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公开(公告)号：US10173795B2
公开(公告)日：2019-01-08
申请号：US12493996
申请日：2009-06-29
摘要： An apparatus and method for wrapping a palletized load are provided. The apparatus preferably includes a film dispenser for dispensing a film web, at least one guide rollers configured to engage the width of the film web, and at least one roping element. The at least one roping element may be a cable rolling roper configured to roll a portion of the film web into a rolled cable of film. The apparatus may also include means for providing relative rotation between the load and the dispenser to wrap a roped portion of the film web around a base of the load/top portion of a pallet supporting the load.
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公开(公告)号：US20110259366A1
公开(公告)日：2011-10-27
申请号：US12867245
申请日：2009-02-11
申请人： Joseph D. Sweeney , Sharad N. Yedave , Oleg Byl , Robert Kaim , David Eldridge , Steven Sergi , Lin Feng , Steven E. Bishop , W. Karl Olander , Ying Tang
发明人： Joseph D. Sweeney , Sharad N. Yedave , Oleg Byl , Robert Kaim , David Eldridge , Steven Sergi , Lin Feng , Steven E. Bishop , W. Karl Olander , Ying Tang
IPC分类号： B08B7/00 , H01L21/265 , B08B5/00
CPC分类号： H01J37/3171 , C23C14/48 , C23C14/54 , C23C14/564 , H01J37/08 , H01J37/16 , H01J37/18 , H01J2237/082 , H01J2237/22
摘要： Cleaning of an ion implantation system or components thereof, utilizing a reactive cleaning reagent enabling growth/etching of the filament in an ion source of the arc chamber, by appropriate control of temperature in the arc chamber to effect the desired filament growth or alternative filament etching. Also described is the use of reactive gases such as XeFx, WFx, AsFx, PFx and TaFx, wherein x has a stoichioimetrically appropriate value or range of values, for cleaning regions of ion implanters, or components of implanters, in in situ or ex situ cleaning arrangements, under ambient temperature, elevated temperature or plasma conditions. Among specific reactive cleaning agents, BrF3 is described as useful for cleaning ion implant systems or component(s) thereof, in in situ or ex situ cleaning arrangements. Also described is a method of cleaning the forelines of an ion implant system for at least partial removal of ionization-related deposit from said forelines, comprising contacting said forelines with a cleaning gas wherein said cleaning gas is chemically reactive with said deposit. Also described is a method of improving the performance and extending the lifetime of an ion implant system, comprising contacting the cathode with a gas mixture.
摘要翻译： 使用能够在电弧室的离子源中生长/蚀刻细丝的反应性清洁剂来清洁离子注入系统或其组分，通过适当地控制电弧室中的温度以实现所需的长丝生长或替代的细丝蚀刻 。 还描述了使用诸如XeFx，WFx，AsFx，PFx和TaFx的反应性气体，其中x具有化学计量学上适当的值或值范围，用于清除离子注入器或植入物的组分的原位或非原生境 清洁布置，在环境温度，升高的温度或等离子体条件下。 在特定的反应性清洁剂中，BrF3被描述为用于在原位或非原位清洁装置中清洁离子注入系统或其组分。 还描述了一种清洁离子注入系统的前沿以从所述前线至少部分去除电离相关沉积物的方法，包括使所述前沿与清洁气体接触，其中所述清洁气体与所述沉积物化学反应。 还描述了改进离子注入系统的性能和延长寿命的方法，包括使阴极与气体混合物接触。
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13.发明授权Method and apparatus for securing a load to a pallet with a roped film web 有权用于将负载固定到具有卷片膜的托盘上的方法和装置公开(公告)号：US07568327B2
公开(公告)日：2009-08-04
申请号：US10767863
申请日：2004-01-30
IPC分类号： B65B53/00
CPC分类号： B65B11/006 , B65B11/02 , B65B11/025 , B65B11/045 , B65B41/16 , B65B2210/20
摘要： An apparatus and method for wrapping a palletized load are provided. The apparatus preferably includes a film dispenser for dispensing a film web, at least one guide rollers configured to engage the width of the film web, and at least one roping element. The at least one roping element may be a cable rolling roper configured to roll a portion of the film web into a rolled cable of film. The apparatus may also include means for providing relative rotation between the load and the dispenser to wrap a roped portion of the film web around a base of the load/top portion of a pallet supporting the load.
