公开(公告)号：US4661409A

公开(公告)日：1987-04-28

申请号：US797635

申请日：1985-11-13

申请人： Jorg Kieser ,  Michael Neusch

发明人： Jorg Kieser ,  Michael Neusch

IPC分类号： C23C16/50 ,  C03C17/22 ,  C23C16/02 ,  C23C16/26 ,  C23C16/511 ,  H01L23/29 ,  B32B9/00 ,  C01B31/00

CPC分类号： C23C16/511 ,  C03C17/22 ,  C23C16/0272 ,  C23C16/26 ,  H01L23/29 ,  C03C2217/282 ,  C03C2218/153 ,  H01L2924/0002 ,  Y10T428/30 ,  Y10T428/31645 ,  Y10T428/31663 ,  Y10T428/31696

摘要： A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atmosphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substance provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.

摘要翻译： 一种通过在反应室内的电离气体气氛中降解气态烃化合物来在基底上生产无定形碳涂层的方法。 电磁场用于等离子体的激发。 为了实现提高沉积速率并允许均匀涂覆大面积的基板的目的，在微波区域（915-2,540MHz）中选择电磁交变场的频率。 此外，通过位于反应室外部的至少一个梯形波导将微波能量放入气体气氛中。 本发明还涉及具有无定形碳涂层的物质，其中在基体和无定形碳涂层之间提供由来自硅氧烷或硅氮烷的聚合物组成的粘附介质涂层。

公开(公告)号：US4515675A

公开(公告)日：1985-05-07

申请号：US624940

申请日：1984-06-27

申请人： Jorg Kieser ,  Reiner Kukla ,  Gerd Deppisch

发明人： Jorg Kieser ,  Reiner Kukla ,  Gerd Deppisch

IPC分类号： C23C14/36 ,  C23C14/35 ,  H01J37/34 ,  C23C15/00

CPC分类号： H01J37/3441 ,  H01J37/3408 ,  H01J37/3423

摘要： A magnetron cathode for cathodic evaporation apparatus with a target holder (10) for releasably securing a plate-like target (9). The associated magnet arrangement (7) has pole faces (7c, 7d) for producing at least one circumferentially closed tunnel of magnetic field lines which overlaps the target. The magnet arrangement (7) is accommodated in a housing of non-ferromagnetic material which extends over the pole faces. To increase the utilization factor of the target material without the pole faces or housing parts participating in the atomization process,(a) the projections of the target (9 ) and the pole faces (7c, 7d) in a common plane parallel to the target face (9a) do not intersect each other,(b) in the zone of the pole faces (7c, 7d), the housing (16) is extended in the atomization direction in front of the target face (9a) or in the extreme case lies in the plane of the target face (9a), and(c) the housing (16) together with the magnet system (7) is electrically insulated as regards both the target holder (10) and earth (4).

摘要翻译： 一种用于阴极蒸发装置的磁控管阴极，具有用于可释放地固定板状靶（9）的靶保持器（10）。 相关联的磁体布置（7）具有用于产生与目标重叠的磁场线的至少一个周向闭合的通道的极面（7c，7d）。 磁体布置（7）容纳在非磁性材料的壳体上，该壳体在极面上延伸。 为了增加目标材料的利用率，而没有参与雾化过程的极面或壳体部分，（a）靶（9）和极面（7c，7d）在平行于靶的公共平面中的突起 （9a）彼此不相交，（b）在极面（7c，7d）的区域中，壳体（16）在目标面（9a）的前方沿着雾化方向延伸，或者在极端 壳体位于目标面（9a）的平面内，（c）与磁体系统（7）一起的壳体（16）与目标支架（10）和地球（4）都是电绝缘的。

公开(公告)号：US6119455A

公开(公告)日：2000-09-19

申请号：US259375

申请日：1999-02-26

申请人： Thomas Hammer ,  Jorg Kieser

发明人： Thomas Hammer ,  Jorg Kieser

IPC分类号： B01D53/32 ,  B01D53/94 ,  F01N3/08 ,  F01N3/10

CPC分类号： F01N3/0892 ,  B01D53/32 ,  B01D2257/404

摘要： In particular for exhaust-gas purification, different processes have been proposed. According to the invention, the polluted exhaust gas flows through a reactor volume to which non-thermal gas discharges are applied, while being brought into contact with a solid reducing agent at least once, and preferably several times. The reducing agent can, in particular, consist of carbon fibers. A suitable device for combining dielectric barrier discharges with the reduction has means for field enhancement substantially periodically spaced in the reactor.

