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11.发明授权公开(公告)号：US08247768B2
公开(公告)日：2012-08-21
申请号：US12896281
申请日：2010-10-01
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译： 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的投影之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。
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公开(公告)号：US07935937B2
公开(公告)日：2011-05-03
申请号：US12391552
申请日：2009-02-24
CPC分类号： H01J37/20 , G01N1/286 , G01N23/2204 , H01J37/26 , H01J37/3056 , H01J37/31 , H01J2237/31745 , H01J2237/31749
摘要： A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the point of the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.
摘要翻译： TEM样品保持器由至少一个纳米机械手探针尖端和TEM样品架预成型件形成。 在将样品连接到FIB内的探针尖端的位置之前，探针尖端永久地附着到TEM样品架预成型件上以形成TEM样品架。 在优选实施例中，通过向预成型件和探针针尖施加压力，将探头尖端连接到TEM样品架预成型件上，以便使预成型材料围绕探针尖端塑性流动。 TEM样品架可能具有比TEM样品架预制件更小的尺寸; 在这种情况下，TEM样品架从较大的TEM样品保持器预成型切割，优选地在与附接探针尖端相同的操作中。
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13.发明申请METHOD AND APPARATUS FOR THE MONITORING OF SAMPLE MILLING IN A CHARGED PARTICLE INSTRUMENT 有权用于监测充电颗粒仪器中样品铣削的方法和装置公开(公告)号：US20110017927A1
公开(公告)日：2011-01-27
申请号：US12842105
申请日：2010-07-23
IPC分类号： H01J37/22 , H01J37/305 , H01J37/20
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/304 , H01J2237/20207 , H01J2237/2482 , H01J2237/30466 , H01J2237/31745
摘要： An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder (130) attached to the instrument tilt stage (120). The variable-tilt specimen holder (130) includes a first pivoting plate (260) having a slot (280) for holding a specimen (290) rotatably supported in the variable-tilt specimen holder (130). The first pivoting plate (260) has a range of rotation sufficient to move the preferred axis of thinning of the specimen (290) from a first position where the tilt stage (120) is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen (290) and the axis of the ion beam column (110) of the instrument is greater than zero, to a second position where the preferred axis for thinning of the specimen (290) is substantially parallel to the axis of the ion-beam column (110). A light detector (250) is positioned to intercept light passing through the specimen (290) as it is thinned by ion-beam milling. The intensity of the light passing through the specimen (290) may be compared to the intensity recorded for previous stages of milling to determine an endpoint for milling of the specimen.
摘要翻译： 用于监测带电粒子仪器中的样品研磨的装置具有附接到仪器倾斜台（120）的可变倾斜试样保持器（130）。 可变倾斜试样架（130）包括第一枢转板（260），其具有用于保持可旋转地支撑在可变倾斜试样保持器（130）中的试样（290）的狭槽（280）。 第一枢转板（260）具有足够的旋转范围，以便将倾斜台（120）放置在其最大倾斜范围内的第一位置移动样本（290）的优选稀疏轴线， 样品（290）的薄化的优选轴线和仪器的离子束柱（110）的轴线大于零，到第二位置，其中样品（290）的薄化优选轴线基本上平行于 离子束柱（110）的轴线。 光检测器（250）被定位成通过离子束铣削来遮蔽通过样品（290）的光线。 通过样品（290）的光的强度可以与先前研磨阶段记录的强度进行比较，以确定样品研磨的终点。
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14.发明授权公开(公告)号：US07834315B2
公开(公告)日：2010-11-16
申请号：US12041217
申请日：2008-03-03
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译： 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。
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15.发明授权Variable-tilt specimen holder and method and for monitoring milling in a charged-particle instrument 有权可变倾斜试样架和方法，用于监测带电粒子仪器中的铣削公开(公告)号：US08227781B2
公开(公告)日：2012-07-24
申请号：US12842105
申请日：2010-07-23
IPC分类号： G01N21/86
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/304 , H01J2237/20207 , H01J2237/2482 , H01J2237/30466 , H01J2237/31745
摘要： An apparatus for monitoring sample milling in a charged-particle instrument has a variable-tilt specimen holder attached to the instrument tilt stage. The variable-tilt specimen holder includes a first pivoting plate having a slot for holding a specimen rotatably supported in the specimen holder. The first pivoting plate has a range of rotation sufficient to move the axis of thinning of the specimen from a first position where the tilt stage is placed at its maximum range of tilt and the angle between the preferred axis of thinning of the specimen and the axis of the ion beam column of the instrument is greater than zero, to a second position where the axis for thinning of the specimen is substantially parallel to the axis of the ion-beam column. A light detector intercepts light passing through the specimen as it is thinned to determine an endpoint for milling of the specimen.
