公开(公告)号：US08427177B2

公开(公告)日：2013-04-23

申请号：US12912580

申请日：2010-10-26

申请人： Heewon Jeong ,  Kiyoko Yamanaka ,  Yasushi Goto ,  Toshiaki Nakamura ,  Masahide Hayashi

发明人： Heewon Jeong ,  Kiyoko Yamanaka ,  Yasushi Goto ,  Toshiaki Nakamura ,  Masahide Hayashi

IPC分类号： G01R27/26 ,  G01R27/08

CPC分类号： G01P21/00 ,  G01C19/5719 ,  G01P15/125 ,  G01P2015/0814

摘要： A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.

摘要翻译： 提供了一种在由加速度传感器表示的电容传感器中可以抑制错误检测和错误诊断的技术。 构成电容检测单元的第一电容元件和第二电容元件以及配置强制振荡产生单元的第三电容元件和第四电容元件彼此电分离。 也就是说，构成第三电容元件和第四电容元件的诊断可移动电极与可动部一体地形成。 另一方面，诊断固定电极和诊断固定电极与检测固定电极和检测固定电极电分离。

公开(公告)号：US08096180B2

公开(公告)日：2012-01-17

申请号：US12273068

申请日：2008-11-18

申请人： Kiyoko Yamanaka ,  Heewon Jeong

发明人： Kiyoko Yamanaka ,  Heewon Jeong

IPC分类号： G01P9/04 ,  G01C19/56

CPC分类号： G01C19/5726 ,  G01C19/5755 ,  G01P15/125 ,  G01P2015/0814

摘要： Techniques capable of suppressing fixation between a movable electrode and a fixed electrode in an inertial sensor and preventing the inertial sensor from malfunctioning are provided. The movable electrode, the fixed electrode provided so as to face the movable electrode, a peripheral conductor facing both the movable electrode and the fixed electrode, and a demodulation circuit and a voltage adjustment circuit which adjust the electric potential of the peripheral conductor so that the electric potential of the peripheral conductor becomes the same as the electric potential of the movable electrode are provided, and a change in the capacitance between the movable electrode and the fixed electrode is detected.

摘要翻译： 提供了能够抑制惯性传感器中的可动电极和固定电极之间的固定并防止惯性传感器发生故障的技术。 可动电极，设置成面对可动电极的固定电极，面向可动电极和固定电极的周边导体，以及调整电路和调整电路的电压调节电路， 外围导体的电位变得与设置可动电极的电位相同，并且检测到可动电极与固定电极之间的电容变化。

公开(公告)号：US20090126491A1

公开(公告)日：2009-05-21

申请号：US12273068

申请日：2008-11-18

申请人： Kiyoko YAMANAKA ,  Heewon Jeong

发明人： Kiyoko YAMANAKA ,  Heewon Jeong

IPC分类号： G01P15/125

CPC分类号： G01C19/5726 ,  G01C19/5755 ,  G01P15/125 ,  G01P2015/0814

摘要： Techniques capable of suppressing fixation between a movable electrode and a fixed electrode in an inertial sensor and preventing the inertial sensor from malfunctioning are provided. The movable electrode, the fixed electrode provided so as to face the movable electrode, a peripheral conductor facing both the movable electrode and the fixed electrode, and a demodulation circuit and a voltage adjustment circuit which adjust the electric potential of the peripheral conductor so that the electric potential of the peripheral conductor becomes the same as the electric potential of the movable electrode are provided, and a change in the capacitance between the movable electrode and the fixed electrode is detected.

摘要翻译： 提供了能够抑制惯性传感器中的可动电极和固定电极之间的固定并防止惯性传感器发生故障的技术。 可动电极，设置成面对可动电极的固定电极，面向可动电极和固定电极的周边导体，以及调整电路和调整电路的电压调节电路， 外围导体的电位变得与设置可动电极的电位相同，并且检测到可动电极与固定电极之间的电容变化。

公开(公告)号：US09568490B2

公开(公告)日：2017-02-14

申请号：US14383335

申请日：2012-03-19

申请人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

发明人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

IPC分类号： G01C19/00 ,  G01C19/02 ,  G01C19/5726 ,  G01C19/5762 ,  G01C19/5719

CPC分类号： G01P9/02 ,  G01C19/5719 ,  G01C19/5726 ,  G01C19/5762

摘要： Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.

