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公开(公告)号:US20200381044A1
公开(公告)日:2020-12-03
申请号:US16895905
申请日:2020-06-08
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu , Kirk D. Prall
Abstract: The apparatuses and methods described herein may operate to measure a voltage difference between a selected access line and a selected sense line associated with a selected cell of a plurality of memory cells of a memory array. The voltage difference may be compared with a reference voltage specified for a memory operation. A selection voltage(s) applied to the selected cell for the memory operation may be adjusted responsive to the comparison, such as to dynamically compensate for parasitic voltage drop.
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公开(公告)号:US20200341105A1
公开(公告)日:2020-10-29
申请号:US16924068
申请日:2020-07-08
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
IPC: G01R33/58 , H01L27/24 , G11C7/10 , G11C13/00 , G11C8/14 , H01L45/00 , G01R33/12 , G11C5/06 , G11C5/02
Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2F2.
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公开(公告)号:US10746835B1
公开(公告)日:2020-08-18
申请号:US16850293
申请日:2020-04-16
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
IPC: G11C11/00 , G01R33/58 , G11C13/00 , G11C7/10 , H01L27/24 , G11C5/06 , H01L45/00 , G11C5/02 , G01R33/12 , G11C8/14 , G01R33/24
Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2 F2.
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公开(公告)号:US10656231B1
公开(公告)日:2020-05-19
申请号:US16799670
申请日:2020-02-24
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
IPC: G11C11/00 , G01R33/58 , G11C8/14 , G11C13/00 , G11C7/10 , H01L27/24 , G11C5/02 , H01L45/00 , G01R33/12 , G11C5/06 , G01R33/24
Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2F2.
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公开(公告)号:US20190355418A1
公开(公告)日:2019-11-21
申请号:US16419895
申请日:2019-05-22
Applicant: Micron Technology, Inc.
Inventor: Amitava Majumdar , Rajesh Kamana , Hongmei Wang , Shawn D. Lyonsmith , Ervin T. Hill , Zengtao T. Liu , Marlon W. Hug
Abstract: Methods, systems, and devices for non-contact electron beam probing techniques, including at one or more intermediate stages of fabrication, are described. One subset of first access lines may be grounded and coupled with one or more memory cells. A second subset of first access lines may be floating and coupled with one or more memory cells. A second access line may correspond to each first access line and may be configured to be coupled with the corresponding first access line, by way of one or more corresponding memory cells, when scanned with an electron beam. A leakage path may be determined by comparing an optical pattern generated in part by determining a brightness of each scanned access line and comparing the generated optical pattern with a second optical pattern.
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16.
公开(公告)号:US20180350742A1
公开(公告)日:2018-12-06
申请号:US16056806
申请日:2018-08-07
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
IPC: H01L23/528 , H01L27/11582 , H01L49/02 , H01L23/522 , H01L21/768 , H01L27/24
CPC classification number: H01L23/5283 , H01L21/76816 , H01L21/76834 , H01L21/7684 , H01L21/76843 , H01L21/76877 , H01L23/5226 , H01L27/11582 , H01L27/2463 , H01L28/00
Abstract: A method of forming conductive vias comprises forming a first via opening and a second via opening within a substrate. First conductive material of a first conductivity is formed into the first and second via openings. The first conductive material lines sidewalls and a base of the second via opening to less-than-fill the second via opening. Second conductive material is formed into the second via opening over the first conductive material in the second via opening. The second conductive material is of a second conductivity that is greater than the first conductivity. All conductive material within the first via opening forms a first conductive via defining a first maximum conductance elevationally through the first conductive via and all conductive material within the second via opening forms a second conductive via defining a second maximum conductance elevationally through the second conductive via that is greater than said first maximum conductance. Integrated circuit structure comprising conductive vias independent of method of manufacture are disclosed.
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17.
