利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

115 条记录 (耗时 0.035 秒)

    Process for preparing fluorine-containing polymer and photoresist composition
    11.
    发明申请
    Process for preparing fluorine-containing polymer and photoresist composition 审中-公开
    制备含氟聚合物和光致抗蚀剂组合物的方法

    公开(公告)号：US20050191578A1

    公开(公告)日：2005-09-01

    申请号：US11104554

    申请日：2005-04-13

    申请人： Takayuki Araki ,  Takuji Ishikawa ,  Meiten Koh ,  Minoru Toriumi

    发明人： Takayuki Araki ,  Takuji Ishikawa ,  Meiten Koh ,  Minoru Toriumi

    IPC分类号： C08F4/34 ,  C08F8/00 ,  C08F214/18 ,  G03C1/492 ,  G03F7/004 ,  G03F7/039

    CPC分类号： C08F214/18 ,  C08F8/00 ,  C08F2800/20 ,  G03C1/492 ,  G03F7/0046 ,  G03F7/0392 ,  C08F214/26

    摘要： There is provided a process for preparing a fluorine-containing polymer for resist which is excellent in transparency in a vacuum ultraviolet region, comprises a structural unit derived from a fluorine-containing ethylenic monomer and/or a structural unit derived from a monomer which can provide an aliphatic ring structure in the polymer trunk chain and may have a fluorine atom, and has an acid-reactive group Y1 reacting with an acid or a group Y2 which can be converted to the acid-reactive group Y1, in which the fluorine-containing ethylenic monomer and/or the monomer which can provide an aliphatic ring structure in the polymer trunk chain are subjected to radical polymerization by using an organic peroxide represented by the formula (1): wherein R50 and R51 are the same or different and each is a hydrocarbon group having 1 to 30 carbon atoms which may have ether bond (an atom at an end of bond is not oxygen atom); p1 and p2 are the same or different and each is 0 or 1; p3 is 1 or 2, and also there is provided a photoresist composition comprising the obtained polymer. The fluorine-containing polymer is excellent in transparency in a vacuum ultraviolet region, and can form an ultra fine pattern as a polymer for a photoresist, particularly for a F2 resist.

    摘要翻译： 提供了一种制备真空紫外线区域的透明度优异的抗蚀剂用含氟聚合物的方法，包括衍生自含氟乙烯性单体的结构单元和/或衍生自单体的结构单元，其可以提供 聚合物主链中的脂族环结构，并且可以具有氟原子，并且具有与酸或Y 2的基团反应的酸反应性基团Y 1，其可以是 转化为酸反应性基团Y 1，其中可以在聚合物主链中提供脂族环结构的含氟乙烯性单体和/或单体通过使用 由式（1）表示的有机过氧化物：其中R 50和R 51相同或不同，并且各自为具有1至30个碳原子的烃基，其可以 具有醚键（键的末端的原子不是氧原子）; p1和p2相同或不同，分别为0或1; p3为1或2，并且还提供包含所得聚合物的光致抗蚀剂组合物。 含氟聚合物在真空紫外区域的透明度优异，并且可以形成作为光致抗蚀剂的聚合物的超细图案，特别是用于F2抗蚀剂。

    Solid electrolyte comprising fluorine-containing polymer having fluorine-containing ether chains
    12.
    发明授权
    Solid electrolyte comprising fluorine-containing polymer having fluorine-containing ether chains 有权
    含有含氟醚链的含氟聚合物的固体电解质

    公开(公告)号：US08034490B2

    公开(公告)日：2011-10-11

    申请号：US12471860

    申请日：2009-05-26

    申请人： Takayuki Araki ,  Meiten Koh

    发明人： Takayuki Araki ,  Meiten Koh

    IPC分类号： H01M10/40

    CPC分类号： H01G9/028 ,  H01B1/122 ,  H01G9/038 ,  H01G11/56 ,  H01M8/0289 ,  H01M8/1023 ,  H01M8/1039 ,  H01M10/052 ,  H01M10/0565 ,  H01M2300/0082 ,  Y02E60/13