摘要翻译： 用于监测带电粒子仪器中的样品研磨的装置具有连接到仪器倾斜台上的可变倾斜的样品支架。 可变倾斜试样架包括第一枢转板，其具有用于保持可旋转地支撑在试样保持器中的试样的狭槽。 第一枢转板具有足够的旋转范围，以使样品的变薄轴从第一位置移动，其中倾斜台被放置在其最大倾斜范围内，并且样品的优选减薄轴线与轴线之间的角度 的仪器的离子束柱大于零，到第二位置，其中用于使样品变薄的轴线基本上平行于离子束柱的轴线。 光检测器在被稀释时拦截通过样品的光，以确定试样的铣削终点。
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公开(公告)号：US08168949B2
公开(公告)日：2012-05-01
申请号：US12896274
申请日：2010-10-01
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
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17.发明申请公开(公告)号：US20110031396A1
公开(公告)日：2011-02-10
申请号：US12896274
申请日：2010-10-01
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译： 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。
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公开(公告)号：US20090294690A1
公开(公告)日：2009-12-03
申请号：US12391552
申请日：2009-02-24
IPC分类号： G01N23/00
CPC分类号： H01J37/20 , G01N1/286 , G01N23/2204 , H01J37/26 , H01J37/3056 , H01J37/31 , H01J2237/31745 , H01J2237/31749
摘要： A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the point of the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.
摘要翻译： TEM样品保持器由至少一个纳米机械手探针尖端和TEM样品架预成型件形成。 在将样品连接到FIB内的探针尖端的位置之前，探针尖端永久地附着到TEM样品架预成型件上以形成TEM样品架。 在优选实施例中，通过向预成型件和探针针尖施加压力，将探头尖端连接到TEM样品架预成型件上，以便使预成型材料围绕探针尖端塑性流动。 TEM样品架可能具有比TEM样品架预制件更小的尺寸; 在这种情况下，TEM样品架从较大的TEM样品保持器预成型切割，优选地在与附接探针尖端相同的操作中。
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19.发明授权Method and apparatus for precursor delivery system for irradiation beam instruments 有权用于照射束仪的前驱体输送系统的方法和装置公开(公告)号：US08394454B2
公开(公告)日：2013-03-12
申请号：US12399579
申请日：2009-03-06
申请人： Rocky Kruger , Aaron Smith , Thomas M. Moore
发明人： Rocky Kruger , Aaron Smith , Thomas M. Moore
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube for injecting gasses into the vacuum chamber of the instrument and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.
摘要翻译： 具有真空室的照射束装置的前体输送系统包括用于将气体注入仪器的真空室的注入管和具有入口和出口的主气体管线。 出口连接到注射管，入口连接到连接到载气源的顺序一对阀。 用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。 载气源可以通过一对载气阀的顺序操作选择性地连接到入口，使得载气的脉冲有助于前体材料流到注射管。 通过阀选择性地将主管线连接到与仪器真空连通的外壳，能够快速清洗前体之间的系统。 还公开了使用该系统的CVD和蚀刻的方法。
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20.发明申请公开(公告)号：US20130025536A1
公开(公告)日：2013-01-31
申请号：US13357741
申请日：2012-01-25
申请人： Rocky Kruger , Aaron Smith , Thomas M. Moore
发明人： Rocky Kruger , Aaron Smith , Thomas M. Moore
IPC分类号： C23C16/452
CPC分类号： C23C16/4481 , C23C16/45561 , C23C16/48 , C23C16/52 , C23C16/54
摘要： A precursor delivery system for an irradiation beam instrument includes an injection tube for injecting gasses into the instrument vacuum chamber and a main gas line having an inlet and an outlet. The outlet is connected to the injection tube, and the inlet is connected to a sequential pair of valves connected to a carrier gas source. A crucible for holding precursor material is selectively connected to the main gas line at a location between the pair of valves and the injection tube. The source of carrier gas may be selectively connected to the inlet by sequential operation of the pair of carrier gas valves, so that pulses of carrier gas assist the flow of precursor material to the injection tube. Rapid purging of the system between precursors is enabled by a valve selectively connecting the main line to an envelope in communication with the instrument vacuum.
摘要翻译： 用于照射束仪器的前体传送系统包括用于将气体注入仪器真空室的注入管和具有入口和出口的主气体管线。 出口连接到注射管，入口连接到连接到载气源的顺序一对阀。 用于保持前体材料的坩埚在一对阀和注射管之间的位置处选择性地连接到主气体管线。 载气源可以通过一对载气阀的顺序操作选择性地连接到入口，使得载气的脉冲有助于前体材料流到注射管。 通过阀选择性地将主管线连接到与仪器真空连通的外壳，能够快速清洗前体之间的系统。
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