Abstract:
Substrate processing with return processing is carried out efficiently by a substrate processing apparatus that continuously processes a plurality of substrates. The apparatus is equipped with a conveyor chamber constituting a substrate convey space, a plurality of process chambers in which substrate processing is carried out, a substrate conveying device provided in the conveyor chamber having a function of conveying substrates, and a substrate convey control device that controls the process of substrate conveyance by the substrate conveying device so that in a case in which after a substrate is continuously processed by two or more process chambers, the substrate is re-conveyed from the last process chamber to any of the two or more process chambers other than the last and return processing is implemented. In re-conveyance, the substrate is conveyed to any of the process chambers after being temporarily retracted to a place other than a process chamber.
Abstract:
An electromagnetic relay includes a base, an electromagnet unit, a movable piece movable due to a function of the electromagnet unit, a card that is supported by the base so as to swing freely and is swung by the movable piece, and a contact structure that is opened and closed by swinging of the card, the card and the base respectively having protrusions and holes so that the protrusions fit into the holes to enable the card to swing freely.
Abstract:
An arc-resistant terminal, couple, and connecter are provided. In an embodiment, a metal-based electrical contact portion thereof includes at least one of Cu, Ni or Sn, and not more than 0.06 mass % P, wherein the arc-resistant terminal capable of suppressing arc discharge wherein a voltage between the arc-resistant terminal and a second terminal immediately after separation thereof is DC36V to 60V and a current between terminals during contact is 6A to 30A. In another embodiment, the an electrical contact portion comprising at least 80 mass % of metal having a boiling point of not less than 1000 degrees centigrade. According to the present invention, since the electrical contact portion or the final contact portion of the terminal includes a specific metal-based material, even when the voltage applied between the terminals is increased and an arc discharge is liable to be generated, the arc discharge can be suppressed. The arc-resistant terminal of the present invention can be suitably used in a connector for an automobile, a joint box provided with the connector portion and the like. This abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.
Abstract:
An image forming apparatus including a cleaning device for removing toner, paper dust and other impurities left on an image carrier after image transfer with a cleaning member is disclosed. The cleaning member contacts the surface of the image carrier with variable pressure and remains, about the time when the image carrier stops moving after image formation, in contact with the surface with pressure lower than pressure capable of scrapping off the impurities. Before movement for image formation, the image carrier is driven in a reverse direction opposite to a forward direction assigned to image formation, stopped, and again moved in the forward direction and then in the reverse direction at least one time.
Abstract:
A recovered toner classifier includes a rotatable cylindrical-shaped filter and a fur brush having a brush spirally provided on an outer peripheral surface of a rotation shaft. A non-brush region is continuously formed from the inlet of the filter for the recovered toner through the outlet of the filter for discharging the disposal toner along the axis line of the rotation shaft. The fur brush integrally rotates with the rotation shaft with a tip portion of the brush is in press-contact with an inner peripheral surface of the filter. A screw conveyer having a screw on a portion of the rotation shaft on a side of the inlet of the filter for the recovered toner is provided to convey the recovered toner to the inlet of the filter for the recovered toner.
Abstract:
A connector assembly with a bad-connection-preventive function is disclosed. It is simple in structure, made up of a small number of parts, and has high long-term reliability. It has a second connector having an integral locking arm and a first connector. Protrusions A and B are formed on side faces of the locking arm and the side faces of the first connector, respectively. A spring is mounted in the first connector. By inserting the second connector into the first connector, the locking arm is pushed upward by the protrusions B, so that its shoulder portion abuts the spring. Thus, the spring is compressed when the second connector is further pushed into the first connector. The connectors are thus urged in a direction away from each other by the spring. The spring disengages when the connectors are completely coupled together. When pulling the second connector out of the first connector, the protrusions A pass under the protrusions B.
Abstract:
Disclosed herein is a method of forming a single-crystalline thin film having excellent crystallinity on a base material without depending on the material for and crystallinity of the base material. In this method, a base material is provided thereon with a mask which can prevent chemical species contained in a vapor phase from adhering to the base material. The base material is continuously moved along arrow A, to deliver a portion covered with the mask into the vapor phase for crystal growth. Thus, a thin film is successively deposited on the portion of the base material, which is delivered from under the mask, from the vapor phase. A crystal growth end is formed on a boundary region between a portion of the base material which is covered with the mask and that which is exposed to the vapor phase, so that a crystal having the same orientation as the growth end is grown on a portion of the base material newly exposed by the movement.
Abstract:
An electronic apparatus includes a sub-system that receives, from a wireless LAN module, incoming data including wireless LAN packets according to plural communication methods and a main system including a processor that process the incoming data. The sub-system includes an interface circuit and a sub-processor. The interface circuit acquires a data length of each of the wireless LAN packets from a header of the wireless LAN packet. Based on MAC addresses included in the wireless LAN packet, the interface circuit identifies a communication method of the wireless LAN packet. Based on the data length and the communication method of the wireless LAN packet, the interface circuit transfers the wireless LAN packet to one of different storage areas respectively corresponding to the communication methods. The sub-processor transfers the wireless LAN packet from the one of the different storage areas to the main system.
Abstract:
An electromagnetic relay includes an electromagnet part, an actuating part, a contact part and a base for holding the electromagnet part, the actuating part and the contact part. The contact part includes a pair of fixed plates having one end fixed to the base and the other end to which a fixed contact is attached, a pair of movable springs having one end fixed to the base and the other end to which a movable contact is attached, and a connecting portion extending between the movable springs and electrically connecting the movable contacts to each other. The actuating part is actuated so as to press only a part of the movable springs inside an area defined between longitudinal axes extending between one end and the other end of the movable springs through the movable contact, when the contact part closes.
Abstract:
An input apparatus comprises detection means that detects a position of instruction means as a detected position; and position determining means that when the detection means detects a plurality of detected positions by detecting the position of the instruction means a plurality of times, performs a position determining process of determining an input position of the instruction means using the plurality of detected positions detected by the detection means and changes the position determining process based on a last detected position from among the plurality of detected positions.