摘要翻译： 提供了一种角速度传感器，其包括多个角速度检测单元，每个角速度检测单元输出不同的检测结果，并且包括用于驱动角速度检测单元的公共驱动电路。 本发明的角速度传感器的角速度检测单元被配置为当由相同频率的驱动信号驱动时具有不同的驱动振幅。

公开(公告)号：US09511993B2

公开(公告)日：2016-12-06

申请号：US13983775

申请日：2012-01-18

申请人： Kiyoko Yamanaka ,  Heewon Jeong ,  Chisaki Takubo

发明人： Kiyoko Yamanaka ,  Heewon Jeong ,  Chisaki Takubo

IPC分类号： B81B7/02 ,  G01C19/5747 ,  G01C19/5769 ,  G01P15/125 ,  G01P15/18 ,  G01P15/08

CPC分类号： B81B7/02 ,  G01C19/5747 ,  G01C19/5769 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0822

摘要： A semiconductor physical quantity detection sensor includes (1) a first electrostatic capacitance formed by the movable electrode, and a first fixed electrode formed in a first conductive layer shared with the movable electrode, (2) a second electrostatic capacitance that is formed by the movable electrode, and a second fixed electrode formed in a second conductive layer different in a height from a substrate surface from the movable electrode, and (3) an arithmetic circuit that calculates the physical quantity on the basis of a change in the first and second electrostatic capacitances generated when the physical quantity is applied. In this configuration, an electric signal from the first electrostatic capacitance, and an electric signal from the second electrostatic capacitance are input to the arithmetic circuit.

摘要翻译： 半导体物理量检测传感器包括（1）由可动电极形成的第一静电电容和形成在与可动电极共用的第一导电层中的第一固定电极，（2）由可动电极形成的第二静电电容 电极和形成在与可动电极的基板表面不同高度的第二导电层中的第二固定电极，以及（3）基于第一和第二静电的变化来计算物理量的运算电路 当施加物理量时产生的电容。 在该结构中，来自第一静电电容的电信号和来自第二静电电容的电信号被输入到运算电路。

公开(公告)号：US20130319075A1

公开(公告)日：2013-12-05

申请号：US13976372

申请日：2011-11-24

申请人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

发明人： Daisuke Maeda ,  Heewon Jeong ,  Masahide Hayashi

IPC分类号： G01P21/00

CPC分类号： G01P21/00 ,  G01C19/5776 ,  G01C21/16

摘要： Reliability and accuracy of a sensor are secured while adjustment cost of a sensor module is suppressed. A signal component analysis part 10 receives a signal output from a signal processing part 7 before passing through a low-pass filter 8, analyzes whether or not application of a fragile frequency with respect to a physical quantity is equal to or more than a threshold level, if the application of the fragile frequency is equal to or more than the threshold level, outputs output stop signals to output signal control parts 9, 16. The output signal control parts 9, 16 receive control signals output from the signal component analysis part 10, and outputs an acceleration signal and a physical quantity signal from which noise has been removed by the low-pass filters 8, 15 through the signal processing parts 7, 14.

摘要翻译： 确保传感器模块的调整成本得到抑制，从而确保传感器的可靠性和精度。 信号分量分析部分10在通过低通滤波器8之前接收从信号处理部分7输出的信号，分析相对于物理量的脆弱频率的施加是否等于或大于阈值水平 如果脆弱频率的应用等于或大于阈值电平，则将输出停止信号输出到输出信号控制部9,16。输出信号控制部9,16接收从信号分量分析部10输出的控制信号 并且通过信号处理部件7,14输出通过低通滤波器8,15除去噪声的加速度信号和物理量信号。

公开(公告)号：US20130285172A1

公开(公告)日：2013-10-31

申请号：US13991749

申请日：2011-11-22

申请人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

发明人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

IPC分类号： B81B3/00

CPC分类号： B81B3/0018 ,  G01C19/574 ,  G01P15/125 ,  G01P15/18

摘要： To provide a combined sensor that can detect a plurality of physical quantities. With the combined sensor, it is possible to realize, while maintaining performance, a reduction in size and a reduction in costs by increasing elements that can be shared among respective sensors. A weight M2 and a detection electrode DTE2 used in an angular-velocity detecting section are also used as a reference capacitive element of a Z-direction-acceleration detecting section configured to detect acceleration in a Z direction. That is, in the Z-direction-acceleration detecting section, a detection capacitive element including the weight M2 and the detection electrode DTE2 configuring the angular-velocity detecting section is used as a reference capacitive element for a detection capacitive element formed by a detection electrode DTE5 and a weight M4.

