公开(公告)号：US5266526A

公开(公告)日：1993-11-30

申请号：US854812

申请日：1992-03-19

申请人： Masaharu Aoyama ,  Masahiro Abe

发明人： Masaharu Aoyama ,  Masahiro Abe

IPC分类号： H01L21/3205 ,  H01L21/288 ,  H01L21/74 ,  H01L21/768 ,  H01L23/52 ,  H01L21/441 ,  H01L21/469

CPC分类号： H01L21/7688 ,  H01L21/743 ,  Y10S148/10

摘要： A method of forming a trench buried wiring on a semiconductor device. The method includes the steps of: forming a trench in a first insulating film formed on a semiconductor substrate, by using as a mask a photoresist layer, the trench having substantially an upright step; depositing a first electrode material on the surface of the photoresist layer and on the bottom of the trench, while leaving the photoresist layer; removing the photoresist layer and the first electrode material on the photoresist layer while leaving the first electrode material only on the bottom of the trench; and filling a second electrode material in the trench to form a composite electrode with the second electrode material being superposed on the first electrode material.

摘要翻译： 一种在半导体器件上形成沟槽埋入布线的方法。 该方法包括以下步骤：在形成在半导体衬底上的第一绝缘膜中形成沟槽，通过使用光刻胶层作为掩模，该沟槽具有基本上直立的步骤; 在光致抗蚀剂层的表面上和沟槽的底部上沉积第一电极材料，同时留下光致抗蚀剂层; 在光致抗蚀剂层上除去光致抗蚀剂层和第一电极材料，同时仅在沟槽的底部留下第一电极材料; 以及在沟槽中填充第二电极材料以形成复合电极，其中第二电极材料叠置在第一电极材料上。

公开(公告)号：US4618878A

公开(公告)日：1986-10-21

申请号：US621086

申请日：1984-06-15

申请人： Masaharu Aoyama ,  Masahiro Abe ,  Takashi Ajima ,  Toshio Yonezawa

发明人： Masaharu Aoyama ,  Masahiro Abe ,  Takashi Ajima ,  Toshio Yonezawa

IPC分类号： H01L21/768 ,  H01L21/31 ,  H01L23/522 ,  H01L23/532 ,  H01L23/48

CPC分类号： H01L23/5329 ,  H01L2924/0002

摘要： A semiconductor device having a multilayer wiring structure which comprises a semiconductor substrate, a first wiring layer deposited on said substrate, and a second wiring layer deposited on said first wiring layer with insulating layers disposed therebetween, wherein the insulating interlayer consists of an inorganic insulating layer and a polyimide-based resin film overlying the inorganic insulating layer. The thickness ratio of the polyimide-based resin film to the inorganic insulating film ranges from 0.1 to 0.5. A method of manufacturing a semiconductor device of a multilayer wiring structure wherein an opening is formed in the insulating interlayer to have a small step.

摘要翻译： 一种具有多层布线结构的半导体器件，包括半导体衬底，沉积在所述衬底上的第一布线层和沉积在所述第一布线层上的绝缘层的第二布线层，其中绝缘中间层由无机绝缘层 以及覆盖无机绝缘层的聚酰亚胺系树脂膜。 聚酰亚胺系树脂膜与无机绝缘膜的厚度比为0.1〜0.5。 一种制造多层布线结构的半导体器件的方法，其中在绝缘中间层中形成具有小台阶的开口。

