Methods for manufacturing a semiconductor device

    公开(公告)号:US09916979B2

    公开(公告)日:2018-03-13

    申请号:US15381135

    申请日:2016-12-16

    Abstract: Methods for manufacturing a semiconductor device include forming a gate line extending in a first direction in a substrate, and an impurity region on a side surface of the gate line, forming an insulating film pattern on the substrate, the insulating film pattern extending in the first direction and comprising a first through-hole that is configured to expose the impurity region, forming a barrier metal layer on the first through-hole, forming a conductive line contact that fills the first through-hole and that is electrically connected to the impurity region, forming a first mask pattern on the conductive line contact and the insulating film pattern, the first mask pattern extending in a second direction that is different from the first direction and the first mask pattern comprising a first opening, and removing corners of the barrier metal layer by partially etching the barrier metal layer.

    Wire connection apparatus
    15.
    发明授权
    Wire connection apparatus 有权
    接线装置

    公开(公告)号:US09416855B2

    公开(公告)日:2016-08-16

    申请号:US14270880

    申请日:2014-05-06

    CPC classification number: F16H19/08 B25J9/104 F16H2019/085 Y10T74/18848

    Abstract: A wire connection apparatus includes a link unit and a drive unit configured to drive the link unit. The link unit includes a first link, a second link rotatably coupled to the first link, a third link rotatably coupled to the second link, a plurality of wires, each of which is fixed at one end thereof to the third link, and is fixed at the other end thereof to the drive unit, and through which a driving force is transmitted from the drive unit to the third link, a path forming structure to form a path of each of the wires between the drive unit and the third link, and a length holding structure to hold constant a length of each of the wires between the drive unit and the third link.

    Abstract translation: 线连接装置包括链接单元和被配置为驱动链接单元的驱动单元。 连杆单元包括第一连杆,可旋转地联接到第一连杆的第二连杆,可旋转地联接到第二连杆的第三连杆,多个电线,每个电线的一端固定到第三连杆,并且固定 在驱动单元的另一端,驱动单元从驱动单元向第三连杆传递驱动力,路径形成结构,用于形成驱动单元和第三连杆之间的每根导线的路径,以及 长度保持结构,用于保持驱动单元和第三连杆之间的每条线的长度恒定。

    WIRE CONNECTION APPARATUS
    16.
    发明申请
    WIRE CONNECTION APPARATUS 有权
    电线连接装置

    公开(公告)号:US20140331798A1

    公开(公告)日:2014-11-13

    申请号:US14270880

    申请日:2014-05-06

    CPC classification number: F16H19/08 B25J9/104 F16H2019/085 Y10T74/18848

    Abstract: A wire connection apparatus includes a link unit and a drive unit configured to drive the link unit. The link unit includes a first link, a second link rotatably coupled to the first link, a third link rotatably coupled to the second link, a plurality of wires, each of which is fixed at one end thereof to the third link, and is fixed at the other end thereof to the drive unit, and through which a driving force is transmitted from the drive unit to the third link, a path forming structure to form a path of each of the wires between the drive unit and the third link, and a length holding structure to hold constant a length of each of the wires between the drive unit and the third link.

    Abstract translation: 线连接装置包括链接单元和被配置为驱动链接单元的驱动单元。 连杆单元包括第一连杆,可旋转地联接到第一连杆的第二连杆,可旋转地联接到第二连杆的第三连杆,多个电线,每个电线的一端固定到第三连杆,并且固定 在驱动单元的另一端,驱动单元从驱动单元向第三连杆传递驱动力,路径形成结构,用于形成驱动单元和第三连杆之间的每根导线的路径,以及 长度保持结构,用于保持驱动单元和第三连杆之间的每条线的长度恒定。

