Method and device for cleaning air
    11.
    发明授权
    Method and device for cleaning air 有权
    清洁空气的方法和装置

    公开(公告)号:US07160362B2

    公开(公告)日:2007-01-09

    申请号:US10482332

    申请日:2002-06-26

    IPC分类号: F24F7/06 B01D53/26

    摘要: A method of cleaning air, including a humidifying operation for humidifying the air containing chemical contaminants by a humidifier and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air, and a dehumidifying operation for dehumidifying the humidified air by a condenser and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying operation into condensed water for removal. By using an oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifier and condenser.

    摘要翻译: 一种清洁空气的方法,包括加湿操作,用于通过加湿器加湿包含化学污染物的空气,并将一部分空气中的气态污染物吸入过量的水分以从空气中除去污染物;以及除湿操作,用于对加湿的 空气通过冷凝器,并且在加湿操作中将气态化学污染物保留,而不被除去,进入冷凝水以除去。 通过使用具有前表面和后表面以及设置在打开状态的上表面和下表面的倾斜蜂窝体,从倾斜蜂窝体的前开口部分引导空气,并且水从其上部开口部分被供给到一个或两个 加湿器和冷凝器。

    Wet sealing materials and building components useful for clean rooms and local facilities
    12.
    发明授权
    Wet sealing materials and building components useful for clean rooms and local facilities 失效
    湿密封材料和建筑部件可用于洁净室和当地设施

    公开(公告)号:US06613835B1

    公开(公告)日:2003-09-02

    申请号:US09498044

    申请日:2000-02-04

    IPC分类号: C08K300

    摘要: Materials not releasing gaseous organic materials during use are used as a dry-type sealing material such as a gasket disposed upon mounting an air filter to an opening of a ceiling or the like, a wet-type sealing material filled and used in a gap for connecting wall materials or partitionings, a vinyl chloride sheet or a vinyl chloride cloth as a facing material for walls and floors. Specifically, a carboxylic acid ester having a molecular weight of not less than 400 is used as a plasticizer, a phenolic compound having a molecular weight of not less 300 is used as an antioxidant, an aliphatic hydrocarbon having not less than 19 carbon atoms (for example, microcrystalline wax) is used as a lubricant, and an alkylamine ethylene oxide adduct having a molecular weight of not less than 350 is used as an antistatic agent.

    摘要翻译: 在使用期间不释放气态有机材料的材料被用作干式密封材料,例如在将空气过滤器安装到天花板等的开口上时设置的垫圈,填充并用于间隙中的湿式密封材料 连接壁材料或隔板,氯乙烯片或氯乙烯布作为墙壁和地板的面材。 具体地说,使用分子量不小于400的羧酸酯作为增塑剂,使用分子量不低于300的酚类化合物作为抗氧化剂,不少于19个碳原子的脂族烃(对于 例如微晶蜡)用作润滑剂,并且使用分子量不小于350的烷基胺环氧乙烷加合物作为抗静电剂。

    Electronic/electric components used in clean room and substrate treatment apparatus
    13.
    发明授权
    Electronic/electric components used in clean room and substrate treatment apparatus 失效
    用于洁净室和基板处理设备的电子/电气部件

    公开(公告)号:US06337365B1

    公开(公告)日:2002-01-08

    申请号:US09381667

    申请日:1999-09-24

    IPC分类号: C08L9106

    CPC分类号: C08K5/0075

    摘要: An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.

    摘要翻译: 一种电子/电气部件,其用于在半导体器件工业中控制气氛以处理衬底的洁净室中,该半导体器件工业包含树脂基材和添加到树脂基材中的添加剂。 添加剂含有一种或多种选自由分子量为350以上的非离子化合物制成的抗静电剂的组分,由分子量为300以上的酚类化合物制成的抗氧化剂 润滑剂,增塑剂,阻燃剂和防水剂。 在使用该部件的条件下,添加剂在树脂基材中几乎不释放气态有机物质。

    Air filter, local facility, and clean room
    14.
    发明授权
    Air filter, local facility, and clean room 有权
    空气过滤器,本地设施和洁净室

    公开(公告)号:US06293982B1

    公开(公告)日:2001-09-25

    申请号:US09405756

    申请日:1999-09-27

    IPC分类号: B01D4600

    摘要: A material not releasing gaseous organic substances during use is used as a filter medium and a sealing material for tightly sealing between the medium and a frame. Specifically, a synthetic paraffin not containing an aliphatic hydrocarbon having not more than 19 carbon atoms or less is used as a non-silicone type water repellent contained in a treatment agent for forming fibers into a cloth-like filter medium. A carboxylic acid ester having 400 or more molecular weight is used as a plasticizer and a phenolic compound having 300 or more molecular weight is used as an antioxidant to be added to the treatment agent and the sealing material. This enables that the gaseous organic substances are not present in a clean room, in a semiconductor production apparatus or in the like. Further, if the filter medium and the sealing material are formed of a material not releasing organic phosphorus compounds and boron compounds in the air, a clean room and a local facility particularly suitable for use in the production of semiconductors are provided.