摘要翻译： 提供可以检测多个物理量的组合传感器。 利用组合的传感器，通过增加可在各个传感器之间共享的元件，可以在保持性能的同时实现尺寸的减小和成本的降低。 在角速度检测部中使用的重量M2和检测电极DTE2也被用作被配置为检测Z方向上的加速度的Z方向加速度检测部的基准电容元件。 也就是说，在Z方向加速度检测部中，使用包括权重M2的检测电容元件和构成角速度检测部的检测电极DTE2作为由检测电极形成的检测用电容元件的基准电容元件 DTE5和重量M4。

公开(公告)号：US20130241013A1

公开(公告)日：2013-09-19

申请号：US13878776

申请日：2011-10-07

申请人： Kiyoko Yamanaka ,  Kengo Suzuki ,  Kazunori Ohta ,  Heewon Jeong ,  Masahide Hayashi

发明人： Kiyoko Yamanaka ,  Kengo Suzuki ,  Kazunori Ohta ,  Heewon Jeong ,  Masahide Hayashi

IPC分类号： B81B7/00

CPC分类号： B81B7/0058 ,  G01C19/5783 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0845 ,  H01L24/32 ,  H01L2224/05554 ,  H01L2224/48091 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2924/14 ,  H01L2924/00014 ,  H01L2924/00

摘要： Provided is an inertial sensor device comprising a detection part having an MEMS structure, wherein convenience during sensor installation is ensured while erroneous operation caused by the application of external vibration is controlled. To achieve this objective, an anti-vibration structure (103) is provided in the inertial sensor device, between a semiconductor chip (102) mounted on a package substrate and a semiconductor chip (104) comprising a sensor detection part. The anti-vibration structure (103) has a structure in which the periphery of an anti-vibration part (103a) is surrounded by an anti-vibration part (103b) comprising a material having a larger Young's modulus.

摘要翻译： 提供了一种惯性传感器装置，其包括具有MEMS结构的检测部件，其中，在控制由施加外部振动引起的错误操作的同时确保传感器安装期间的便利性。 为了实现该目的，在惯性传感器装置中，在安装在封装基板上的半导体芯片（102）和包括传感器检测部件的半导体芯片（104）之间设置防振结构（103）。 防振结构（103）具有防振部（103a）的周围由包含杨氏模量较大的材料的防振部（103b）包围的结构。

公开(公告)号：US08327706B2

公开(公告)日：2012-12-11

申请号：US12832965

申请日：2010-07-08

申请人： Heewon Jeong ,  Yasushi Goto

发明人： Heewon Jeong ,  Yasushi Goto

IPC分类号： G01P15/08

CPC分类号： G01P3/22 ,  G01C19/5747 ,  G01C19/5762

摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.

摘要翻译： 提供了一种高性能角速率检测装置。 包括驱动框架和科里奥利框架的驱动部分通过共享固定端并且沿与驱动方向正交的方向延伸的至少两个固定梁悬浮，从而使驱动部分振动。 即使当通过安装或热波动使基板变形时，产生到固定梁和支撑梁的内应力也小，从而保持振动状态，例如共振频率和振动幅度恒定。 因此，可以获得对安装环境变化坚固的高性能角速度检测装置。

公开(公告)号：US09182421B2

公开(公告)日：2015-11-10

申请号：US13807284

申请日：2011-05-25

申请人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

发明人： Heewon Jeong ,  Munenori Degawa ,  Masahide Hayashi

IPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C19/5747 ,  G01C19/574

CPC分类号： G01P9/04 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

摘要翻译： 本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。 振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd） 两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。 在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容 并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器 单位（53）。