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公开(公告)号：US4647331A
公开(公告)日：1987-03-03
申请号：US653490
申请日：1984-09-24
CPC分类号： G02B6/4239 , H01L33/005
摘要： An assembly method is described in which low level light is used to align an optical fiber to the emitting area of an LED. When alignment is achieved, the power dissipated by the LED is increased to gel or partially cure an adhesive, thereby securing the aligned fiber to the LED.
摘要翻译： 描述了一种组装方法，其中使用低等级的光将光纤对准LED的发射区域。 当达到对准时，由LED消散的功率增加到凝胶或部分固化粘合剂，从而将对准的光纤固定到LED。
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公开(公告)号：US09376312B2
公开(公告)日：2016-06-28
申请号：US14031041
申请日：2013-09-18
CPC分类号： B81C1/00142 , B81C1/00261 , B81C1/00492 , H01G4/40 , H01G5/16 , H01G5/40
摘要： An improved MEMS transducer apparatus and method. The method includes providing a movable base structure having a base surface region overlying a substrate and a center cavity with a cavity surface region. At least one center anchor structure and one spring structure can be spatially disposed within a substantially circular portion of the surface region. The spring structure(s) can be coupled the center anchor structure(s) to a portion of the cavity surface region. The substantially circular portion can be configured within a vicinity of the center of the surface region. At least one capacitor element, having a fixed and a movable capacitor element, can be spatially disposed within a vicinity of the cavity surface region. The fixed capacitor element(s) can be coupled to the center anchor structure(s) and the movable capacitor element(s) can be spatially disposed on a portion of the cavity surface region.
摘要翻译： 一种改进的MEMS换能器装置和方法。 该方法包括提供具有覆盖衬底的基面区域和具有空腔表面区域的中心空腔的可移动基座结构。 至少一个中心锚固结构和一个弹簧结构可以空间地设置在表面区域的基本圆形部分内。 弹簧结构可以将中心锚固结构耦合到空腔表面区域的一部分。 大致圆形的部分可以构造在表面区域的中心附近。 具有固定和可动电容器元件的至少一个电容器元件可以空间地设置在空腔表面区域附近。 固定电容器元件可以耦合到中心锚定结构，并且可移动电容器元件可以在空间上设置在空腔表面区域的一部分上。
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公开(公告)号：US08477473B1
公开(公告)日：2013-07-02
申请号：US12859672
申请日：2010-08-19
IPC分类号： H01G5/00
CPC分类号： G01R3/00 , B81B3/0072 , B81B2203/0163 , B81B2203/0307 , G01C19/5783 , G01P15/125 , G01P2015/0857 , Y10T29/49007
摘要： An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.
摘要翻译： 提供了一种改进的MEMS换能器装置和方法。 该装置具有可移动的基座结构，其包括外表面区域和至少一个部分被去除以形成至少一个内表面区域。 至少一个中间锚结构设置在内表面区域内。 该装置包括可操作地联接到中心锚固结构的中间弹簧结构以及内表面区域的至少一部分。 电容器元件设置在内表面区域内。
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公开(公告)号：US07268463B2
公开(公告)日：2007-09-11
申请号：US11192874
申请日：2005-07-28
IPC分类号： H02N1/00
CPC分类号： H02N1/008 , B81B3/0072 , B81B2201/0235 , G01P15/0802 , G01P15/125 , G01P2015/0814
摘要： MEMS devices (100) and methods for forming the devices have now been provided. In one exemplary embodiment, the MEMS device (100) comprises a substrate (106) having a surface, an electrode (128) having a first portion coupled to the substrate surface, and a second portion movably suspended above the substrate surface, and a stress-release mechanism (204) disposed on the electrode second portion, the stress-release mechanism (204) including a first slot (208) integrally formed in the electrode. In another exemplary embodiment, the substrate (106) includes an anchor (134, 136) and the stress-release mechanism 222 is formed adjacent the anchor (134, 136).