摘要翻译： 特别是对于废气净化，已经提出了不同的方法。 根据本发明，被污染的废气流过施加非热气体的反应器体积，同时与固体还原剂接触至少一次，优选数次。 还原剂特别可以由碳纤维组成。 用于将介电阻挡放电与该还原组合的合适装置具有在反应器中基本上周期性间隔的场增强的装置。

公开(公告)号：US4630568A

公开(公告)日：1986-12-23

申请号：US736556

申请日：1985-05-21

申请人： Jorg Kieser

发明人： Jorg Kieser

IPC分类号： C08F2/00 ,  B01J19/08 ,  B01J19/12 ,  B05D7/24 ,  C08G85/00 ,  C23C14/22 ,  C23C16/50 ,  C23C16/511 ,  H01J37/32 ,  C23C16/00

CPC分类号： B05D1/62 ,  B01J19/126 ,  C23C16/511 ,  H01J37/32192 ,  H01J37/32229 ,  H01J37/32238 ,  H01J37/32275 ,  B01J2219/0894 ,  H01J2237/3382

摘要： Apparatus for coating substrates by means of a reaction for depositing atoms or molecules which is initiated by a plasma. A reaction chamber (1) is equipped with at least one window (22, 23), penetrable by microwaves, with at least one wave-guide structure (16, 17), arranged outside the chamber (1) and in front of the window (22, 23), and with a distributing means (25) discharging into the chamber.According to the invention and for the purpose of achieving the object of facilitating inspection and repairs, the window (22, 23) penetrable by microwaves, the one or more wave-guide structures (16, 17) and the distributing means (25) are all secured in or on a support frame (10), which can be removed, or swung away, from the reaction chamber (1) as a single unit.

摘要翻译： 用于通过用于沉积由等离子体引发的原子或分子的反应来涂覆基底的装置。 反应室（1）装备有可被微波穿透的至少一个窗口（22,23），其中至少一个波导结构（16,17）布置在室（1）的外部和窗口的前面 （22,23），并且具有排出到所述室中的分配装置（25）。 根据本发明，为了实现便于检查和修理的目的，可以由微波穿透的窗口（22,23），一个或多个波导结构（16,17）和分配装置（25）是 全部固定在可作为单个单元从反应室（1）移除或摆动的支撑框架（10）中或上。

公开(公告)号：US4572776A

公开(公告)日：1986-02-25

申请号：US678597

申请日：1984-12-05

申请人： Hans Aichert ,  Jorg Kieser ,  Reiner Kukla

发明人： Hans Aichert ,  Jorg Kieser ,  Reiner Kukla

IPC分类号： C23C14/36 ,  C23C14/35 ,  H01J37/34 ,  C23C14/34

CPC分类号： H01J37/3441 ,  H01J37/3408 ,  H01J37/3426 ,  H01J37/3497

摘要： A magnetron cathode for sputtering ferromagnetic targets. The magnet system consists of magnet poles of opposite polarity lying one within the other disposed on a basic cathode body. Between the target and the pole shoes, which consist of target material, two circumferential air gaps in the direction of the depth of the system are formed. The surfaces of projection of the magnet poles and target do not overlap. For the purpose of making the target ablation uniform while simultaneously achieving high sputtering rates, the pole shoes are separated, in accordance with the invention, each by a distance S from the magnet poles. The magnet poles lie in an area which runs from a plane passing through the sputtering surface in the direction of the depth of the system. Between the pole shoes and the target, on the one hand, and the magnet poles on the other, there is disposed a thermally conductive metal body which is in communication with at least one coolant passage and consists of a nonferromagnetic material.