公开(公告)号：US4462856A

公开(公告)日：1984-07-31

申请号：US467298

申请日：1983-02-17

申请人： Masahiro Abe ,  Toshio Yonezawa ,  Masaharu Aoyama ,  Takashi Ajima

发明人： Masahiro Abe ,  Toshio Yonezawa ,  Masaharu Aoyama ,  Takashi Ajima

IPC分类号： C23F1/00 ,  H01L21/306 ,  H01L21/3213 ,  C23F1/02 ,  C25F3/04 ,  C25F3/12

CPC分类号： C23F1/00 ,  H01L21/306 ,  H01L21/32134

摘要： A system is adapted to etch an aluminium film on a semiconductor wafer into a predetermined pattern by immersing the film in an etching solution. The system comprises a voltage detecting circuit for detecting a voltage created between a platinum electrode and the aluminium film on the semiconductor wafer which are immersed in the etching solution, a comparator for comparing a reference voltage with the voltage detected by the voltage detecting circuit to produce an output signal, and a timer for starting a time count operation upon receipt of the output signal from the comparator and for producing an etching completion signal when it continuously receives the output signal from the comparator for a predetermined time period.

摘要翻译： 系统适于通过将膜浸入蚀刻溶液中将半导体晶片上的铝膜蚀刻成预定图案。 该系统包括电压检测电路，用于检测浸在蚀刻溶液中的铂电极和半导体晶片上的铝膜之间产生的电压;比较器，用于将参考电压与由电压检测电路检测到的电压进行比较，以产生 输出信号，以及在从比较器接收到输出信号时开始时间计数操作的定时器，并且当其在预定时间段内连续接收来自比较器的输出信号时产生蚀刻完成信号。

公开(公告)号：US08744156B2

公开(公告)日：2014-06-03

申请号：US12764013

申请日：2010-04-20

申请人： Masahiro Abe

发明人： Masahiro Abe

IPC分类号： G06K9/00 ,  G06T7/00

CPC分类号： G06T7/0012 ,  G06F19/00 ,  G06F19/321 ,  G16H40/63

摘要： A photographic information processing apparatus corrects photographic information based on temporarily determined photographic information relating to a photographing operation. The photographic information processing apparatus includes a photographic information correction determination unit determines whether correction of the photographic information is required based on an operation by an operator, an image data acquisition unit detects an X-ray having penetrated a body of a patient and acquires image data based on the detected X-ray, a photographic information correction unit corrects the temporarily determined photographic information based on patient information of the patient in a case where the correction of the photographic information is determined to be required, and an image data output unit outputs the image data after the correction of the temporarily determined photographic information is completed. The acquired image data is prevented from being output unless the temporarily determined photographic information is corrected.

摘要翻译： 摄影信息处理设备基于与拍摄操作相关的临时确定的摄影信息来校正摄影信息。 摄影信息处理设备包括摄影信息校正确定单元，基于操作者的操作来确定是否需要校正摄影信息，图像数据获取单元检测穿透患者身体的X射线并获取图像数据 基于检测到的X射线，摄影信息校正单元在确定需要照相信息的校正的情况下，基于患者的患者信息来校正临时确定的摄影信息，并且图像数据输出单元输出 完成临时确定的摄影信息的修正之后的图像数据。 除非修正了临时确定的摄影信息，否则防止所获取的图像数据被输出。

公开(公告)号：US08665490B2

公开(公告)日：2014-03-04

申请号：US12563270

申请日：2009-09-21

申请人： Masahiro Abe

发明人： Masahiro Abe

IPC分类号： G06K15/00 ,  H04N1/60 ,  H04N5/262 ,  G06K9/20

CPC分类号： H04N1/3871 ,  H04N1/0044 ,  H04N1/00469 ,  H04N1/32133 ,  H04N2201/3225 ,  H04N2201/3271 ,  H04N2201/3273

摘要： An information processing apparatus sets, on an image to be printed, the print position of attribute information of the image. The information processing apparatus displays, on a display device, the print preview screen of the image to be printed in which an image forming the attribute information is arranged at the set print position. When a region corresponding to the attribute information on the print preview screen displayed on the display device is selected, the information processing apparatus enlarges and displays the attribute information.

