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公开(公告)号：US20180048281A1
公开(公告)日：2018-02-15
申请号：US15487620
申请日：2017-04-14
发明人： Moon Chul LEE , Jae Chang LEE , Chang Hyun LIM , Tae Hun LEE , Tae Kyung LEE , Tae Yoon KIM
IPC分类号： H03H9/02 , H01L41/047 , H03H9/54
CPC分类号： H03H9/02102 , H01L41/047 , H03H9/173 , H03H9/542 , H03H9/564
摘要： A bulk acoustic filter device includes: a substrate; a cavity forming layer disposed on the substrate so as to form a cavity; a lower electrode disposed on the cavity; a piezoelectric layer disposed on the lower electrode; an upper electrode disposed on the piezoelectric layer; and a temperature compensation layer disposed below the lower electrode and in the cavity portion.
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公开(公告)号：US20160069926A1
公开(公告)日：2016-03-10
申请号：US14698329
申请日：2015-04-28
发明人： Tae Yoon KIM , Seung Hoon HAN , Chang Hyun LIM
CPC分类号： G01P15/123 , B81B7/0029 , B81B2201/0235 , B81B2203/0109 , B81B2203/0118 , B81C1/00698 , G01P2015/0842
摘要： There is provided an acceleration sensor in which outer surfaces of a plurality of beams in which piezo-resistive elements are provided and upper portions of a mass body and a support body connected to the plurality of beams may be enclosed by a protective layer to prevent electrical disturbances from being transferred from an external environment to the piezo-resistive elements.
摘要翻译： 提供一种加速度传感器，其中设置有压阻元件的多个梁的外表面，连接到多个梁的质量体和支撑体的上部可以被保护层包围以防止电气 干扰从外部环境转移到压阻元件。
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公开(公告)号：US20150198626A1
公开(公告)日：2015-07-16
申请号：US14465390
申请日：2014-08-21
发明人： Tae Yoon KIM , Chang Hyun LIM , Jong Woon KIM
IPC分类号： G01P15/12
CPC分类号： G01P15/123 , G01P2015/0842 , G01P2015/0871
摘要： Embodiments of the invention provide an acceleration sensor, including a sensor part comprising a mass body part including a first mass body, a second mass body, and a connecting layer connecting the first mass body and the second mass body to each other, a flexible beam having the mass body part connected thereto to be displaceable, and a supporting part having the flexible beam connected thereto and supporting the mass body part to be floatable. The acceleration sensor further includes a cover coupled to the supporting part to cover the sensor part, being opposite to the first mass body to thereby form a cavity, and being opposite to the second mass body to thereby form a protrusion part.
摘要翻译： 本发明的实施例提供了一种加速度传感器，包括传感器部分，包括质量体部分，其包括第一质量体，第二质量体和将第一质量体和第二质量体彼此连接的连接层，柔性梁 具有连接到其上的质量体部分可移动，以及具有连接到其上的柔性梁并支撑质量体部分以可浮动的支撑部。 所述加速度传感器还包括与所述支撑部连接以覆盖所述传感器部分的盖，所述盖与所述第一质量体相对，从而形成空腔，并且与所述第二质量体相对，从而形成突出部。
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公开(公告)号：US20210359662A1
公开(公告)日：2021-11-18
申请号：US16953431
申请日：2020-11-20
发明人： Tae Kyung LEE , Yong Suk KIM , Sang Kee YOON , Chang Hyun LIM , Tae Hun LEE , Jin Woo YI
摘要： A bulk-acoustic wave resonator includes a resonator, including a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on a substrate; and an insertion layer disposed below the piezoelectric layer, and configured to partially elevate the piezoelectric layer and the second electrode, wherein the insertion layer may be formed of a material containing silicon (Si), oxygen (O), and nitrogen (N).
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公开(公告)号：US20210313955A1
公开(公告)日：2021-10-07
申请号：US16942913
申请日：2020-07-30
发明人： Chang Hyun LIM , Sang Hyun YI , Yong Suk KIM , Sung Jun LEE , Jae Hyoung GIL , Dong Hyun PARK
摘要： A bulk acoustic resonator includes: a substrate; a first electrode disposed on the substrate; a piezoelectric layer disposed to cover at least a portion of the first electrode; a second electrode disposed to cover at least a portion of the piezoelectric layer; a metal pad connected to the first electrode and the second electrode; and a protective layer disposed to cover at least the metal pad.