摘要翻译： 用于溅射铁磁靶的磁控管阴极。 磁体系统由相反极性的磁极组成，位于另一个设置在基本阴极体上的磁极。 在由目标材料组成的目标和极靴之间形成在系统深度方向上的两个圆周气隙。 磁极和靶的投影面不重叠。 为了使目标消融均匀，同时实现高溅射速率，根据本发明，极靴与磁极分开距离S。 磁极位于从系统深度方向穿过溅射表面的平面延伸的区域。 一方面，在极靴和目标之间以及另一方面的磁极之间设置有导热金属体，其与至少一个冷却剂通道连通并由非铁磁材料构成。

公开(公告)号：US4521717A

公开(公告)日：1985-06-04

申请号：US445339

申请日：1982-11-29

申请人： Jorg Kieser

发明人： Jorg Kieser

IPC分类号： C08F2/00 ,  B01J19/08 ,  B01J19/12 ,  B05D7/24 ,  C08F2/46 ,  C08F2/52 ,  C08G85/00 ,  C23C14/22 ,  C23C16/50 ,  C23C16/511 ,  C23C16/54 ,  H01J37/32 ,  H05H1/46 ,  H01J7/46 ,  H01J19/80

CPC分类号： B05D1/62 ,  B01J19/126 ,  C23C16/511 ,  H01J37/32192 ,  H01J37/32229 ,  H01J37/32266 ,  B01J2219/0894 ,  H01J2237/3382

摘要： The invention relates to apparatus for producing a microwave plasma for the treatment of substrates, and in particular for the plasma polymerization of monomers for coating substrates. The apparatus consists of a reaction chamber with a carrier for conveying the substrates and a way for maintaining an atmosphere of ionizable gases and monomers. The apparatus also has a first and at least one second wave-guide structure which are arranged at opposite acute setting angles to the surface of the substrate carrier and are each connected at one end to a microwave transmitter by way of a hollow conductor. Thus, the treatment intensities, i.e. the rates of deposition, are superposed, and this leads to greater uniformity in the properties of the product. The apparatus may also include angling the wave-guide structures toward each other and staggering crossbar structures in the wave-guides for further improvement.

摘要翻译： 本发明涉及用于生产用于处理衬底的微波等离子体的设备，特别涉及用于涂覆衬底的单体的等离子体聚合。 该装置由具有用于输送基板的载体的反应室和用于维持可离子化气体和单体的气氛的方式组成。 该装置还具有第一和至少一个第二波导结构，其以与衬底载体的表面相对的锐角设置角度布置，并且其一端通过空心导体连接到微波发射器。 因此，处理强度，即沉积速率被叠加，并且这导致产品的性质更均匀。 该装置还可以包括将波导结构朝向彼此倾斜并且在波导中交错的横梁结构进一步改进。

公开(公告)号：US5746051A

公开(公告)日：1998-05-05

申请号：US737502

申请日：1996-11-08

申请人： Jorg Kieser ,  Markus Klein ,  Gunter Lins ,  Robert Seebock ,  Michael Romheld

发明人： Jorg Kieser ,  Markus Klein ,  Gunter Lins ,  Robert Seebock ,  Michael Romheld

IPC分类号： B01D53/32 ,  B01D53/94 ,  B01J19/08 ,  F01N3/04 ,  F01N3/08 ,  F01N3/02

CPC分类号： B01D53/9454 ,  B01D53/32 ,  B01J19/088 ,  F01N3/04 ,  F01N3/08 ,  F01N3/0892 ,  B01J2219/0809 ,  B01J2219/0835 ,  B01J2219/0845 ,  B01J2219/0875 ,  B01J2219/0883 ,  B01J2219/0894 ,  Y02T10/20 ,  Y02T10/22

摘要： In automobiles, for example, the exhaust fumes must pass through a plasma reactor operating by the principle of dielectrically inhibited ("silent") discharge, consisting of an arrangement of flat plates with alternating metallic and dielectric layers, whereby a plurality of adjacent discharge paths in parallel in the flow direction are formed. According to the invention, the discharge paths border on a single metallic electrode surface or layer (62, 72) and the electric power is supplied (58, 59) from two different sides with the metallic layers (62, 72) having alternating polarities.

