公开(公告)号：US20110043791A1

公开(公告)日：2011-02-24

申请号：US12855394

申请日：2010-08-12

申请人： Hendrik Jan Hidde Smilde ,  Arno Jan Bleeker ,  Arie Jeffrey Den Boef ,  Armand Eugene Albert Koolen ,  Henricus Petrus Maria Pellemans ,  Reinder Teun Plug ,  Willem Marie Julia Marcel Coene

发明人： Hendrik Jan Hidde Smilde ,  Arno Jan Bleeker ,  Arie Jeffrey Den Boef ,  Armand Eugene Albert Koolen ,  Henricus Petrus Maria Pellemans ,  Reinder Teun Plug ,  Willem Marie Julia Marcel Coene

IPC分类号： G01N21/41

CPC分类号： G03F7/70633 ,  G03F7/70616

摘要： A metrology apparatus is arranged to illuminate a plurality of targets with an off-axis illumination mode. Images of the targets are obtained using only one first order diffracted beam. Where the target is a composite grating, overlay measurements can be obtained from the intensities of the images of the different gratings. Overlay measurements can be corrected for errors caused by variations in the position of the gratings in an image field.

摘要翻译： 计量装置被布置成以离轴照明模式照亮多个目标。 仅使用一个一阶衍射光束获得目标图像。 在目标是复合光栅的地方，可以从不同光栅的图像的强度获得覆盖测量。 可以对由图像场中的光栅位置的变化引起的误差来校正叠加测量。

公开(公告)号：US20110001978A1

公开(公告)日：2011-01-06

申请号：US12822422

申请日：2010-06-24

申请人： Hendrik Jan Hidde SMILDE ,  Willem Marie Julia Marcel Coene

发明人： Hendrik Jan Hidde SMILDE ,  Willem Marie Julia Marcel Coene

IPC分类号： G01N21/47

CPC分类号： G03F7/70633 ,  G03F7/705 ,  G03F7/70516

摘要： A method of determining an overlay error between two successive layers produced by a lithographic process on a substrate, including using the lithographic process to form a calibration structure including a periodic structure of the same pitch on each of the layers, such that an overlaid pair of periodic structures is formed, the structures being parallel, but offset relative to each other by an overlay amount. A spectrum produced by directing a beam of radiation onto the calibration structure is measured and compared with one or more modeled spectra so as to determine values of the grating parameters for the calibration structure from the measured spectrum. The lithographic process is used to form further overlaid periodic structures on the same or one or more subsequent substrates, the determined grating parameter values for the calibration structure being used to determine overlay amounts for the further overlaid periodic structures.

摘要翻译： 一种确定由光刻工艺在衬底上产生的两个连续层之间的重叠误差的方法，包括使用光刻工艺形成包括在每个层上的相同间距的周期性结构的校准结构，使得重叠的一对 形成周期性结构，结构是平行的，但是相对于彼此偏移了重叠量。 测量通过将辐射束引导到校准结构上产生的光谱，并将其与一个或多个建模光谱进行比较，以便根据测量的光谱确定校准结构的光栅参数的值。 光刻工艺用于在相同或一个或多个后续衬底上形成进一步覆盖的周期性结构，所确定的校准结构的光栅参数值用于确定进一步覆盖的周期性结构的重叠量。

公开(公告)号：US20100085849A1

公开(公告)日：2010-04-08

申请号：US12444700

申请日：2007-10-04

申请人： Bin Yin ,  Ruud Vlutters ,  Willem Marie Julia Marcel Coene ,  Theodorus Petrus Henricus Gerardus Jansen

发明人： Bin Yin ,  Ruud Vlutters ,  Willem Marie Julia Marcel Coene ,  Theodorus Petrus Henricus Gerardus Jansen

IPC分类号： G11B20/00

CPC分类号： G11B20/10009 ,  G11B20/10046 ,  G11B20/10055 ,  G11B2220/2537 ,  G11B2220/2541

摘要： The present invention discloses an optical drive and a method for preprocessing a disc readout signal rk of an optical drive on the basis of a set of low-pass filters. The cutoff frequency fC of the filters wk, more particularly, can be set within the optical bandwidth, which improves the Viterbi detection performance in the case of high speed drive operations. Three types of filters are described, in which a Type I shaping filter performs best given a limited hardware cost for the bit detector. Compared to other more advanced noise-whitening techniques, it is only speed dependent and requires little prior knowledge of the channel and noise, thus cheap and easy to design. The invention can be applied in connection with optical disc drives, in particular when high frequency noises are dominant, for example, in the case of high speed operations.

