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    Methods of scanning an object that includes multiple regions of interest using an array of scanning beams
    11.
    发明申请
    Methods of scanning an object that includes multiple regions of interest using an array of scanning beams 有权
    使用扫描光束阵列扫描包括多个感兴趣区域的物体的方法

    公开(公告)号：US20050279936A1

    公开(公告)日：2005-12-22

    申请号：US11076483

    申请日：2005-03-09

    申请人： Alon Litman ,  Benzion Sender

    发明人： Alon Litman ,  Benzion Sender

    IPC分类号： G01N23/225 ,  H01J37/28

    CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/2817

    摘要： A multi beam inspection method and system. The inspection system includes: (i) a beam array generator adapted to generate an array of beams characterized by a beam array axis; and (ii) at least one mechanism adapted to position the object under the array of beams such that at least two beams that are positioned along a beam array axis scan substantially simultaneously at least two regions of interest of the object, wherein the first axis is oriented in relation to the beam array axis.

    摘要翻译： 一种多光束检测方法和系统。 所述检查系统包括：（i）光束阵列发生器，适于产生以束阵列轴为特征的光束阵列; 以及（ii）至少一个机构，其适于将所述物体定位在所述梁阵列的下方，使得沿着光束阵列轴定位的至少两个光束基本上同时扫描所述物体的至少两个感兴趣区域，其中所述第一轴线 相对于光束阵列轴定向。

    SYSTEM AND METHOD FOR COMPENSATING FOR MAGNETIC NOISE
    12.
    发明申请
    SYSTEM AND METHOD FOR COMPENSATING FOR MAGNETIC NOISE 有权
    用于磁化噪声补偿的系统和方法

    公开(公告)号：US20120305763A1

    公开(公告)日：2012-12-06

    申请号：US13149318

    申请日：2011-05-31

    申请人： Konstantine Chirko ,  Alon Litman ,  Yoav Nachum

    发明人： Konstantine Chirko ,  Alon Litman ,  Yoav Nachum

    IPC分类号： G01N23/00

    CPC分类号： G01R33/025 ,  H01J37/28 ,  H01J2237/0266 ,  H01J2237/2485

    摘要： A system and method for noise compensation of a charged particle beam location includes one or more sensors that are spaced apart from each other for sensing magnetic noises within at least one predefined frequency band thereby to provide magnetic noise measurements with synchronous detection of the location of a charged particle beam. Based on the magnetic noise measurements and on relationships between values of the magnetic noises and particle beam location errors, magnetic noise compensations signals are generated. An object is then scanned by a particle beam in response to a desired particle beam scan pattern and the magnetic noise compensation signals.

    摘要翻译： 用于带电粒子束位置的噪声补偿的系统和方法包括彼此间隔开的一个或多个传感器，用于感测至少一个预定频带内的磁噪声，由此提供磁噪声测量，同时检测位置的一个 带电粒子束。 基于磁噪声测量以及磁噪声和粒子束位置误差之间的关系，产生磁噪声补偿信号。 然后响应于期望的粒子束扫描图案和磁噪声补偿信号，通过粒子束扫描物体。

    System for high resolution imaging and measurement of topographic and material features on a specimen
    13.
    发明授权
    System for high resolution imaging and measurement of topographic and material features on a specimen 失效
    用于高分辨率成像和测量样品上的地形和材料特征的系统

    公开(公告)号：US5644132A

    公开(公告)日：1997-07-01

    申请号：US579125

    申请日：1995-12-27

    申请人： Alon Litman ,  Alexander Goldenstein ,  Steven R. Rogers

    发明人： Alon Litman ,  Alexander Goldenstein ,  Steven R. Rogers

    IPC分类号： H01J37/244 ,  H01J37/248 ,  H01J37/26

    CPC分类号： H01J37/244 ,  H01J2237/24475 ,  H01J2237/2448

    摘要： A particle beam column for high-resolution imaging and measurement of topographic and material features on a specimen. The particle beam column includes a particle source for providing a primary beam along a primary beam axis for impinging on the specimen so as to release secondary electrons and backscattered electrons therefrom. The particle beam column also includes an objective lens for focussing the electrons so as to provide a radial dispersion of electrons relative to the primary beam axis, the radial dispersion of electrons including an inner annulus of backscattered electrons and an outer annulus of secondary electrons. The particle beam column still further includes a backscattered electron detector for detecting the inner annulus of backscattered electrons and a secondary electron detector for detecting the outer annulus of secondary electrons.