摘要翻译： 现在已经提供了MEMS器件（100）和用于形成器件的方法。 在一个示例性实施例中，MEMS器件（100）包括具有表面的衬底（106），具有耦合到衬底表面的第一部分的电极（128）和可移动地悬挂在衬底表面上方的第二部分 - 释放机构（204），所述应力释放机构（204）包括一体地形成在所述电极中的第一槽（208）。 在另一示例性实施例中，衬底（106）包括锚固件（134,136），并且应力释放机构222邻近锚固件（134,136）形成。
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公开(公告)号：US4730278A
公开(公告)日：1988-03-08
申请号：US914957
申请日：1986-10-03
CPC分类号： G11C8/08
摘要： A circuit is described that provides a quick charge and discharge of a row of memory cells. A first transistor has its collector-emitter path coupled between a first voltage and a row of memory cells, and a base coupled to an input terminal. A second transistor has its collector-emitter path coupled to the first voltage by a resistor and to a voltage level setting device, and a base coupled to the input terminal. A third transistor has its collector-emitter path coupled between the row of memory cells and a second voltage, and a base coupled to a voltage level shifting device. As the row of memory cells are selected, the third transistor becomes less conductive, thereby sinking less current from the row of memory cells and allowing the inherent capacitance of the row of memory cells to charge more quickly. As the row of memory cells are deselected, the third transistor becomes more conductive, thereby sinking more current from the row of memory cells and discharging the inherent capacitance more quickly.
摘要翻译： 描述了提供一行存储器单元的快速充电和放电的电路。 第一晶体管具有耦合在第一电压和一行存储器单元之间的集电极 - 发射极路径，以及耦合到输入端子的基极。 第二晶体管的集电极 - 发射极路径通过电阻器和电压电平设置装置耦合到第一电压，以及耦合到输入端子的基极。 第三晶体管具有耦合在该行存储单元和第二电压之间的集电极 - 发射极路径，以及耦合到电压电平移位装置的基极。 当选择存储单元行时，第三晶体管变得较少导电，从而从存储单元行中吸收更少的电流，并允许存储单元行的固有电容更快地充电。 当存储器单元行被取消选择时，第三晶体管变得更加导电，从而从存储单元行中吸收更多的电流并且更快地对固有电容进行放电。
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公开(公告)号：US08553389B1
公开(公告)日：2013-10-08
申请号：US12859647
申请日：2010-08-19
IPC分类号： H01G7/00
CPC分类号： B81C1/00142 , B81C1/00261 , B81C1/00492 , H01G4/40 , H01G5/16 , H01G5/40
摘要： An improved MEMS transducer apparatus and method is provided. The apparatus includes a movable base structure having a base surface region. An anchor structure is disposed within a substantially circular portion of the surface region typically at or near the center of the surface region. A spring structure is coupled to the anchor structure and at least one portion of the base surface region. A capacitor, having a fixed capacitor element and a movable capacitor element, are disposed near the base surface region. The fixed capacitor element can be coupled to the anchor structure and the movable capacitor element can be spatially disposed on a portion of the base surface region near the anchor structure.
摘要翻译： 提供了一种改进的MEMS换能器装置和方法。 该装置包括具有基面区域的可移动基座结构。 锚结构设置在通常在表面区域的中心或附近的表面区域的基本圆形的部分内。 弹簧结构联接到锚结构和基表面区域的至少一部分。 具有固定电容器元件和可动电容器元件的电容器设置在基面区域附近。 固定电容器元件可以联接到锚结构，并且可移动电容器元件可以空间地设置在靠近锚结构的基部表面区域的一部分上。
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公开(公告)号：US08056415B2
公开(公告)日：2011-11-15
申请号：US12130702
申请日：2008-05-30
IPC分类号： G01P15/125
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2203/0109 , B81B2203/0136 , G01P1/006 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082
摘要： A microelectromechanical systems (MEMS) sensor (52) includes a substrate (62) a movable element (58) spaced apart from the substrate (62), suspension anchors (66, 68, 70, 72) formed on the substrate (62), and compliant members (74) interconnecting the movable element (58) with the suspension anchors. The MEMS sensor (52) further includes fixed fingers (76) and fixed finger anchors (78) attaching the fixed fingers (76) to the substrate (62). The movable element (58) includes openings (64). At least one of the suspension anchors resides in at least one of the multiple openings (64) and pairs (94) of the fixed fingers (76) reside in other multiple openings (64). The MEMS sensor (52) is symmetrically formed, and a location of the fixed finger anchors (78) defines an anchor region (103) within which the suspension anchors (66, 68, 70, 72) are positioned.
