公开(公告)号：US20220205784A1

公开(公告)日：2022-06-30

申请号：US17700275

申请日：2022-03-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712 ,  H01G5/011 ,  G01C25/00 ,  B81C1/00

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US11340069B2

公开(公告)日：2022-05-24

申请号：US16898339

申请日：2020-06-10

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Guerinoni ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5712 ,  G01C19/5755 ,  G01C19/574 ,  B81B3/00

Abstract: The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.

公开(公告)号：US11280611B2

公开(公告)日：2022-03-22

申请号：US16696709

申请日：2019-11-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US10254332B2

公开(公告)日：2019-04-09

申请号：US15401435

申请日：2017-01-09

Applicant: STMicroelectronics S.r.l.

Inventor： Fabiano Frigoli ,  Giuseppe Ballotta ,  Massimo Greppi ,  Luca Giuseppe Falorni ,  Paolo Aranzulla

IPC: G01R1/04 ,  G01R31/28

Abstract: A for positioning a miniaturized piece includes a positioning structure that forms a first cavity designed to receive with play the miniaturized piece and a second cavity communicating with the first cavity. At least one electrical-contact terminal is provided facing the second cavity and is electrically coupleable to an electronic testing device designed to carry out an electrical test on the miniaturized piece. An actuator device causes a vibration of the positioning structure such that the vibration translates the miniaturized piece towards the second cavity until it penetrates at least in part into the second cavity.

公开(公告)号：US10113872B2

公开(公告)日：2018-10-30

申请号：US15610251

申请日：2017-05-31

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca Giuseppe Falorni ,  Carlo Valzasina ,  Roberto Carminati ,  Alessandro Tocchio

IPC: G01C19/00 ,  B81B3/00 ,  G01C19/5712 ,  G01C19/5733 ,  G01C19/5747

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

公开(公告)号：US09869550B2

公开(公告)日：2018-01-16

申请号：US14964347

申请日：2015-12-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele Prati ,  Carlo Valzasina ,  Luca Giuseppe Falorni ,  Matteo Fabio Brunetto

IPC: G01C19/5747 ,  G01C19/5733

CPC classification number: G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US09696157B2

公开(公告)日：2017-07-04

申请号：US14750840

申请日：2015-06-25

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Luca Giuseppe Falorni ,  Carlo Valzasina ,  Roberto Carminati ,  Alessandro Tocchio

IPC: G01C19/00 ,  G01C19/5712 ,  B81B3/00 ,  G01C19/5733 ,  G01C19/5747

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  B81B3/0086 ,  B81B2201/025 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

公开(公告)号：US20170115341A1

公开(公告)日：2017-04-27

申请号：US15401435

申请日：2017-01-09

Applicant: STMicroelectronics S.r.l.

Inventor： Fabiano Frigoli ,  Giuseppe Ballotta ,  Massimo Greppi ,  Luca Giuseppe Falorni ,  Paolo Aranzulla

IPC: G01R31/28 ,  G01R1/04

CPC classification number: G01R31/2887 ,  G01R1/0408 ,  G01R1/0483 ,  G01R31/2891 ,  G01R31/2893

Abstract: A for positioning a miniaturized piece includes a positioning structure that forms a first cavity designed to receive with play the miniaturized piece and a second cavity communicating with the first cavity. At least one electrical-contact terminal is provided facing the second cavity and is electrically coupleable to an electronic testing device designed to carry out an electrical test on the miniaturized piece. An actuator device causes a vibration of the positioning structure such that the vibration translates the miniaturized piece towards the second cavity until it penetrates at least in part into the second cavity.

公开(公告)号：US11808574B2

公开(公告)日：2023-11-07

申请号：US17700275

申请日：2022-03-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747 ,  G01C19/5712 ,  H01G5/011 ,  G01C25/00 ,  B81C1/00 ,  G01C19/58

CPC classification number: G01C19/5747 ,  B81C1/00158 ,  G01C19/5712 ,  G01C25/00 ,  H01G5/011 ,  G01C19/58 ,  Y10T29/49169

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US20200064134A1

公开(公告)日：2020-02-27

申请号：US16664041

申请日：2019-10-25

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.