    LINK UNIT AND ARM MODULE HAVING THE SAME
    18.
    发明申请
    LINK UNIT AND ARM MODULE HAVING THE SAME 有权
    链路单元和ARM模块

    公开(公告)号:US20130213170A1

    公开(公告)日:2013-08-22

    申请号:US13772746

    申请日:2013-02-21

    CPC classification number: B25J18/06 A61B1/0055 B25J9/06 B25J9/104 Y10T74/20305

    Abstract: An arm module having a structure capable of precisely moving each link unit while flexibly moving with sufficient stiffness includes a plurality of link units each having a ring shape, a plurality of joint units each disposed in a middle portion of a corresponding one of the plurality of link units to connect the plurality of link units, wherein the plurality of link units includes a first link unit, a second link unit disposed while being rotated with respect to the first link unit, the second link unit linked at an upper side of the first link unit while passing through a middle portion of the first link unit, and a third link unit disposed while being rotated with respect to the second link unit, the third link unit linked at an upper side of the second link unit while passing through a middle portion of the second link unit.

    Abstract translation: 具有能够以足够的刚度灵活地移动的能够精确地移动每个连杆单元的结构的臂模块包括多个环形单元,每个连接单元各自具有环形,多个接头单元各自设置在多个 链接单元以连接多个链接单元,其中所述多个链接单元包括第一链接单元,在相对于所述第一链接单元旋转的同时设置的第二链接单元,所述第二链接单元连接在所述第一链接单元的上侧 连杆单元,同时穿过第一连杆单元的中间部分;以及第三连杆单元,其在相对于第二连杆单元旋转的同时设置,第三连杆单元连接在第二连杆单元的上侧,同时穿过中间 第二链接单元的一部分。

    LINK UNIT, ARM MODULE, AND SURGICAL APPARATUS INCLUDING THE SAME
    19.
    发明申请
    LINK UNIT, ARM MODULE, AND SURGICAL APPARATUS INCLUDING THE SAME 有权
    链路单元,ARM模块和手术设备,包括它们

    公开(公告)号:US20130199327A1

    公开(公告)日:2013-08-08

    申请号:US13759506

    申请日:2013-02-05

    Abstract: A surgical apparatus having sufficient rigidity in a fixed mode and being freely operable in a steering mode includes one or more arm modules having at least one degree of freedom, each arm module including at least one steering cable to steer the arm module and a plurality of link units to form the at least one arm module, each link unit including a head disposed at an upper portion thereof and having a hemispherical shape, a seat formed at a lower portion thereof, and a sliding ball arranged at the seat, wherein the link units are arranged such that the head of one of the link units is seated on the seat of the other of the link units, and the head of one of the link units and the seat of the other of the link units are slid with respect to each other by the sliding ball.

    Abstract translation: 具有固定模式的足够的刚度并且能够在转向模式下自由操作的手术装置包括具有至少一个自由度的一个或多个臂模块,每个臂模块包括至少一个转向电缆以转向臂模块和多个 连杆单元以形成至少一个臂模块,每个连杆单元包括设置在其上部并具有半球形状的头部,形成在其下部的座椅和布置在座椅处的滑动球,其中,连杆 单元布置成使得一个链接单元的头部位于另一个链接单元的座位上,并且一个链接单元的头部和另一个连接单元的座部相对于 彼此通过滑球。

    NONVOLATILE MEMORY DEVICES HAVING MAGNETIC TUNNEL JUNCTION MEMORY CELLS THEREIN

    公开(公告)号:US20220246837A1

    公开(公告)日:2022-08-04

    申请号:US17486034

    申请日:2021-09-27

    Abstract: A magnetic memory device includes a substrate having a first mold insulating film on a first region thereof, and a first structure on the substrate. The first structure includes a lower electrode, a magnetic tunnel junction (MTJ) structure on the lower electrode, and an upper electrode on the MTJ structure. A capping film is provided, which extends on the first mold insulating film and sidewalls of the first structure. A first etching stop layer is provided on the first structure and the capping film. A second mold insulating film is provided, which at least partially fills a space between the capping film and the first etching stop layer. A first metal structure is provided, which extends through a portion of the first etching stop layer and a portion of the second mold insulating film, and is electrically coupled to the MTJ structure.

Patent Agency Ranking