公开(公告)号：US20180188546A1

公开(公告)日：2018-07-05

申请号：US15911409

申请日：2018-03-05

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Koichiro TANAKA ,  Tomoaki MORIWAKA

IPC: G02B27/09 ,  H01L21/268 ,  H01S3/00

CPC classification number: G02B27/0955 ,  B23K26/06 ,  B23K26/0604 ,  B23K26/064 ,  B23K26/0732 ,  B23K26/0736 ,  B23K26/0738 ,  G02B27/09 ,  G02B27/095 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02683 ,  H01L21/02686 ,  H01L21/2026 ,  H01L21/268 ,  H01L21/28017 ,  H01L27/1285 ,  H01L27/3244 ,  H01L27/3295 ,  H01L33/08 ,  H01L51/5237 ,  H01L51/5246 ,  H01S3/005 ,  H01S5/4012 ,  H01S5/4025

Abstract: If an optical path length of an optical system is reduced and a length of a laser light on an irradiation surface is increased, there occurs curvature of field which is a phenomenon that a convergent position deviates depending on an incident angle or incident position of a laser light with respect to a lens. To avoid this phenomenon, an optical element having a negative power such as a concave lens or a concave cylindrical lens is inserted to regulate the optical path length of the laser light and a convergent position is made coincident with a irradiation surface to form an image on the irradiation surface.

公开(公告)号：US20170062214A1

公开(公告)日：2017-03-02

申请号：US15350777

申请日：2016-11-14

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Koichiro TANAKA ,  Hidekazu MIYAIRI ,  Aiko SHIGA ,  Akihisa SHIMOMURA ,  Atsuo ISOBE

IPC: H01L21/02 ,  H01L21/283 ,  B23K26/00 ,  B23K26/06 ,  B23K26/073 ,  H01L21/268 ,  H01L27/12

CPC classification number: H01L21/02675 ,  B23K26/0604 ,  B23K26/0608 ,  B23K26/0732 ,  B23K26/0736 ,  B23K26/0738 ,  B23K26/352 ,  B23K2101/40 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/268 ,  H01L21/283 ,  H01L27/1285 ,  H01L27/1296 ,  H01L27/14625

Abstract: The present invention is characterized in that by laser beam being slantly incident to the convex lens, an aberration such as astigmatism or the like is occurred, and the shape of the laser beam is made linear on the irradiation surface or in its neighborhood. Since the present invention has a very simple configuration, the optical adjustment is easier, and the device becomes compact in size. Furthermore, since the beam is slantly incident with respect to the irradiated body, the return beam can be prevented.

Abstract translation: 本发明的特征在于，通过激光束倾斜地入射到凸透镜，发生像散等像，并且激光束的形状在照射表面或其附近被形成为线性。 由于本发明具有非常简单的结构，因此光学调节更容易，并且器件尺寸变得紧凑。 此外，由于光束相对于照射体倾斜入射，所以可以防止返回光束。

公开(公告)号：US20140113440A1

公开(公告)日：2014-04-24

申请号：US14145235

申请日：2013-12-31

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Koichiro TANAKA ,  Hidekazu MIYAIRI ,  Aiko SHIGA ,  Akihisa SHIMOMURA ,  Atsuo ISOBE

IPC: H01L21/02 ,  H01L21/283 ,  H01L21/268

CPC classification number: H01L21/02675 ,  B23K26/0604 ,  B23K26/0608 ,  B23K26/0732 ,  B23K26/0736 ,  B23K26/0738 ,  B23K26/352 ,  B23K2101/40 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/268 ,  H01L21/283 ,  H01L27/1285 ,  H01L27/1296 ,  H01L27/14625

Abstract: The present invention is characterized in that by laser beam being slantly incident to the convex lens, an aberration such as astigmatism or the like is occurred, and the shape of the laser beam is made linear on the irradiation surface or in its neighborhood. Since the present invention has a very simple configuration, the optical adjustment is easier, and the device becomes compact in size. Furthermore, since the beam is slantly incident with respect to the irradiated body, the return beam can be prevented.

Abstract translation: 本发明的特征在于，通过激光束倾斜地入射到凸透镜，发生像散等像，并且激光束的形状在照射表面或其附近被制成线性的。 由于本发明具有非常简单的结构，因此光学调节更容易，并且器件尺寸变得紧凑。 此外，由于光束相对于照射体倾斜入射，所以可以防止返回光束。

公开(公告)号：US20130084691A1

公开(公告)日：2013-04-04

申请号：US13688911

申请日：2012-11-29

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Koichiro TANAKA ,  Hirotada OISHI

IPC: H01L21/02

CPC classification number: H01L21/02617 ,  G02B6/001 ,  G02B6/0048 ,  G02B6/0055 ,  G02B6/262 ,  G02B27/0927 ,  G02B27/095 ,  G02B27/0977 ,  G02B27/0994

Abstract: The present invention is to provide a beam homogenizer, a laser irradiation apparatus, and a method for manufacturing a semiconductor device, which can suppress the loss of a laser beam and form a beam spot having homogeneous energy distribution constantly on an irradiation surface without being affected by beam parameters of a laser beam. A deflector is provided at an entrance of an optical waveguide or a light pipe used for homogenizing a laser beam emitted from a laser oscillator. A pair of reflection planes of the deflector is provided so as to have a tilt angle to an optical axis of the laser beam, whereby the entrance of the optical waveguide or the light pipe is expanded. Accordingly, the loss of the laser beam can be suppressed. Moreover, by providing an angle adjusting mechanism to the deflector, a beam spot having homogeneous energy distribution can be formed at an exit of the optical waveguide.