    摘要： There is provided a fluorine-containing polymer solid electrolyte which has an excellent ion-conducting property, is high in oxidation resistance, is stable electrochemically and thermally, has sufficient strength and is applicable to various electrochemical devices. The electrolyte comprises (I) a non-crystalline fluorine-containing polymer which has a polar nonionic functional group and has, in a side chain of the polymer molecule, a structural unit D having 1 to 4 units derived from a fluorine-containing ether in the form of continuous chain, (II) an electrolytic compound and as case demands, (III) a solvent. The electrolyte has an ionic conductivity of from 10—10 to 101 S/cm measured at 25° C. by an alternating current complex impedance method, and is useful for various electrochemical devices.

    摘要翻译： 提供了具有优异的离子传导性，耐氧化性高，电化学和热稳定性好的含氟聚合物固体电解质，具有足够的强度并适用于各种电化学装置。 电解质包含（I）具有极性非离子官能团的非结晶性含氟聚合物，在聚合物分子的侧链中，具有1〜4个由含氟醚衍生的单元的结构单元D 连续链的形式，（II）电解化合物，如果需要，（III）溶剂。 电解质在25℃下通过交流复阻抗法测得的10-10至101S / cm的离子电导率，并且可用于各种电化学装置。

    Method of forming laminated resist
    13.
    发明申请
    Method of forming laminated resist 审中-公开
    形成层压抗蚀剂的方法

    公开(公告)号：US20070196763A1

    公开(公告)日：2007-08-23

    申请号：US10579855

    申请日：2004-11-15

    申请人： Takayuki Araki ,  Meiten Koh ,  Kazuyuki Sato ,  Mihoko Ohashi ,  Yosuke Kishikawa

    发明人： Takayuki Araki ,  Meiten Koh ,  Kazuyuki Sato ,  Mihoko Ohashi ,  Yosuke Kishikawa

    IPC分类号： G03C11/12

    CPC分类号： G03F7/0046 ,  C09D133/16 ,  G03F7/091

    摘要： There is formed a laminated resist which exhibits sufficient reflection reducing effect in a photolithography process using light of vacuum ultraviolet region and also has sufficient developing characteristics in a developing process. The method of forming the laminated photoresist comprises (I) a step for forming the photoresist layer (L1) on a substrate and (II) a step for forming the antireflection layer (L2) on the photoresist layer (L1) by applying the coating composition containing the fluorine-containing polymer (A) having hydrophilic group Y. The fluorine-containing polymer (A) contains a structural unit derived from a fluorine-containing ethylenic monomer having hydrophilic group Y and is characterized in that (i) the hydrophilic group Y contains an acidic OH group having a pKa value of not more than 11, (ii) a fluorine content is not less than 50% by mass, and (iii) the number of moles of the hydrophilic group Y in 100 g of the fluorine-containing polymer (A) is not less than 0.14.

    摘要翻译： 形成层叠抗蚀剂，其在使用真空紫外线区域的光的光刻工艺中表现出足够的反射降低效果，并且在显影过程中也具有足够的显影特性。 形成层叠光致抗蚀剂的方法包括：（I）在基板上形成光致抗蚀剂层（L1）的工序，（II）在光致抗蚀剂层（L1）上形成抗反射层（L 2）的工序， 含有具有亲水基团Y的含氟聚合物（A）的涂料组合物。含氟聚合物（A）含有由具有亲水性基团Y的含氟乙烯性单体衍生的结构单元，其特征在于，（i） 亲水性基团Y含有pKa值不大于11的酸性OH基，（ii）氟含量不小于50质量％，和（iii）100g的亲水基Y的摩尔数 含氟聚合物（A）不低于0.14。

    Solid electrolyte comprising fluorine-containing polymer having fluorine-containing ether chains
    16.
    发明申请
    Solid electrolyte comprising fluorine-containing polymer having fluorine-containing ether chains 有权
    含有含氟醚链的含氟聚合物的固体电解质