摘要翻译： 本发明公开了一种基于一组低通滤波器对光盘驱动器的盘读出信号rk进行预处理的光驱动器和方法。 滤波器wk的截止频率fC更具体地可以设置在光学带宽内，这提高了在高速驱动操作的情况下的维特比检测性能。 描述了三种类型的滤波器，其中在给定位检测器的有限硬件成本的情况下，I型整形滤波器性能最佳。 与其他更先进的噪声增白技术相比，它只是速度依赖性，并且对通道和噪声几乎没有先前的了解，因此便宜且易于设计。 本发明可以与光盘驱动器结合使用，特别是当高频噪声占主导地位时，例如在高速操作的情况下。

公开(公告)号：US07660224B2

公开(公告)日：2010-02-09

申请号：US10599836

申请日：2005-04-08

申请人： Willem Marie Julia Marcel Coene ,  Bin Yin

发明人： Willem Marie Julia Marcel Coene ,  Bin Yin

IPC分类号： G11B7/00

CPC分类号： G11B20/1426 ,  G11B20/10203 ,  G11B2020/1288 ,  G11B2020/1457 ,  G11B2220/2541 ,  H03M5/145

摘要： A loss of performance of slicer adaptation at high capacities due to the mismatch between the exact bits used in the computation of the RDS for the DC-control on the one hand and the often erroneous threshold decisions that are preliminarily made based on the HF waveform on the other hand, is resolved by performing a new method of DC-control at the encoder: the RDS is modified such that it is not based on the exact channel bits, but on the threshold decisions from a synthetic HF signal waveform that is generated based on a nominal MTF (modulation transfer function) or its IRF (impulse response function) of the channel. In this way, the impact of the erroneous threshold decisions in the receiver are already taken into account at the encoder, and the slicer control is no longer negatively affected thereby.

摘要翻译： 由于用于直流控制的RDS的计算中使用的精确位与一般基于HF波形预先进行的错误阈值判定之间的不匹配，导致高容量的限幅器适应性能丧失 另一方面，通过在编码器处执行DC控制的新方法来解决：RDS被修改为使得它不是基于精确的信道位，而是基于从基于生成的合成HF信号波形的阈值决定 在标称MTF（调制传递函数）或其IRF（脉冲响应函数）的信道上。 以这种方式，在编码器处已经考虑了接收器中的错误阈值判定的影响，并且限幅器控制不再受到负面影响。

公开(公告)号：US20090018410A1

公开(公告)日：2009-01-15

申请号：US12280994

申请日：2007-02-26

申请人： Willem Marie Julia Marcel Coene ,  Martin Ouwerkerk

发明人： Willem Marie Julia Marcel Coene ,  Martin Ouwerkerk

IPC分类号： A61B5/00

CPC分类号： A61B5/0245 ,  A61B5/02438 ,  A61B5/04085 ,  A61B5/6804

摘要： A body parameter sensing arrangement comprising clothing (10) and a plurality of sensors (12, 20) for sensing body signals, located at mutually movable relative positions in the clothing (10). Processing circuit (26) coupled to the plurality of sensors (12, 20), is configured to identify selected ones of the sensors (12, 20) that carry valid body signals. The identification by clustering the sensors (12, 20) according to similarity between signals from the sensors (12, 20). A cluster of sensors (12, 20) is determined with a maximal count of sensors (12, 20) within a minimal cluster diameter A cluster diameter defined by a measure of similarity or distance between signals form the sensors is used. The cluster is used to select sensors (12, 20) to identify the selected ones of the sensors (12, 20) that carries valid body signals on the basis of membership of the cluster

摘要翻译： 一种身体参数感测装置，其包括衣物（10）和用于感测身体信号的多个传感器（12,20），所述传感器位于衣物（10）中相互移动的相对位置。 耦合到多个传感器（12,20）的处理电路（26）被配置为识别携带有效身体信号的传感器（12,20）中选择的传感器（12,20）。 根据来自传感器（12,20）的信号之间的相似性对传感器（12,20）进行聚类的识别。 一组传感器（12,20）由最小聚簇直径A内的传感器（12,20）的最大计数确定。集群直径由使用的传感器形成的相似度或信号距离所确定。 群集用于选择传感器（12,20），以识别基于群集成员身份携带有效身体信号的所选择的传感器（12,20）