摘要翻译： 提供一种用于包装堆垛货物的装置和方法。 该设备优选地包括用于分配薄膜腹板的薄膜分配器，至少一个构造成接合薄膜腹板的宽度的引导辊和至少一个罗带元件。 所述至少一个绳索元件可以是被配置成将薄膜网的一部分滚动成卷状的薄膜电缆的电缆滚压罗拉。 该设备还可以包括用于在负载和分配器之间提供相对旋转的装置，以将卷筒纸的卷绕部分围绕支撑负载的托盘的负载/顶部的底部。
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公开(公告)号：US07469520B2
公开(公告)日：2008-12-30
申请号：US10152346
申请日：2002-05-22
CPC分类号： B29C65/10 , B29C66/1122 , B29C66/43 , B29C66/71 , B29C66/73921 , B29C66/80 , B29C66/81451 , B29C66/8322 , B29K2023/0633 , B29K2023/083 , B65B11/025 , B29K2027/06 , B29K2023/12 , B29K2023/0691 , B29K2023/065
摘要： A heat sealing device for sealing layers of plastic film together is provided. In a preferred embodiment, the heat sealing device is incorporated into a stretch wrapping apparatus for wrapping a load. The heat sealing device includes a heater element, an air compressor or blower, and a sealing head in fluid communication with the heater element to distribute the heated air. The sealing head is preferably flexible and includes a plurality of convection ports configured to apply heated air to a portion of the packaging material without being completely covered by the packaging material. At least one insulated film contact portion is provided to distance the convection ports from the plastic film.
摘要翻译： 提供一种用于将塑料薄膜层密封在一起的热封装置。 在优选实施例中，热封装置结合到用于包裹负载的拉伸包装设备中。 热封装置包括加热器元件，空气压缩机或鼓风机，以及与加热器元件流体连通以分配加热的空气的密封头。 密封头优选地是柔性的并且包括多个对流端口，该对流端口构造成将加热的空气施加到包装材料的一部分而不被包装材料完全覆盖。 提供至少一个绝缘膜接触部分以使对流端口与塑料膜间隔开。
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公开(公告)号：US06516591B1
公开(公告)日：2003-02-11
申请号：US09910858
申请日：2001-07-24
IPC分类号： B65B1104
CPC分类号： B65B11/025 , B65B11/045 , B65B2210/18 , B65B2210/20
摘要： A leading end of packaging material is attached to a retainer to hold the leading end of the packaging material as the retainer moves toward the load. The retainer is positioned adjacent the load and packaging material is dispensed from a packaging material dispenser, and relative rotation is provided between the dispenser and a load to wrap packaging material around the load. The packaging material is released from the retainer in response to force applied to the retainer to withdraw it from the wrapped load.