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公开(公告)号：US20200373900A1
公开(公告)日：2020-11-26
申请号：US16992434
申请日：2020-08-13
发明人： Tae Kyung LEE , Tae Yoon KIM , Sang Kee YOON , Chang Hyun LIM , Jong Woon KIM , Moon Chul LEE
摘要： An acoustic wave resonator includes a resonating part disposed on and spaced apart from a substrate by a cavity, the resonating part including a membrane layer, a first electrode, a piezoelectric layer, and a second electrode that are sequentially stacked. 0 Å≤ΔMg≤170 Å may be satisfied, ΔMg being a difference between a maximum thickness and a minimum thickness of the membrane layer disposed in the cavity.
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公开(公告)号：US20200252051A1
公开(公告)日：2020-08-06
申请号：US16388979
申请日：2019-04-19
发明人： Won HAN , Tae Yoon KIM , Sang Uk SON , Chang Hyun LIM
摘要： A bulk-acoustic wave resonator includes a substrate; a membrane layer forming a cavity with the substrate; a first electrode at least partially disposed on an upper portion of the cavity including an end portion that is thicker than other portions of the first electrode; an insertion layer including a first portion disposed adjacent to from the end portion of the first electrode and a second portion disposed on an upper portion of the first electrode; a piezoelectric layer disposed to cover the insertion layer; and a second electrode disposed on an upper portion of the piezoelectric layer.
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公开(公告)号：US20180337656A1
公开(公告)日：2018-11-22
申请号：US15814869
申请日：2017-11-16
发明人： Tae Hun LEE , Chang Hyun LIM , Tae Yoon KIM , Moon Chul LEE
摘要： A bulk acoustic wave resonator includes a substrate including a first via and a second via, a lower electrode connection member, a lower electrode, a piezoelectric layer, an upper electrode, and an upper electrode connection member spaced apart from the lower electrode connection member. The lower electrode, the piezoelectric layer, and the upper electrode constitute a resonant portion. The lower electrode connection member electrically connects the lower electrode to the first via and supports a first edge portion of the resonant portion. The upper electrode connection member electrically connects the upper electrode to the second via and supports a second edge portion of the resonant portion. Either one or both of the upper electrode connection member and the lower electrode connection member includes a respective extension portion connected to a respective one of the first via and the second via that is disposed below the resonant portion.
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公开(公告)号：US20180013397A1
公开(公告)日：2018-01-11
申请号：US15621552
申请日：2017-06-13
发明人： Chang Hyun LIM , Moon Chul LEE , Won HAN , Tae Kyung LEE , Dae Ho KIM
CPC分类号： H03H9/02015 , H03H3/02 , H03H9/02047 , H03H9/02118 , H03H9/1007 , H03H9/171 , H03H9/173 , H03H2003/021
摘要： A bulk acoustic wave filter device includes a substrate, a lower electrode on the substrate, a piezoelectric layer covering at least a portion of the lower electrode, and an upper electrode covering at least a portion of the piezoelectric layer. The upper electrode has a density reduction layer disposed on at least a portion thereof, except a central portion of a resonance region of the bulk acoustic wave filter device that deforms and vibrates with the piezoelectric layer during activation of the piezoelectric layer. The density reduction layer has a density lower than a density of other portions of the upper electrode.
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公开(公告)号：US20170003187A1
公开(公告)日：2017-01-05
申请号：US15045684
申请日：2016-02-17
发明人： Chang Hyun LIM , Dae Hun JEONG , Tae Hun LEE
IPC分类号： G01L9/00
CPC分类号： G01L9/0054 , G01L9/0047
摘要： A pressure sensor element includes a die; a concave groove formed in one surface of the die; a partition wall formed in the concave groove to be spaced apart from side walls, the partition wall partitioning the concave groove into a trench and a cavity; and a membrane formed on the die and covering the concave groove.
摘要翻译： 压力传感器元件包括模具; 形成在模具的一个表面中的凹槽; 形成在所述凹槽中与侧壁间隔开的分隔壁，所述分隔壁将所述凹槽分隔成沟槽和空腔; 以及形成在模具上并覆盖凹槽的膜。
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