摘要翻译： 信息处理设备在要打印的图像上设置图像的属性信息的打印位置。 信息处理设备在显示设备上显示要在其上形成属性信息的图像被布置在设置的打印位置的要打印的图像的打印预览屏幕。 当选择与在显示装置上显示的打印预览画面上的属性信息对应的区域时，信息处理装置放大并显示属性信息。

公开(公告)号：US08409484B2

公开(公告)日：2013-04-02

申请号：US12637008

申请日：2009-12-14

申请人： Masahiko Namerikawa ,  Yukihisa Takeuchi ,  Shinsuke Yano ,  Kazuyoshi Shibata ,  Koji Ikeda ,  Masahiro Abe

发明人： Masahiko Namerikawa ,  Yukihisa Takeuchi ,  Shinsuke Yano ,  Kazuyoshi Shibata ,  Koji Ikeda ,  Masahiro Abe

IPC分类号： B29C39/10

CPC分类号： H05K3/207 ,  C04B35/6342 ,  C04B35/63448 ,  C04B35/6346 ,  C04B2235/6023 ,  H05K1/0306 ,  H05K3/4611 ,  H05K3/4629 ,  H05K2201/09118 ,  Y10T428/24851 ,  Y10T428/24917 ,  Y10T428/24926

摘要： A ceramic compact having a patterned conductor is obtained by coating the patterned conductor with a slurry and then by hardening the slurry. The slurry is prepared by mixing a thermosetting resin precursor, a ceramic powder, and a medium. In the ceramic compact, an isocyanate- or isothiocyanate-containing gelling agent and a hydroxyl-containing polymer are reacted and hardened to produce a thermosetting resin. The hydroxyl-containing polymer is preferably a butyral resin, an ethylcellulose-based resin, a polyethyleneglycol-based resin, or a polyether-based resin.

摘要翻译： 具有图案化导体的陶瓷压块通过用浆料涂覆图案化的导体，然后通过硬化浆料而获得。 通过混合热固性树脂前体，陶瓷粉末和介质来制备浆料。 在陶瓷压块中，将含异氰酸酯或异硫氰酸酯的胶凝剂和含羟基的聚合物反应并硬化以制备热固性树脂。 含羟基的聚合物优选为丁缩醛树脂，乙基纤维素系树脂，聚乙二醇类树脂或聚醚类树脂。

公开(公告)号：US20110051896A1

公开(公告)日：2011-03-03

申请号：US12852392

申请日：2010-08-06

申请人： Masahiro Abe

发明人： Masahiro Abe

IPC分类号： H05G1/64

CPC分类号： A61B6/00 ,  A61B6/545 ,  A61B6/583

摘要： A radiographic imaging apparatus that is connectable to a plurality of radiation sensors includes an information acquisition unit configured to acquire information about a radiographing site and a radiographing posture of a subject based on an instruction from an operator, a sensor drive status management unit configured to manage drive statuses of the plurality of radiation sensors, and a sensor selection unit configured to select a radiation sensor to be used in performing radiographing from the plurality of radiation sensors based on the acquired information and drive statuses of the plurality of radiation sensors.

摘要翻译： 可连接到多个辐射传感器的放射线照相成像装置包括：信息获取单元，被配置为基于来自操作者的指令来获取关于受检者的放射照片位置和放射照片姿势的信息;传感器驱动状态管理单元，被配置为管理 多个辐射传感器的驱动状态，以及传感器选择单元，被配置为基于所获取的多个辐射传感器的信息和驱动状态来选择要用于从多个辐射传感器执行射线照相的辐射传感器。

公开(公告)号：US07726879B2

公开(公告)日：2010-06-01

申请号：US12247592

申请日：2008-10-08

申请人： Masahiro Abe ,  Tsukasa Sako ,  Yuichi Nishii ,  Hideto Shiozawa

发明人： Masahiro Abe ,  Tsukasa Sako ,  Yuichi Nishii ,  Hideto Shiozawa

IPC分类号： G01N23/04

CPC分类号： A61B6/08 ,  A61B6/4405 ,  A61B6/469

摘要： An X-ray imaging apparatus includes a visible light imaging unit which captures an image of a visual field region with visible light, an X-ray irradiation unit which irradiates X-rays, an X-ray imaging unit which receives the irradiated X-rays and acquires a radiograph based on the X-rays, and a detection unit which detects an irradiated region irradiated with the X-rays based on the acquired radiograph.