摘要翻译： 当保持器朝向负载移动时，包装材料的前端附接到保持器以保持包装材料的前端。 保持器位于负载附近并且包装材料从包装材料分配器分配，并且在分配器和负载之间提供相对旋转以将包装材料包裹在负载周围。 响应于施加到保持器上的力将包装材料从保持器中释放，以将其从包裹的负载中取出。
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公开(公告)号：US08603252B2
公开(公告)日：2013-12-10
申请号：US12298727
申请日：2007-04-26
申请人： Frank Dimeo , James Dietz , W. Karl Olander , Robert Kaim , Steven Bishop , Jeffrey W. Neuner , Jose Arno , Paul J. Marganski , Joseph D. Sweeney , David Eldridge , Sharad Yedave , Oleg Byl , Gregory T. Stauf
发明人： Frank Dimeo , James Dietz , W. Karl Olander , Robert Kaim , Steven Bishop , Jeffrey W. Neuner , Jose Arno , Paul J. Marganski , Joseph D. Sweeney , David Eldridge , Sharad Yedave , Oleg Byl , Gregory T. Stauf
IPC分类号： B08B7/00
CPC分类号： C23C14/564 , C23C16/4405 , H01J37/32412 , H01J37/32862
摘要： A method and apparatus for cleaning residue from components of semiconductor processing systems used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive material for sufficient time and under sufficient conditions to at least partially remove the residue. When the residue and the material from which the components are constructed are different, the gas-phase reactive material is selectively reactive with the residue and minimally reactive with the materials from which the components of the ion implanter are constructed. When the residue and the material from which the components are constructed is the same, then the gas-phase reactive material may be reactive with both the residue and the component part. Particularly preferred gas-phase reactive materials utilized comprise gaseous compounds such as XeF2, XeF4, XeF6, NF3, IF5, IF7, SF6, C2F6, F2, CF4, KrF2, Cl2, HCl, ClF3, ClO2, N2F4, N2F2, N3F, NFH2, NH2F, HOBr, Br2, C3F8, C4F8, C5F8, CHF3, CH2F2, CH3F, COF2, HF, C2HF5, C2H2F4, C2H3F3, C2H4F2, C2H5F, C3F6, and organochlorides such as COCl2, CCl4, CHCl3, CH2Cl2 and CH3Cl.
摘要翻译： 一种清洁残留物的方法和装置，用于制造微电子装置中使用的半导体处理系统的组件。 为了有效地除去残留物，将组分与气相反应性材料接触足够的时间和足够的条件以至少部分地除去残余物。 当残留物和构成组分的材料不同时，气相反应性材料与残余物选择性反应，并与构成离子注入机的组分的材料具有最低的反应性。 当残留物和构成组分的材料相同时，气相反应性材料可以与残留物和组分部分反应。 使用的特别优选的气相反应性材料包括气态化合物如XeF 2，XeF 4，XeF 6，NF 3，IF 5，IF 7，SF 6，C 2 F 6，F 2，CF 4，KrF 2，Cl 2，HCl，ClF 3，ClO 2，N 2 F 4，N 2 F 2，N 3 F， ，NH2F，HOBr，Br2，C3F8，C4F8，C5F8，CHF3，CH2F2，CH3F，COF2，HF，C2HF5，C2H2F4，C2H3F3，C2H4F2，C2H5F，C3F6和有机氯化物，如COCl2，CCl4，CHCl3，CH2Cl2和CH3Cl。
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公开(公告)号：US20120058252A1
公开(公告)日：2012-03-08
申请号：US13201188
申请日：2009-08-12
申请人： Joseph D. Sweeney , Sharad N. Yedave , Oleg Byl , Robert Kaim , David Eldridge , Lin Feng , Steven E. Bishop , W. Karl Olander , Ying Tang
发明人： Joseph D. Sweeney , Sharad N. Yedave , Oleg Byl , Robert Kaim , David Eldridge , Lin Feng , Steven E. Bishop , W. Karl Olander , Ying Tang
CPC分类号： H01J37/3171 , C23C14/48 , C23C14/54 , C23C14/564 , H01J37/08 , H01J37/16 , H01J37/18 , H01J2237/082 , H01J2237/22
摘要： Cleaning of an ion implantation system or components thereof, utilizing temperature and/or a reactive cleaning reagent enabling growth/etching of the cathode in an indirectly heated cathode for an ion implantation system by monitoring the cathode bias power and taking corrective action depending upon compared values to etch or regrow the cathode.
