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公开(公告)号:US20200211916A1
公开(公告)日:2020-07-02
申请号:US16237111
申请日:2018-12-31
Applicant: Micron Technology, Inc.
Inventor: Andrew M. Bayless , Wayne H. Huang , Owen R. Fay
IPC: H01L23/31 , H01L23/473 , H01L23/467 , H01L23/36 , H01L21/56
Abstract: A semiconductor device assembly can include a first die package comprising a bottom side; a top side; and lateral sides extending between the top and bottom sides. The assembly can include an encapsulant material encapsulating the first die package. In some embodiments, the assembly includes a cooling cavity in the encapsulant material. The cooling cavity can have a first opening; a second opening; and an elongate channel extending from the first opening to the second opening. In some embodiments, the elongate channel surrounds at least two of the lateral sides of the first die package. In some embodiments, the elongate channel is configured to accommodate a cooling fluid.
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公开(公告)号:US10325926B2
公开(公告)日:2019-06-18
申请号:US15464060
申请日:2017-03-20
Applicant: Micron Technology, Inc.
Inventor: Sanh D. Tang , Ming Zhang , Andrew M. Bayless , John K. Zahurak
IPC: H01L21/02 , H01L21/84 , H01L27/12 , H01L27/24 , H01L29/04 , H01L29/16 , H01L29/78 , H01L21/306 , H01L21/762 , H01L27/102 , H01L27/108 , H01L29/786
Abstract: Methods for fabricating semiconductor-metal-on-insulator (SMOI) structures include forming an acceptor wafer including an insulator material on a first semiconductor substrate, forming a donor wafer including a conductive material and an amorphous silicon material on a second semiconductor substrate, and bonding the amorphous silicon material of the donor wafer to the insulator material of the acceptor wafer. SMOI structures formed from such methods are also disclosed, as are semiconductor devices including such SMOI structures.
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公开(公告)号:US20250046730A1
公开(公告)日:2025-02-06
申请号:US18781737
申请日:2024-07-23
Applicant: Micron Technology, Inc.
Inventor: Andrew M. Bayless , Brandon P. Wirz , Owen R. Fay , Cassie L. Bayless
IPC: H01L23/544 , H01L21/304 , H01L21/3115 , H01L21/32 , H01L23/00
Abstract: Methods, apparatuses, and systems related to a semiconductor structure having an implanted alignment mark. The alignment mark may be formed by implanting a distinguishable material within a thickness of an initial semiconductor wafer and then thinning the initial semiconductor wafer. The distinguishable material may be implanted during, as a part of, or shortly following frontside processing to form active circuitry or portions thereof and then subsequently exposed through the thinning process. The resulting mark may be used to identify a relative location of circuits on the thinned wafer for subsequent processing or bonding.
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公开(公告)号:US11961818B2
公开(公告)日:2024-04-16
申请号:US17817803
申请日:2022-08-05
Applicant: Micron Technology, Inc.
Inventor: Andrew M. Bayless , Brandon P. Wirz
IPC: H01L23/00 , H01L25/065 , H01L25/18
CPC classification number: H01L24/75 , H01L24/81 , H01L25/0657 , H01L25/18 , H01L2224/16221 , H01L2224/16238 , H01L2224/75263 , H01L2224/81203 , H01L2224/81224 , H01L2225/06517
Abstract: This patent application relates to methods and apparatus for temperature modification within a stack of microelectronic devices for mutual collective bonding of the microelectronic devices, and to related substrates and assemblies.
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公开(公告)号:US11715696B2
公开(公告)日:2023-08-01
申请号:US17237496
申请日:2021-04-22
Applicant: Micron Technology, Inc.
Inventor: Ruei Ying Sheng , Andrew M. Bayless , Brandon P. Wirz
IPC: H01L23/538 , H01L25/065 , H01L21/768 , H01L21/48 , H01L21/50
CPC classification number: H01L23/5384 , H01L21/486 , H01L21/50 , H01L21/76802 , H01L21/76877 , H01L23/5386 , H01L25/0657
Abstract: Semiconductor devices having electrical interconnections through vertically stacked semiconductor dies, and associated systems and methods, are disclosed herein. In some embodiments, a semiconductor assembly includes a die stack having a plurality of semiconductor dies. Each semiconductor die can include surfaces having an insulating material, a recess formed in at least one surface, and a conductive pad within the recess. The semiconductor dies can be directly coupled to each other via the insulating material. The semiconductor assembly can further include an interconnect structure electrically coupled to each of the semiconductor dies. The interconnect structure can include a monolithic via extending continuously through each of the semiconductor dies in the die stack. The interconnect structure can also include a plurality of protrusions extending from the monolithic via. Each protrusion can be positioned within the recess of a respective semiconductor die and can be electrically coupled to the conductive pad within the recess.
