公开(公告)号：US08450906B2

公开(公告)日：2013-05-28

申请号：US13449072

申请日：2012-04-17

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Masafumi Iwaki ,  Masanori Ueda ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Motoaki Hara

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Masafumi Iwaki ,  Masanori Ueda ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Motoaki Hara

IPC分类号： H01L41/09 ,  H03H9/00

CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/132 ,  H03H9/706

摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the substrate and the lower electrode, an upper electrode provided on the piezoelectric film, and an additional pattern, a cavity being formed between the lower electrode and the substrate in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film, the additional pattern being provided in a position that is on the lower electrode and includes an interface between the resonance portion and a non-resonance portion.

摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在基板和下电极上的压电膜，设置在压电膜上的上电极和附加图案，空腔形成在该基板 所述下电极和所述基板在所述下电极和所述上电极通过所述压电膜彼此面对的共振部中，所述附加图案设置在所述下电极上并且包括所述共振部和所述共振部之间的界面的位置 非共振部分。

公开(公告)号：US20110006860A1

公开(公告)日：2011-01-13

申请号：US12921150

申请日：2008-03-04

申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

IPC分类号： H03H9/17 ,  H01L41/053

CPC分类号： H03H9/174 ,  H03H3/02 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/023

摘要： A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

摘要翻译： 本发明的压电薄膜谐振器具有基板1，设置在基板1上并由绝缘体形成的中间层7，设置在中间层7上的下部电极3，设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5，其间插入压电膜4，其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中，或在下部电极3和中间层7之间，并且空间6的区域包含在谐振区域8中。通过这种结构，振动能量从基板 可以抑制共振部分，从而提高质量因素。

公开(公告)号：US20100060384A1

公开(公告)日：2010-03-11

申请号：US12494990

申请日：2009-06-30

申请人： Shinji TANIGUCHI ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

发明人： Shinji TANIGUCHI ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

IPC分类号： H03H9/205 ,  H01L41/04

CPC分类号： H03H9/173 ,  H03H9/02133 ,  H03H9/132 ,  H03H9/205 ,  H03H9/564 ,  H03H9/568

摘要： A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

摘要翻译： 滤波器具有多个压电薄膜谐振器，其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠，其轮廓包括曲线。 在多个压电薄膜谐振器中，相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​，可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此，可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。

公开(公告)号：US07567023B2

公开(公告)日：2009-07-28

申请号：US11790806

申请日：2007-04-27

申请人： Masafumi Iwaki ,  Jun Tsutsumi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Shinji Taniguchi ,  Masanori Ueda ,  Go Endo

发明人： Masafumi Iwaki ,  Jun Tsutsumi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Shinji Taniguchi ,  Masanori Ueda ,  Go Endo

IPC分类号： H01L41/08

CPC分类号： H03H9/174 ,  H03H3/04 ,  H03H9/02118 ,  H03H9/13 ,  H03H9/132 ,  H03H9/605

摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion that overlaps the lower electrode across the piezoelectric film. At least a part of an outer end of the piezoelectric film is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film.

摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极，以便具有与下电极重叠的部分跨越压电 电影。 压电薄膜的外端部的至少一部分进一步位于上下电极跨越压电薄膜的相对区域的外端。

公开(公告)号：US07482738B2

公开(公告)日：2009-01-27

申请号：US11586731

申请日：2006-10-26

申请人： Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Motoaki Hara ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H01L41/08

CPC分类号： H03H9/132 ,  H03H3/02 ,  H03H9/02133 ,  H03H9/173 ,  H03H9/568 ,  H03H2003/021

摘要： A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A membrane region is an overlapping region of the lower electrode and the upper electrode interposing the piezoelectric film and a projected area of the cavity onto the substrate includes the membrane region.

摘要翻译： 压电薄膜谐振器包括形成在基板上的下电极，以在下电极和基板之间限定圆顶形空腔，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极。 膜区域是下电极的重叠区域，并且插入压电膜的上电极，并且空腔的投影面积包括膜区域。

公开(公告)号：US07368859B2

公开(公告)日：2008-05-06

申请号：US11413104

申请日：2006-04-28

申请人： Tsuyoshi Yokoyama ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Masanori Ueda

发明人： Tsuyoshi Yokoyama ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Jun Tsutsumi ,  Masafumi Iwaki ,  Masanori Ueda

IPC分类号： H01L41/047

CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/132 ,  H03H9/174 ,  H03H2003/0428 ,  H03H2003/0457

摘要： A piezoelectric thin-film resonator includes a lower electrode provided on a substrate, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film. A membrane region is defined by a region where the upper electrode and the lower electrode overlap each other to sandwich the piezoelectric thin film therebetween and has an elliptical shape, and the lower electrode is also provided at an outer side of the membrane region in a region in which neither an extraction electrode of the upper electrode nor an extraction electrode of the lower electrode is provided.