    公开(公告)号：US20050233221A1

    公开(公告)日：2005-10-20

    申请号：US11157957

    申请日：2005-06-22

    申请人： Takayuki Araki ,  Meiten Koh

    发明人： Takayuki Araki ,  Meiten Koh

    IPC分类号： G01N27/406 ,  H01B1/06 ,  H01B1/12 ,  H01G9/028 ,  H01G9/032 ,  H01G9/035 ,  H01G11/54 ,  H01G11/56 ,  H01M8/02 ,  H01M8/10 ,  H01M10/40 ,  H01G9/025

    CPC分类号： H01G9/028 ,  H01B1/122 ,  H01G9/038 ,  H01G11/56 ,  H01M8/0289 ,  H01M8/1023 ,  H01M8/1039 ,  H01M10/052 ,  H01M10/0565 ,  H01M2300/0082 ,  Y02E60/13

    摘要： There is provided a fluorine-containing polymer solid electrolyte which has an excellent ion-conducting property, is high in oxidation resistance, is stable electrochemically and thermally, has sufficient strength and is applicable to various electrochemical devices. The electrolyte comprises (I) a non-crystalline fluorine-containing polymer which has a polar nonionic functional group and has, in a side chain of the polymer molecule, a structural unit D having 1 to 4 units derived from a fluorine-containing ether in the form of continuous chain, (II) an electrolytic compound and as case demands, (III) a solvent. The electrolyte has an ionic conductivity of from 10−10 to 101 S/cm measured at 25° C. by an alternating current complex impedance method, and is useful for various electrochemical devices.

    摘要翻译： 提供了具有优异的离子传导性，耐氧化性高，电化学和热稳定性好的含氟聚合物固体电解质，具有足够的强度并适用于各种电化学装置。 电解质包含（I）具有极性非离子官能团的非结晶性含氟聚合物，在聚合物分子的侧链中，具有1〜4个由含氟醚衍生的单元的结构单元D 连续链的形式，（II）电解化合物，如果需要，（III）溶剂。 电解质在25℃下通过交流复阻抗法测得的离子电导率为10 -10 -10 10 S / cm，可用于各种 电化学装置。

    Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same
    17.
    发明授权
    Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same 有权
    具有酸反应性基团的含氟聚合物和由其制备的化学放大型光致抗蚀剂组合物

    公开(公告)号：US06908724B2

    公开(公告)日：2005-06-21

    申请号：US10262893

    申请日：2002-10-03

    申请人： Takayuki Araki ,  Meiten Koh ,  Yoshito Tanaka ,  Takuji Ishikawa ,  Hirokazu Aoyama ,  Tetsuo Shimizu

    发明人： Takayuki Araki ,  Meiten Koh ,  Yoshito Tanaka ,  Takuji Ishikawa ,  Hirokazu Aoyama ,  Tetsuo Shimizu

    IPC分类号： G03F7/004 ,  G03F7/038 ,  G03F7/039 ,  G03F7/075

    CPC分类号： G03F7/039 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0382 ,  G03F7/0392 ,  G03F7/0395 ,  G03F7/0397 ,  G03F7/0758 ,  Y10S430/106 ,  Y10S430/108

    摘要： There is provided a novel fluorine-containing polymer having an acid-reactive group which has a high transparency against energy rays (radioactive rays) in a vacuum ultraviolet region (157 nm), and further there are provided a material for fluorine-containing base polymer prepared from the polymer and suitable for a photoresist and a chemically amplifying type resist composition obtained therefrom.The polymer has a number average molecular weight of from 1,000 to 1,000,000 and represented by the formula: —(M1)—(M2)—(A)—, wherein M1 is a structural unit having an acid-labile or acid-degradable functional group, M2 is a structural unit of fluorine-containing acryl ester, A is a structural unit derived from other copolymerizable monomer, the percent by mole ratio M1/M2 is 1 to 99/99 to 1 and the polymer comprises from 1 to 99% by mole of the structural unit M1, from 1 to 99% by mole of the structural unit M2 and from 0 to 98% by mole of the structural unit A1. The material for fluorine-containing base polymer comprises a fluorine-containing polymer having an acid-reactive group such as the above-mentioned polymer and is suitable for a photoresist, and the chemically amplifying type resist composition is obtained from those polymer and material.