公开(公告)号：US07116250B2

公开(公告)日：2006-10-03

申请号：US10512117

申请日：2003-04-01

申请人： Willem Marie Julia Marcel Coene

发明人： Willem Marie Julia Marcel Coene

IPC分类号： H03M5/06

CPC分类号： G11B20/14 ,  G11B20/1496

摘要： In a method of multi-dimensionally encoding a user data stream of user words into a channel data stream of channel words evolving in a one-dimensional direction of infinite extent, a user word is encoded into an NRZ channel word by selecting a NRZ channel word from a code table depending on the user word and the current state of an underlying finite-state-machine. A NRZ channel word comprises a sequence of NRZ channel symbols of NRZ channel bits having a one-dimensional interpretation along said one-dimensional direction and wherein states of an underlying finite-state-machine describing the characteristics of the multi-dimensional code are defined by NRZI channel bits of the previous channel work and by NRZ channel symbols of the current channel word. The NRZ channel symbols are transcoded into NRZI channel symbols by a one-dimensional 1T-precoding operation including an intergration modulo 2, said 1T-precoding operation being carried out along said one-dimensional direction of infinite extent. The finite-state-machine is put into a new state selected from the code table depending on said user word and the current state of said finite-state-machine together with encoding a user word into a channel word.

摘要翻译： 在将用户字的用户数据流多维编码为在无限大的一维方向上演进的频道字的频道数据流的方法中，通过选择NRZ频道字来将用户字编码成NRZ频道字 来自代码表，取决于用户字和底层有限状态机的当前状态。 NRZ信道字包括沿着所述一维方向具有一维解释的NRZ信道比特的NRZ信道符号序列，并且其中描述多维码的特征的底层有限状态机的状态由 前一个通道的NRZI通道位工作，以及当前通道字的NRZ通道符号。 NRZ信道符号通过包括积分模2的一维1T预编码操作被转码成NRZI信道符号，所述1T预编码操作沿着无限大程度的所述一维方向执行。 根据所述用户字和所述有限状态机的当前状态，将有限状态机置于从代码表中选择的新状态以及将用户字编码为通道字。

公开(公告)号：USRE44678E1

公开(公告)日：2013-12-31

申请号：US12138565

申请日：2008-06-13

申请人： Job Cornelis Oostveen ,  Willem Marie Julia Marcel Coene ,  Jan Harm Boer ,  Franciscus Lucas Antonius Johannes Kamperman ,  Aloysius Michael Josephus Maria Spruijt ,  Paulus Reinier Joannes Van Roosmalen

发明人： Job Cornelis Oostveen ,  Willem Marie Julia Marcel Coene ,  Jan Harm Boer ,  Franciscus Lucas Antonius Johannes Kamperman ,  Aloysius Michael Josephus Maria Spruijt ,  Paulus Reinier Joannes Van Roosmalen

IPC分类号： G11B7/00

CPC分类号： G11B20/00594 ,  G11B7/0053 ,  G11B20/00086 ,  G11B20/00586 ,  G11B20/00601 ,  G11B20/1403

摘要： An information system according to the invention comprises a record carrier and a playback apparatus. The record carrier has information marks along a track thereof and exhibits first variations caused by existence and nonexistence of the information marks along the track. The first variations represent an information signal recorded on said record carrier. The record carrier further exhibits second variations caused by variations associated with the information marks. The phase of the second variations is coupled to the phase of the first variations.

摘要翻译： 根据本发明的信息系统包括记录载体和播放装置。 记录载体在其轨道上具有信息标记，并显示由轨迹上的信息标记的存在和不存在引起的第一变化。 第一变化形式表示记录在所述记录载体上的信息信号。 记录载体进一步显示由与信息标记相关联的变化引起的第二变化。 第二变化的相位耦合到第一变化的相位。

