摘要:
An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors.A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.
摘要:
The present invention provides a production method for biofuel based on a technology to convert carbon-dioxide as a carbon source through photosynthesis by photosynthetic microorganisms to biomass and produce biofuel of the biomass. The production method for biofuel of the present invention comprises a culturing process (S1) of culturing in a culture solution photosynthetic microorganisms which store oils, fats and carbohydrates in cells of the photosynthetic microorganisms, an oil and fat conversion process (S2) of converting the carbohydrates stored in the cells of the photosynthetic microorganisms cultured in the culture apparatus to oils and fats, an extraction process (S3) of extracting the oils and fats out of the cells of the photosynthetic microorganisms, and a reforming process (S4) to reform the extracted oils and fats.
摘要:
Disclosed is a compound containing a pyridine ring that can be synthesized in an industrially advantageous manner, and is useful as an intermediate for producing tetrazolyloxime derivatives that exhibit fungicidal activity (wherein R0 represents a C1-6 alkoxy group, C1-6 alkoxy-C1-6 alkoxy group or the like, R1 represents a C1-2 alkoxycarbonyl group, acetyl group or the like, Z represents a halogen atom, cyano group or the like, X represents a halogen atom, and n represents an integer of 0 to 3), and industrially advantageous production methods for producing 2-substituted amino-6-halomethylpyridine derivatives and tetrazolyloxime derivatives.
摘要:
Provided is an inertial sensor device comprising a detection part having an MEMS structure, wherein convenience during sensor installation is ensured while erroneous operation caused by the application of external vibration is controlled. To achieve this objective, an anti-vibration structure (103) is provided in the inertial sensor device, between a semiconductor chip (102) mounted on a package substrate and a semiconductor chip (104) comprising a sensor detection part. The anti-vibration structure (103) has a structure in which the periphery of an anti-vibration part (103a) is surrounded by an anti-vibration part (103b) comprising a material having a larger Young's modulus.
摘要:
A movable device of acceleration sensors and a vibration device of a gyroscope are formed on the same sensor wafer spaced apart from each other by a wall. A cap wafer having gaps corresponding to the movable mechanical components of the acceleration sensors and gyroscope is provided for the wafer and an adsorbent divided into a plurality of divisional portions is disposed in the gap for the gyroscope. After the sensor wafer and the cap wafer have been bonded together at a temperature of inactivation of the adsorbent and in an atmospheric pressure ambience of noble gas and activated gas, the adsorbent divisional portions are activated in sequence to adsorb the activated gas so as to adjust the pressure inside the gyroscope, thus manufacturing a combined sensor wafer.
摘要:
A spectrometer 1A is provided with an integrating sphere 20 for observing measured light emitted from a sample S of a measurement target, and a Dewar vessel 50 which retains a medium R for regulating temperature of the sample S, so as to cover the sample S and a second container portion 50b of which is located so as to face the interior of the integrating sphere 20. The sample S can be easily regulated at a desired temperature with the use of the Dewar vessel 50 retaining the medium R so as to cover the sample S. As the second container portion 50b is located so as to face the interior of the integrating sphere 20, the temperature of the sample S is regulated by the medium R, while inhibiting an external ambience around the integrating sphere from affecting the sample S. Therefore, the sample S can be efficiently regulated at a desired temperature.
摘要:
A photodetecting device 1 includes an integrating sphere 20 for observing light to be measured generated according to irradiation of a sample with excitation light and a sample holder 60 removably attached to the integrating sphere 20, the integrating sphere 20 has an excitation light introducing hole 201 for introducing the excitation light and a sample introducing hole 205 for introducing a cell C held by the sample holder 60, the sample holder 60 is locked to the sample introducing hole 205 and holds the cell C for accommodating the sample, and the cell is disposed so that an entrance surface of the cell C, through which the excitation light enters the cell C, inclines relative to the surface perpendicular to the optical axis L of the excitation light.
摘要:
When a domain inversion part is produced by means of electric field polling process, damage in the vicinity of the forward end of a comb electrode and deviation of width of each domain inversion part are to be reduced. A polarization domain inversion structure has polarization domain inversion parts is produced by electric field poling process using a comb electrode formed on one surface of a substrate of a ferroelectric single crystal and of a single domain, and the comb electrode has a plurality of electrode portions and feeding portion. Each of the electrode portions corresponds with each domain inversion part of the domain inversion structure. The electrode portion has a plurality of low resistance pieces arranged in a direction “F” intersecting the longitudinal direction “E” of the electrode portion and spaced apart with each other.
摘要:
The present invention is directed to preventing characteristic variations and damage caused by a difference in thermal expansion coefficient. A piezoelectric thin film filter, including four film bulk acoustic resonators, has a configuration where a filter section for providing a filter function of the piezoelectric thin film filter is bonded with a flat base substrate mechanically supporting the filter section via an adhesive layer. In manufacturing of the piezoelectric thin film filter, a piezoelectric thin film is obtained by performing removal processing on a piezoelectric substrate that can individually stand up under its own weight, but substrates made of one kind of single crystal material are adopted as the base substrate and the piezoelectric substrate, to make the respective thermal expansion coefficients of the piezoelectric thin film and the base substrate coincident with each other.
摘要:
The present invention is directed to improving characteristics of a piezoelectric thin film device. A piezoelectric thin film filter including four film bulk acoustic resonators has a configuration where a filter section and a base substrate are bonded to each other via an adhesive layer, the filter section including a piezoelectric thin film which cannot stand up individually under its own weight, the flat base substrate mechanically supporting the filter section. As a piezoelectric material constructing the piezoelectric thin film, it is desirable to use a single-crystal material including no grain boundary, selected from crystal, lithium niobate, lithium tantalite, lithium tetraborate, zinc oxide, potassium niobate, and langasite.