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公开(公告)号:US11646269B2
公开(公告)日:2023-05-09
申请号:US17243411
申请日:2021-04-28
Applicant: Micron Technology, Inc.
Inventor: Andrew M. Bayless , Brandon P. Wirz
IPC: H01L23/538 , H01L25/065 , H01L21/768 , H01L23/532
CPC classification number: H01L23/5384 , H01L21/76802 , H01L21/76877 , H01L23/5381 , H01L23/5386 , H01L23/53228 , H01L25/0657
Abstract: Semiconductor devices having recessed edges with plated structures, semiconductor assemblies formed therefrom, and associated systems and methods are disclosed herein. In one embodiment, a semiconductor assembly includes a first semiconductor device and a second semiconductor device. The first semiconductor device can include an upper surface and a first dielectric layer over the upper surface, the second semiconductor device can include a lower surface and a second dielectric layer over the lower surface, and the first and second dielectric layers can be bonded to couple the first and second semiconductor devices. The first and second dielectric layers can each include a plurality of inwardly extending recesses exposing a plurality of metal structures on the respective upper and lower surfaces, and the upper surface recesses and metal structures can correspond to the lower surface recesses and metal structures. The metal structures can be electrically coupled by plated structures positioned in the recesses.
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公开(公告)号:US20220352077A1
公开(公告)日:2022-11-03
申请号:US17243411
申请日:2021-04-28
Applicant: Micron Technology, Inc.
Inventor: Andrew M. Bayless , Brandon P. Wirz
IPC: H01L23/538 , H01L25/065 , H01L23/532 , H01L21/768
Abstract: Semiconductor devices having recessed edges with plated structures, semiconductor assemblies formed therefrom, and associated systems and methods are disclosed herein. In one embodiment, a semiconductor assembly includes a first semiconductor device and a second semiconductor device. The first semiconductor device can include an upper surface and a first dielectric layer over the upper surface, the second semiconductor device can include a lower surface and a second dielectric layer over the lower surface, and the first and second dielectric layers can be bonded to couple the first and second semiconductor devices. The first and second dielectric layers can each include a plurality of inwardly extending recesses exposing a plurality of metal structures on the respective upper and lower surfaces, and the upper surface recesses and metal structures can correspond to the lower surface recesses and metal structures. The metal structures can be electrically coupled by plated structures positioned in the recesses.
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公开(公告)号:US20220336280A1
公开(公告)日:2022-10-20
申请号:US17231313
申请日:2021-04-15
Applicant: Micron Technology, Inc.
Inventor: Brandon P. Wirz , Andrew M. Bayless
IPC: H01L21/78 , H01L23/544 , H01L21/326 , H01L21/67
Abstract: Microelectronic devices may include an active surface and a side surface. The side surface may include a first portion having a reflective surface and a second portion having a non-reflective surface. The reflective surface may be formed by depositing a conductive material in trenches formed in material of the wafer along streets between the microelectronic devices on a wafer. The conductive material may be heated. The wafer may be cooled after the conductive material is heated fracturing the wafer along the streets and separating the microelectronic devices.
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公开(公告)号:US11410961B2
公开(公告)日:2022-08-09
申请号:US16821536
申请日:2020-03-17
Applicant: Micron Technology, Inc.
Inventor: Andrew M. Bayless , Brandon P. Wirz
IPC: H01L23/00 , H01L25/18 , H01L25/065
Abstract: This patent application relates to methods and apparatus for temperature modification within a stack of microelectronic devices for mutual collective bonding of the microelectronic devices, and to related substrates and assemblies.
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公开(公告)号:US20210384042A1
公开(公告)日:2021-12-09
申请号:US16895751
申请日:2020-06-08
Applicant: Micron Technology, Inc.
Inventor: Xiaopeng Qu , Hyunsuk Chun , Brandon P. Wirz , Andrew M. Bayless
IPC: H01L21/447 , H01L21/67 , H01L21/033
Abstract: This patent application relates to methods and apparatus for temperature modification and reduction of contamination in bonding stacked microelectronic devices with heat applied from a bond head of a thermocompression bonding tool. The stack is substantially enclosed within a skirt carried by the bond head to reduce heat loss and contaminants from the stack, and heat may be added from the skirt.
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