公开(公告)号：US20110194092A1

公开(公告)日：2011-08-11

申请号：US13059408

申请日：2009-07-09

申请人： Hendrik Jan Hidde Smilde ,  Willem Marie Julia Marcel Coene

发明人： Hendrik Jan Hidde Smilde ,  Willem Marie Julia Marcel Coene

IPC分类号： G03B27/54 ,  G01J1/42 ,  G03F7/20 ,  B32B3/00

CPC分类号： G03F7/70683 ,  G03F7/70625 ,  G03F7/70633 ,  Y10T428/24802

摘要： A target for measuring an overlay error or a critical dimension of a substrate comprises a grating. In one example, lines of the grating are arranged at an angle of about 45° with respect to edges of the target. As a consequence, the diffraction order of the grating reflection has its sub-maxima not aligned along the line on which the other diffraction orders are positioned, and overlap of intensity with other diffraction orders is reduced

摘要翻译： 用于测量衬底的重叠误差或临界尺寸的目标包括光栅。 在一个示例中，光栅的线相对于目标的边缘以约45°的角度布置。 因此，光栅反射的衍射级别具有沿其它衍射级所在的线不对齐的亚极大值，并且强度与其他衍射级的重叠减少

公开(公告)号：US20090296556A1

公开(公告)日：2009-12-03

申请号：US11721495

申请日：2005-12-15

申请人： Alexander Marc Van Der Lee ,  Willem Marie Julia Marcel Coene ,  Andries Pieter Hekstra

发明人： Alexander Marc Van Der Lee ,  Willem Marie Julia Marcel Coene ,  Andries Pieter Hekstra

IPC分类号： G11B7/00

CPC分类号： G11B7/1369 ,  G11B7/1353 ,  G11B7/14

摘要： The invention provides an efficient reading device in which, even if one radiation beam should fail, no information is lost and the information can still be read out without time-consuming recurring operations. The present invention solves this problem by providing a reading device (FIG. 5A) and a means (FIG. 4) for forming read-out spots (A, B, C, D, E) that are built up by multiple radiation beams from the radiation source (4). This has the advantage that each read-out spot will have energy contributions from different radiation beams and, should one radiation beam break down, the intensity of some of the read-out spots may indeed diminish, but the information can still be read out thanks to the contributions from other radiation beams.

摘要翻译： 本发明提供了一种有效的读取装置，其中即使一个辐射束发生故障，也不会丢失信息，并且仍然可以读出信息而不需要耗费时间的循环操作。 本发明通过提供一种用于形成由多个辐射束构成的读出点（A，B，C，D，E）的读取装置（图5A）和装置（图4）来解决这个问题， 辐射源（4）。 这具有的优点是，每个读出的点将具有来自不同辐射束的能量贡献，并且如果一个辐射束分解，一些读出点的强度可能确实减小，但是仍然可以读出信息 对其他辐射束的贡献。

公开(公告)号：US20080317170A1

公开(公告)日：2008-12-25

申请号：US10597147

申请日：2005-01-07

申请人： Petrus Henricus Cornelius Bentvelsen ,  Willem Marie Julia Marcel Coene

发明人： Petrus Henricus Cornelius Bentvelsen ,  Willem Marie Julia Marcel Coene

IPC分类号： H04L25/06

CPC分类号： G11B20/00579 ,  G11B20/00086 ,  G11B20/1426 ,  G11B2020/1453

摘要： The present invention relates to a method and a corresponding device for embedding a secondary information signal in a channel data stream of encoded primary information signal. In order to make it more difficult for unauthorized persons or devices to retrieve the location of storage of the secondary information signal or its content itself a device is proposed according to the present invention comprising: an encoder (1) for encoding said primary information signal into a channel data stream, a control unit (3) for controlling the DC content of said channel data stream, a secondary information signal embedding unit (2) for embedding said secondary information signal in said channel data stream by using freedoms in the DC control, and an adaptation unit (4) for adapting the DC control by making non-optimal, arbitrary or random choices of the DC control at a number of locations of said channel data stream.

摘要翻译： 本发明涉及用于将次要信息信号嵌入编码的主信息信号的信道数据流中的方法和相应装置。 为了使未经授权的人员或设备更难以检索辅助信息信号或其内容本身的存储位置，根据本发明提出了一种设备，包括：编码器（1），用于将所述主信息信号编码成 频道数据流，用于控制所述频道数据流的DC内容的控制单元（3），用于通过使用DC控制中的自由将所述辅助信息信号嵌入在所述频道数据流中的次信息信号嵌入单元（2） 以及适配单元（4），用于通过在所述信道数据流的多个位置处进行DC控制的非最佳，任意或随机的选择来适配DC控制。