Abstract translation: 本发明提供一种光束均化器，激光照射装置和半导体装置的制造方法，其能够抑制激光束的损失，并且在照射面上不间断地形成具有均匀的能量分布的束斑而不受影响 通过激光束的光束参数。 在用于使从激光振荡器发射的激光束均匀化的光波导或光管的入口处设置偏转器。 偏转器的一对反射面被设置为具有与激光束的光轴的倾斜角，从而扩大了光波导或光管的入射。 因此，可以抑制激光束的损失。 此外，通过向偏转器设置角度调节机构，可以在光波导的出口处形成具有均匀能量分布的束斑。

公开(公告)号：US20160111451A1

公开(公告)日：2016-04-21

申请号：US14924100

申请日：2015-10-27

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Atsuo ISOBE ,  Shunpei YAMAZAKI ,  Koji DAIRIKI ,  Hiroshi SHIBATA ,  Chiho KOKUBO ,  Tatsuya ARAO ,  Masahiko HAYAKAWA ,  Hidekazu MIYAIRI ,  Akihisa SHIMOMURA ,  Koichiro TANAKA ,  Mai AKIBA

IPC: H01L27/12 ,  H01L29/786

CPC classification number: H01L27/1222 ,  B23K26/0738 ,  H01L21/02354 ,  H01L21/02356 ,  H01L21/02675 ,  H01L21/02683 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/2026 ,  H01L21/32139 ,  H01L21/84 ,  H01L27/1214 ,  H01L27/1218 ,  H01L27/124 ,  H01L27/1255 ,  H01L27/1274 ,  H01L27/1281 ,  H01L27/1296 ,  H01L29/66757 ,  H01L29/78603 ,  H01L29/78675 ,  H01L29/78696 ,  Y10S118/90 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008

Abstract: A semiconductor device production system using a laser crystallization method is provided which can avoid forming grain boundaries in a channel formation region of a TFT, thereby preventing grain boundaries from lowering the mobility of the TFT greatly, from lowering ON current, and from increasing OFF current. Rectangular or stripe pattern depression and projection portions are formed on an insulating film. A semiconductor film is formed on the insulating film. The semiconductor film is irradiated with continuous wave laser light by running the laser light along the stripe pattern depression and projection portions of the insulating film or along the major or minor axis direction of the rectangle. Although continuous wave laser light is most preferred among laser light, it is also possible to use pulse oscillation laser light in irradiating the semiconductor film.

Abstract translation: 提供了一种使用激光晶化方法的半导体器件制造系统，其可以避免在TFT的沟道形成区域中形成晶界，从而防止晶界大大降低TFT的迁移率，降低导通电流，并且提高截止电流 。 在绝缘膜上形成矩形或条纹图案凹陷和突出部分。 在绝缘膜上形成半导体膜。 通过沿着条形图案凹陷和绝缘膜的突出部分沿着矩形的长轴或短轴方向运行激光来对连续波激光照射半导体膜。 尽管在激光中最优选连续波激光，但也可以在照射半导体膜时使用脉冲振荡激光。

公开(公告)号：US20130323866A1

公开(公告)日：2013-12-05

申请号：US13962984

申请日：2013-08-09

Applicant: Semiconductor Energy Laboratory Co., LTD.

Inventor： Koichiro TANAKA ,  Tomoaki MORIWAKA

IPC: H01L33/08

CPC classification number: G02B27/0955 ,  B23K26/06 ,  B23K26/0604 ,  B23K26/064 ,  B23K26/0732 ,  B23K26/0736 ,  B23K26/0738 ,  G02B27/09 ,  G02B27/095 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02683 ,  H01L21/02686 ,  H01L21/2026 ,  H01L21/268 ,  H01L21/28017 ,  H01L27/1285 ,  H01L27/3244 ,  H01L27/3295 ,  H01L33/08 ,  H01L51/5237 ,  H01L51/5246 ,  H01S3/005 ,  H01S5/4012 ,  H01S5/4025

Abstract: If an optical path length of an optical system is reduced and a length of a laser light on an irradiation surface is increased, there occurs curvature of field which is a phenomenon that a convergent position deviates depending on an incident angle or incident position of a laser light with respect to a lens. To avoid this phenomenon, an optical element having a negative power such as a concave lens or a concave cylindrical lens is inserted to regulate the optical path length of the laser light and a convergent position is made coincident with a irradiation surface to form an image on the irradiation surface.

Abstract translation: 如果光学系统的光路长度减小并且照射表面上的激光长度增加，则会产生作为会聚位置根据激光的入射角或入射位置而偏离的现象的曲率 相对于镜头的光。 为了避免这种现象，插入具有负功率的光学元件，例如凹透镜或凹柱面透镜，以调节激光的光路长度，并且使会聚位置与照射表面一致以形成图像 照射面。