摘要:
Methods of manufacturing a semiconductor device including a semiconductor substrate and a hetero semiconductor region including a semiconductor material having a band gap different from that of the semiconductor substrate and contacting a portion of a first surface of the semiconductor substrate are taught herein, as are the resulting devices. The method comprises depositing a first insulating film on exposed portions of the first surface of the semiconductor substrate and on exposed surfaces of the hetero semiconductor material and forming a second insulating film between the first insulating film and facing surfaces of the semiconductor substrate and the hetero semiconductor region by performing a thermal treatment in an oxidizing atmosphere.
摘要:
A semiconductor substrate made of a semiconductor material is prepared, and a hetero semiconductor region is formed on the semiconductor substrate to form a heterojunction in an interface between the hetero semiconductor region and the semiconductor substrate. The hetero semiconductor region is made of a semiconductor material having a bandgap different from that of the semiconductor material, and a part of the hetero semiconductor region includes a film thickness control portion whose film thickness is thinner than that of the other part thereof. By oxidizing the hetero semiconductor region with a thickness equal to the film thickness of the film thickness control portion, a gate insulating film adjacent to the heterojunction is formed. A gate electrode is formed on the gate insulating film. This makes it possible to manufacture a semiconductor device including the gate insulating film with a lower ON resistance, and with a higher insulating characteristic and reliability.
摘要:
A rolling bearing made of stainless steel for use in conditions where hydrofluoric acid or fluorine grease is present can prevent boundary lubrication due to the invasion of metal corrosion powder into rolling surface of the bearing, and thus prevent the rapid advance of internal wear. The rolling bearing is highly durable and has a long life even if used in metal corrosive environments. A deep-groove rolling bearing includes bearing rings (inner ring and outer ring), rolling elements, and a retainer all made of stainless steel, and solidified lubricating oil sealed in the rolling bearing. The solidified lubricating oil is made by heat curing a mixture of lubricating oil or grease containing perfluoropolyether and a thermoplastic resin. Contact seals made of fluorine rubber seal the solidified lubricating oil. Even if metal abrasion powder is produced by effect of perfluoropolyether or hydrofluoric acid, it will be held embedded in the solidified lubricating oil, so that abnormal wear will not occur.
摘要:
A hetero semiconductor corner region, which is a current-concentration relief region that keeps a reverse bias current from concentrating on the convex corner, is arranged in a hetero semiconductor region. Thereby, a current concentration on the convex corner can be prevented. As a result, an interrupting performance can be improved at the time of interruption, and at the same time, the generation of the hot spot where in a specific portion is prevented at the time of conduction to suppress deterioration in a specific portion, thereby ensuring a long-term reliability. Further, when the semiconductor chip is used in an L load circuit or the like, for example, at the time of conduction or during a transient response time to the interrupted state, in an index such as a short resistant load amount and an avalanche resistant amount, which are indexes of a breakdown tolerance when overcurrent or overvoltage occurs, the current concentration on a specific portion can be prevented, and thus, these breakdown tolerances can also be improved.
摘要:
A ring mechanism, comprising a focus ring and divided cover rings surrounding a wafer W placed on a loading table (lower electrode) mounted in a processing chamber, wherein a ring-shaped clearance δ1 is provided between the divided rings to spread plasma to the radial outside of the focus ring to allow plasma to get therein, whereby a potential difference between the wafer W and the focus ring can be eliminated to prevent arc discharge by plasma from occurring between the wafer W and the focus ring.
摘要:
To provide a hardly colored curable composition having an excellent storage stability while maintaining fast curing properties.A curable composition which comprises a polymer (P) having a polyoxyalkylene chain and a group of the following formula (1) and a compound (S) having a mercapto group and a group of the following formula (2), and which contains from 0.01 to 0.50 part by mass of the compound (S) per 100 parts by mass of the polymer (P): —Si(—X1)3 (1) —Si(—X2)m(—Y2)3-m (2) wherein symbols have the following meanings: X1 and X2: each independently a C1-6 alkoxy group, Y2: a C1-6 alkyl group, and m: 1, 2 or 3.
摘要:
A semiconductor device, includes: a first conductivity type semiconductor base having a main face; a hetero semiconductor region contacting the main face of the semiconductor base and forming a hetero junction in combination with the semiconductor base, the semiconductor base and the hetero semiconductor region in combination defining a junction end part; a gate insulating film defining a junction face in contact with the semiconductor base and having a thickness; and a gate electrode disposed adjacent to the junction end part via the gate insulating film and defining a shortest point in a position away from the junction end part by a shortest interval, a line extending from the shortest point to a contact point vertically relative to the junction face, forming such a distance between the contact point and the junction end part as to be smaller than the thickness of the gate insulating film contacting the semiconductor base.
摘要:
A focus ring and a plasma processing apparatus capable of improving an in-surface uniformity of a surface and reducing occurrences of deposition on a backside surface of a peripheral portion of a semiconductor wafer compared to a conventional case are provided. Installed in a vacuum chamber is a susceptor for mounting the semiconductor wafer thereon and a focus ring is installed to surround the semiconductor wafer mounted on the susceptor. The focus ring includes an annular lower member made of a dielectric, and an annular upper member made of a conductive material and mounted on the lower member. The upper member includes a flat portion which is an outer peripheral portion having a top surface positioned higher than a surface to be processed of the semiconductor wafer W, and an inclined portion which is an inner peripheral portion inclined inwardly.
摘要:
The present invention provides a stretched laminate film with oxygen-gas barrier properties which includes a layer (a) formed from a composition of a polycarboxylate-based polymer (A) and a plasticizer (B), a layer (c) containing a multivalent metal compound (C) and a layer (b) formed from a thermoplastic resin, which film includes at least one layer forming unit where the layer (a) and the layer (c) are adjacent to each other, and in which film at least the layer (a) and the layer (b) are stretched with a surface stretch ratio of 1.1 to 100. By means of carrying out an applying step and a stretching step according to a production method of the present invention, the layer formed from the polycarboxylate-based polymer including the plasticizer can be made thinner, although making the layer thinner has been difficult to achieve as long as only the application is carried out.
摘要:
A semiconductor device includes: a semiconductor base; a hetero semiconductor region which is in contact with the semiconductor base and which has a band gap different from that of the semiconductor base; a first electrode connected to the hetero semiconductor region; and a second electrode forming an ohmic contact to the semiconductor base. The hetero semiconductor region includes a laminated hetero semiconductor region formed by laminating a plurality of semiconductor layers in which crystal alignment is discontinuous at a boundary between at least two layers.