摘要翻译： 微机电系统（MEMS）传感器（52）包括基板（62），与基板（62）间隔开的可移动元件（58），形成在基板（62）上的悬挂锚固件（66,68,70,72） 以及将可移动元件（58）与悬挂锚固件互连的柔性构件（74）。 MEMS传感器（52）还包括将固定指状物（76）附接到基底（62）的固定指状物（76）和固定指状锚（78）。 可移动元件（58）包括开口（64）。 悬挂锚中的至少一个驻留在多个开口（64）中的至少一个中，固定指状物（76）的对（94）位于其它多个开口（64）中。 MEMS传感器（52）对称地形成，并且固定指状物锚定件（78）的位置限定了锚定区域（103），悬挂锚固件（66,68,70,72）定位在锚定区域内。
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公开(公告)号：US07829366B2
公开(公告)日：2010-11-09
申请号：US12040737
申请日：2008-02-29
IPC分类号： H01L21/00
CPC分类号： B81C1/00182 , B81B2201/0257 , B81C2201/019 , H04R19/005 , H04R19/04 , H04R31/00
摘要： A microelectromechanical systems (MEMS) component 20 includes a portion 32 of a MEMS structure 30 formed on a semiconductor substrate 34 and a portion 36 of the structure 30 formed in a non-semiconductor substrate 22. The non-semiconductor substrate 22 is in fixed communication with the semiconductor substrate 34 with the portion 32 of the MEMS structure 30 being interposed between the substrates 34 and 22. A fabrication method 96 entails utilizing semiconductor thin-film processing techniques to form the portion 32 on the semiconductor substrate 34, and utilizing a lower cost processing technique to fabricate the portion 36 in the non-semiconductor substrate 22. The portions 32 and 36 are coupled to yield the MEMS structure 30, and the MEMS structure 30 can be attached to another substrate as needed for additional functionality.
摘要翻译： 微机电系统（MEMS）部件20包括形成在半导体衬底34上的MEMS结构30的部分32和形成在非半导体衬底22中的结构30的部分36.非半导体衬底22处于固定通信 其中半导体衬底34与MEMS结构30的部分32插入在衬底34和22之间。制造方法96需要利用半导体薄膜处理技术在半导体衬底34上形成部分32，并且利用较低的 成本处理技术以制造非半导体衬底22中的部分36.部分32和36被耦合以产生MEMS结构30，并且可以根据需要将MEMS结构30附接到另一衬底以用于附加功能。
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公开(公告)号：US07628072B2
公开(公告)日：2009-12-08
申请号：US11489789
申请日：2006-07-19
IPC分类号： G01P15/125
CPC分类号： G01P15/0802 , B81B3/001 , G01P15/125 , G01P2015/0814
摘要： A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.
摘要翻译： MEMS器件包括衬底; 悬挂在基板附近的可动块; 以及耦合到所述可移动质量块的至少一个悬架结构，用于执行机械弹簧功能。 所述至少一个悬架结构具有当MEMS装置在感测方向上受到至少一个刺激时串联移动的部分，并且还包括在串联移动的部分之间的至少一个连杆。
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公开(公告)号：US06936492B2
公开(公告)日：2005-08-30
申请号：US11009109
申请日：2004-12-10
申请人： Andrew C. McNeil , Gary Li , Daniel N. Koury, Jr.
发明人： Andrew C. McNeil , Gary Li , Daniel N. Koury, Jr.
IPC分类号： G01P15/125 , G01P15/18 , H01G5/18
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/082 , G01P2015/0831
摘要： A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
摘要翻译： 本文提供了一种传感器，其包括不平衡证明块（51），并且适于在至少两个相互正交的方向上感测加速度。 证明物质（51）具有不等质量的第一（65）和第二（67）相对的侧面。
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