METHOD FOR DETECTING DEFECT IN PATTERN
    11.
    发明申请
    METHOD FOR DETECTING DEFECT IN PATTERN 有权
    检测图案缺陷的方法

    公开(公告)号:US20150131891A1

    公开(公告)日:2015-05-14

    申请号:US14331899

    申请日:2014-07-15

    CPC classification number: G06T7/001 G06T2207/10061 G06T2207/30148

    Abstract: Provided is a method of detecting a defect of a pattern using vectorization to increase accuracy and efficiency in OPC modeling and OPC verification. The method includes acquiring a target layout image associated with a target pattern, acquiring a pattern image associated with a pattern formed on a substrate, extracting an edge image from the pattern image, producing a first vector form based on the target layout image, producing a second vector form based on the edge image, and comparing the first vector form with the second vector form.

    Abstract translation: 提供了一种使用向量化来检测图案的缺陷以提高OPC建模和OPC验证中的精度和效率的方法。 该方法包括获取与目标图案相关联的目标布局图像,获取与形成在基板上的图案相关联的图案图像,从图案图像中提取边缘图像,基于目标布局图像产生第一矢量形状, 基于边缘图像的第二矢量形式,并且将第一矢量形式与第二矢量形式进行比较。

    ATOMIC LAYER DEPOSITION APPARATUS
    13.
    发明申请

    公开(公告)号:US20130178070A1

    公开(公告)日:2013-07-11

    申请号:US13780560

    申请日:2013-02-28

    CPC classification number: H01L21/30 C23C16/45546 C23C16/45551 C23C16/45578

    Abstract: An atomic layer deposition apparatus and an atomic layer deposition method increase productivity. The atomic layer deposition apparatus includes a reaction chamber, a heater for supporting a plurality of semiconductor substrates with a given interval within the reaction chamber and to heat the plurality of semiconductor substrates and a plurality of injectors respectively positioned within the reaction chamber and corresponding to the plurality of semiconductor substrates supported by the heater. The plurality of injectors are individually swept above the plurality of semiconductor substrates to spray reaction gas.

    ACCESSORY APPARATUS AND INFORMATION DISPLAYING METHOD USING THE SAME

    公开(公告)号:US20170244822A1

    公开(公告)日:2017-08-24

    申请号:US15380059

    申请日:2016-12-15

    Abstract: An accessory apparatus and an information displaying method are provided. The apparatus may include, a housing having a first and second side, a coupling member that detachably couples the housing to an external electronic device, a first conductive pattern, positioned between the first side and the second side, to receive a first RF signal from the external electronic device through a second side, a second conductive pattern, positioned between the first and second side and electrically separated from the first conductive pattern, to receive the first RF signal through the second side, a wireless communication circuit to receive the first RF signal through the first conductive pattern, a power management circuit, connected with the second conductive pattern, to extract power from the first RF signal to generate a second RF signal, and a display element, connected with the wireless communication circuit, supplied with power contained in the second RF signal.

    APPARATUS AND METHOD FOR RECEIVING WIRELESS POWER

    公开(公告)号:US20170324253A1

    公开(公告)日:2017-11-09

    申请号:US15656724

    申请日:2017-07-21

    Abstract: An apparatus for controlling wireless power transmission includes a near-field wireless communication antenna for receiving wireless power transmission control signals from a power transmitting device at a communication frequency, a near-field wireless communication Integrated Circuit (IC) for delivering wireless power transmission control messages based on the wireless power transmission control signals received through the near-field wireless communication antenna to a power IC, a Wireless Power Transmission (WPT) coil for resonating at a frequency band corresponding to a resonant frequency of the power transmitting device, to receive power supplied from the power transmitting device, and the power IC for controlling output of a constant voltage, using the supply power received by the WPT coil, based on the wireless power transmission control messages from the near-field wireless communication IC.

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