摘要翻译： 一种X射线摄像装置，具备：以可见光捕获视场区域的图像的可见光摄像单元，照射X射线的X射线照射单元，接收X射线照射的X射线摄像单元 并且基于X射线获取X射线照片;以及检测单元，其基于获取的射线照片检测用X射线照射的照射区域。

公开(公告)号：US07702413B2

公开(公告)日：2010-04-20

申请号：US10935430

申请日：2004-09-08

申请人： Yukihiro Ushiku ,  Akira Ogawa ,  Hidenori Kakinuma ,  Shunji Shuto ,  Masahiro Abe ,  Tatsuo Akiyama ,  Shigeru Komatsu

发明人： Yukihiro Ushiku ,  Akira Ogawa ,  Hidenori Kakinuma ,  Shunji Shuto ,  Masahiro Abe ,  Tatsuo Akiyama ,  Shigeru Komatsu

IPC分类号： G06F19/00

CPC分类号： G05B19/4184 ,  G05B19/41885 ,  G05B2219/32368 ,  G05B2219/45031 ,  Y02P90/14 ,  Y02P90/22 ,  Y02P90/26 ,  Y02P90/265

摘要： The present invention provides a solution for interleaving data frames, in a semiconductor device manufacturing system in which the processing apparatus for conducting a process on any one of a semiconductor substrate and a thin film on a surface thereof; a self-diagnostic system for diagnosing a state of the processing apparatus; and a parameter fitting apparatus for maintaining a parameter of the self-diagnostic system when an inspection result of the semiconductor substrate having undergone the process has been determined to be correct, and for changing the parameter of the self-diagnostic system when the inspection result has been determined to be incorrect.

摘要翻译： 本发明提供了一种在半导体器件制造系统中交错数据帧的解决方案，其中用于对其表面上的半导体衬底和薄膜中的任一个进行处理的处理装置; 用于诊断处理装置的状态的自诊断系统; 以及参数拟合装置，当已经确定了所述处理的半导体衬底的检查结果被确定为正确时，用于维持所述自我诊断系统的参数，并且当所述检查结果具有所述参数时，改变所述自我诊断系统的参数 被确定为不正确。

公开(公告)号：US20100092657A1

公开(公告)日：2010-04-15

申请号：US12637008

申请日：2009-12-14

申请人： Masahiko Namerikawa ,  Yukihisa Takeuchi ,  Shinsuke Yano ,  Kazuyoshi Shibata ,  Koji Ikeda ,  Masahiro Abe

发明人： Masahiko Namerikawa ,  Yukihisa Takeuchi ,  Shinsuke Yano ,  Kazuyoshi Shibata ,  Koji Ikeda ,  Masahiro Abe

IPC分类号： B05D5/12 ,  B29C33/60

CPC分类号： H05K3/207 ,  C04B35/6342 ,  C04B35/63448 ,  C04B35/6346 ,  C04B2235/6023 ,  H05K1/0306 ,  H05K3/4611 ,  H05K3/4629 ,  H05K2201/09118 ,  Y10T428/24851 ,  Y10T428/24917 ,  Y10T428/24926

摘要： A ceramic compact having a patterned conductor is obtained by coating the patterned conductor with a slurry and then by hardening the slurry. The slurry is prepared by mixing a thermosetting resin precursor, a ceramic powder, and a medium. In the ceramic compact, an isocyanate- or isothiocyanate-containing gelling agent and a hydroxyl-containing polymer are reacted and hardened to produce a thermosetting resin. The hydroxyl-containing polymer is preferably a butyral resin, an ethylcellulose-based resin, a polyethyleneglycol-based resin, or a polyether-based resin.