    摘要翻译： 提供了一种具有酸反应性基团的新型含氟聚合物，其具有对真空紫外区域（157nm）中的能量射线（放射线）的高透明性，并且还提供了含氟基础聚合物 由聚合物制备并适用于由其获得的光致抗蚀剂和化学放大型抗蚀剂组合物。 聚合物的数均分子量为1,000〜1,000,000，由下式表示： - （M1） - （M2） - （A） - ，其中M1是具有酸不稳定性或酸可降解官能团的结构单元 M2是含氟丙烯酸酯的结构单元，A是来自其它可共聚单体的结构单元，M1 / M2的摩尔比为1〜99/99〜1，聚合物的含量为1〜99％ 结构单元M1的摩尔数，结构单元M2的1〜99摩尔％和结构单元A1的0〜98摩尔％。 含氟基础聚合物的材料包括具有酸反应性基团的含氟聚合物如上述聚合物，并且适用于光致抗蚀剂，化学放大型抗蚀剂组合物由那些聚合物和材料获得。

    METHOD OF FORMING THIN FILM
    19.
    发明申请
    METHOD OF FORMING THIN FILM 有权
    形成薄膜的方法

    公开(公告)号：US20100093962A1

    公开(公告)日：2010-04-15

    申请号：US12641183

    申请日：2009-12-17

    申请人： Takayuki Araki ,  Tetsuhiro Kodani

    发明人： Takayuki Araki ,  Tetsuhiro Kodani

    IPC分类号： C08F214/22

    CPC分类号： C08F114/22 ,  C07C21/18 ,  Y10T428/3154 ,  Y10T428/31544

    摘要： There is provided a method of forming a thin film of vinylidene fluoride homopolymer having crystal form I which is applicable to various substrates in relatively easy way (coating conditions, application method, etc.), a process for preparing a vinylidene fluoride homopolymer having crystal form I efficiently at high purity, and novel vinylidene fluoride homopolymers which can give a thin film being excellent in ferroelectricity. The method of forming a thin film of vinylidene fluoride homopolymer comprises (i) a step for preparing a green powder product of vinylidene fluoride homopolymer comprising crystal form I alone or as main component by subjecting vinylidene fluoride to radical polymerization in the presence of a bromine compound or iodine compound having 1 to 20 carbon atoms which contains at least one moiety represented by —CRf1Rf2X1, wherein X1 is iodine atom or bromine atom; Rf1 and Rf2 are the same or different and each is selected from fluorine atom or perfluoroalkyl groups having 1 to 5 carbon atoms and (ii) a step for forming a thin film on a substrate surface by using vinylidene fluoride homopolymer which comprises crystal form I alone or as main component and is obtained from the green powder product of vinylidene fluoride homopolymer comprising crystal form I alone or as main component.

    摘要翻译： 提供一种以相对容易的方式（涂布条件，涂布方法等）形成可以适用于各种基材的结晶形式I的偏二氟乙烯均聚物的薄膜的方法，制备具有结晶形式的偏二氟乙烯均聚物 我高效率地得到高纯度的新型偏二氟乙烯均聚物，可以得到铁电性优异的薄膜。 形成偏氟乙烯均聚物薄膜的方法包括（i）通过在溴化合物的存在下使偏二氟乙烯进行自由基聚合，制备单晶或单体晶形的偏二氟乙烯均聚物的生粉产物的步骤 或含有至少一个由-CR f 1 R f 2 X 1表示的部分的碳原子数为1〜20的碘化合物，其中X1为碘原子或溴原子; Rf1和Rf2相同或不同，分别选自具有1〜5个碳原子的氟原子或全氟烷基，（ii）通过使用仅含有晶型I的偏二氟乙烯均聚物在基板表面上形成薄膜的步骤 或作为主要成分，并且由包含单晶晶体I或主要成分的偏二氟乙烯均聚物的绿色粉末产品获得。