摘要翻译： 使用温度和/或反应性清洗剂清洁离子注入系统或其组件，使得能够通过监测阴极偏置功率并根据比较值采取校正动作来增加/蚀刻用于离子注入系统的间接加热的阴极中的阴极 以蚀刻或再生阴极。
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18.发明授权公开(公告)号：US07626405B2
公开(公告)日：2009-12-01
申请号：US11764230
申请日：2007-06-18
申请人： David Eldridge
发明人： David Eldridge
IPC分类号： G01R31/02
CPC分类号： G01R1/0466
摘要： Disclosed herein is a suspension system and adjustment mechanism for an integrated chip held in a clamping or similar assembly and a related method for same. The suspension system Includes a pressure plate member adapted to fit compatibly within the clamp assembly. A hinge assembly applies and releases pressure through the pressure plate member. The hinge assembly has a first open position where pressure is released and a second closed position where pressure is applied. A spring member between the pressure plate member and the hinge assembly has predetermined travel limits controlling the amount of pressure to be applied. In an exemplary embodiment of the invention disclosed herein the suspension system includes an adjustment mechanism which adjusts to the pressure to a fine degree. The adjustment mechanism includes a housing which applies and releases pressures in response to the turning of a control knob. The control knob is connected to a gear apparatus within the housing which responds to the movement of the control knob by moving the housing.
摘要翻译： 本文公开了一种用于夹持或类似组件的集成芯片的悬挂系统和调节机构及其相关方法。 悬挂系统包括适于在夹具组件内相配合的压板构件。 铰链组件通过压板构件施加并释放压力。 铰链组件具有第一打开位置，其中释放压力和施加压力的第二关闭位置。 压板构件和铰链组件之间的弹簧构件具有控制要施加的压力量的预定行程限制。 在本文公开的本发明的示例性实施例中，悬架系统包括调节机构，该调节机构能够将压力调节到很小程度。 调节机构包括响应于控制旋钮转动而施加和释放压力的壳体。 控制旋钮连接到外壳内的齿轮装置，通过移动外壳来响应控制旋钮的移动。
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公开(公告)号：US20080309348A1
公开(公告)日：2008-12-18
申请号：US11764229
申请日：2007-06-18
申请人： David Eldridge
发明人： David Eldridge
IPC分类号： G01R1/04
CPC分类号： G01R1/0425
摘要： Disclosed herein is an apparatus that relates to a device useful in integrated chip (IC) testing apparatus. More particularly, the device is an adjustable clamp assembly which allows a variety of different sized IC's to be used with a single piece of test equipment. The clamp assembly includes a frame, a base and a plurality of clamps. Each clamp is movably connected to the base to allow movement in the x-y directions and each of the clamps includes an z-direction adjustment mechanism. Additionally, the device according to this invention also includes an adapter having opposed adapters which are designed for compatible mating with a mechanized handlers. In an exemplary embodiment, the adapter has a suspension system designed for quiet mechanized handling of the IC while being held by the clamp assembly.
摘要翻译： 本文公开了一种涉及集成芯片（IC）测试装置中有用的装置。 更具体地说，该装置是可调节的夹具组件，其允许将多种不同尺寸的IC用于单件测试设备。 夹具组件包括框架，基座和多个夹具。 每个夹具可移动地连接到基座以允许在x-y方向上移动，并且每个夹具包括z方向调节机构。 此外，根据本发明的装置还包括具有相对的适配器的适配器，其被设计用于与机械化处理器兼容配合。 在示例性实施例中，适配器具有悬挂系统，其设计用于在由夹具组件保持的状态下安静地机械化处理IC。
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公开(公告)号：US06854247B2
公开(公告)日：2005-02-15
申请号：US10322476
申请日：2002-12-19
CPC分类号： B65B11/025 , B65B11/045 , B65B2210/18 , B65B2210/20
摘要： A leading end of packaging material is attached to a retainer to hold the leading end of the packaging material as the retainer moves toward the load. The retainer is positioned adjacent the load and packaging material is dispensed from a packaging material dispenser, and relative rotation is provided between the dispenser and a load to wrap packaging material around the load. The packaging material is released from the retainer in response to force applied to the retainer to withdraw it from the wrapped load.
摘要翻译： 当保持器朝向负载移动时，包装材料的前端附接到保持器以保持包装材料的前端。 保持器位于负载附近并且包装材料从包装材料分配器分配，并且在分配器和负载之间提供相对旋转以将包装材料包裹在负载周围。 响应于施加到保持器上的力将包装材料从保持器中释放，以将其从包裹的负载中取出。
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