Very high energy, high stability gas discharge laser surface treatment system

    公开(公告)号:US07167499B2

    公开(公告)日:2007-01-23

    申请号:US10781251

    申请日:2004-02-18

    IPC分类号: H01S3/22 H01S3/03

    摘要: A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed which may comprise, a multichamber laser system comprising, a first laser unit comprising, a first and second gas discharge chamber; each with a pair of elongated spaced apart opposing electrodes contained within the chamber, forming an elongated gas discharge region; a laser gas contained within the chamber comprising a halogen and a noble gas selected to produce laser light at a center wavelength optimized to the crystallization process to be earned out on the workpiece; a power supply module comprising, a DC power source; a first and a second pulse compression and voltage step up circuit connected to the DC power source and connected to the respective electrodes, comprising a multistage fractional step up transformer having a plurality of primary windings connected in series and a single secondary winding passing through each of the plurality of primary windings, and a solid state trigger switch; and a laser timing and control module operative to time the closing of the respective solid state switch based upon operating parameters of the respective first and second pulse compression and voltage step up circuit to effect operation of the first and second laser units as either a POPA configured laser system or a POPO configured laser system to produce a single output laser light pulse beam. As a POPA laser system relay optics may be operative to direct a first output laser light pulse beam from the first laser unit into the second gas discharge chamber; and, the timing and control module operates to create a gas discharge between the second pair of electrodes while the first output laser light pulse beam is transiting the second discharge region, within plus or minus 3 ns and as a POPO, combining optics combine the output beams, and timing creates pulse separation in the combined output a preselected time plus or minus 3 ns.

    Method and apparatus for electronically interconnecting high voltage modules positioned in relatively close proximity
    15.
    发明授权
    Method and apparatus for electronically interconnecting high voltage modules positioned in relatively close proximity 有权
    用于电子互连位于相对靠近的高压模块的方法和装置

    公开(公告)号:US07101203B2

    公开(公告)日:2006-09-05

    申请号:US10606412

    申请日:2003-06-25

    IPC分类号: H01R13/62

    CPC分类号: H01R13/53

    摘要: Apparatus and method for electrically connecting two closely positioned high voltage modules with little or no bend and without any loops in an electrical interconnecting coaxial cable may have a high voltage connector attached to at least a portion of the cable on at least one end of the cable; a push through high voltage connector receptor within one module; and a disconnection mechanism within the one module adapted to move the high voltage connector and at least a portion of cable to which the high voltage connector is attached through the connector receptor from a contact position to a housed position in a direction away from the other module to which high voltage connection is to be made. The connector receptor may have an open cylindrical connector with a contacting surface contained on the interior wall of the cylindrical connector and an interlock mechanism.

    摘要翻译: 用于电连接两个紧密定位的高电压模块的设备和方法具有很少或没有弯曲并且在电互连同轴电缆中没有任何环路可以具有连接到电缆的至少一部分上的电缆的至少一部分上的高压连接器 ; 在一个模块内通过高压连接器接头; 以及所述一个模块内的断开机构,其适于将所述高压连接器的所述高压连接器的至少一部分通过所述连接器接头从接触位置移动到远离所述另一模块的方向的容纳位置 要进行高压连接。 连接器接头可以具有敞开的圆柱形连接器,其中接触表面包含在圆柱形连接器的内壁上以及互锁机构。

    6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
    16.
    发明申请
    6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements 审中-公开
    6K脉冲重复率及以上气体放电激光系统固态脉冲电源系统改进

    公开(公告)号:US20090238225A1

    公开(公告)日:2009-09-24

    申请号:US12454763

    申请日:2009-05-22

    IPC分类号: H01S3/00 H01S3/22

    摘要: A method and apparatus for operating a very high repetition gas discharge laser system magnetic switch pulsed power system is disclosed, which may comprise a solid state switch, a charging power supply electrically connected to one side of the solid state switch; a charging inductor electrically connected to the other side of the solid state switch; a deque circuit electrically in parallel with the solid state switch comprising a deque switch; a peaking capacitor electrically connected to the charging inductor, a peaking capacitor charging control system operative to charge the peaking capacitor by opening the deque switch and leaving the solid state switch open and then shutting the solid state switch. The solid state switch may comprise a plurality of solid state switches electrically in parallel.

    摘要翻译: 公开了一种用于操作非常高重复气体放电激光系统磁开关脉冲功率系统的方法和装置,其可以包括固态开关,电连接到固态开关的一侧的充电电源; 充电电感器电连接到固态开关的另一侧; 与固态开关并联电路的德克电路,其包括德克式开关; 与充电电感器电连接的峰值电容器,峰值电容器充电控制系统,其操作以通过打开所述开关开关并使固态开关断开并且然后关断所述固态开关来对所述峰值电容器充电。 固态开关可以并联电连接多个固态开关。