    Fluorocopolymer material with sulfonic acid functional groups as a solid polyelectrolyte for use in fuel cells
    20.
    发明授权
    Fluorocopolymer material with sulfonic acid functional groups as a solid polyelectrolyte for use in fuel cells 有权
    具有磺酸官能团的含氟共聚物材料作为用于燃料电池的固体聚电解质

    公开(公告)号：US07455934B1

    公开(公告)日：2008-11-25

    申请号：US09700185

    申请日：1999-05-10

    申请人： Takayuki Araki ,  Noritoshi Oka ,  Yoshito Tanaka ,  Takayuki Nakamura ,  Tetsuo Shimizu

    发明人： Takayuki Araki ,  Noritoshi Oka ,  Yoshito Tanaka ,  Takayuki Nakamura ,  Tetsuo Shimizu

    IPC分类号： H01M10/08

    CPC分类号： H01S5/22 ,  C08J5/2237 ,  C08J2327/12 ,  G02B2006/12097 ,  G02B2006/12176 ,  H01B1/122 ,  H01M8/0289 ,  H01M8/1025 ,  H01M8/1039 ,  H01M8/1067 ,  H01S5/0655 ,  H01S5/20 ,  H01S5/2004 ,  H01S5/2213 ,  H01S5/2218 ,  H01S5/2227

    摘要： The invention is a material for a solid polyelectrolyte, comprising a multi-segmented fluoropolymer that comprises a block copolymer and/or a graft copolymer, wherein the copolymer contains one or more blocks essentially consisting of segment A and one or more blocks essentially consisting of segment B, the segment A combines with the segment B, wherein the segment A has a molecular weight of 5,000 to 1,000.000, and the Segment A is a copolymer chain comprising (a) an ethylenicfluoromonomer containing sulfonic acid functional groups each represented by Formula (1) CX2═CX1—(O)n—Rf—SO2Y, wherein X and X1 may be the same or different and are each hydrogen or fluorine; Y is FI, Cl, or OY1 wherein y1 is hydrogen, alkali metal or C1-C5 alkyl; Rf is C1 to C40 divalent fluoroalkylene or C1 to C40 divalent fluoroalkylene having one or more ether bonds; and n is 0 or 1; and (b) at least one type of ethylenic fluoromonomer copolymerizable with the ethylenic fluoromonomer (a) and containing no sulfonic acid functional groups, the segment B is a fluoropolymer containing no sulfonic acid functional groups, has a molecular weight of 3,000 to 1,200,000, and has a crystalline melting point of 100° C. or higher or a glass transition point of 100° C. or higher, wherein the ratio of segment A:segment B in the segmented fluoropolymer is 5:9˜to 98:2 30:70 to 90:10 wt. %.

    摘要翻译： 本发明是用于固体聚电解质的材料，其包含多段含氟聚合物，其包含嵌段共聚物和/或接枝共聚物，其中所述共聚物含有一个或多个基本上由片段A组成的嵌段和一个或多个基本上由片段 B，段A与段B结合，其中段A的分子量为5,000〜1,000.000，段A为共聚物链，其包含（a）含有各自由式（1）表示的磺酸官能团的烯键式氟单体， CX 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - （O） SUP> 1可以相同或不同，分别为氢或氟; Y是FI，Cl或OY 1，其中y 1是氢，碱金属或C 1 -C 5 烷基; Rf是C 1至C 40二价氟代亚烷基或C 1至C 40二价氟代亚烷基，其具有一个或多个醚 债券 并且n为0或1; 和（b）至少一种可与烯属含氟单体（a）共聚并且不含磺酸官能团的烯属含氟单体，段B是不含磺酸官能团的含氟聚合物，分子量为3,000至1,200,000， 具有100℃以上的结晶熔点或100℃以上的玻璃化转变温度，其中分段含氟聚合物中A段：B段的比例为5:9〜98:2 30:70 至90:10重量 ％。