公开(公告)号:US10121745B2
公开(公告)日:2018-11-06
申请号:US15621329
申请日:2017-06-13
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
IPC: H01L27/24 , H01L49/02 , H01L21/768 , H01L23/522 , H01L23/528 , H01L27/11582
Abstract: A method of forming conductive vias comprises forming a first via opening and a second via opening within a substrate. First conductive material of a first conductivity is formed into the first and second via openings. The first conductive material lines sidewalls and a base of the second via opening to less-than-fill the second via opening. Second conductive material is formed into the second via opening over the first conductive material in the second via opening. The second conductive material is of a second conductivity that is greater than the first conductivity. All conductive material within the first via opening forms a first conductive via defining a first maximum conductance elevationally through the first conductive via and all conductive material within the second via opening forms a second conductive via defining a second maximum conductance elevationally through the second conductive via that is greater than said first maximum conductance. Integrated circuit structure comprising conductive vias independent of method of manufacture are disclosed.
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公开(公告)号:US20160336046A1
公开(公告)日:2016-11-17
申请号:US15220316
申请日:2016-07-26
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
CPC classification number: G01R33/58 , G01R33/1284 , G01R33/24 , G11C5/025 , G11C5/063 , G11C7/1087 , G11C7/1093 , G11C8/14 , G11C13/0004 , G11C13/0026 , G11C13/003 , G11C2213/18 , G11C2213/71 , G11C2213/72 , G11C2213/77 , H01L27/2409 , H01L27/2427 , H01L27/2481 , H01L45/06 , H01L45/1226 , H01L45/1233 , H01L45/14 , H01L45/144
Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2 F2.
Abstract translation: 一些实施例包括存储器阵列。 存储器阵列可以具有沿着第一水平方向延伸的全局位线,垂直于全局位线垂直延伸的垂直局部位线以及沿垂直于第一水平方向的第二水平方向延伸的字线。 全局位线可以在第一高度级细分为第一系列,而在第二高度级可以被分为与第一高度不同的第二系列。 第一个系列的全局位线可以与第二个系列的全局位线交替。 直接在字线和垂直的局部位线之间可以存储单元格材料。 存储单元材料可以形成由字线/全局位线组合唯一地寻址的多个存储单元。 一些实施例包括具有约F2F的区域的交叉点存储单元单元。
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公开(公告)号:US09412421B2
公开(公告)日:2016-08-09
申请号:US13937994
申请日:2013-07-09
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
CPC classification number: G01R33/58 , G01R33/1284 , G01R33/24 , G11C5/025 , G11C5/063 , G11C7/1087 , G11C7/1093 , G11C8/14 , G11C13/0004 , G11C13/0026 , G11C13/003 , G11C2213/18 , G11C2213/71 , G11C2213/72 , G11C2213/77 , H01L27/2409 , H01L27/2427 , H01L27/2481 , H01L45/06 , H01L45/1226 , H01L45/1233 , H01L45/14 , H01L45/144
Abstract: Some embodiments include memory arrays. The memory arrays can have global bitlines extending along a first horizontal direction, vertical local bitlines extending perpendicularly from the global bitlines, and wordlines extending along a second horizontal direction which is perpendicular to the first horizontal direction. The global bitlines may be subdivided into a first series at a first elevational level, and a second series at a second elevational level which is different from the first elevational level. The global bitlines of the first series can alternate with the global bitlines of the second series. There can be memory cell material directly between the wordlines and the vertical local bitlines. The memory cell material may form a plurality of memory cells uniquely addressed by wordline/global bitline combinations. Some embodiments include cross-point memory cell units that have areas of about 2F2.
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20.
公开(公告)号:US12167615B2
公开(公告)日:2024-12-10
申请号:US17589683
申请日:2022-01-31
Applicant: Micron Technology, Inc.
Inventor: Zengtao T. Liu
Abstract: An array of vertically stacked tiers of memory cells includes horizontally oriented access lines within individual tiers of memory cells and horizontally oriented global sense lines elevationally outward of the tiers. Select transistors are elevationally inward of the tiers. Pairs of local first and second vertical lines extends through the tiers. One vertical line within individual of the pairs is in conductive connection with one of the global sense lines and in conductive connection with one of the two source/drain regions of one of the select transistors. The second vertical line within individual of the pairs is in conductive connection with another of the two source/drain regions of the one select transistor. Individual of the memory cells include a crossing one of the local second vertical lines and one of the horizontal access lines and programmable material there-between. Other aspects including methods, are disclosed.
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