Microfluidic MEMS device for fluid ejection with piezoelectric actuation

    公开(公告)号:US11242242B2

    公开(公告)日:2022-02-08

    申请号:US16422504

    申请日:2019-05-24

    Abstract: A microfluidic MEMS device is formed by a plurality of ejection cells each having a fluid chamber; an actuator chamber; a membrane having a first surface facing the actuator chamber and a second surface facing the fluid chamber; a piezoelectric actuator on the first surface of the membrane; and a passivation layer on the piezoelectric actuator. The membrane has an elongated area defining a longitudinal direction and a transverse direction. The passivation layer has a plurality of holes. The holes extend throughout the thickness of the passivation layer and, in a plan view, have an elongated shape with a greater dimension parallel to the longitudinal direction of the membrane and a smaller dimension parallel to the transverse direction.

    Microfluidic assembly and methods of forming same

    公开(公告)号:US10357964B2

    公开(公告)日:2019-07-23

    申请号:US15917231

    申请日:2018-03-09

    Abstract: One or more embodiments are directed to a microfluidic assembly that includes an interconnect substrate coupled to a microfluidic die. In one embodiment, the microfluidic die includes a ledge with a plurality of bond pads. The microfluidic assembly further includes an interconnect substrate having an end resting on the ledge proximate the bond pads. In another embodiment, the interconnect substrate abuts a side surface of the ledge or is located proximate the ledge. Conductive elements couple the microfluidic die to contacts of the interconnect substrate. Encapsulant is located over the conductive elements, the bond pads, the contacts.

    Microfluidic die on a support with at least one other die

    公开(公告)号:US10118391B2

    公开(公告)日:2018-11-06

    申请号:US15253618

    申请日:2016-08-31

    Inventor: Simon Dodd

    Abstract: The present disclosure provides supports for a microfluidic die and one or more additional die including, but not limited to, microfluidic die, ASICs, MEMS devices, and sensors. This includes semi-flexible supports that allow a microfluidic die to be at a 90 degree angle with respect to another die and rigid supports that allow a microfluidic and another die to be in close proximity to each other.

    Microfluidic system with single drive signal for multiple nozzles
    20.
    发明授权
    Microfluidic system with single drive signal for multiple nozzles 有权
    具有多个喷嘴的单驱动信号的微流体系统

    公开(公告)号:US09358567B2

    公开(公告)日:2016-06-07

    申请号:US14310886

    申请日:2014-06-20

    Abstract: The present disclosure is directed to a microfluidic die that includes a plurality of heaters above a substrate, a plurality of chambers and nozzles above the heaters, a plurality of first contacts coupled to the heaters, and a plurality of second contacts coupled to the heaters. The plurality of second contacts are coupled to each other and coupled to ground. The die includes a plurality of contact pads, a first signal line coupled to the plurality of second contacts and to a first one of the plurality of contact pads, and a plurality of second signal lines, each second signal line being coupled to one of the plurality of first contacts, groups of the second signal lines being coupled together to drive a group of the plurality of heaters with a single signal, each group of the second signal lines being coupled to a remaining one of the plurality of contact pads.

    Abstract translation: 本公开涉及一种微流体管芯,其包括在基底上方的多个加热器,加热器上方的多个腔室和喷嘴,联接到加热器的多个第一触头以及耦合到加热器的多个第二触点。 多个第二触点彼此耦合并耦合到地。 芯片包括多个接触焊盘,耦合到多个第二触点和多个接触焊盘中的第一触点的第一信号线以及多个第二信号线,每个第二信号线耦合到 多个第一触点,第二信号线的组被耦合在一起以用单个信号驱动一组多个加热器,每组第二信号线耦合到多个接触垫中的剩余的一个。

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