    摘要翻译: 使用在使用期间不释放气态有机物质的材料用作过滤介质和用于在介质和框架之间紧密密封的密封材料。 具体地说,不含有不超过19个碳原子的脂肪族烃的合成石蜡用作用于将纤维形成布状过滤介质的处理剂中所含的非硅氧烷型防水剂。 使用具有400以上分子量的羧酸酯作为增塑剂,使用具有300以上分子量的酚类化合物作为添加到处理剂和密封材料中的抗氧化剂。 这使得气体有机物质不存在于洁净室,半导体制造装置等中。 此外,如果过滤介质和密封材料由空气中不释放有机磷化合物和硼化合物的材料形成,则提供特别适合用于制造半导体的洁净室和本地设备。

    Sealing materials and building components useful for clean rooms
    15.
    发明授权
    Sealing materials and building components useful for clean rooms 失效
    密封材料和建筑部件可用于洁净室

    公开(公告)号:US5869560A

    公开(公告)日:1999-02-09

    申请号:US685428

    申请日:1996-07-24

    IPC分类号: C09K3/10 C08L27/06 C08K5/02

    摘要: Materials not releasing gaseous organic materials during use are used as a dry-type sealing material such as a gasket disposed upon mounting an air filter to an opening of a ceiling or the like, a wet-type sealing material filled and used in a gap for connecting wall materials or partitionings, a vinyl chloride sheet or a vinyl chloride cloth as a facing material for walls and floors. Specifically, a carboxylic acid ester having a molecular weight of not less than 400 is used as a plasticizer, a phenolic compound having a molecular weight of not less 300 is used as an antioxidant, an aliphatic hydrocarbon having not less than 19 carbon atoms (for example, microcrystalline wax) is used as a lubricant, and an alkylamine ethylene oxide adduct having a molecular weight of not less than 350 is used as an antistatic agent.

    摘要翻译: 在使用期间不释放气态有机材料的材料被用作干式密封材料,例如在将空气过滤器安装到天花板等的开口上时设置的垫圈,填充并用于间隙中的湿式密封材料 连接壁材料或隔板,氯乙烯片或氯乙烯布作为墙壁和地板的面材。 具体地说,使用分子量不小于400的羧酸酯作为增塑剂,使用分子量不低于300的酚类化合物作为抗氧化剂,不少于19个碳原子的脂族烃(对于 例如微晶蜡)用作润滑剂,并且使用分子量不小于350的烷基胺环氧乙烷加合物作为抗静电剂。

    Filter medium for air filter and process for producing the same
    18.
    发明授权
    Filter medium for air filter and process for producing the same 有权
    用于空气过滤器的过滤介质及其制造方法

    公开(公告)号:US06929672B1

    公开(公告)日:2005-08-16

    申请号:US09601390

    申请日:1998-12-22

    IPC分类号: B01D39/16 D21H27/08 B01D39/04

    摘要: The present invention has as its object to provide an air filter not only for trapping suspended particulate substances but also for not generating hazardous contaminates in the air, which cause trouble in the manufacture of semiconductor devices. As a binder to bind fibers of the air filter together, a polymer dispersion is used in which a copolymer of a hydrophilic monomer and a hydrophobic monomer is dispersed in water. As an initiator for polymerization of the copolymer, an organic peroxide is used. When an air filter (8) is installed downstream of a chemical filter (7), the space (4) placed downstream of the air filter (8) is made substantially free of organic substances and/or inorganic substances that cause trouble in the manufacture of semiconductor devices.

    摘要翻译: 本发明的目的是提供一种空气过滤器,其不仅用于捕获悬浮颗粒物质,而且还用于在空气中不产生有害污染物,这在制造半导体器件时引起故障。 作为将空气过滤器的纤维结合在一起的粘合剂,使用聚合物分散体,其中亲水单体和疏水性单体的共聚物分散在水中。 作为共聚物聚合的引发剂,使用有机过氧化物。 当空气过滤器(8)安装在化学过滤器(7)的下游时,放置在空气过滤器(8)下游的空间(4)基本上不含导致生产麻烦的有机物质和/或无机物质 的半导体器件。