METAL SHEET HOLDING DEVICE FOR MANUFACTURING PATTERN MASK
    11.
    发明申请
    METAL SHEET HOLDING DEVICE FOR MANUFACTURING PATTERN MASK 有权
    金属板保持装置制造图案面膜

    公开(公告)号:US20140312546A1

    公开(公告)日:2014-10-23

    申请号:US14043696

    申请日:2013-10-01

    CPC classification number: B23K37/0408 B23K26/0624 B23K26/18 B23K26/382

    Abstract: A metal sheet holding device for manufacturing a pattern mask used in manufacturing processes of a flat panel displays include a first holder and second holder. The first holder includes an adhesive layer contacting edge portions of a metal sheet, and a first frame supporting the metal sheet using the adhesive layer. The second holder includes a second frame below the first frame, a supported plate positioned at the center of the second frame, and an adhered unit positioned between the central portion of a metal sheet and the supported plate. The adhered unit generates an electrostatic force or a magnetic force to hold the central portion of the metal sheet.

    Abstract translation: 用于制造平板显示器的制造工艺中使用的图案掩模的金属片保持装置包括第一保持器和第二保持器。 第一保持器包括接触金属片的边缘部分的粘合剂层和使用粘合剂层支撑金属片的第一框架。 第二保持器包括位于第一框架下方的第二框架,位于第二框架中心的支撑板和位于金属板的中心部分与支撑板之间的粘合单元。 附着单元产生静电力或磁力以保持金属片的中心部分。

    Mask manufacturing apparatus and method of manufacturing mask using laser beam
    13.
    发明授权
    Mask manufacturing apparatus and method of manufacturing mask using laser beam 有权
    使用激光束制造掩模的掩模制造装置和方法

    公开(公告)号:US09377681B2

    公开(公告)日:2016-06-28

    申请号:US14021489

    申请日:2013-09-09

    Abstract: A mask manufacturing apparatus includes a laser irradiator, a stage, a frame, and a heat spreader sheet. The laser irradiator divides a laser beam into a plurality of sub-laser beams and irradiates the sub-laser beams to a shadow mask material which is placed over a stage. The frame is disposed over the stage to support the shadow mask material. The heat spreader sheet makes contact with the shadow mask material, absorbs heat generated from the shadow mask material, and dissipates the heat to surroundings of the shadow mask material. Accordingly, the shadow mask material is protected from overheating.

    Abstract translation: 掩模制造装置包括激光照射器,台架,框架和散热片。 激光照射器将激光束分割成多个子激光束,并将副激光束照射到放置在台上的荫罩材料。 框架设置在舞台上以支撑荫罩材料。 散热片与荫罩材料接触,吸收由荫罩材料产生的热量,并将热量散发到荫罩材料的周围。 因此,防止荫罩材料过热。

    LASER PROCESSING APPARATUS
    14.
    发明申请
    LASER PROCESSING APPARATUS 有权
    激光加工设备

    公开(公告)号:US20140076869A1

    公开(公告)日:2014-03-20

    申请号:US13919641

    申请日:2013-06-17

    Abstract: A laser processing apparatus includes a laser generator for generating laser beams, a diffraction optic element for dividing the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam number controller for controlling the number of the plurality of sub-laser beams. Accordingly, the diffractive optic element that splits a laser beam generated by the laser beam generator into a plurality of sub-laser beams and the beam number controller that controls the number of sub-laser beams are provided so that the processing speed of a processing target can be improved and, at the same time, the number of laser beams can be promptly controlled, thereby promptly forming various patterns of the processing target.

    Abstract translation: 激光加工装置包括:激光发生器,用于产生激光束;衍射光学元件,用于将由激光发生器产生的激光束分割成多个子激光束;以及光束数控制器,用于控制多个子激光束的数量 激光束。 因此,将由激光束发生器产生的激光束分割为多个子激光束的衍射光学元件和控制副激光束的数量的光束号控制器被设置成使得处理目标的处理速度 并且同时可以迅速地控制激光束的数量,从而迅速地形成处理目标的各种图案。

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