recess, and extends in the first direction. The hole extends from the surface of the slider along the insertion axis and into the slider. The rolling members are disposed in the channel. The sensing module is disposed in the hole, and contacts the deforming region to detect the amount of deformation.
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公开(公告)号：US10703625B1
公开(公告)日：2020-07-07
申请号：US16369542
申请日：2019-03-29
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Chien-Nan Yeh , Yu-Wen Hsu , Chao-Ta Huang
Abstract: A MEMS apparatus with adjustable spring includes a central portion, a peripheral portion and at least one spring. The peripheral portion surrounds the central portion and is spaced apart from the central portion. The spring includes a peripheral section, an outward extension section and a central section. The peripheral section is connected to the outward extension section. An amount of thermal expansion per unit temperature change of the outward extension section is greater than that of the peripheral section or greater than that of the central section.
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公开(公告)号：US20200025281A1
公开(公告)日：2020-01-23
申请号：US16221615
申请日：2018-12-17
Applicant: Industrial Technology Research Institute
Inventor： Chih-Yuan Chen , Chung-Yuan Su , Chien-Nan Yeh , Chao-Ta Huang , Yu-Wen Hsu
Abstract: A ball screw with force sensor in radial direction including a screw rod, a screw nut, a plurality of balls, and a force sensor is provided. The screw nut has a cavity. The cavity is extended along a radial direction from an outer surface of the screw nut. The force sensor is disposed in the cavity of the screw nut, and the force sensor includes a stationary base and an elastic component. The stationary base includes a displacement restraint, and the elastic component includes a contact end and a fixed end. The displacement restraint is coupled to the cavity to prevent the stationary base from being displaced in the radial direction for fixing stationary base firmly in the cavity. The fixed end is connected to the stationary base, and the contact end contacts a bottom surface of the cavity in order to sense a force along the radial direction.
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