摘要翻译： 压电薄膜谐振器包括设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极。 膜区域由上电极和下电极彼此重叠的区域限定，以夹在其间的压电薄膜并具有椭圆形状，并且下电极也设置在膜区域的外侧，区域 其中不设置上电极的引出电极和下电极的引出电极。

公开(公告)号：US08854158B2

公开(公告)日：2014-10-07

申请号：US13127215

申请日：2008-11-28

申请人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Tsuyoshi Yokoyama ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H03H9/54 ,  H03H3/04 ,  H03H9/56 ,  H03H9/17

CPC分类号： H03H9/173 ,  H03H3/04 ,  H03H9/564 ,  H03H9/568 ,  H03H2003/0414 ,  H03H2003/0428 ,  Y10T29/42 ,  Y10T29/49005

摘要： A method of manufacturing an elastic wave device is provided with a lamination step of forming, on a substrate (1), a plurality of elastic wave devices, each of which includes a lower electrode (2), a piezoelectric film (3), and an upper electrode (4); a measuring step for measuring the operation frequency distribution of the elastic wave devices on the substrate (1); and an adjusting step for forming an adjusting region, in which the thickness of the elastic wave device is different from the thicknesses of other portions in a resonance portion of each elastic wave device, corresponding with the distribution of the operation frequencies. The adjusting region is formed so that the size of the area of the adjusting region of the resonator portion of each elastic wave device is different in accordance with the operation frequency distribution that is measured. Thus, the frequency characteristics of the elastic wave devices are easily adjusted by a small number of steps.

摘要翻译： 一种制造弹性波装置的方法具有层压步骤，在基板（1）上形成多个弹性波装置，每个弹性波装置包括下电极（2），压电薄膜（3）和 上电极（4）; 用于测量衬底（1）上的弹性波器件的操作频率分布的测量步骤; 以及用于形成调整区域的调整步骤，其中弹性波器件的厚度与每个弹性波器件的谐振部分中的其它部分的厚度不同，与对应于操作频率的分布相对应。 调整区域被形成为使得每个弹性波装置的谐振器部分的调整区域的面积的大小根据所测量的操作频率分布而不同。 因此，弹性波器件的频率特性可以通过少量的步骤容易地调节。

公开(公告)号：US08723623B2

公开(公告)日：2014-05-13

申请号：US12503583

申请日：2009-07-15

申请人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

发明人： Motoaki Hara ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Masanori Ueda

IPC分类号： H03H9/54 ,  H03H3/02 ,  H03H9/205 ,  H03H9/56 ,  H03H9/58

CPC分类号： H03H9/205 ,  H03H3/02 ,  H03H9/173 ,  H03H9/568 ,  H03H9/587 ,  H03H9/605 ,  H03H2003/021 ,  Y10T29/42 ,  Y10T29/49005

摘要： An acoustic wave device includes a substrate and a plurality of piezoelectric thin film resonators formed over the substrate. Each of the plurality of the piezoelectric thin film resonators includes lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film and opposed to the lower electrode through the piezoelectric film. Each of the piezoelectric thin film resonators is partly supported by the substrate and extends above the substrate to form a cavity between the substrate and each lower electrodes. The cavity continuously extending under the plurality of the piezoelectric thin film resonators.

摘要翻译： 声波器件包括衬底和形成在衬底上的多个压电薄膜谐振器。 多个压电薄膜谐振器中的每一个包括设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上并通过压电薄膜与下电极相对的上电极。 每个压电薄膜谐振器由衬底部分地支撑并且在衬底上方延伸以在衬底和每个下电极之间形成空腔。 该腔体在多个压电薄膜谐振器下连续延伸。

公开(公告)号：US08228138B2

公开(公告)日：2012-07-24

申请号：US13177797

申请日：2011-07-07

申请人： Motoaki Hara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda

发明人： Motoaki Hara ,  Shinji Taniguchi ,  Takeshi Sakashita ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Tokihiro Nishihara ,  Masanori Ueda

IPC分类号： H03H9/54 ,  H03H9/70

CPC分类号： H03H9/584 ,  H03H9/0095 ,  H03H9/542 ,  H03H9/60 ,  H03H9/706

摘要： A filter element includes a plurality of multilayer filters that are connected in cascade, each of the plurality of multilayer filters including a plurality of piezoelectric thin-film resonators stacked vertically, each of the piezoelectric thin-film resonators including a piezoelectric film and a pair of first electrodes between which the piezoelectric film is interposed, and a capacitor connected between an input terminal of one of the plurality of multilayer filters of a preceding stage and an input terminal of another one of the plurality of multilayer filters of a following stage, exciting directions of piezoelectric thin-film resonators to which the input terminals of the multilayer filters of the preceding and following stages are connected being opposite to each other.

摘要翻译： 滤波器元件包括串联连接的多个多层滤波器，多个多层滤波器中的每一个包括垂直堆叠的多个压电薄膜谐振器，每个压电薄膜谐振器包括压电薄膜和一对 插入压电膜的第一电极和连接在前级的多个多层滤波器中的一个的输入端子和后级的多个多层滤波器中的另一个的输入端子之间的电容器，激励方向 压电薄膜谐振器彼此相反地连接有前级和后级的多层滤波器的输入端。

公开(公告)号：US08093962B2

公开(公告)日：2012-01-10

申请号：US12494990

申请日：2009-06-30

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Takeshi Sakashita ,  Masanori Ueda

IPC分类号： H03H9/70 ,  H03H9/54

CPC分类号： H03H9/173 ,  H03H9/02133 ,  H03H9/132 ,  H03H9/205 ,  H03H9/564 ,  H03H9/568

摘要： A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

摘要翻译： 滤波器具有多个压电薄膜谐振器，其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠，其轮廓包括曲线。 在多个压电薄膜谐振器中，相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​，可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此，可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。