    摘要翻译： 用于高分辨率成像和测量样品上的地形和材料特征的粒子束柱。 粒子束柱包括用于沿着主光束轴提供主光束以撞击样本以便从其释放二次电子和反向散射电子的粒子源。 粒子束列还包括用于聚焦电子的物镜，以便提供电子相对于主光束轴的径向色散，包括反向散射电子的内环和二次电子的外环的电子的径向色散。 粒子束列还包括用于检测反向散射电子的内环的背散射电子检测器和用于检测二次电子的外环的二次电子检测器。

    Variable rate scanning in an electron microscope
    15.
    发明授权
    Variable rate scanning in an electron microscope 有权
    电子显微镜中的可变速率扫描

    公开(公告)号：US08207499B2

    公开(公告)日：2012-06-26

    申请号：US12237364

    申请日：2008-09-24

    申请人： Amir Shoham ,  Benzion Sender ,  Alon Litman

    发明人： Amir Shoham ,  Benzion Sender ,  Alon Litman

    IPC分类号： H01J37/26

    CPC分类号： H01J37/28 ,  G01N23/2208 ,  G01N23/2251 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/2809 ,  H01J2237/2823

    摘要： A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam from the first region, and scanning a second region of the surface with the primary charged particle beam at a second scan rate faster than the first scan rate so as to generate a second secondary charged particle beam from the second region. The method also includes receiving the first secondary charged particle beam and the second secondary charged particle beam at a detector configured to generate a signal in response to the beams, and forming an image of the first and the second regions in response to the signal.

    摘要翻译： 一种用于对表面进行成像的方法，包括以第一扫描速率用初级带电粒子束扫描表面的第一区域，以便产生来自第一区域的第一次级带电粒子束，以及扫描表面的第二区域， 所述初级带电粒子束以比所述第一扫描速率快的第二扫描速率，以便从所述第二区域产生第二次级带电粒子束。 该方法还包括在被配置为响应于光束产生信号的检测器处接收第一次级带电粒子束和第二次级带电粒子束，并且响应于该信号形成第一和第二区域的图像。

    Methods of scanning an object that includes multiple regions of interest using an array of scanning beams
    16.
    发明授权
    Methods of scanning an object that includes multiple regions of interest using an array of scanning beams 有权
    使用扫描光束阵列扫描包括多个感兴趣区域的物体的方法

    公开(公告)号：US07285779B2

    公开(公告)日：2007-10-23

    申请号：US11076483

    申请日：2005-03-09

    申请人： Alon Litman ,  Benzion Sender

    发明人： Alon Litman ,  Benzion Sender

    IPC分类号： G01N23/00 ,  G21K7/00

    CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/2817

    摘要： A multi beam inspection method and system. The inspection system includes: (i) a beam array generator adapted to generate an array of beams characterized by a beam array axis; and (ii) at least one mechanism adapted to position the object under the array of beams such that at least two beams that are positioned along a beam array axis scan substantially simultaneously at least two regions of interest of the object, wherein the first axis is oriented in relation to the beam array axis.

    摘要翻译： 一种多光束检测方法和系统。 所述检查系统包括：（i）光束阵列发生器，适于产生以束阵列轴为特征的光束阵列; 以及（ii）至少一个机构，其适于将所述物体定位在所述梁阵列的下方，使得沿着光束阵列轴定位的至少两个光束基本上同时扫描所述物体的至少两个感兴趣区域，其中所述第一轴线 相对于光束阵列轴定向。