摘要翻译： PCT No.PCT / DE95 / 00619 Sec。 371日期：1996年11月8日 102（e）日期1996年11月8日PCT提交1995年5月10日PCT公布。 公开号WO95 / 31271 日期1995年11月23日在汽车中，例如，排气必须通过由介电抑制（“无声”）排放的原理运行的等离子体反应器，其由具有交替的金属和电介质层的平板的布置组成，由此 形成在流动方向上平行的多个相邻的排出路径。 根据本发明，放电路径在单个金属电极表面或层（62,72）上相交，并且从具有交替极性的金属层（62,72）的两个不同侧供给电力（58,59）。

公开(公告)号：US5644283A

公开(公告)日：1997-07-01

申请号：US381927

申请日：1995-02-14

申请人： Hubert Grosse-Wilde ,  Jorg Kieser ,  Wilfried Jaehner ,  Fritz Pohl ,  Reinhard Steger ,  Gert Vogel

发明人： Hubert Grosse-Wilde ,  Jorg Kieser ,  Wilfried Jaehner ,  Fritz Pohl ,  Reinhard Steger ,  Gert Vogel

IPC分类号： H01C10/10 ,  H01C10/12 ,  H02H9/02 ,  H01C7/10

CPC分类号： H02H9/026 ,  H01C10/10

摘要： A variable high-current resistor, especially for use as a protective element in power switching technology has already been proposed, which contains carbon as a resistance material, at least one boundary layer with a transition zone to another electric conductor being provided. By applying a contact pressure, the resistance in the transition zone can be kept low. Under the prior art, the resistance is converted into a highly resistive state by means of Joulean heat. In accordance with the invention, the contact pressure of the variable high-current resistor is able to be selectively influenced, the carbon- and/or carbon-black-containing layer being pressed by the surface pressure with a preset first value against the other conductor to adjust the low-resistance state of the resistor, and that, in the event of a short-circuit, this contact pressure being able to be reduced in a short enough time to a second value, at which the resistance in the transition zone goes up by at least two orders of magnitude. High-current resistors of this type are able to be used in conjunction with circuit-breakers, power semiconductors, contactors and vacuum contactors.

摘要翻译： PCT No.PCT / DE93 / 00721 Sec。 371日期：1995年2月14日 102（e）1995年2月14日PCT PCT 1993年8月11日PCT公布。 公开号WO94 / 06130 日期1994年3月17日已经提出了特别用作功率开关技术中的保护元件的可变大电流电阻器，其包含碳作为电阻材料，至少一个具有与另一导体的过渡区的边界层 提供。 通过施加接触压力，过渡区域中的电阻可以保持较低。 在现有技术中，通过Joulean热将电阻转换成高电阻状态。 根据本发明，能够选择性地影响可变高电流电阻器的接触压力，所述含碳和/或含碳黑的层被表面压力按预定的第一值抵抗另一导体 以调节电阻器的低电阻状态，并且在短路的情况下，该接触压力能够在足够短的时间内减小到过渡区域中的电阻达到第二值 上升至少两个数量级。 这种类型的大电流电阻器可以与断路器，功率半导体，接触器和真空接触器结合使用。

公开(公告)号：US4569738A

公开(公告)日：1986-02-11

申请号：US606920

申请日：1984-05-04

申请人： Jorg Kieser ,  Michael Neusch

发明人： Jorg Kieser ,  Michael Neusch

IPC分类号： C23C16/50 ,  C03C17/22 ,  C23C16/02 ,  C23C16/26 ,  C23C16/511 ,  H01L23/29 ,  C01B31/00

CPC分类号： C23C16/511 ,  C03C17/22 ,  C23C16/0272 ,  C23C16/26 ,  H01L23/29 ,  C03C2217/282 ,  C03C2218/153 ,  H01L2924/0002 ,  Y10T428/30 ,  Y10T428/31645 ,  Y10T428/31663 ,  Y10T428/31696

摘要： A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atomsphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substrate provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.

摘要翻译： 一种通过在反应室内离子化的气体原子中降解气态烃化合物来在基底上生产无定形碳涂层的方法。 电磁场用于等离子体的激发。 为了实现提高沉积速率并允许均匀涂覆大面积的基板的目的，在微波区域（915-2,540MHz）中选择电磁交变场的频率。 此外，通过位于反应室外部的至少一个梯形波导将微波能量放入气体气氛中。 本发明还涉及一种具有无定形碳涂层的基底，其中在基底和无定形碳涂层之间提供由来自硅氧烷或硅氮烷的聚合物组成的粘附介导涂层。